Abstract: An imprint apparatus includes: a movable housing unit; an ejection head provided in the housing unit and configured to eject an ejection material; a flexible member provided in the housing unit and separating the housing unit into a first storing space communicating with the ejection head and storing the ejection material and a second storing space storing hydraulic liquid; a first channel and a second channel communicating with the second storing space; a pressure control unit configured to control a pressure in the second storing space through the channels; and a bubble detection unit configured to detect bubbles in the channels.

Abstract: A storage device stores an ejection cartridge including an accommodating container that accommodates an ejection material, and an ejection head that includes an ejection port for ejecting the ejection material accommodated in the accommodating container. The storage device includes a mount on which the ejection cartridge is mounted, and includes a pressure regulating tank configured to control a pressure of an inside of the accommodating container of the ejection cartridge fixed to the mount with its ejection port not enclosed.

Abstract: A metallic shell for a spark plug which metallic shell achieves suppressed elution of hexavalent chromium, and a spark plug including the metallic shell. The spark plug has a metallic shell. The metallic shell includes a tubular metallic shell body; a metal plating layer provided on a surface of the metallic shell body; and a chromium-containing chemical conversion coating layer provided to cover the metal plating layer. The chemical conversion coating layer has a zirconium component content of 0.1 mass % or more.

Abstract: A liquid discharge apparatus has a storage portion configured to store a discharged material, a discharge port configured to communicate with the storage portion and discharge the discharged material stored in the storage portion, and a pressure control device configured to control a pressure of the discharged material stored in the storage portion. The pressure control device controls the pressure of the discharged material to shift from a first negative pressure state, to a second negative pressure state of a greater negative pressure than the first negative pressure state, and then to a third positive pressure state.

Abstract: A metallic shell for a spark plug which metallic shell achieves suppressed elution of hexavalent chromium, and a spark plug including the metallic shell. The spark plug has a metallic shell. The metallic shell includes a tubular metallic shell body; a metal plating layer provided on a surface of the metallic shell body; and a chromium-containing chemical conversion coating layer provided to cover the metal plating layer. The chemical conversion coating layer has a zirconium component content of 0.1 mass % or more.

Abstract: A liquid discharge apparatus includes a discharge head including a discharge surface formed with a plurality of discharge openings from which a liquid is discharged, a cap configured to be detachably attached to the discharge head and form a holding space for a cleaning liquid such that the cleaning liquid contacts the discharge surface, a supply portion configured to connect to the cap and to supply the cleaning liquid to the holding space, and an outlet portion configured to connect to the cap and to drain the cleaning liquid from the holding space. The supply portion is formed at a position facing the discharge surface. The outlet portion is formed at a position outside the supply portion in an inside-outside direction of the discharge surface.

Abstract: An ejection material ejecting device includes: an ejection unit including an ejection opening configured to eject an ejection material; an electric substrate configured to control ejection of the ejection material; a first flexible cable connected to the ejection unit; a second flexible cable connected to the electric substrate; and a joint at which the first flexible cable and the second flexible cable are joined by an anisotropic conductive film, wherein the joint is covered with a sealant resistant to the ejection material.

Abstract: An ejection-material ejection apparatus and an imprinting apparatus are provided which are capable of quickly detecting damage of a flexible membrane and avoiding contact between an ejection material and an operating liquid even if part of the flexible membrane is damaged. The flexible membrane includes a first film (1) covering a first storing space (5) for the ejection material, a second film (2) covering a second storing space (6) for the operating liquid, and an inter-film space 4 situated between the first film (1) and the second film (2). A change in state of the inter-film space (4) resulting from communication between at least one of the first storing space (5) and the second storing space (6) and the inter-film space (4) is detected with a liquid sensor (41), a flow speed sensor (77), and a liquid leakage sensor (42).

Abstract: An ejection material filling device fills an ejection material into a first storage space of an ejection material ejecting device including an ejection head configured to eject the ejection material and a storage container having an internal space separated by flexible membrane into the first storage space storing the ejection material and a second storage space storing a hydraulic fluid. The ejection material filling device includes an ejection material server bottle storing the ejection material to be filled into the first storage space, pipes configured to form a circulation path including the ejection material server bottle and the first storage space, a pump configured to circulate the ejection material through the circulation path, and a particle filter provided in the circulation path.

Abstract: An ejection device includes: an ejection unit provided with an ejection port configured to eject an ejection material; a piezoelectric element configured to cause the ejection material to be ejected from the ejection unit; a first liquid chamber connected to the ejection unit and configured to supply the ejection unit with the ejection material; a pressure control unit configured to control a pressure in the ejection unit by controlling a pressure in the first liquid chamber; and a detection unit configured to detect a wetness of an ejection port side surface.

