Abstract: A decrease in output power due to a foreign matter present on a base at the time of forming a thin film solid electrolyte layer is limited, and an increase in yield even when an area of a fuel battery cell is increased, is obtained. The fuel battery cell has a membrane electrode assembly including a lower electrode layer, first and second solid electrolyte layers, and an upper electrode layer formed on a support substrate. An interface between the first and second solid electrolyte layers is flat as compared with an interface between the lower electrode layer and the solid electrolyte layer, and the second solid electrolyte layer has a thickness at which a leakage current between the first solid electrolyte layer and the second solid electrolyte layer is less than an allowable value even when an output voltage of the fuel battery cell is generated.

Abstract: The present invention aims to provide a fuel battery system improved in reliability by accurately detecting when a fuel electrode gas or an air electrode gas has leaked. A fuel battery cell according to the present invention includes a first electrode, an electrolyte membrane, and a second electrode which are layered on a support substrate. Further, at least any one of the first electrode, the electrolyte membrane, and the second electrode is electrically isolated by an insulating member to form a first region and a second region. The insulating member is disposed at a position where the insulating member does not overlap with an opening portion of the support substrate (refer to FIG. 3).

Abstract: A preferred aspect of the present invention is a fuel cell stack provided with a plurality of fuel cells each including a solid electrolyte layer and first and second electrode layers formed across the solid electrolyte layer. The fuel cells are stacked with the first or second electrode layers of adjacent cells facing each other. A common flow path for supplying a first gas to both of the first electrode layers facing each other is formed in an area where the first electrode layers face each other. A common flow path for supplying a second gas to both of the second electrode layers facing each other is formed in an area where the second electrode layers face each other. A connection electrode is formed at the end of the fuel cell. At least some of the stacked cells are connected in series via the connection electrode.

Abstract: An object of the present invention is to provide a fuel cell that obtains high output density and prevents stress application to the cell during stack assembling and breakage. The fuel cell is equipped with a unit cell including a structure in which an electrolyte layer is sandwiched between an anode electrode layer and a cathode electrode layer. The unit cell is disposed between a first member and a second member. An intermediate substrate is disposed between the first member and the second member. The unit cell is supported at the outer peripheral portion thereof by the intermediate substrate. The width of the electrolyte layer is the maximum width or less of a hollow portion formed between at least one of the first member and the second member and the unit cell.

Abstract: A fuel cell 1 includes a silicon substrate 2, a porous support material layer 5, a plurality of holes 60 or columns 40, and a stacked body. The stacked body includes an upper electrode layer 10, a solid electrolyte layer 100 and a lower electrode layer 20. The upper electrode layer 10 is also formed on a surface parallel to a main surface of the silicon substrate 2 in a manner of being continuous to the upper electrode layer 10 formed in the plurality of holes 60 or columns 40, or the lower electrode layer 20 is also formed on a surface parallel to the main surface of the silicon substrate 2 in a manner of being continuous to the lower electrode layer 20 formed in the plurality of holes 60 or columns 40. The stacked body is supported by the porous support material layer 5 in at least upper end portions and lower end portions of the plurality of holes 60 or columns 40.

Abstract: An object of the present invention is to provide a fuel cell that maintains electric generation efficiency of the fuel cell and that has high reliability in which an electrolyte film is not easily damaged. The fuel cell according to the present invention includes a stress adjusting layer covering an opening above a support substrate, and the stress adjusting layer has tensile stress with respect to the support substrate and has a columnar crystal structure in which a grain boundary extends along a direction parallel to a film thickness direction (see FIG. 2).

Abstract: An object of the present invention is to provide a fuel battery cell of a high power generation output by increasing an area of an effective power generation region contributing to power generation while ensuring mechanical strength of the fuel battery cell. The fuel battery cell according to the present invention is provided with a first and a second insulating films between a support substrate and a first electrode. The support substrate has a first opening, the first insulating film has a second opening, and the second insulating film has a third opening. An opening area of the first opening is larger than that of the second opening, and an opening area of the third opening is larger than that of the second opening (see FIG. 2).

