Abstract: At least a part of a bridge portion of each electromagnetic steel sheet is modified, and electromagnetic steel sheets that have undergone the modification are stacked. This allows the bridge portions of a rotor core according to the present embodiment to have a lower magnetic permeability than that of other sites, and it is therefore possible to prevent some of the magnetic field lines from being short-circuited so as to draw a closed curve in the rotor core. Accordingly, a decrease in the efficiency of an interior permanent magnet (IPM) type rotating electric machine can be suppressed.

Abstract: A magneto-sensitive wire (magneto-sensitive body) made of a Co-based alloy having a composite structure in which crystal grains are dispersed in an amorphous phase. The Co-based alloy is, for example, a Co—Fe—Si—B-based alloy, and the total amount of Si and B is preferably 20 to 25 at % with respect to the Co-based alloy as a whole. Preferably, the average diameter of the crystal grains is 70 nm or less and the area ratio of the crystal grains is 10% or less to the composite structure as a whole. The magneto-sensitive wire has a circular cross section and the wire diameter is about 1 to 100 ?m. Such a magneto-sensitive wire can be obtained, for example, through a heat treatment step of heating an amorphous wire composed of a Co-based alloy at a temperature equal to or higher than a crystallization start temperature and lower than a crystallization end temperature.

Abstract: An object is to provide a magneto-sensitive wire (magneto-sensitive body) with which the measurement range of a magnetic sensor can be expanded, the heat resistance and the high-temperature durability can be improved, and other appropriate properties can be obtained. The magneto-sensitive wire of the present invention is composed of a Co-based alloy having a composite structure in which crystal grains are dispersed in an amorphous phase. The Co-based alloy is, for example, a Co—Fe—Si—B-based alloy. In this case, the total amount of Si and B is preferably 20 to 25 at % with respect to the Co-based alloy as a whole. Preferably, the average diameter of the crystal grains is 70 nm or less and the area ratio of the crystal grains is 10% or less to the composite structure as a whole. The magneto-sensitive wire has a circular cross section, for example, and the wire diameter is about 1 to 100 ?m.

Abstract: A magneto-sensitive wire for a magnetic impedance sensor and a method of manufacturing the same are provided which can prevent generation of abnormal noise in an output voltage and deterioration in hysteresis characteristics and enable higher-accuracy measurement than conventional magneto-sensitive wires. The magneto-sensitive wire (1) comprises an amorphous wire for detecting magnetism. The magnetic impedance sensor (6) has the magneto-sensitive wire (1) and a detection coil (3) around the magneto-sensitive wire (1). The magnetic impedance sensor (6) is configured to apply a pulse current to the magneto-sensitive wire (1) and detect a voltage generated in the detection coil (3) thereby capable of measuring strength of a magnetic field. The voltage has magnitude in response to strength of an external magnetic field. The magneto-sensitive wire (1) is a Co-based amorphous wire manufactured using an in-rotating liquid spinning method and finished by wire drawing.

Abstract: Method for heat treating magnetic wire includes a wire supply unit, a wire property measuring unit, a wire tensile force measuring unit, a heat treatment unit, and a wire winding unit. The wire supply unit includes a supply bobbin, a supply rotary part, a wire reel, and a tension roller. The wire property measuring unit includes a size measuring device, an after measurement capstan, and a wire reel and measures a size of the wire prior to the heat treatment. The wire tensile force measuring unit includes a tensile force measuring device, a tension roller, and a wire reel. The wire heat treatment unit includes a heat treatment furnace, a temperature measuring device, an after heat treatment capstan, and a wire reel. The wire winding unit includes a winding bobbin, a winding rotary part that rotates the winding bobbin, a tension roller, and a wire reel.

Abstract: Apparatus for heat treating magnetic wire includes a wire supply unit, a wire property measuring unit, a wire tensile force measuring unit, a heat treatment unit, and a wire winding unit. The wire supply unit includes a supply bobbin, a supply rotary part, a wire reel, and a tension roller. The wire property measuring unit includes a size measuring device, an after measurement capstan, and a wire reel and measures a size of the wire prior to the heat treatment. The wire tensile force measuring unit includes a tensile force measuring device, a tension roller, and a wire reel. The wire heat treatment unit includes a heat treatment furnace, a temperature measuring device, an after heat treatment capstan, and a wire reel. The wire winding unit includes a winding bobbin, a winding rotary part that rotates the winding bobbin, a tension roller, and a wire reel.

