Patents by Inventor Paolo Tessariol

Paolo Tessariol has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11514953
    Abstract: Some embodiments include an integrated assembly having a pair of adjacent memory-block-regions, and having a separator structure between the adjacent memory-block-regions. The memory-block-regions include a first stack of alternating conductive levels and first insulative levels. The separator structure includes a second stack of alternating second and third insulative levels. The second insulative levels are substantially horizontally aligned with the conductive levels, and the third insulative levels are substantially horizontally aligned with the first insulative levels. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: April 29, 2021
    Date of Patent: November 29, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Yoshiaki Fukuzumi, Paolo Tessariol, David H. Wells, Lars P. Heineck, Richard J. Hill, Lifang Xu, Indra V. Chary, Emilio Camerlenghi
  • Patent number: 11489038
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes conductive materials located in different levels of the apparatus, dielectric materials located in different levels of the apparatus, a first conductive contact, and a second conductive contact. One of the conductive materials is between two of the dielectric materials. One of the dielectric materials is between two of the conductive materials. The first conductive contact has a length extending through the conductive materials and the dielectric materials in a direction perpendicular to the levels of the apparatus. The first conductive contact is electrically separated from the conductive materials. The second conductive contact contacts a group of conductive materials of the conductive materials.
    Type: Grant
    Filed: August 29, 2017
    Date of Patent: November 1, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Paolo Tessariol, Qiang Tang
  • Patent number: 11430734
    Abstract: Conductive structures include stair step structures positioned along a length of the conductive structure and at least one landing comprising at least one via extending through the conductive structure. The at least one landing is positioned between a first stair step structure of the stair step structures and a second stair step structure of the stair step structures. Devices may include such conductive structures. Systems may include a semiconductor device and stair step structures separated by at least one landing having at least one via formed in the at least one landing. Methods of forming conductive structures include forming at least one via through a landing positioned between stair step structures.
    Type: Grant
    Filed: December 28, 2020
    Date of Patent: August 30, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Paolo Tessariol, Graham R. Wolstenholme, Aaron Yip
  • Patent number: 11424267
    Abstract: In an example of forming a stacked memory array, a stack of alternating first and second dielectrics is formed. A dielectric extension is formed through the stack such that a first portion of the dielectric extension is in a first region of the stack between a first group of semiconductor structures and a second group of semiconductor structures in a second region of the stack and a second portion of the dielectric extension extends into a third region of the stack that does not include the first and second semiconductor structures. An opening is formed through the first region, while the dielectric extension couples the alternating first and second dielectrics in the third region to the alternating first and second dielectrics in the second region.
    Type: Grant
    Filed: December 14, 2020
    Date of Patent: August 23, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Paolo Tessariol, Yoshiaki Fukuzumi
  • Patent number: 11417676
    Abstract: A method of forming a microelectronic device comprises forming a memory array region comprising memory cells vertically over a base structure comprising a semiconductive material and alignment mark structures vertically extending into the semiconductive material. First contact structures are formed to extend through the memory array region and into the alignment mark structures. A support structure is formed over the memory array region. A portion of the base structure is removed to expose the alignment mark structures. A control logic region is formed vertically adjacent a remaining portion of the base structure. The control logic region comprises control logic devices in electrical communication with the first contact structures by way of second contact structures extending partially through the alignment mark structures and contacting the first contact structures. Microelectronic devices, memory devices, electronic systems, and additional methods are also described.
    Type: Grant
    Filed: August 24, 2020
    Date of Patent: August 16, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Umberto Maria Meotto, Emilio Camerlenghi, Paolo Tessariol, Luca Laurin
  • Publication number: 20220230960
    Abstract: Microelectronic devices include stadium structures within a stack structure and substantially symmetrically distributed between a first pillar structure and a second pillar structure, each of which vertically extends through the stack structure. The stack structure includes a vertically alternating sequence of insulative materials and conductive materials arranged in tiers. Each of the stadium structures includes staircase structures having steps including lateral ends of some of the tiers. The substantially symmetrical distribution of the stadium structures, and fill material adjacent such structures, may substantially balance material stresses to avoid or minimize bending of the adjacent pillars. Related methods and systems are also disclosed.
