Patents by Inventor Paolo Tessariol

Paolo Tessariol has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220051944
    Abstract: A method for manufacturing a 3D vertical array of memory cells is disclosed. The method comprises: forming on a substrate a stack of dielectric material layers comprising first and second dielectric material layers alternated to each other; forming holes through the stack of dielectric material layers, said holes exposing the substrate; selectively removing the second material layers through said holes to form cavities between adjacent first dielectric material layers; filling said cavities with a conductive material through said holes to form corresponding conductive material layers; forming first memory cell access lines from said conductive material layers; carrying out a conformal deposition of a chalcogenide material through said holes; forming memory cell storage elements from said deposed chalcogenide material; filling said holes with conductive material to form corresponding second memory cell access lines.
    Type: Application
    Filed: March 18, 2020
    Publication date: February 17, 2022
    Inventors: Paolo Fantini, Lorenzo Fratin, Paolo Tessariol
  • Patent number: 11244955
    Abstract: A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Operative channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. Insulative pillars are laterally-between and longitudinally-spaced-along immediately-laterally-adjacent of the memory blocks. The pillars are directly against conducting material of conductive lines in the conductive tiers. Other arrays, and methods, are disclosed.
    Type: Grant
    Filed: August 25, 2019
    Date of Patent: February 8, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Paolo Tessariol, Justin B. Dorhout, Jian Li, Ryan L. Meyer
  • Patent number: 11244954
    Abstract: Some embodiments include a NAND memory array having a vertical stack of alternating insulative levels and conductive levels. The conductive levels include control gate regions. High-k dielectric material is adjacent to the control gate regions and is configured as an arrangement of first vertically-extending linear segments which are vertically spaced from one another. Charge-blocking material is adjacent to the high-k dielectric material and is configured as an arrangement of second vertically-extending linear segments which are vertically spaced from one another. Charge-storage material is adjacent to the charge-blocking material and is configured as an arrangement of third vertically-extending linear segments which are vertically spaced from one another. Gate-dielectric material is adjacent to the charge-storage material. Channel material extends vertically along the stack and is adjacent to the gate-dielectric material.
    Type: Grant
    Filed: August 22, 2019
    Date of Patent: February 8, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Shyam Surthi, Davide Resnati, Paolo Tessariol, Richard J. Hill, John D. Hopkins
  • Publication number: 20220037360
    Abstract: A device comprises an array of elevationally-extending transistors and a circuit structure adjacent and electrically coupled to the elevationally-extending transistors of the array. The circuit structure comprises a stair step structure comprising vertically-alternating tiers comprising conductive steps that are at least partially elevationally separated from one another by insulative material. Operative conductive vias individually extend elevationally through one of the conductive steps at least to a bottom of the vertically-alternating tiers and individually electrically couple to an electronic component below the vertically-alternating tiers. Dummy structures individually extend elevationally through one of the conductive steps at least to the bottom of the vertically-alternating tiers. Methods are also disclosed.
    Type: Application
    Filed: October 18, 2021
    Publication date: February 3, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Paolo Tessariol, Justin B. Dorhout, Indra V. Chary, Jun Fang, Matthew Park, Zhiqiang Xie, Scott D. Stull, Daniel Osterberg, Jason Reece, Jian Li
  • Publication number: 20210358759
    Abstract: Some embodiments include an integrated structure having a semiconductor base and an insulative frame over the semiconductor base. The insulative frame has vertically-spaced sheets of first insulative material, and pillars of second insulative material between the vertically-spaced sheets. The first and second insulative materials are different from one another. Conductive plates are between the vertically-spaced sheets and are directly against the insulative pillars. Some embodiments include capacitors, and some embodiments include methods of forming capacitors.
    Type: Application
    Filed: August 2, 2021
    Publication date: November 18, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Eric Freeman, Paolo Tessariol
  • Patent number: 11177271
    Abstract: A device comprises an array of elevationally-extending transistors and a circuit structure adjacent and electrically coupled to the elevationally-extending transistors of the array. The circuit structure comprises a stair step structure comprising vertically-alternating tiers comprising conductive steps that are at least partially elevationally separated from one another by insulative material. Operative conductive vias individually extend elevationally through one of the conductive steps at least to a bottom of the vertically-alternating tiers and individually electrically couple to an electronic component below the vertically-alternating tiers. Dummy structures individually extend elevationally through one of the conductive steps at least to the bottom of the vertically-alternating tiers. Methods are also disclosed.
    Type: Grant
    Filed: September 14, 2017
    Date of Patent: November 16, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Paolo Tessariol, Justin B. Dorhout, Indra V. Chary, Jun Fang, Matthew Park, Zhiqiang Xie, Scott D. Stull, Daniel Osterberg, Jason Reece, Jian Li
  • Publication number: 20210343640
    Abstract: A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Operative channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. First dummy pillars in the memory blocks extend through at least a majority of the insulative tiers and the conductive tiers through which the channel-material strings extend. Second dummy pillars are laterally-between and longitudinally-spaced-along immediately-laterally-adjacent of the memory blocks. The second dummy pillars extend through at least a majority of the insulative tiers and the conductive tiers through which the operative channel-material strings extend laterally-between the immediately-laterally-adjacent memory blocks. Other embodiments, including method, are disclosed.