Abstract: An imprint apparatus includes: a substrate stage configured to move a substrate; an ejection unit including a plurality of nozzles and configured to eject an ejection material from the nozzles onto the substrate in synchronization with movement of the substrate stage; and a mold driving mechanism configured to drive a mold on which a pattern is formed to press down the mold onto the substrate. The imprint apparatus determines a relative ejection timing of an abnormal nozzle with respect to a normal nozzle based on ejection properties of the nozzles and a moving direction of the substrate stage, determines an ejection timing of the normal nozzle based on the determined relative ejection timing, and controls a synchronization timing of the substrate stage and the ejection unit based on the determined ejection timing of the normal nozzle.

Abstract: An ejection device is used for an imprint apparatus that presses a mold against an ejection material ejected onto a substrate to form a pattern. The ejection device includes: a housing unit having an ejection head configured to eject the ejection material onto the substrate, and housing configured to accommodate the ejection material; and a control unit configured to control processing of the ejection device. The control unit switches the processing according to a usage status of a consumable part included in the housing unit.

Abstract: An imprint apparatus that forms a pattern of a resin on a substrate that includes a plurality of substrate-side pattern regions by using a mold. The imprint apparatus includes a first mechanism applying a force to the mold to thereby deform a mold-side pattern region of the mold, a second mechanism heating the substrate-side pattern region to generate an uneven temperature distribution within the substrate-side pattern region for deforming the substrate-side pattern region, and obtaining shape difference information between the mold-side pattern region and the substrate-side pattern region, to control a shape of the mold-side pattern region by using the first mechanism based on the obtained shape difference information and controlling such that an uneven temperature distribution is formed in the substrate-side pattern region by using the second mechanism based on the obtained shape difference information.

Abstract: There is provided a liquid discharge apparatus. A discharge head is provided with a discharge port that discharges a liquid. A retention portion is facing the discharge head, and retains the liquid between the discharge head and the retention portion. A detection unit detects that the discharge port is covered with the liquid after the liquid is supplied between the discharge head and the retention portion.

Abstract: There is provided a liquid discharge device comprising: a container configured to contain a liquid; a discharge port which is formed by bonding a plurality of substrates and from which the liquid supplied from the container is discharged; a piezoelectric element provided in correspondence with the discharge port, and configured to generate energy for discharging the liquid from the discharge port; and a detection unit configured to detect peeling of a bonding surface between the plurality of substrates forming the discharge port.

Abstract: Provided is an ejection apparatus including: an ejection head having an ejection opening for ejecting an ejection material in a liquid state; a storage container storing therein the ejection material and communicating with the ejection head; and a pressure control unit that maintains the pressure inside the storage container at a negative pressure. The pressure control unit generates a first pressure in the storage container in a normal operation, the first pressure being capable of forming a meniscus of the ejection material in the ejection opening. The pressure control unit drops the pressure inside the storage container to at least the first pressure in a case where the pressure inside the storage container reaches a predetermined pressure above the first pressure.

Abstract: An imprint method for forming a pattern of an imprint material on a substrate-side pattern region of a substrate by using a mold. The method includes deforming a partial region of the substrate, the partial region corresponding to the substrate-side pattern region, by irradiating the substrate with light that has passed through the mold and has a first wavelength different from light having a second wavelength that is used for curing the imprint material, and curing the imprint material by irradiating the light having the second wavelength in a state in which the substrate-side pattern region is deformed and the mold is contacted with the imprint material. The step of deforming includes forming an uneven temperature distribution on the substrate-side pattern region by irradiation of the light having the first wavelength with an uneven illumination distribution.

Abstract: An imprint apparatus comprises a mold holder configured to move while holding the mold, and a substrate holder including a plurality of suction regions for chucking the substrate and configured to move while holding the substrate. When performing the mold separation, among the plurality of suction regions, a suction force of a suction region at a position where the mold is to be separated from the imprint material is made weaker than a suction force of a suction region on a peripheral side of the substrate than the position where the mold is to be separated, and the mold holder is tilted after at least one of the mold holder and the substrate holder is moved by a predetermined amount so as to widen a gap between the mold and the substrate.

Abstract: An ejection-material ejection apparatus and an imprinting apparatus are provided which are capable of quickly detecting damage of a flexible membrane and avoiding contact between an ejection material and an operating liquid even if part of the flexible membrane is damaged. The flexible membrane includes a first film (1) covering a first storing space (5) for the ejection material, a second film (2) covering a second storing space (6) for the operating liquid, and an inter-film space 4 situated between the first film (1) and the second film (2). A change in state of the inter-film space (4) resulting from communication between at least one of the first storing space (5) and the second storing space (6) and the inter-film space (4) is detected with a liquid sensor (41), a flow speed sensor (77), and a liquid leakage sensor (42).

Abstract: Provided is an ejection device and an imprint apparatus which can suppress ejection failures and breakage of a mold. To achieve this, a circulation mechanism including a degassing unit is provided in an ejection head.