    Type: Application
    Filed: April 7, 2022
    Publication date: July 21, 2022
    Inventors: Lifang Xu, Jian Li, Graham R. Wolstenholme, Paolo Tessariol, George Matamis, Nancy M. Lomeli
  • Publication number: 20220223613
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes levels of conductive materials interleaved with levels of dielectric materials; memory cell strings including respective pillars extending through the levels of conductive materials and the levels of dielectric materials; a first dielectric structure formed in a first slit through the levels of conductive materials and the levels of dielectric materials; a second dielectric structure formed in a second slit through the levels of conductive materials and the levels of dielectric materials; the first dielectric structure and the second dielectric structure separating the levels of conductive materials, the levels of dielectric materials, and the pillars into separate portions, and the first and second dielectric structures including different widths.
    Type: Application
    Filed: January 11, 2021
    Publication date: July 14, 2022
    Inventors: Paolo Tessariol, David H. Wells, Umberto Maria Meotto
  • Publication number: 20220199641
    Abstract: A microelectronic device comprises a stack structure comprising a stack structure comprising a vertically alternating sequence of conductive structures and insulative structures arranged in tiers, the stack structure divided into block structures separated from one another by slot structures, strings of memory cells vertically extending through the block structures of the stack structure, the strings of memory cells individually comprising a channel material vertically extending through the stack structure, an additional stack structure vertically overlying the stack structure and comprising a vertical sequence of additional conductive structures and additional insulative structures arranged in additional tiers, first pillars extending through the additional stack structure and vertically overlying the strings of memory cells, each of the first pillars horizontally offset from a center of a corresponding string of memory cells, second pillars extending through the additional stack structure and vertically ove
    Type: Application
    Filed: December 18, 2020
    Publication date: June 23, 2022
    Inventors: Yoshiaki Fukuzumi, Jun Fujiki, Matthew J. King, Sidhartha Gupta, Paolo Tessariol, Kunal Shrotri, Kye Hyun Baek, Kyle A. Ritter, Shuji Tanaka, Umberto Maria Meotto, Richard J. Hill, Matthew Holland
  • Publication number: 20220157844
    Abstract: A method used in forming a memory array comprising strings of memory cells comprises forming a construction comprising a stack that have vertically-alternating insulative tiers and wordline tiers. An array of openings is formed in an uppermost portion of upper material that is above the stack, and the openings comprise channel openings and dummy openings. At least the uppermost portion of the upper material is used as a mask while etching the channel openings and the dummy openings into a lower portion of the upper material. The channel openings are etched into the insulative and wordline tiers. The channel openings are etched deeper into the construction than the dummy openings, and channel material is formed in the channel openings after the etching. Structures independent of method are disclosed.
    Type: Application
    Filed: February 1, 2022
    Publication date: May 19, 2022
    Applicant: Micron Technology, Inc.
    Inventors: M. Jared Barclay, Merri L. Carlson, Saurabh Keshav, George Matamis, Young Joon Moon, Kunal R. Parekh, Paolo Tessariol, Vinayak Shamanna
  • Publication number: 20220149015
    Abstract: A microelectronic device comprises a memory array region, a control logic region, and an additional control logic region. The memory array region comprises a stack structure comprising vertically alternating conductive structures and insulating structures, and vertically extending strings of memory cells within the stack structure. The control logic region underlies the stack structure and comprises control logic devices configured to effectuate a portion of control operations for the vertically extending strings of memory cells. The additional control logic region overlies the stack structure and comprises additional control logic devices configured to effectuate an additional portion of the control operations for the vertically extending strings of memory cells. Methods of forming a microelectronic device, and additional microelectronic devices and electronic systems are also described.