Abstract: Apparatus for heat treating magnetic wire includes a wire supply unit, a wire property measuring unit, a wire tensile force measuring unit, a heat treatment unit, and a wire winding unit. The wire supply unit includes a supply bobbin, a supply rotary part, a wire reel, and a tension roller. The wire property measuring unit includes a size measuring device, an after measurement capstan, and a wire reel and measures a size of the wire prior to the heat treatment. The wire tensile force measuring unit includes a tensile force measuring device, a tension roller, and a wire reel. The wire heat treatment unit includes a heat treatment furnace, a temperature measuring device, an after heat treatment capstan, and a wire reel. The wire winding unit includes a winding bobbin, a winding rotary part that rotates the winding bobbin, a tension roller, and a wire reel.

Abstract: Apparatus for heat treating magnetic wire includes a wire supply unit, a wire property measuring unit, a wire tensile force measuring unit, a heat treatment unit, and a wire winding unit. The wire supply unit includes a supply bobbin, a supply rotary part, a wire reel, and a tension roller. The wire property measuring unit includes a size measuring device, an after measurement capstan, and a wire reel and measures a size of the wire prior to the heat treatment. The wire tensile force measuring unit includes a tensile force measuring device, a tension roller, and a wire reel. The wire heat treatment unit includes a heat treatment furnace, a temperature measuring device, an after heat treatment capstan, and a wire reel. The wire winding unit includes a winding bobbin, a winding rotary part that rotates the winding bobbin, a tension roller, and a wire reel.

Abstract: A magneto-sensitive wire for a magnetic impedance sensor and a method of manufacturing the same are provided which can prevent generation of abnormal noise in an output voltage and deterioration in hysteresis characteristics and enable higher-accuracy measurement than conventional magneto-sensitive wires. The magneto-sensitive wire (1) comprises an amorphous wire for detecting magnetism. The magnetic impedance sensor (6) has the magneto-sensitive wire (1) and a detection coil (3) around the magneto-sensitive wire (1). The magnetic impedance sensor (6) is configured to apply a pulse current to the magneto-sensitive wire (1) and detect a voltage generated in the detection coil (3) thereby capable of measuring strength of a magnetic field. The voltage has magnitude in response to strength of an external magnetic field. The magneto-sensitive wire (1) is a Co-based amorphous wire manufactured using an in-rotating liquid spinning method and finished by wire drawing.

Abstract: A method for etching an organic film 1 having a surface selectively protected by a hard mask layer 2, includes a partial etching process of etching the organic film 1 partly in a thickness direction of the organic film 1 by using a mixed gas containing a gas that anisotropically etches a silicon oxide film and a gas that isotropically etches the organic film without etching the silicon oxide film; and a deposition process of depositing a protective film 3 made of the silicon oxide film on side surfaces 12 and a bottom surface 11 of a recess 10 formed in the organic film in the partial etching process. The partial etching process and the deposition process is alternately performed multiple times.

Abstract: A method for etching an organic film 1 having a surface selectively protected by a hard mask layer 2, includes a partial etching process of etching the organic film 1 partly in a thickness direction of the organic film 1 by using a mixed gas containing a gas that anisotropically etches a silicon oxide film and a gas that isotropically etches the organic film without etching the silicon oxide film; and a deposition process of depositing a protective film 3 made of the silicon oxide film on side surfaces 12 and a bottom surface 11 of a recess 10 formed in the organic film in the partial etching process. The partial etching process and the deposition process is alternately performed multiple times.

Abstract: The magneto-sensitive wire of the invention has a vortex-spin structure and hence includes no magnetic domain walls, so that the magneto-sensitive wire of the invention has an excellent hysteresis characteristic exhibiting nearly zero hysteresis. Therefore, the linearity related to the output voltage characteristic for the applied magnetic field in the determination range of an MI sensor is significantly improved as compared to MI sensors using the conventional magneto-sensitive wires. Using the magneto-sensitive wire of the invention makes it possible to provide a magneto-impedance (MI) element exhibiting a higher precision than the conventional ones and further provide a sensor using such an MI element.

Abstract: An MI sensor element 1 includes a substrate 4 formed of a non-magnetic material, a plurality of magneto-sensitive bodies 2, and a plurality of detecting coils 3. The plurality of magneto-sensitive bodies 2 are formed of an amorphous material, and are fixed on the substrate 4, and are electrically connected to each other. The detecting coils 3 are wound around each of the magneto-sensitive bodies 2, and are electrically connected to each other. The MI sensor element 1 outputs a voltage corresponding to a magnetic field strength acting on the magneto-sensitive bodies 2 from the detecting coil 3 by flowing a pulse current or a high-frequency current to the magneto-sensitive body 2. The plurality of magneto-sensitive bodies 2 are formed by fixing one amorphous wire 20 on the substrate 4, and then cutting the wire.