Abstract: An object of the invention is to increase the output power of a solid oxide fuel cell by making a lower electrode layer porous so as to form a three-phase interface and reducing a thickness of a solid electrolyte layer to 1 micrometer or less. A fuel cell according to the invention includes a first electrode layer at a position where an opening formed in a board is covered, and a solid electrolyte layer having a thickness of 1000 nm or less. At least a part of a region of the first electrode layer covering the opening is porous (see FIG. 5).

Abstract: The present invention aims to reduce a failure in a fuel cell module and reduce manufacturing costs by specifying and taking countermeasures against cells in short-circuit failure from among fuel cells manufactured on a substrate by using a thin-film deposition process. In a fuel cell array according to the present invention, each fuel cell includes a solid electrolyte layer between a first electrode layer and a second electrode layer. A first wiring is connected to the second electrode layer, and a second wiring is connected to the first electrode layer through a connection element. The connection element is formed by sandwiching a conductive layer between two electrodes (refer to FIG. 8).

Abstract: Provided is a highly reliable fuel cell that improves power generation efficiency of the fuel cell and that is less likely to cause damage to an electrode and an electrolyte film. The fuel cell includes a support substrate (2, 3) having a region in which a support portion having a mesh-like shape in a plan view is provided, a first electrode 4 on the support substrate, an electrolyte film 5 on the first electrode, and a second electrode 6 on the electrolyte film. The first electrode includes a first thin film electrode 4A formed in a manner of covering at least the region, and a first mesh-like electrode 4B connected to the first thin film electrode and provided corresponding to the support portion. The first mesh-like electrode 4B has a film thickness larger than that of the first thin film electrode and has a mesh-like shape in a plan view.

Abstract: The present invention aims to provide a fuel battery system improved in reliability by accurately detecting when a fuel electrode gas or an air electrode gas has leaked. A fuel battery cell according to the present invention includes a first electrode, an electrolyte membrane, and a second electrode which are layered on a support substrate. Further, at least any one of the first electrode, the electrolyte membrane, and the second electrode is electrically isolated by an insulating member to form a first region and a second region. The insulating member is disposed at a position where the insulating member does not overlap with an opening portion of the support substrate (refer to FIG. 3).

Abstract: Provided is a solid oxide fuel cell having high power generation efficiency and being operable at low temperature. A fuel cell of the present invention includes a cathode electrode, an anode electrode, and a solid electrolyte layer disposed between the cathode electrode and the anode electrode and formed from polycrystalline zirconia or polycrystalline ceria doped with divalent or trivalent positive ions and having proton conductivity, in which the cathode electrode and the solid electrolyte layer are stacked with a first oxygen ion blocking layer interposed therebetween.

Abstract: Provided is a highly reliable fuel cell that improves power generation efficiency of the fuel cell and that is less likely to cause damage to an electrode and an electrolyte film. The fuel cell includes a support substrate (2, 3) having a region in which a support portion having a mesh-like shape in a plan view is provided, a first electrode 4 on the support substrate, an electrolyte film 5 on the first electrode, and a second electrode 6 on the electrolyte film. The first electrode includes a first thin film electrode 4A formed in a manner of covering at least the region, and a first mesh-like electrode 4B connected to the first thin film electrode and provided corresponding to the support portion. The first mesh-like electrode 4B has a film thickness larger than that of the first thin film electrode and has a mesh-like shape in a plan view.

Abstract: Provided are acceleration sensor, geophone and seismic prospecting system with high sensitivity and low power consumption. The acceleration sensor includes a mass body displaceable with respect to a rotation shaft. The acceleration sensor includes a first AC servo control facing a first symmetrical region of the first movable portion, a second AC servo control electrode facing a second symmetrical region of the second movable portion, and a DC servo control electrode facing an asymmetrical region of the second movable portion. A first AC servo capacitive element is formed by the first movable portion and the first AC servo control electrode, a second AC servo capacitive element is formed by the second movable portion and the second AC servo control electrode, and a DC servo capacitive element is formed by the second movable portion and the DC servo control electrode.

