Abstract: A light deflecting device which suppresses a vibration caused by swing of a light deflecting unit and transmitted to a fixed unit and prevents noise from being made on a housing to which the fixed unit is attached, including a light deflecting unit having paired beams on both sides of a movable unit having a light reflecting unit and a coil, and a fixed unit to which the light deflecting unit is swingably fixed through the beams and which includes a magnetic field forming unit, swings the movable unit with the beams as torsional rotation axes by an electromagnetic force generated by a driving current flowing to the coil and a magnetic field formed by the magnetic field forming unit, and a counter swing member in the fixed unit to be swung in a reverse phase to the light deflecting unit so it is opposed to the light deflecting unit.

Abstract: A light deflecting device which suppresses a vibration caused by swing of a light deflecting unit and transmitted to a fixed unit and prevents noise from being made on a housing to which the fixed unit is attached, including a light deflecting unit having paired beams on both sides of a movable unit having a light reflecting unit and a coil, and a fixed unit to which the light deflecting unit is swingably fixed through the beams and which includes a magnetic field forming unit, swings the movable unit with the beams as torsional rotation axes by an electromagnetic force generated by a driving current flowing to the coil and a magnetic field formed by the magnetic field forming unit, and a counter swing member in the fixed unit to be swung in a reverse phase to the light deflecting unit so it is opposed to the light deflecting unit.

Abstract: A metal elastic member to be used for beams 4 for supporting a movable unit 3 at respective ends with respect to a fixed unit 2 in a miniature machine including at least one movable unit 3, the fixed unit 2 and the beams 4 , and capable of swinging the movable unit about an axis P with the beams 4 serving as torsional rotation axes, includes a metal bar 4a having a predetermined length, a fixed unit pad 4b that is provided at a first end of the metal bar 4a and is fixed to the fixed unit 2, and a movable unit pad 4c formed on the other end side of the metal bar 4a and fixed to the movable unit 3. At least the metal bar 4a is molded to have a sectional area of 1 mm2 or less by using a physical or chemical processing method excluding a mechanical processing method and swings the movable unit 3 within a frequency of 150 Hz to 500 Hz.

Abstract: Scanning distance measuring equipment includes a light emitter/receiver and a deflector for deflecting and reflecting measurement light emitted from the light emitter/receiver to outside through an optical window. The deflector is provided with a first deflection mechanism including a movable unit swingable about a first axis and a drive unit for driving to swing the movable unit; a second deflection mechanism for driving to rotate the first deflection mechanism about a second axis perpendicular to the first axis; and a contactless power supply unit including a second coil that is located to rotate about the second axis along with the rotating second deflection mechanism, and a first coil that is located to face the second coil on a common axis.

Abstract: A metal elastic member includes a movable unit 3, a fixed unit 2, and paired beams 4 for supporting the movable unit 3 at respective ends with respect to the fixed unit 2 and is used for the beams 4 of the miniature machine capable of swinging the movable unit 3 about an axis P with the beams 4 serving as torsional rotation axes, includes a metal bar 4a which swings the movable unit 3, and a fixed unit pad 4b that is provided at a first end of the metal bar and is fixed to the fixed unit 2, and the metal bar is molded to have a sectional area of 1 mm2 or less by using a physical or chemical processing method excluding a mechanical processing method and has a plurality of projections 4d formed in extension in an intersecting direction with the torsional rotation axes P.

Abstract: Scanning distance measuring equipment includes a light emitter/receiver and a deflector for deflecting and reflecting measurement light emitted from the light emitter/receiver to outside through an optical window. The deflector is provided with a first deflection mechanism including a movable unit swingable about a first axis and a drive unit for driving to swing the movable unit; a second deflection mechanism for driving to rotate the first deflection mechanism about a second axis perpendicular to the first axis; and a contactless power supply unit including a second coil that is located to rotate about the second axis along with the rotating second deflection mechanism, and a first coil that is located to face the second coil on a common axis.