Abstract: An MI sensor element 1 includes a substrate 4 formed of a non-magnetic material, a plurality of magneto-sensitive bodies 2, and a plurality of detecting coils 3. The plurality of magneto-sensitive bodies 2 are formed of an amorphous material, and are fixed on the substrate 4, and are electrically connected to each other. The detecting coils 3 are wound around each of the magneto-sensitive bodies 2, and are electrically connected to each other. The MI sensor element 1 outputs a voltage corresponding to a magnetic field strength acting on the magneto-sensitive bodies 2 from the detecting coil 3 by flowing a pulse current or a high-frequency current to the magneto-sensitive body 2. The plurality of magneto-sensitive bodies 2 are formed by fixing one amorphous wire 20 on the substrate 4, and then cutting the wire.

Abstract: Provided is a magnetoimpedance (MI) sensor having a high magnetic sensor sensitivity and a wide measurement range. The MI sensor comprises an MI element, an electric current supply unit and a signal processing circuit. The MI element comprises a magnetosensitive wire formed of an amorphous soft magnetic alloy having zero magnetostriction, and a detection coil provided around the magnetosensitive wire with an electric insulator disposed therebetween, thereby detecting voltage generated at the detection coil and corresponding to an external magnetic field upon application of a high frequency electric current to the magnetosensitive wire. The electric current supply unit supplies the high frequency electric current to the MI element. The signal processing circuit processes an output signal from the detection coil.

Abstract: A magnetic detection device of the present invention includes at least one pair of first magnetosensitive bodies each comprising a soft magnetic material extending in a first axis direction and being sensitive to an external magnetic field oriented in the first axis direction; and a magnetic field direction changer comprising a soft magnetic material and changing an external magnetic field oriented in a different axis direction from the first axis direction into a measurement magnetic field having a component in the first axis direction which can be detected by the at least one pair of first magnetosensitive bodies. With this magnetic detection device, the external magnetic field oriented in the different axis direction can be detected by way of the first magnetosensitive bodies. As a result, while attaining magnetic detection with high accuracy, the magnetic detection device can be reduced in size or thickness by omitting a magnetosensitive body extending long in the different axis direction.

Abstract: Provided is a magnetoimpedance (MI) sensor having a high magnetic sensor sensitivity and a wide measurement range. The MI sensor comprises an MI element, an electric current supply unit and a signal processing circuit. The MI element comprises a magnetosensitive wire formed of an amorphous soft magnetic alloy having zero magnetostriction, and a detection coil provided around the magnetosensitive wire with an electric insulator disposed therebetween, thereby detecting voltage generated at the detection coil and corresponding to an external magnetic field upon application of a high frequency electric current to the magnetosensitive wire. The electric current supply unit supplies the high frequency electric current to the MI element. The signal processing circuit processes an output signal from the detection coil.

Abstract: A magnetic detection device of the present invention includes at least one pair of first magnetosensitive bodies each comprising a soft magnetic material extending in a first axis direction and being sensitive to an external magnetic field oriented in the first axis direction; and a magnetic field direction changer comprising a soft magnetic material and changing an external magnetic field oriented in a different axis direction from the first axis direction into a measurement magnetic field having a component in the first axis direction which can be detected by the at least one pair of first magnetosensitive bodies. With this magnetic detection device, the external magnetic field oriented in the different axis direction can be detected by way of the first magnetosensitive bodies. As a result, while attaining magnetic detection with high accuracy, the magnetic detection device can be reduced in size or thickness by omitting a magnetosensitive body extending long in the different axis direction.

Abstract: The magneto-sensitive wire of the invention has a vortex-spin structure and hence includes no magnetic domain walls, so that the magneto-sensitive wire of the invention has an excellent hysteresis characteristic exhibiting nearly zero hysteresis. Therefore, the linearity related to the output voltage characteristic for the applied magnetic field in the determination range of an MI sensor is significantly improved as compared to MI sensors using the conventional magneto-sensitive wires. Using the magneto-sensitive wire of the invention makes it possible to provide a magneto-impedance (MI) element exhibiting a higher precision than the conventional ones and further provide a sensor using such an MI element.

Abstract: The bonded magnet of the present invention, in which average particle diameter and compounding ratio are specified, is comprised of Cobalt-less R1 d-HDDR coarse magnet powder that has been surface coated with surfactant, R2 fine magnet powder that has been surface coated with surfactant (R1 and R2 are rare-earth metals), and a resin which is a binder. The resin, a ferromagnetic buffer in which R2 fine magnet powder is uniformly dispersed, envelops the outside of the Cobalt-less R1 d-HDDR coarse magnet powder. Despite using Cobalt-less R1 d-HDDR anisotropic magnet powder, which is susceptible to fracturing and therefore vulnerable to oxidation, the bonded magnet of the present invention exhibits high magnetic properties along with extraordinary heat resistance.