Abstract: A laser reflow apparatus reflows solder bumps disposed on a side of a semiconductor chip in a workpiece and included in an irradiation range on the workpiece by applying a laser beam to an opposite side of the semiconductor chip. The laser reflow apparatus includes a spatial beam modulation unit including a laser power density setting function to locally set the laser power density in the irradiation range of a laser beam emitted from a laser beam source, and an image focusing unit including an image focusing function to focus the laser beam emitted from the laser beam source and apply the focused laser beam to the irradiation range on the workpiece.

Abstract: A thickness measuring apparatus includes a white light source for emitting white light, a dispersing mechanism for producing time differences corresponding to the wavelengths of light components of the white light to thereby generate spectral light, the spectral light being applied to the workpiece and then reflected on the upper surface and the lower surface of the workpiece to obtain return light, a two-dimensional image sensor having a photodetecting area for detecting the return light, the photodetecting area including a plurality of pixels, a storing section for storing the intensity of the return light detected by the plural pixels according to wavelength with time difference, the intensity of the return light detected by each pixel being stored as a spectral interference waveform, and a thickness computing section for computing the thickness of the workpiece from the spectral interference waveform stored in the storing section.

Abstract: A thickness measuring apparatus that measures a thickness of a workpiece held by a chuck table. The thickness measuring apparatus includes plural image sensors that detect intensity of light spectrally split on each wavelength basis by plural diffraction gratings and generate a spectral interference waveform and a thickness output unit that outputs thickness information from the spectral interference waveform generated by the plural image sensors.

Abstract: A thickness measuring apparatus including a thickness measuring unit for measuring the thickness of a plate-shaped workpiece. The thickness measuring unit includes a white light source for emitting white light, a dispersing mechanism for producing time differences corresponding to wavelengths of light components of the white light to thereby generate spectral light, a two-dimensional image sensor having a photodetecting area for detecting the return light, the photodetecting area including a plurality of pixels, a storing section for storing the intensity of the return light detected by the plural pixels according to wavelength with time difference, a waveform table previously storing a plurality of kinds of sample spectral interference waveforms respectively corresponding to different thicknesses of the workpiece, and a thickness deciding section for deciding the thickness at an X-Y coordinate position in a two-dimensional area of the workpiece.

Abstract: A thickness measuring apparatus for measuring a thickness of a wafer includes a light source emitting light having a transmission wavelength region to the wafer, a focusing unit applying the light emitted from the light source to the wafer held on a chuck table, an optical branching section branching the light reflected on the wafer held on the chuck table, a diffraction grating diffracting the reflected light branched by the optical branching section to obtain diffracted light of different wavelengths, an image sensor detecting an intensity of the diffracted light obtained by the diffraction grating to produce a spectral interference waveform, and a computing unit computing the spectral interference waveform produced by the image sensor to output thickness information.

Abstract: A thickness measuring apparatus for measuring the thickness of a workpiece held on a chuck table includes the followings: a light source configured to emit white light; an optical branching unit configured to branch, to a second optical path, reflected light applied from the light source to the workpiece held on the chuck table via a first optical path and reflected from the workpiece; a diffraction grating disposed in the second optical path; an image sensor configured to detect an optical intensity signal of light separated into each wavelength by the diffraction grating; and a thickness output unit configured to generate a spectral interference waveform on the basis of the optical intensity signal detected by the image sensor, determine the thickness on the basis of the spectral interference waveform, and output the thickness.

Abstract: A thickness measuring apparatus has a thickness measuring unit including a white light source, a diffracting mechanism that diffracts white light emitted from the white light source into diffracted light at time differences corresponding to the wavelengths of light components of the white light, a two-dimensional image sensor having a photodetection area that include a plurality of pixels for detecting return light reflected from upper and lower surfaces of a plate-shaped workpiece, a storage unit that stores, as a spectral interference waveform, intensities of the return light corresponding to the wavelengths of the light components successively received at the time differences by the pixels, and a waveform table recording therein a plurality of kinds of sample spectral interference waveforms corresponding to plate-shaped workpiece thicknesses.