    Type: Application
    Filed: January 26, 2022
    Publication date: May 12, 2022
    Inventors: Kunal R. Parekh, Paolo Tessariol, Akira Goda
  • Patent number: 11329062
    Abstract: A method used in forming a memory array comprises forming a stack comprising vertically-alternating insulative tiers and wordline tiers. The stack comprises an insulator tier above the wordline tiers. The insulator tier comprises first insulator material comprising silicon, nitrogen, and one or more of carbon, oxygen, boron, and phosphorus. The first insulator material is patterned to form first horizontally-elongated trenches in the insulator tier. Second insulator material is formed in the first trenches along sidewalls of the first insulator material. The second insulator material is of different composition from that of the first insulator material and narrows the first trenches. After forming the second insulator material, second horizontally-elongated trenches are formed through the insulative tiers and the wordline tiers. The second trenches are horizontally along the narrowed first trenches laterally between and below the second insulator material.
    Type: Grant
    Filed: December 21, 2018
    Date of Patent: May 10, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Justin B. Dorhout, Erik Byers, Merri L. Carlson, Indra V. Chary, Damir Fazil, John D. Hopkins, Nancy M. Lomeli, Eldon Nelson, Joel D. Peterson, Dimitrios Pavlopoulos, Paolo Tessariol, Lifang Xu
  • Publication number: 20220130857
    Abstract: A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Operative channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. Insulative pillars are laterally-between and longitudinally-spaced-along immediately-laterally-adjacent of the memory blocks. The pillars are directly against conducting material of conductive lines in the conductive tiers. Other arrays, and methods, are disclosed.
    Type: Application
    Filed: January 3, 2022
    Publication date: April 28, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Paolo Tessariol, Justin B. Dorhout, Jian Li, Ryan L. Meyer
  • Publication number: 20220123018
    Abstract: Some embodiments include a NAND memory array having a vertical stack of alternating insulative levels and conductive levels. The conductive levels include control gate regions. High-k dielectric material is adjacent to the control gate regions and is configured as an arrangement of first vertically-extending linear segments which are vertically spaced from one another. Charge-blocking material is adjacent to the high-k dielectric material and is configured as an arrangement of second vertically-extending linear segments which are vertically spaced from one another. Charge-storage material is adjacent to the charge-blocking material and is configured as an arrangement of third vertically-extending linear segments which are vertically spaced from one another. Gate-dielectric material is adjacent to the charge-storage material. Channel material extends vertically along the stack and is adjacent to the gate-dielectric material.
    Type: Application
    Filed: December 23, 2021
    Publication date: April 21, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Shyam Surthi, Davide Resnati, Paolo Tessariol, Richard J. Hill, John D. Hopkins
  • Patent number: 11302634
    Abstract: Microelectronic devices include stadium structures within a stack structure and substantially symmetrically distributed between a first pillar structure and a second pillar structure, each of which vertically extends through the stack structure. The stack structure includes a vertically alternating sequence of insulative materials and conductive materials arranged in tiers. Each of the stadium structures includes staircase structures having steps including lateral ends of some of the tiers. The substantially symmetrical distribution of the stadium structures, and fill material adjacent such structures, may substantially balance material stresses to avoid or minimize bending of the adjacent pillars. Related methods and systems are also disclosed.
    Type: Grant
    Filed: February 13, 2020
    Date of Patent: April 12, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Lifang Xu, Jian Li, Graham R. Wolstenholme, Paolo Tessariol, George Matamis, Nancy M. Lomeli
  • Patent number: 11282815
    Abstract: A microelectronic device comprises a memory array region, a control logic region, and an additional control logic region. The memory array region comprises a stack structure comprising vertically alternating conductive structures and insulating structures, and vertically extending strings of memory cells within the stack structure. The control logic region underlies the stack structure and comprises control logic devices configured to effectuate a portion of control operations for the vertically extending strings of memory cells. The additional control logic region overlies the stack structure and comprises additional control logic devices configured to effectuate an additional portion of the control operations for the vertically extending strings of memory cells. Methods of forming a microelectronic device, and additional microelectronic devices and electronic systems are also described.
