Abstract: A laser beam generated from a laser beam generating means 201 is reflected on a semiconductor mirror galvanometer 102. A region 105 to be inspected is scanned with the reflected laser beam 106. The laser beam 106 passing through the region 105 to be inspected is received by a light receiving device array 130. A pulse train included in an output signal produced from the light receiving device array 130 are monitored by a signal processing circuit 206. If an obstacle introduces into the region 105 to be inspected and induces a pulse deficiency in the pulse train, the deficiency is detected by use of a pulse deficiency detecting circuit 204. A constitution mentioned above provides an optical barrier apparatus capable of reducing manufacturing costs without endangering a fail-safe property.

Abstract: An electromagnetic actuator for driving a movable plate equipped with an optical element such as a mirror on the basis of the operation principle of a galvanometer. The structure of the movable plate is simplified, and a driving coil and a wiring are formed by aluminium vapor deposition to improve durability. When an impact brings the movable plate outside the allowable rocking range of the movable plate, a stopper prevents excessive displacement of the movable plate to thereby prevent destruction of a torsion bar that supports the movable plate. Moreover, electrical connection in the torsion bar is eliminated to prolong the service life, and a production process is simplified to reduce a production cost.

Abstract: A laser beam generated from a laser beam generating means 201 is reflected on a semiconductor mirror galvanometer 102. A region 105 to be inspected is scanned with the reflected laser beam 106. The laser beam 106 passing through the region 105 to be inspected is received by a light receiving device array 130. A pulse train included in an output signal produced from the light receiving device array 130 are monitored by a signal processing circuit 206. If an obstacle intrudes into the region 105 to be inspected and induces a pulse deficiency in the pulse train, the deficiency is detected by use of a pulse deficiency detecting circuit 204. A constitution mentioned above provides an optical barrier apparatus capable of reducing manufacturing costs without endangering a fail-safe property.

Abstract: Monitoring and control apparatus for fail-safe monitoring for normal operation of traffic signal lights provided at an intersection or the like where a plurality of roads intersect. The illumination conditions of respective signal lights are detected using as sensor device, and when the number of illuminated or non-illuminated signal lights is a predetermined number, a normal judgment output of logic value 1 corresponding to a high energy condition is generated while, when the number of illuminated or non-illuminated signal lights is not the predetermined number, an abnormal judgment output of logic value 0 corresponding to a low energy condition is generated. As a result, when a fault in the monitoring apparatus stops the output, the resultant output condition is the same as for a danger condition due to a signal light abnormality, resulting in an extremely safe signal light monitoring and control with excellent fail-safe characteristics.

Abstract: A laser beam generated from a laser beam generating means 201 is reflected on a semiconductor mirror galvanometer 102. A region 105 to be inspected is scanned with the reflected laser beam 106. The laser beam 106 passing through the region 105 to be inspected is received by a light receiving device array 130. A pulse train included in an output signal produced from the light receiving device array 130 are monitored by a signal processing circuit 206. If an obstacle intrudes into the region 105 to be inspected and induces a pulse deficiency in the pulse train, the deficiency is detected by use of a pulse deficiency detecting circuit 204. A constitution mentioned above provides an optical barrier apparatus capable of reducing manufacturing costs without endangering a fail-safe property.

Abstract: A laser beam generated from a laser beam generating means 201 is reflected on a semiconductor mirror galvanometer 102. A region 105 to be inspected is scanned with the reflected laser beam 106. The laser beam 106 passing through the region 105 to be inspected is received by a light receiving device array 130. A pulse train included in an output signal produced from the light receiving device array 130 are monitored by a signal processing circuit 206. If an obstacle intrudes into the region 105 to be inspected and induces a pulse deficiency in the pulse train, the deficiency is detected by use of a pulse deficiency detecting circuit 204. A constitution mentioned above provides an optical barrier apparatus capable of reducing manufacturing costs without endangering a fail-safe property.

Abstract: A portion of a torsion bar (6) for axially supporting a movable plate (5) of a planar electromagnetic actuator, is made conducting by diffusing boron therein in a high concentration. An external power source can thus be electrically connected to a planar coil (7) via the torsion bar (6) itself. As a result, the possibility of disconnection faults in the electrical wiring due to back and forth twisting movement of the torsion bar is eliminated, thus improving the durability and reliability of the electromagnetic actuator.

Abstract: The present invention relates to a planar type electromagnetic actuator of two axis construction, having two movable plates (12A, 12B) with pivotal supports at right angles to each other. A pair of static magnetic field generating devices (4, 5) are arranged facing each other on either side of the movable plates (12A, 12B), and aligned with one diagonal direction of the movable plates (12A, 12B) so that a magnetic field acts on the movable plates (12A, 12B). A magnetic force due to the mutual action with a current flowing through drive coils (15A, 15B), acts on the movable plates (12A, 12B), to thus drive the movable plates (12A, 12B). As a result, the number of components for the magnetic field generating devices can be reduced, the construction of the electromagnetic actuator simplified, and construction costs reduced.