Abstract: A thickness measuring apparatus including a thickness measuring unit for measuring the thickness of a plate-shaped workpiece. The thickness measuring unit includes a white light source for emitting white light, a dispersing mechanism for producing time differences corresponding to wavelengths of light components of the white light to thereby generate spectral light, a two-dimensional image sensor having a photodetecting area for detecting the return light, the photodetecting area including a plurality of pixels, a storing section for storing the intensity of the return light detected by the plural pixels according to wavelength with time difference, a waveform table previously storing a plurality of kinds of sample spectral interference waveforms respectively corresponding to different thicknesses of the workpiece, and a thickness deciding section for deciding the thickness at an X-Y coordinate position in a two-dimensional area of the workpiece.

Abstract: A thickness measuring apparatus includes a white light source for emitting white light, a dispersing mechanism for producing time differences corresponding to the wavelengths of light components of the white light to thereby generate spectral light, the spectral light being applied to the workpiece and then reflected on the upper surface and the lower surface of the workpiece to obtain return light, a two-dimensional image sensor having a photodetecting area for detecting the return light, the photodetecting area including a plurality of pixels, a storing section for storing the intensity of the return light detected by the plural pixels according to wavelength with time difference, the intensity of the return light detected by each pixel being stored as a spectral interference waveform, and a thickness computing section for computing the thickness of the workpiece from the spectral interference waveform stored in the storing section.

Abstract: A thickness measuring apparatus for measuring a thickness of a wafer includes a light source emitting light having a transmission wavelength region to the wafer, a focusing unit applying the light emitted from the light source to the wafer held on a chuck table, an optical branching section branching the light reflected on the wafer held on the chuck table, a diffraction grating diffracting the reflected light branched by the optical branching section to obtain diffracted light of different wavelengths, an image sensor detecting an intensity of the diffracted light obtained by the diffraction grating to produce a spectral interference waveform, and a computing unit computing the spectral interference waveform produced by the image sensor to output thickness information.

Abstract: A thickness measuring apparatus measures the thickness of a wafer. The apparatus includes a light source for emitting light having a transmission wavelength region to the wafer, a focusing unit for applying the light emitted from the light source to the wafer, a first optical path for optically connecting the light source to the focusing unit, an optical branching section provided on the first optical path for branching the light reflected on the wafer and then guiding the reflected light to a second optical path, a diffraction grating provided on the second optical path for diffracting the reflected light to obtain diffracted light of different wavelengths, an image sensor for detecting the intensity of the diffracted light according to the different wavelengths and producing a spectral interference waveform, and a control unit having a thickness computing section for computing the spectral interference waveform to output thickness information.

Abstract: In order to improve a characteristic of an optical element, an optical element (polarizing filter) including a substrate 1S having a wire-grid region 1A and a peripheral region 2A positioned on an outer periphery thereof is made to have the following configuration. A wire-grid in which a plurality of line-shaped wires P10 made of Al and extending in a y direction are arranged at spaces S in an x direction is provided in the wire-grid region 1A of the substrate 1S, and a pattern (repetitive pattern) in which a plurality of protruding portions P20 made of Al are arranged is provided in the peripheral region 2A. This pattern is, for example, a checkerboard pattern. According to the above-mentioned configuration, the plurality of wires P10 can be arranged so that their respective ends are spaced apart from an end of the substrate 1S, so that the wires P10 can be prevented from being deformed and nicked.

Abstract: A spectral interference height detecting apparatus includes a chuck table for holding a workpiece thereon and a height detecting unit for detecting the height of an upper surface of the workpiece held on the chuck table. The height detecting unit includes a light source for emitting light in a predetermined wavelength band into a first optical path, a condenser disposed in the first optical path for converging light onto the workpiece held on the chuck table, a beam splitter disposed between the light source and the condenser for splitting the light in the first optical path into a second optical path, a mirror disposed in the second optical path to form a basic optical path length, for reflecting light into the second optical path and returning light through the beam splitter to the first optical path.