    Type: Application
    Filed: July 13, 2021
    Publication date: November 4, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Vladimir Machkaoutsan, Pieter Blomme, Emilio Camerlenghi, Justin B. Dorhout, Jian Li, Ryan L. Meyer, Paolo Tessariol
  • Patent number: 11158673
    Abstract: A vertical 3D memory device may comprise: a substrate including a plurality of conductive contacts each coupled with a respective one of a plurality of digit lines; a plurality of word line plates separated from one another with respective dielectric layers on the substrate, the plurality of word line plates including at least a first set of word lines separated from at least a second set of word lines with a dielectric material extending in a serpentine shape and at least a third set of word lines separated from at least a fourth set of word lines with a dielectric material extending in a serpentine shape; at least one separation layer separating the first set of word lines and the second set of word lines from the third set of word lines and the fourth set of word lines, wherein the at least one separation layer is parallel to both a digit line and a word line; and a plurality of storage elements each formed in a respective one of a plurality of recesses such that a respective storage element is surrounded
    Type: Grant
    Filed: December 18, 2019
    Date of Patent: October 26, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Paolo Fantini, Corrado Villa, Paolo Tessariol
  • Publication number: 20210257298
    Abstract: Microelectronic devices include stadium structures within a stack structure and substantially symmetrically distributed between a first pillar structure and a second pillar structure, each of which vertically extends through the stack structure. The stack structure includes a vertically alternating sequence of insulative materials and conductive materials arranged in tiers. Each of the stadium structures includes staircase structures having steps including lateral ends of some of the tiers. The substantially symmetrical distribution of the stadium structures, and fill material adjacent such structures, may substantially balance material stresses to avoid or minimize bending of the adjacent pillars. Related methods and systems are also disclosed.
    Type: Application
    Filed: February 13, 2020
    Publication date: August 19, 2021
    Inventors: Lifang Xu, Jian Li, Graham R. Wolstenholme, Paolo Tessariol, George Matamis, Nancy M. Lomeli
  • Patent number: 11094627
    Abstract: A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Operative channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. First dummy pillars in the memory blocks extend through at least a majority of the insulative tiers and the conductive tiers through which the channel-material strings extend. Second dummy pillars are laterally-between and longitudinally-spaced-along immediately-laterally-adjacent of the memory blocks. The second dummy pillars extend through at least a majority of the insulative tiers and the conductive tiers through which the operative channel-material strings extend laterally-between the immediately-laterally-adjacent memory blocks. Other embodiments, including method, are disclosed.
    Type: Grant
    Filed: October 25, 2019
    Date of Patent: August 17, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Vladimir Machkaoutsan, Pieter Blomme, Emilio Camerlenghi, Justin B. Dorhout, Jian Li, Ryan L. Meyer, Paolo Tessariol
  • Patent number: 11087991
    Abstract: Some embodiments include an integrated structure having a semiconductor base and an insulative frame over the semiconductor base. The insulative frame has vertically-spaced sheets of first insulative material, and pillars of second insulative material between the vertically-spaced sheets. The first and second insulative materials are different from one another. Conductive plates are between the vertically-spaced sheets and are directly against the insulative pillars. Some embodiments include capacitors, and some embodiments include methods of forming capacitors.
    Type: Grant
    Filed: July 17, 2019
    Date of Patent: August 10, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Eric Freeman, Paolo Tessariol
  • Publication number: 20210233591
    Abstract: Methods of operating a memory, and memory configured to perform similar methods, might include applying a positive first voltage level to a first node selectively connected to a string of series-connected memory cells while applying a negative second voltage level to a control gate of a transistor connected between the first node and the string of series-connected memory cells, and increasing the voltage level applied to the first node to a third voltage level while increasing the voltage level applied to the control gate of the transistor to a fourth voltage level lower than the third voltage level and higher than the first voltage level.
