Abstract: For achieving small-sizing and high efficiency by improving heat radiation of coils, and further for simple-construction to be easily disassembled, thereby being environment-friendly from a view point of recycling, an electric rotating machine comprising: a stator 1a being constructed by inserting coils 10a into slots 11 of a stator core 2a; an outer frame 4 being divided into a plurality thereof, so as to cover periphery of the stator core of said stator; a pair of bearing holder portions 6a and 6b, each having a fitting portion 35a or 35b to be fitted into an inner diameter reference surface 25a at both end portions of said stator and being provided with a bearing 8a or 8b at an axial center portion thereof, and being attached at both sides of said stator core so as to cover coil end portions dropping out at both sides of said stator; a squeezing mechanism (30, 32a, 32b, 6a, 6b) fixing the outer frame at an outer periphery of the stator core, by a wedge function between each of the bearing holder portions a

Abstract: An illumination optical apparatus includes a light source emitting an illumination light beam, the illumination light beam being directed along a predetermined optical path, a variable optical filter disposed on the predetermined optical path of the illumination light beam for controlling the intensity of the illumination light beam, a transmissivity of the variable optical filter with respect to the illumination light beam being continuously variable, and an optical integrator receiving the illumination light beam that has passed through the variable optical filter to form a plurality of images of the light source.

Abstract: The present invention is characterized in that a rotary machine attempts to lower the resistance of each coil and realize improvement of efficiency and miniaturization of a motor by shortening the end portion of a coil to be inserted into a stator, and the constitution thereof is that the coil end portion of a stator coil has a shape that a conductor raised and looped back from a slot provided in the core on the rotor side is closer to the end face of the aforementioned core than a conductor raised and looped back in the aforementioned slot on the opposite side of the rotor, and the aforementioned constitution has a stator coil having a loopback shape passing a location other than above the adjacent slot surface.

Abstract: An illumination optical apparatus according to the present invention comprises a light source, a collector mirror having an ellipsoidal surface of revolution for reflecting and collecting light from the light source, a collimator lens for converting the light collected by the collector mirror into nearly parallel beams, an optical integrator for producing a plurality of light source images from the beams outgoing from the collimator lens, and a condenser lens for condensing light from the plurality of light source images to illuminate a body to be illuminated in a superimposed manner. Wherein the collimator lens is arranged to satisfy the following condition, R.sub.max <f.sub.col .multidot.sin u.sub.max ; where f.sub.col is a focal length of the condenser lens, u.sub.max a maximum angle of incidence of the light incident into the collimator lens, and R.sub.max a maximum beam radius of the nearly parallel beams collimated by the collimator lens.

Abstract: An illumination optical apparatus of this invention is small in size as a whole and capable of illuminating a plurality of illumination areas on a mask. The illumination optical apparatus illuminates a plurality of areas on a mask to be projected/exposed. This apparatus includes at least two light sources, a focusing optical system for focusing light beams from the respective light sources to form light source images, a light guide having incident ends equal in number to the light sources and exit ends equal in number to the illumination areas and serving to guide light beams from the respective light source images incident on the incident ends to the exit ends, and an illumination optical system for irradiating the light beams from the respective light source images emerging from the exit ends of the light guide onto the corresponding areas on the mask.

Abstract: An illumination optical apparatus for illuminating an object to be illuminated in an arcuate or rectangular shape. A first optical integrator forms a plurality of light source images in a substantially linear arrangement, based on a beam of parallel rays. Then a second optical integrator forms a plurality of light source images in a substantially square arrangement, based on the beam from the first optical integrator. A relay optical system is disposed between the first and second optical integrator, and makes a position of the light source images formed by the first optical cintegrator conjugate with a position of the light source images formed by the second optical integrator.

Abstract: An exposure apparatus comprises a plurality of illumination optical systems for generating a plurality of light beams, a plurality of projection optical systems disposed corresponding to the plurality of illumination optical systems, respectively, a plurality of light intensity detectors, provided respectively for the plurality of illumination optical systems, for detecting individual intensities of the plurality of light beams, a light intensity changing device for changing the respective intensities of the plurality of light beams, and a control device for controlling the light intensity changing device and uniformizing the intensities of the plurality of light beams to a substantially fixed level.

Abstract: A grease extractor includes a centrifugal fan for forcibly flowing grease laden air in order to remove grease therefrom in cooperation with a trap member. The grease extractor comprises a vessel with an inlet for introduction of the grease laden air and an outlet for discharging clear air. The fan, which has a rotation axis and has a circumferential fan surface, is disposed between the inlet and the outlet to be rotated about a rotation axis so as to generate a forced flow of the air for introducing the grease laden air inwardly and flowing it radially outwardly through the circumferential fan surface. The fan includes impellers which deflects the grease laden air to separate the grease therefrom and coagulate it into corresponding grease particles. Flow converting members are provided on the circumferential fan surface for converting the radial air flow into an axial flow directed outwardly substantially along the rotation axis.

Abstract: A method of detecting an end point of etching by emission spectroscopy. Using a constant ratio between emission intensities in the course of etching and after the termination thereof, a correction value is computed with data of a waveform already adjusted to be capable of detecting an end point of etching and the corresponding emission intensity in the course of etching treatment thereafter, and the waveform of corresponding emission intensity in the course of etching treatment is processed so that the detection can be conducted on the same level as in the end point detection already adjusted to be capable of detecting the end point of etching at the time of treatment. Thus, irrespective of the reduction of the quantity of emission for an emission detection at each time of treatment, a constant electric signal of the same detecting level can be obtained, making it possible to detect an end point of etching with the same accuracy as in the initial treatment.

Abstract: The present invention relates to the etching of a gate film, a tungsten film, a silicon film, etc. In the present invention, use is made of an etching gas comprising a mixture composed of a reductive fluoride gas, a hydrocarbon gas and a halogen gas having a larger atomic diameter than a material to be etched, or a mixture composed of a reductive fluoride gas and a Cl-containing hydrocarbon gas, and the process comprises the step of conducting anisotropic etching of a material to be etched with an etching gas (a reductive fluoride gas), the step of forming a protective film by a depositing gas (a hydrocarbon gas), and the step of removing excess deposits formed as the protective film by means of a gas reactive with the protective film (a halogen gas or a Cl-containing hydrogen gas), wherein anisotropic etching is conducted by forming a protective film on a side wall while removing excess deposits formed as the protective film, thus enabling the anisotropic etching to be conducted with good accuracy.

Abstract: A metal fitting for fixing a precast concrete board comprises: a supporting metal member with one end portion secured to the board and with the other end portion provided with a first screw to move the board upward and downward through the supporting metal member and a second screw to move the board backward and forward through the supporting metal member; and an adjusting metal member including a base board which is secured to a building's structure, and a pair of third screws for moving the board rightward and leftward through the supporting metal member, so that the position adjustments of the board in the three directions can be achieved independently of one another.

Abstract: This invention relates to a method and apparatus for controlling temperature of a sample and is intended to prevent a sample from being deformed by the pressure of a heat transmission gas by mounting and fixing the sample being mounted and processed in a vacuum on and to the sample stand and supplying the heat transmission gas to the gap between the under surface of the sample thus fixed and the sample stand; effectively control the temperature of the sample being processed in a vacuum by limiting the size of the gap between the under surface of the sample and the sample stand; and make the heat transmission gas least affect the process by limiting the flow of the heat transmission gas in the vacuum process chamber.