Abstract: An electric power steering device includes a basic return command value calculation unit configured to calculate a basic return command value in a direction to return a steering wheel to a neutral position on the basis of a steering angle of a steering wheel, a turn/return determination unit configured to determine the turn and the return of the steering wheel, a gradually changing return command value calculation unit configured to calculate a gradually changing return command value, the gradually changing return command value gradually increasing, while the return of the steering wheel is determined by the turn/return determination unit, and a return command value calculation unit configured to calculate a return command value by adding the gradually changing return command value to the basic return command value. The electric motor is driven by adding the return command value to the assist command value.

Abstract: A electric power steering device includes a basic return command value calculation unit configured to calculate a basic return command value in a direction to return a steering wheel to a neutral position on the basis of a steering angle of the steering wheel, a return command value calculation unit configured to calculate a return command value by correcting the basic return command value by the first correction gain, and an opposite return command value calculation unit configured to calculate an opposite return command value in a direction not to return the steering wheel to the neutral position on the basis of an angular acceleration of an electric motor. A correction return command value is calculated on the basis of the return command value and the opposite return command value and the electric motor is driven by adding the correction return command value to the assist command value.

Abstract: Provided are a plasma light source capable of solving a problem occurring when an arc discharge lamp is used and an inspection apparatus capable of providing uniform and high-brightness plasma light. The plasma light source includes a pulse laser generator configured to generate a pulse laser beam, a continuous wave (CW) laser generator configured to generate an infrared ray (IR) CW laser beam, a first dichroic mirror configured to transmit or reflect the pulse laser beam and reflect or transmit the IR CW laser beam, a chamber configured to receive the pulse laser beam to ignite plasma and the IR CW laser beam to maintain the plasma in an ignited state, and discharge plasma light generated by the plasma, and a second dichroic mirror configured to transmit the pulse laser beam and the IR CW laser beam and reflect the plasma light.

Abstract: Provided are an optical element and an optical device using the optical element to which a manufacturing process for manufacturing a wire-grid structure can be basically applied, and besides, in which a higher polarization contrast ratio than that of a wire-grid element can be obtained. A wobbled wire element in an embodiment has a feature that a periodic structure having a period equal to or larger than a wavelength of an incident light wave is formed in a y direction. In this manner, in a wobbled wire element in a first embodiment, a polarization contrast ratio can be significantly improved.

Abstract: A solid-state light source device, enabling to build up with using solid-state elements, and having the structure suitable to be applied as a light source for a projection-type display apparatus, comprises a solid-state light source unit 10 for emitting excitation light therefrom, a reflection mirror (or reflector) 130 made of a parabolic surface, for condensing the excitation light from the solid-state light source to be point-like, and a disc-like (or wheel) member 140, repeating reflection/scattering or transmission/scattering of the excitation light and conversion of the excitation light, alternately, in vicinity of a focus point of the excitation light, which is condensed to be point-like by the reflection mirror (or reflector), wherein the excitation light (B-color) reflected/or scattered by that disc-like (or wheel) member and fluorescence light (Y-color), wavelength of which is converted, is taken on a same optical path, by means of the reflection mirror (or reflector) 130 or a second reflection mirro

Abstract: A electric power steering device includes a basic return command value calculation unit configured to calculate a basic return command value in a direction to return a steering wheel to a neutral position on the basis of a steering angle of the steering wheel, a return command value calculation unit configured to calculate a return command value by correcting the basic return command value by the first correction gain, and an opposite return command value calculation unit configured to calculate an opposite return command value in a direction not to return the steering wheel to the neutral position on the basis of an angular acceleration of an electric motor. A correction return command value is calculated on the basis of the return command value and the opposite return command value and the electric motor is driven by adding the correction return command value to the assist command value.

Abstract: A stator for a rotational electrical machine includes a cylindrical stator core and a stator winding. The stator core includes slots arranged at intervals in a circumferential direction. The slots pass through the stator core in an axial direction. The stator winding is obtained by joining together ends of U-shaped conductors inserted through the slots. A second insertion part is located away from a first insertion part in the circumferential direction and is inserted in its corresponding slot. A joining end part is joined to another U-shaped conductor at a joining position away from the insertion part in the circumferential direction. The joining end part includes a first bent part and at least one second bent part. The first bent part is bent near an opening of its corresponding slot. The second bent part is bent between the first bent part and the joining position.