Abstract: A metal elastic member to be used for beams 4 for supporting a movable unit 3 at respective ends with respect to a fixed unit 2 in a miniature machine including at least one movable unit 3, the fixed unit 2 and the beams 4, and capable of swinging the movable unit about an axis P with the beams 4 serving as torsional rotation axes, includes a metal bar 4a having a predetermined length, a fixed unit pad 4b that is provided at a first end of the metal bar 4a and is fixed to the fixed unit 2, and a movable unit pad 4c formed on the other end side of the metal bar 4a and fixed to the movable unit 3. At least the metal bar 4a is molded to have a sectional area of 1 mm2 or less by using a physical or chemical processing method excluding a mechanical processing method and swings the movable unit 3 within a frequency of 150 Hz to 500 Hz.

Abstract: The present invention provides an electromagnetically actuating optical deflecting elements which can be manufactured out of reduced number of components and are capable of being actuated at lower frequencies and at wider deflecting angles without causing mechanical influences of the metal wiring on beams of the optical deflecting element. For that purpose, the electromagnetically actuating optical deflecting element comprises: a movable part having a light reflecting plane and a coil; a base component having a magnetic field generating means; and a pair of beams which axially support said movable part on to the base component, The movable part is actuated by an electromagnetic force generated by an electric current flowing through the coil and the magnetic field generating means.

Abstract: The present invention can provide a downsized optical deflecting element having less operating fluctuations at low cost and further it can be actuated at lower frequencies and at wider deflecting angles. The optical deflecting element comprises a base component having magnets therein; a soft resin component comprising a fixed part adhered to the base component and a movable part having a coil therein supported by the fixed part via a pair of beams; and a reflector plate 3 adhered on to the movable part. The soft resin component consists of a first insulating resin part 2-1 and second conductive resin part 2-2 for electrical wiring.

Abstract: The present invention provides a resonator capable of varying its resonance frequency of good performance with a low dispersion at a high manufacturing yield and a low cost. The resonator comprises a fixed electrode 1; a movable electrode 3 arranged with a predetermined distance apart from and parallel to the fixed electrode; a plurality of conductive leaf springs 2 with conductive property, all of which are bent outward or inward beforehand, arranged parallel apart from each other wherein, one end of each leaf spring is integrated into the fixed electrode and the other end of each leaf spring is integrated into the movable electrode; and an actuator 6 attached to the movable electrode for deforming the leaf springs by pushing or pulling the movable electrode.

Abstract: The present invention provides an electromagnetically actuating optical deflecting elements which can be manufactured out of reduced number of components and are capable of being actuated at lower frequencies and at wider deflecting angles without causing mechanical influences of the metal wiring on beams of the optical deflecting element. For that purpose, the electromagnetically actuating optical deflecting element comprises: a movable part having a light reflecting plane and a coil; a base component having a magnetic field generating means; and a pair of beams which axially support said movable part on to the base component, The movable part is actuated by an electromagnetic force generated by an electric current flowing through the coil and the magnetic field generating means.

Abstract: In order to provide an anisotropic conductive sheet which can be applied to more finely and more narrowly pitched electrodes and also to provide spring electrodes applied for the anisotropic conductive sheet, the spring electrodes manufactured as follows. A part having a bending leaf spring shape is formed out of a monocrystal silicon by anisotropic etching and gold is plated on the surface of the part so as to obtain a silicon spring electrode 1. The silicon spring electrodes 1 are inserted in through holes formed on a silicone rubber sheet and fixed to the through holes.

Abstract: In order to provide an anisotropic conductive sheet which can be applied to more finely and more narrowly pitched electrodes and also to provide spring electrodes applied for the anisotropic conductive sheet, the spring electrodes manufactured as follows. A part having a bending leaf spring shape is formed out of a monocrystal silicon by anisotropic etching and gold is plated on the surface of the part so as to obtain a silicon spring electrode 1. The silicon spring electrodes 1 are inserted in through holes formed on a silicone rubber sheet and fixed to the through holes.

