Abstract: An insulator layer is formed on a part of semiconductor substrate to form an isolation layer that insulates and separates active elements from each other in the first region, and to form a dummy portion which is composed of a base material of the semiconductor substrate exposed in the insulator layer in a second region. Active elements are formed in the first region. A silicide layer is formed on the first and second regions excluding at least a portion in which the TSV electrode should be formed. At least one TSV hole extending from a reverse surface side of the semiconductor substrate to an electrode pad via the second region is formed. A conductive film is formed on the inner wall of the TSV hole to form a TSV electrode electrically connected to the electrode pad.

Abstract: There is provided a semiconductor device comprising a semiconductor substrate having an active area in which a plurality of active elements are formed, and a non-active area excepting the active area; at least one electrode pad electrically connected to any of the active elements. At least one Through Silicon VIA electrode is formed, being electrically connected to the electrode pad by way of the non-active area. The non-active area has an insulating region obtained by forming an insulating film on the semiconductor substrate, and a dummy section obtained by leaving a base material of the semiconductor substrate in the insulating region. The dummy section is provided in a position where an outer edge of the Through Silicon VIA electrode does not intersect with the boundary between the insulating region and the dummy section.

Abstract: A dummy oxide film having a film thickness that is the same as that of a gate oxide film of a high voltage transistor is formed on a gate electrode of a transistor, and the dummy oxide film and the gate oxide film formed on a substrate surface are removed at the same time during etching for spacer formation. Thus, it becomes possible to stably form a spacer width that sufficiently satisfies device characteristics when manufacturing a semiconductor device where a low voltage transistor and a high voltage transistor are formed on the same semiconductor substrate.

Abstract: There is provided a high-voltage-withstanding semiconductor device a fabrication method thereof capable of suppressing Vt fluctuation induced by plasma damage in a via hole forming step. In the high-voltage-withstanding semiconductor device, a gate electrode of a transistor having a gate insulating film formed on a semiconductor substrate and having a thickness of 350 ? or more and a diode composed of a first conductive well region formed in a surface layer region of the semiconductor substrate and a second conductive diffusion layer formed in the surface layer region of the semiconductor substrate and on the well region are electrically connected by a wire directly connected to contacts formed respectively on the gate electrode and the diode, via the contacts.

Abstract: A dummy oxide film having a film thickness that is the same as that of a gate oxide film of a high voltage transistor is formed on a gate electrode of a transistor, and the dummy oxide film and the gate oxide film formed on a substrate surface are removed at the same time during etching for spacer formation. Thus, it becomes possible to stably form a spacer width that sufficiently satisfies device characteristics when manufacturing a semiconductor device where a low voltage transistor and a high voltage transistor are formed on the same semiconductor substrate.

Abstract: A laminated film of a pad oxide film (12) and a silicon nitride film (13) is deposited on a silicon substrate (11). Further, a polysilicon film (14) is formed on the laminated film. The silicon film (14), the silicon nitride film (13) and the pad oxide film (12) are sequentially etched through the use of a resist mask (15). Then the silicon substrate (11) is etched with the polysilicon film (14) as a mask to form a trench (16).

Abstract: A focus ring is disposed along a circumference of a semiconductor substrate on a lower electrode. A sensor measures a position of an upper surface of the focus ring, and a drive mechanism 6 drives the focus ring vertically. A controller adjusts the position of the upper surface of the focus ring to a desired position by driving the drive mechanism on the basis of a result of measurement by the sensor.

Abstract: A semiconductor device includes a semiconductor substrate, a gate electrode formed over the semiconductor substrate and a first interlevel insulating layer which is formed over the semiconductor substrate and has first and second contact holes defined by the first interlevel insulating layer. The semiconductor device also includes a first wiring pattern formed in the first contact hole and on the first interlevel insulating layer, a protection layer covering the first wiring pattern and a second interlevel insulating layer which is formed over the first interlevel insulating layer and has a third contact hole defined by the second interlevel insulating layer. The semiconductor device further includes the third contact hole being located on the second contact hole and a second wiring pattern formed in the second and third contact holes and on the second interlevel insulating layer.

Abstract: A focus ring is disposed along a circumference of a semiconductor substrate on a lower electrode. A sensor measures a position of an upper surface of the focus ring, and a drive mechanism 6 drives the focus ring vertically. A controller adjusts the position of the upper surface of the focus ring to a desired position by driving the drive mechanism on the basis of a result of measurement by the sensor.

Abstract: In an optical fiber system comprising first and second polarization-maintaining fibers, a first orthogonal coordinate system of the first polarization-maintaining fiber is azimuthally rotated relative to a second orthogonal coordinate system of the second polarization-maintaining fiber by the use of an optical coupler by a preselected angle between 0.degree. and 90.degree., both exclusive. Preferably, the optical coupler is shorter than a beat length of each fiber and the preselected angle is equal to 45.degree.. The optical fiber system is applicable to an optical sensor for sensing a variable physical parameter. In the sensor, a light beam is incident onto one end of the first polarization-maintaining fiber so that a plane of polarization of the light beam is matched to one of those planes of the first polarization-maintaining fiber which are determined by the first orthogonal coordinate system.