Abstract: A movable plate 5 and torsion bars 6 are monolithically formed in a semiconductor substrate 2. A flat coil 7 is formed on peripheries of the movable plate 5 while a photodiode 8 is formed on a central portion of the movable plate 5. Permanent magnets 10A, 10B, 11A and 11B are provided on upper and lower spaces of the peripheries of the movable plate 5 while coils 12A and 12B for detecting a displacement angle of the movable plate 5 are provided on lower spaces of the peripheries of the movable plate 5. Flowing a current into the flat coil 7 generates a driving force depending on a relation with magnetic fields induced by the permanent magnets 10A, 10B, 11A and 11B, which makes the movable plate 5 to rotate axially around the torsion bars 6 to vary an orienting direction of an optical axis of the photodiode 8.

Abstract: A slim-type small size electromagnetic relay is made using semiconductor manufacturing techniques to form a silicon substrate 2 having a planar movable plate 5 and a torsion bar 6 for axially supporting the movable plate 5 formed integrally therewith, with a planar coil 7 provided on an upper face of the movable plate 5 and a movable contact 9 provided on a lower face. Glass substrates 3, 4 are provided on upper and lower faces of the silicon substrate 2, with fixed contact 11 contactable with the movable contact 9 provided on the lower glass substrate 4. Permanent magnets 13A, 13B and 14A, 14B for producing a magnetic field at the planar coil 7 are fixed to the glass substrates 3, 4. Rotation of the movable plate 5 against the torsion force of the torsion bar 6 is controlled by passing a current through the planar coil 7 to produce a magnetic force, thereby causing contact or separation of the movable contact 9 and the fixed contact 11.

Abstract: The present invention relates to a slim-type small size mirror galvanometer wherein the mirror displacement angle can be detected, made using semiconductor manufacturing techniques. Using semiconductor manufacturing techniques, a movable plate 5 and a torsion bar 6 for axially supporting the movable plate 5 are formed integrally on a silicon substrate 2, with a planar coil 7 and a total reflecting mirror 8 formed on an upper face of the movable plate 5, and permanent magnets 10A, 10B and 11A, 11B fixedly located so as to produce a magnetic field at the planar coil 7. The direction and quantity of current flowing in the planar coil 7 is controlled to variably control the swing angle of the movable plate 5 depending on the balance between the generated magnetic force and the torsion force in the torsion bar 6. Moreover, detection coils 12A, 12B are provided beneath the movable plate 5, and a detection current is superimposed on the drive current in the planar coil 7.

Abstract: A leakage and earthing wire disconnection detection apparatus monitors for earthing wire disconnection and leakage of an electrical or electronic device during operation of the device. Two earthing wires are independently provided for the electrical or electronic device. The ends of the earthing wires on the electrical or electronic device side are electrically connected together, while earth-side ends are connected independently to earth. A single closed loop is made up of the two earthing wires, the electrical or electronic device, and earth. A detection circuit determines that the earthing wires are normal when the closed loop is closed, and abnormal when the closed loop is open. In addition, the apparatus performs leakage detection of a motor, or the like, based on a current level flowing in the earthing wires.

Abstract: The present invention relates to an acceleration sensor which uses magnetic coupling to detect acceleration. A mass portion 3 is movably supported on a frame 2 by means of support beams 4. A first planar coil 5 is disposed on the mass portion 3, and a second planar coil 8 is provided facing the first planar coil 5 with a space therebetween. A transformer is made up with the first planar coil 5 as the primary winding and the second planar coil 8 as the secondary winding. Acceleration is obtained using magnetic coupling to detect the change in the distance between the coils, that is to say, the displacement of the mass portion.

Abstract: A slim-type small size mirror galvanometer is made using semiconductor manufacturing techniques to form a silicon substrate 2 having a planar movable plate 5 and a torsion bar 6 for axially supporting the movable plate 5 formed integrally therewith, with a planar coil 7 and a total reflecting mirror 8 provided on an upper face of the movable plate 5. Upper and lower glass substrates 3, 4 are provided on upper and lower faces of the silicon substrate 2, and permanent magnets 10A, 10B and 11A, 11B are fixed to the upper and lower substrates 3, 4 at predetermined locations so as to produce a magnetic field at the planar coil 7. The direction and quantity of current flowing in the planar coil 7 is controlled to variably control the displacement angle of the movable plate 5 depending on the balance between the generated magnetic force and the torsion force of the torsion bar 6.

Abstract: A fail-safe logic circuit employs a transformer (T) and a level tester (1). The transformer receives input signals each representing a binary logic variable and provides the sum of magnetic flux based on the input signals. The level tester tests the level of the sum of the magnetic flux and provides a binary output (y) representing a logic value of 1 or 0. This circuit is simple and capable of lowering an output level.