Abstract: The invention aims at suppressing an amount of deformation of a central portion of a movable part in a micro-miniature semiconductor actuator. A boundary portion is provided between a central portion and an edge of a movable part which is axially supported in a rotatable manner by torsion bars of an actuator, the boundary portion suppressing transmission of a warp due to an influence of air resistance at the edge of the movable part or moment of inertia, or heat generated by a driving force generating portion at the edge of the movable part, to a central portion of the movable part, to suppress deformation of the central portion of the movable part.

Abstract: Monitoring and control apparatus for fail-safe monitoring for normal operation of traffic signal lights provided at an intersection or the like where a plurality of roads intersect. The illumination conditions of respective signal lights are detected using as sensor device, and when the number of illuminated or non-illuminated signal lights is a predetermined number, a normal judgment output of logic value 1 corresponding to a high energy condition is generated while, when the number of illuminated or non-illuminated signal lights is not the predetermined number, an abnormal judgment output of logic value 0 corresponding to a low energy condition is generated. As a result, when a fault in the monitoring apparatus stops the output, the resultant output condition is the same as for a danger condition due to a signal light abnormality, resulting in an extremely safe signal light monitoring and control with excellent fail-safe characteristics.

Abstract: The invention aims at suppressing an amount of deformation of a central portion of a movable part in a micro-miniature semiconductor actuator. A boundary portion (10) is provided between a central portion and an edge of a movable part (3), which is axially supported in a rotatable manner by torsion bars (4, 4) of an actuator (1), the boundary portion (10) being for suppressing transmission of a warp due to an influence of air resistance at the edge of the movable part (3) or moment of inertia, or heat generated by a driving force generating portion (6) at the edge of the movable part, to a central portion of the movable part, to suppress deformation of the central portion of the movable part.

Abstract: The present invention relates to a planar type optical scanning apparatus and a mounting structure thereof, which enables further miniaturization and cost reduction. By locating a mirror (14), on the surface side of a movable plate (12) that is axially supported by torsion bars (13A, 13B) on a silicon substrate (11), and a drive coil (15) on the rear side thereof, the area of the movable plate (12) can be reduced. Furthermore, in an optical scanning apparatus fixing region on a package substrate (31), a cavity (32) and conductive patterns (33, 33A, 33B) are provided, the construction being such that the electrode terminals (16A, 16B) of the drive coil provided on the rear face of the silicon substrate (11) of the optical scanning apparatus (10) are connected with the conductive patterns (33, 33A, 33B) to mount the optical scanning apparatus (10) on the package substrate (31).

Abstract: An electromagnetic actuator includes an external movable plate formed integrally with a semiconductor substrate. A first torsion bar movably supports the movable plate with respect to the semiconductor substrate. An internal movable plate is disposed inside the external movable plate. A second torsion bar rotatably supports the internal movable plate relative to the external movable plate, and is positioned at a right angle relative to the first torsion bar; and further includes a single turn first driving coil extending around the external movable plate; a single turn second driving coil extending around the internal movable plate, and which is connected in series with the first driving coil; magnetic field generating means for applying a magnetic field to the first and second driving coils; and an optical element having an optical axis and located on the internal movable plate.

Abstract: The invention relates to monitoring apparatus and control apparatus for fail-safe monitoring for normal operation of traffic signal lights provided at an intersection or the like where a plurality of roads intersect.

Abstract: An electromagnetic actuator includes an external movable plate formed integrally with a semiconductor substrate. A first torsion bar movably supports the movable plate with respect to the semiconductor substrate. An internal movable plate is disposed inside the external movable plate. A second torsion bar rotatably supports the internal movable plate relative to the external movable plate, and is positioned at a right angle relative to the first torsion bar; and further includes a single turn first driving coil extending around the external movable plate; a single turn second driving coil extending around the internal movable plate, and which is connected in series with the first driving coil; magnetic field generating means for applying a magnetic field to the first and second driving coils; and an optical element having an optical axis and located on the internal movable plate.