Abstract: Provided is an acceleration sensor having a large mass in a movable portion, and realizing high impact resistance. An acceleration sensor element 10a includes an upper substrate 20, a lower substrate 21 spaced apart from the upper substrate 20, and an intermediate substrate 19 provided between the upper substrate 20 and the lower substrate 21. Each of a first movable portion 16, a second movable portion 17, a frame portion 12, a fixed portion 13, and a spring portion 14 constituting the intermediate substrate 19 is configured with two layers of an upper layer and a lower layer, and a stopper portion 18 is provided at one end of the frame portion 12. A distance 31 between an end portion of the first movable portion 16 or the second movable portion 17 and an end portion of the stopper portion 18 in the upper layer and a distance 32 between an end portion of the first movable portion 16 or the second movable portion 17 and an end portion of the stopper portion 18 in the lower layer are different from each other.

Abstract: An acceleration sensor has high sensitivity, low power consumption and high linearity of output to the applied acceleration under gravity. To solve the above problem, the acceleration sensor is provided with a movable section placed between a base substrate and a cap substrate and rotating about a rotation axis. A top left electrode included in the cap substrate and a left movable electrode included in the movable section form a left capacitor, and a top right electrode included in the cap substrate and a right movable electrode included in the movable section form a right capacitor. Then, a lateral width of a first detection region in which capacitance is detected between the top left electrode and the left movable electrode, and a lateral width of a second detection region in which capacitance is detected between the top right electrode and the right movable electrode are different from each other.

Abstract: In an acceleration sensor detecting a vibration acceleration by using torsion of a beam joining a fixed portion and a membrane, a spring constant of the beam is decreased while an increase in a chip size due to extension of the beam is prevented, so that an acceleration sensor that is highly sensitive and small in a size is provided with a low price. A sensor of a capacitance detecting type includes a membrane having a stacking structure formed of two or more layers and a plurality of beams capable of twisting so that the membrane is movable in a detecting direction, a first beam of the plurality of beams is formed of the same layer as either an upper or a lower layer of the membrane, and a second beam thereof is formed of the same layer as either an upper or a lower layer of the movable portion.

Abstract: There is provided an acceleration sensor with low noise and high sensitivity. Specifically, a first number of opening portions are formed in a region corresponding to a heavyweight section of a mass body, on a surface of a membrane layer, and a second number of opening portions are formed in a region corresponding to the heavyweight section of the mass body, on a back surface of the membrane layer. The opening portion and the opening portion are connected to each other to form a plurality of through portions on the membrane layer, and the first number is larger than the second number.

Abstract: An acceleration sensor with an improved membrane (mass body) is provided. The membrane includes a moving portion, a moving portion electrically separated from the moving portion, and a mechanical junction portion that mechanically connects the moving portion and the moving portion in a y-axis direction. The mechanical junction portion includes a first portion extending in a direction having a first angle with respect to the y-axis direction and a second portion extending in a direction having a second angle different from the first angle with respect to the y-axis direction in an xy plane, and is formed to have a non-linear shape in an x-axis direction. The acceleration sensor with improved the membrane stably operates by reducing a variation in a capacity value of a detection electrode and has an excellent noise characteristic.

Abstract: There is provided an inertia sensor with low noise and high sensitivity. The inertia sensor captures a physical quantity as a change of electrostatic capacitance and detects the physical quantity based on a servo voltage generating electrostatic force that cancels the change of the electrostatic capacitance. The inertia sensor includes a detection capacitor unit that captures the physical quantity as the change of the electrostatic capacitance and a servo capacitor unit to which the servo voltage is applied. Here, the detection capacitor unit and the servo capacitor unit are connected mechanically through an insulation material.