    Type: Grant
    Filed: January 14, 2020
    Date of Patent: March 22, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Kunal R. Parekh, Paolo Tessariol, Akira Goda
  • Publication number: 20220077236
    Abstract: A vertical 3D memory device may comprise: a substrate including a plurality of conductive contacts each coupled with a respective one of a plurality of digit lines; a plurality of word line plates separated from one another with respective dielectric layers on the substrate, the plurality of word line plates including at least a first set of word lines separated from at least a second set of word lines with a dielectric material extending in a serpentine shape and at least a third set of word lines separated from at least a fourth set of word lines with a dielectric material extending in a serpentine shape; at least one separation layer separating the first set of word lines and the second set of word lines from the third set of word lines and the fourth set of word lines, wherein the at least one separation layer is parallel to both a digit line and a word line; and a plurality of storage elements each formed in a respective one of a plurality of recesses such that a respective storage element is surrounded
    Type: Application
    Filed: October 8, 2021
    Publication date: March 10, 2022
    Inventors: Paolo Fantini, Corrado Villa, Paolo Tessariol
  • Patent number: 11271002
    Abstract: A method used in forming a memory array comprising strings of memory cells comprises forming a construction comprising a stack that have vertically-alternating insulative tiers and wordline tiers. An array of openings is formed in an uppermost portion of upper material that is above the stack, and the openings comprise channel openings and dummy openings. At least the uppermost portion of the upper material is used as a mask while etching the channel openings and the dummy openings into a lower portion of the upper material. The channel openings are etched into the insulative and wordline tiers. The channel openings are etched deeper into the construction than the dummy openings, and channel material is formed in the channel openings after the etching. Structures independent of method are disclosed.
    Type: Grant
    Filed: April 12, 2019
    Date of Patent: March 8, 2022
    Assignee: Micron Technology, Inc.
    Inventors: M. Jared Barclay, Merri L. Carlson, Saurabh Keshav, George Matamis, Young Joon Moon, Kunal R. Parekh, Paolo Tessariol, Vinayak Shamanna
  • Publication number: 20220068317
    Abstract: Some embodiments include an integrated assembly having a pair of adjacent memory-block-regions, and having a separator structure between the adjacent memory-block-regions. The memory-block-regions include a first stack of alternating conductive levels and first insulative levels. The separator structure includes a second stack of alternating second and third insulative levels. The second insulative levels are substantially horizontally aligned with the conductive levels, and the third insulative levels are substantially horizontally aligned with the first insulative levels. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: April 29, 2021
    Publication date: March 3, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Yoshiaki Fukuzumi, Paolo Tessariol, David H. Wells, Lars P. Heineck, Richard J. Hill, Lifang Xu, Indra V. Chary, Emilio Camerlenghi
  • Publication number: 20220068952
    Abstract: Some embodiments include an integrated assembly having a first deck with first memory cells arranged in first tiers disposed one atop another, and having a second deck over the first deck and with second memory cells arranged in second tiers disposed one atop another. Cell-material-pillars pass through the first and second decks. The cell-material-pillars have first inter-deck inflections associated with a boundary between the first and second decks. The cell-material-pillars are arranged within a configuration which includes a first memory-block-region and a second memory-block-region. A panel is between the first and second memory-block-regions. The panel has a second inter-deck inflection associated with the boundary between the first and second decks. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: August 25, 2020
    Publication date: March 3, 2022
    Applicant: Micron Technology, Inc.
    Inventors: David H. Wells, Aaron R. Wilson, Paolo Tessariol
  • Publication number: 20220059559
    Abstract: A method of forming a microelectronic device comprises forming a memory array region comprising memory cells vertically over a base structure comprising a semiconductive material and alignment mark structures vertically extending into the semiconductive material. First contact structures are formed to extend through the memory array region and into the alignment mark structures. A support structure is formed over the memory array region. A portion of the base structure is removed to expose the alignment mark structures. A control logic region is formed vertically adjacent a remaining portion of the base structure. The control logic region comprises control logic devices in electrical communication with the first contact structures by way of second contact structures extending partially through the alignment mark structures and contacting the first contact structures. Microelectronic devices, memory devices, electronic systems, and additional methods are also described.
    Type: Application
    Filed: August 24, 2020
    Publication date: February 24, 2022
    Inventors: Umberto Maria Meotto, Emilio Camerlenghi, Paolo Tessariol, Luca Laurin