    Type: Application
    Filed: April 13, 2021
    Publication date: July 29, 2021
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Giovanni Maria Paolucci, Paolo Tessariol, Emilio Camerlenghi, Gianpietro Carnevale, Augusto Benvenuti
  • Publication number: 20210225938
    Abstract: A vertical 3D memory device may comprise: a substrate including a plurality of conductive contacts each coupled with a respective one of a plurality of digit lines; a plurality of word line plates separated from one another with respective dielectric layers on the substrate, the plurality of word line plates including at least a first set of word lines separated from at least a second set of word lines with a dielectric material extending in a serpentine shape and at least a third set of word lines separated from at least a fourth set of word lines with a dielectric material extending in a serpentine shape; at least one separation layer separating the first set of word lines and the second set of word lines from the third set of word lines and the fourth set of word lines, wherein the at least one separation layer is parallel to both a digit line and a word line; and a plurality of storage elements each formed in a respective one of a plurality of recesses such that a respective storage element is surrounded
    Type: Application
    Filed: December 18, 2019
    Publication date: July 22, 2021
    Inventors: Paolo Fantini, Corrado Villa, Paolo Tessariol
  • Publication number: 20210217730
    Abstract: A microelectronic device comprises a memory array region, a control logic region, and an additional control logic region. The memory array region comprises a stack structure comprising vertically alternating conductive structures and insulating structures, and vertically extending strings of memory cells within the stack structure. The control logic region underlies the stack structure and comprises control logic devices configured to effectuate a portion of control operations for the vertically extending strings of memory cells. The additional control logic region overlies the stack structure and comprises additional control logic devices configured to effectuate an additional portion of the control operations for the vertically extending strings of memory cells. Methods of forming a microelectronic device, and additional microelectronic devices and electronic systems are also described.
    Type: Application
    Filed: January 14, 2020
    Publication date: July 15, 2021
    Inventors: Kunal R. Parekh, Paolo Tessariol, Akira Goda
  • Patent number: 11056383
    Abstract: Array contacts for semiconductor memories may be formed using a first set of parallel stripe masks and subsequently a second set of parallel stripe masks transverse to the first set. For example, one set of masks may be utilized to etch a dielectric layer, to form parallel spaced trenches. Then the trenches may be filled with a sacrificial material. That sacrificial material may then be masked transversely to its length and etched, for example. The resulting openings may be filled with a metal to form array contacts.
    Type: Grant
    Filed: January 26, 2018
    Date of Patent: July 6, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Roberto Somaschini, Alessandro Vaccaro, Paolo Tessariol, Giulio Albini
  • Publication number: 20210201993
    Abstract: Memory array structures providing for determination of resistive characteristics of access lines might include a first block of memory cells, a second block of memory cells, a first current path between a particular access line of the first block of memory cells and a particular access line of the second block of memory cells, and, optionally, a second current path between the particular access line of the second block of memory cells and a different access line of the first block of memory cells. Methods for determining resistive characteristics of access lines might include connecting the particular access line of the first block of memory cells to a driver, and determining the resistive characteristics in response to a current level through that access line and a voltage level of that access line.
    Type: Application
    Filed: September 3, 2020
    Publication date: July 1, 2021
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Dan Xu, Jun Xu, Erwin E. Yu, Paolo Tessariol, Tomoko Ogura Iwasaki
  • Publication number: 20210193570
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses.
    Type: Application
    Filed: December 20, 2019
    Publication date: June 24, 2021
    Inventors: Violante Moschiano, Paolo Tessariol, Aaron Yip, Naveen Kaushik
  • Publication number: 20210151375
    Abstract: Conductive structures include stair step structures positioned along a length of the conductive structure and at least one landing comprising at least one via extending through the conductive structure. The at least one landing is positioned between a first stair step structure of the stair step structures and a second stair step structure of the stair step structures. Devices may include such conductive structures. Systems may include a semiconductor device and stair step structures separated by at least one landing having at least one via formed in the at least one landing. Methods of forming conductive structures include forming at least one via through a landing positioned between stair step structures.
    Type: Application
    Filed: December 28, 2020
    Publication date: May 20, 2021
    Inventors: Paolo Tessariol, Graham R. Wolstenholme, Aaron Yip
  • Patent number: 11011236
    Abstract: Methods of operating a memory, and memory configured to perform similar methods, might include applying a positive first voltage level to a first node selectively connected to a string of series-connected memory cells while applying a negative second voltage level to a control gate of a transistor connected between the first node and the string of series-connected memory cells, and increasing the voltage level applied to the first node to a third voltage level while increasing the voltage level applied to the control gate of the transistor to a fourth voltage level lower than the third voltage level and higher than the first voltage level.
    Type: Grant
    Filed: August 29, 2019
    Date of Patent: May 18, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Giovanni Maria Paolucci, Paolo Tessariol, Emilio Camerlenghi, Gianpietro Carnevale, Augusto Benvenuti
  • Publication number: 20210125919
    Abstract: A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Operative channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. First dummy pillars in the memory blocks extend through at least a majority of the insulative tiers and the conductive tiers through which the channel-material strings extend. Second dummy pillars are laterally-between and longitudinally-spaced-along immediately-laterally-adjacent of the memory blocks. The second dummy pillars extend through at least a majority of the insulative tiers and the conductive tiers through which the operative channel-material strings extend laterally-between the immediately-laterally-adjacent memory blocks. Other embodiments, including method, are disclosed.
    Type: Application
    Filed: October 25, 2019
    Publication date: April 29, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Vladimir Machkaoutsan, Pieter Blomme, Emilio Camerlenghi, Justin B. Dorhout, Jian Li, Ryan L. Meyer, Paolo Tessariol