Abstract: The invention relates to pressure sensors that are micromachined using microelectronics technologies. The sensor provided by the invention comprises a cavity (V) hermetically sealed on one side by a silicon substrate (40) and on the other side by a diaphragm (58) that can be formed under the effect of the pressure outside the cavity, the sensor having at least one resistance strain gage (54, 56) fastened to the diaphragm and having resistance that varies as a function of the deformation of the diaphragm. The diaphragm, preferably made of silicon nitride, is fastened to the resistance strain gages. The gages are located beneath the diaphragm inside the sealed cavity (V). It is not necessary to recess the substrate to produce the cavity: the diaphragm is formed by depositing an insulting layer on a sacrificial layer, for example made of a polyamide; it may cover integrated measurement circuits in the silicon substrate.

Abstract: A tire is provided with a force measurement device embedded, for example, in an isolated element such as a tread block. The device may be a stud-type device. The device includes a rigid stem connected to a deformable substantially flat membrane, which includes a detector for detecting a deformation of the membrane. The stem further includes a portion designed to be in contact with an element on which a force can act. The stem also includes an anchor that collaborates with the element. The anchor functions to improve the transmission of a load to the deformable membrane.

Abstract: A method for producing a device with at least one suspended membrane, comprising at least the following steps: producing a trench through a first sacrificial layer and a second layer deposited on the first sacrificial layer, the trench completely surrounding at least a portion of the first sacrificial layer and at least a portion of the second layer, filling all or a portion of the trench with at least one material capable of resisting at least one etching agent, etching said portion of the first sacrificial layer with said etching agent through at least one opening made in the second layer, said portion of the second layer forming at least one portion of the suspended membrane.

Abstract: A device for measuring force by resistive detection includes a double Wheatstone bridge having at least eight resistive gauges arranged on a membrane where each of the Wheastone bridges are respectively arranged on disjointed portions of the membrane, and two resistive gauges of at least one Wheatstone bridge are reside on a non-deformable area of the membrane.

Abstract: A force measuring device has a rigid stem joined to an essentially flat deformable membrane. The membrane includes detectors for detecting a deformation of the membrane. A portion of the stem comes in contact with an element capable of being subjected to the action of a force. The stem has slots forming anchoring means for interacting with the element. The force measuring device is for use, in particular, in improving the transmission of loads to the deformable membrane.

Abstract: The movement detector having six degrees of freedom comprises a support on which three position sensors are arranged according to three orthogonal axes. Each sensor comprises a rigid body (3), a deformable element (4) which is electrically conductive, and four conductive areas (6b) which are disposed on rigid walls (3). The deformable element (4) is balanced around the centre part thereof and has a rest position and four active positions wherein it is temporarily in contact with two of the conductive areas (6b) of the rigid body (3). The deformable element (4) of a sensor moves from a rest position to one of the active positions in response to a predetermined directional or axial translation or votation.

Abstract: A tire is provided with a force measurement device embedded, for example, in an isolated element such as a tread block. The device may be a stud-type device. The device includes a rigid stem connected to a deformable substantially flat membrane, which includes a detector for detecting a deformation of the membrane. The stem further includes a portion designed to be in contact with an element on which a force can act. The stem also includes an anchor that collaborates with the element. The anchor functions to improve the transmission of a load to the deformable membrane.

Abstract: The movement detector having six degrees of freedom comprises a support on which three position sensors are arranged according to three orthogonal axes. Each sensor comprises a rigid body (3), a deformable element (4) which is electrically conductive, and four conductive areas (6b) which are disposed on rigid walls (3). The deformable element (4) is balanced around the centre part thereof and has a rest position and four active positions wherein it is temporarily in contact with two of the conductive areas (6b) of the rigid body (3). The deformable element (4) of a sensor moves from a rest position to one of the active positions in response to a predetermined directional or axial translation or votation.

Abstract: Bolometric detection device with antenna and optimized cavity for millimetric or sub-millimetric electromagnetic waves, and manufacturing process for this device. This device, preferably made from a double type substrate, is applicable particularly in astrophysics and comprises at least one bolometer comprising an antenna (22), a resistive load (26), a thermometric element (24) and a resonant cavity (28), surrounded by a material with optical index n. The thickness of the cavity is less than ?/(4n), where ? is the average wavelength of the waves to be detected.

Abstract: Bolometric detection device with antenna and optimized cavity for millimetric or sub-millimetric electromagnetic waves, and manufacturing process for this device.

Abstract: A tire includes a nail-type force sensor embedded, for example, in an isolated element such as a tread pattern block (T112). The sensor comprises a rigid shank (1) designed to be acted upon by the force to be determined and a head (2). The head (2) comprises an element attached to the shank (1) capable of being deformed when the shank is displaced. This deformable element carries means to measure the deformation and comprises anchoring points which have a position relative to the shank (1) at rest and which essentially maintain that position when the shank (1) is displaced.

Abstract: A tire includes a nail-type force sensor embedded, for example, in an isolated element such as a tread pattern block (T112). The sensor comprises a rigid shank (1) designed to be acted upon by the force to be determined and a head (2). The head (2) comprises an element attached to the shank (1) capable of being deformed when the shank is displaced. This deformable element carries means to measure the deformation and comprises anchoring points which have a position relative to the shank (1) at rest and which essentially maintain that position when the shank (1) is displaced.

Abstract: A method of manufacturing a structure with a useful layer (120) held at a distance from a substrate (100) by abutments (150, 151) and of detaching such a layer.This method comprises the following steps:a first partial and selective etching of the sacrificial layer leaving at least one spacer paving (140) to survive between the substrate and the useful layer,a second selective etching of the useful layer (120) and/or the substrate (100) using the spacer (140) as a mask so as to form at least one abutment (150, 151) in said useful layer and/or the substrate,removal of said spacer.