Patents by Inventor Norio Shiraiwa

Norio Shiraiwa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20130286531
    Abstract: An electrostatic chuck includes a base having a first through hole extending through the base. An electrostatic chuck attraction plate is bonded to the base. An attraction electrode is incorporated in the electrostatic chuck attraction plate to generates electrostatic charge and electrostatically attract an attraction subject. A recess is formed in the electrostatic chuck attraction plate in alignment with the first through hole. The recess partially exposes the attraction electrode. An adhesive layer is formed between the electrostatic chuck attraction plate and the base. The adhesive layer covers an inner surface of the recess. A tubular insulator is arranged in the recess. The tubular insulator includes a second through hole. A power supply terminal is arranged in the first through hole and the second through hole. The power supply terminal includes a distal portion electrically connected to the attraction electrode.
    Type: Application
    Filed: April 16, 2013
    Publication date: October 31, 2013
    Applicant: Shinko Electric Industries Co., LTD.
    Inventors: Norio Shiraiwa, Jiro Kawai
  • Publication number: 20130048217
    Abstract: An electrostatic chuck includes, a chuck function portion including a plurality of chuck regions on which an attractable object is placed respectively, and a concave surface portion provided in an outer region of the chuck regions, and electrodes arranged in an inner part of the chuck function portion corresponding to the chuck regions and an inner part of the chuck function portion corresponding to the concave surface portion, respectively.
    Type: Application
    Filed: July 12, 2012
    Publication date: February 28, 2013
    Applicant: SHINKO ELECTRIC INDUSTRIES CO., LTD.
    Inventor: Norio SHIRAIWA
  • Publication number: 20120287552
    Abstract: A disclosed substrate temperature adjusting-fixing device includes an electro static chuck attracting and holding an attractable object onto a base body having a built-in electrode by applying a voltage to the electrode, a base plate fixing the electro static chuck via an adhesive layer, a power supplying portion electrically connected to the electrode, and a retaining portion holding the power supplying portion, wherein the retaining portion includes a main body and a sealing portion, the main body is fixed to the base plate and has recesses opened on an opposite side of the adhesive layer and a through hole penetrating through the main body, the power supplying portion includes an electrode pin and an electric wire, the electric wire is wired inside the adhesive layer, the through hole and the recesses to electrically connect the electrode with the electrode pin, and the sealing portion fills the recesses.
    Type: Application
    Filed: April 23, 2012
    Publication date: November 15, 2012
    Applicant: Shinko Electric Industries Co., Ltd.
    Inventors: Norio SHIRAIWA, Yuichi Hata
  • Patent number: 8023246
    Abstract: In a method of manufacturing an electrostatic chuck, the method includes: a step of providing an electrostatic chucking portion including an electrode to which a voltage is applied and a film-like insulating layer covering the electrode; a step of bonding an elastomer layer onto the electrostatic chucking portion; a step of bonding a metal base onto the elastomer layer such that recess portions formed on a surface of the metal base face the elastomer layer.
    Type: Grant
    Filed: May 7, 2008
    Date of Patent: September 20, 2011
    Assignee: Shinko Electric Industries Co., Ltd.
    Inventors: Norio Shiraiwa, Takeshi Kobayashi, Yuichi Hata, Naoto Watanabe
  • Patent number: 7483256
    Abstract: An electrostatic chuck includes a base plate, an electrode layer having flexibility, covering the surface of the base plate, and a power supply unit for electrically connecting the electrode layer to the power source side. The power supply unit includes a connection piece including a wire, and electrically conductive components to be used in connection to the power source side. The wire is connected to an electrode of the electrode layer, and extends from the side edge of the electrode layer. The electrically conductive component is electrically connected with the wire, and fixes the connection piece bent along the side surface of the base plate to the base plate.
    Type: Grant
    Filed: September 19, 2007
    Date of Patent: January 27, 2009
    Assignee: Shinko Electric Industries Co., Ltd.
    Inventors: Norio Shiraiwa, Yuichi Hata, Naoto Watanabe
  • Publication number: 20080278883
    Abstract: In a method of manufacturing an electrostatic chuck, the method includes: a step of providing an electrostatic chucking portion including an electrode to which a voltage is applied and a film-like insulating layer covering the electrode; a step of bonding an elastomer layer onto the electrostatic chucking portion; a step of bonding a metal base onto the elastomer layer such that recess portions formed on a surface of the metal base face the elastomer layer.
    Type: Application
    Filed: May 7, 2008
    Publication date: November 13, 2008
    Applicant: SHINKO ELECTRIC INDUSTRIES CO., LTD.
    Inventors: Norio Shiraiwa, Takeshi Kobayashi, Yuichi Hata, Naoto Watanabe
  • Publication number: 20080266747
    Abstract: In an electrostatic chuck for chucking a glass substrate, the electrostatic chuck includes a pair of electrodes embedded in a ceramic material and interlaced with each other, where a volume resistivity of the ceramic material is 1×108 ?cm to 1×1014 ?cm, a thickness of the ceramic material on a chucking surface side to cover the pair of electrodes is 100 ?m to 200 ?m, a pattern width of the pair of electrodes is 0.5 mm to 1 mm, and a minimum distance between the pair of electrodes is 0.5 mm to 1 mm.
    Type: Application
    Filed: April 25, 2008
    Publication date: October 30, 2008
    Applicant: SHINKO ELECTRIC INDUSTRIES CO., LTD.
    Inventors: Norio Shiraiwa, Takeshi Kobayashi, Yuichi Hata, Naoto Watanabe
  • Publication number: 20080080118
    Abstract: An electrostatic chuck includes a base plate, an electrode layer having flexibility, covering the surface of the base plate, and a power supply unit for electrically connecting the electrode layer to the power source side. The power supply unit includes a connection piece including a wire, and electrically conductive components to be used in connection to the power source side. The wire is connected to an electrode of the electrode layer, and extends from the side edge of the electrode layer. The electrically conductive component is electrically connected with the wire, and fixes the connection piece bent along the side surface of the base plate to the base plate.
    Type: Application
    Filed: September 19, 2007
    Publication date: April 3, 2008
    Applicant: SHINKO ELECTRIC INDUSTRIES CO., LTD.
    Inventors: Norio Shiraiwa, Yuichi Hata, Naoto Watanabe