Patents by Inventor Patrick H. Keys

Patrick H. Keys has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12230687
    Abstract: Disclosed herein are lateral gate material arrangements for quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a quantum well stack; and a gate above the quantum well stack, wherein the gate includes a gate electrode, the gate electrode includes a first material proximate to side faces of the gate and a second material proximate to a center of the gate, and the first material has a different material composition than the second material.
    Type: Grant
    Filed: December 10, 2020
    Date of Patent: February 18, 2025
    Inventors: Roza Kotlyar, Stephanie A. Bojarski, Hubert C. George, Payam Amin, Patrick H. Keys, Ravi Pillarisetty, Roman Caudillo, Florian Luethi, James S. Clarke
  • Patent number: 12100623
    Abstract: Stacked finFET structures including a fin having at least a first layer of semiconductor material stacked over or under a second layer of semiconductor material. The first and second layers may include a Group IV semiconductor material layer and a Group III-V semiconductor material layer, for example. A stacked finFET may include an N-type finFET stacked over or under a P-type finFET, the two finFETs may have channel portions within the different semiconductor material layers. Channel portions of the first and second layers of semiconductor material may be coupled to separate gate electrodes that are vertically aligned. Channel portions of the first and second layers of semiconductor material may be vertically separated by subfin portions of the first and second layers. Different layers of dielectric material adjacent to the subfin portions may improve electrical isolation between the channel portions, for example as a source of fixed charge or impurity dopants.
    Type: Grant
    Filed: June 23, 2022
    Date of Patent: September 24, 2024
    Assignee: Intel Corporation
    Inventors: Aaron Lilak, Sean Ma, Justin R. Weber, Rishabh Mehandru, Stephen M. Cea, Patrick Morrow, Patrick H. Keys
  • Patent number: 11757026
    Abstract: Nanowire structures having wrap-around contacts are described. For example, a nanowire semiconductor device includes a nanowire disposed above a substrate. A channel region is disposed in the nanowire. The channel region has a length and a perimeter orthogonal to the length. A gate electrode stack surrounds the entire perimeter of the channel region. A pair of source and drain regions is disposed in the nanowire, on either side of the channel region. Each of the source and drain regions has a perimeter orthogonal to the length of the channel region. A first contact completely surrounds the perimeter of the source region. A second contact completely surrounds the perimeter of the drain region.
    Type: Grant
    Filed: October 16, 2020
    Date of Patent: September 12, 2023
    Assignee: Google LLC
    Inventors: Stephen M. Cea, Cory E. Weber, Patrick H. Keys, Seiyon Kim, Michael G. Haverty, Sadasivan Shankar
  • Publication number: 20220336284
    Abstract: Stacked finFET structures including a fin having at least a first layer of semiconductor material stacked over or under a second layer of semiconductor material. The first and second layers may include a Group IV semiconductor material layer and a Group III-V semiconductor material layer, for example. A stacked finFET may include an N-type finFET stacked over or under a P-type finFET, the two finFETs may have channel portions within the different semiconductor material layers. Channel portions of the first and second layers of semiconductor material may be coupled to separate gate electrodes that are vertically aligned. Channel portions of the first and second layers of semiconductor material may be vertically separated by subfin portions of the first and second layers. Different layers of dielectric material adjacent to the subfin portions may improve electrical isolation between the channel portions, for example as a source of fixed charge or impurity dopants.
    Type: Application
    Filed: June 23, 2022
    Publication date: October 20, 2022
    Applicant: Intel Corporation
    Inventors: Aaron Lilak, Sean Ma, Justin R. Weber, Rishabh Mehandru, Stephen M. Cea, Patrick Morrow, Patrick H. Keys
  • Patent number: 11404319
    Abstract: Stacked finFET structures including a fin having at least a first layer of semiconductor material stacked over or under a second layer of semiconductor material. The first and second layers may include a Group IV semiconductor material layer and a Group III-V semiconductor material layer, for example. A stacked finFET may include an N-type finFET stacked over or under a P-type finFET, the two finFETs may have channel portions within the different semiconductor material layers. Channel portions of the first and second layers of semiconductor material may be coupled to separate gate electrodes that are vertically aligned. Channel portions of the first and second layers of semiconductor material may be vertically separated by subfin portions of the first and second layers. Different layers of dielectric material adjacent to the subfin portions may improve electrical isolation between the channel portions, for example as a source of fixed charge or impurity dopants.
    Type: Grant
    Filed: August 24, 2017
    Date of Patent: August 2, 2022
    Assignee: Intel Corporation
    Inventors: Aaron Lilak, Sean Ma, Justin R. Weber, Rishabh Mehandru, Stephen M. Cea, Patrick Morrow, Patrick H. Keys
  • Publication number: 20220190135
    Abstract: Disclosed herein are lateral gate material arrangements for quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a quantum well stack; and a gate above the quantum well stack, wherein the gate includes a gate electrode, the gate electrode includes a first material proximate to side faces of the gate and a second material proximate to a center of the gate, and the first material has a different material composition than the second material.
    Type: Application
    Filed: December 10, 2020
    Publication date: June 16, 2022
    Inventors: Roza Kotlyar, Stephanie A. Bojarski, Hubert C. George, Payam Amin, Patrick H. Keys, Ravi Pillarisetty, Roman Caudillo, Florian Luethi, James S. Clarke
  • Patent number: 11183564
    Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a quantum well stack including a quantum well layer and a barrier layer; a first gate metal above the quantum well stack, wherein the barrier layer is between the first gate metal and the quantum well layer; and a second gate metal above the quantum well stack, wherein the barrier layer is between the second gate metal and the quantum well layer, and a material structure of the second gate metal is different from a material structure of the first gate metal.
    Type: Grant
    Filed: June 21, 2018
    Date of Patent: November 23, 2021
    Assignee: Intel Corporation
    Inventors: Nicole K. Thomas, Ravi Pillarisetty, Payam Amin, Roza Kotlyar, Patrick H. Keys, Hubert C. George, Kanwaljit Singh, James S. Clarke, David J. Michalak, Lester Lampert, Zachary R. Yoscovits, Roman Caudillo, Jeanette M. Roberts
  • Patent number: 11107891
    Abstract: Quantum dot devices, and related systems and methods, are disclosed herein. In some embodiments, a quantum dot device may include a quantum well stack; a plurality of first gates above the quantum well stack; and a plurality of second gates above the quantum well stack; wherein the plurality of first gates are arranged in electrically continuous first rows and the plurality of second gates are arranged in electrically continuous second rows parallel to the first rows. Quantum dot devices according to various embodiments of the present disclosure are based on arranging first and second gates in hexagonal/honeycomb arrays.
    Type: Grant
    Filed: December 23, 2017
    Date of Patent: August 31, 2021
    Assignee: Intel Corporation
    Inventors: Ravi Pillarisetty, Hubert C. George, Nicole K. Thomas, Jeanette M. Roberts, Roman Caudillo, Zachary R. Yoscovits, Kanwaljit Singh, Roza Kotlyar, Patrick H. Keys, James S. Clarke
  • Patent number: 10978590
    Abstract: Methods and apparatus to remove epitaxial defects in semiconductors are disclosed. A disclosed example multilayered die structure includes a fin having a first material, where the fin is epitaxially grown from a first substrate layer having a second material, and where a defect portion of the fin is etched or polished. The disclosed example multilayered die structure also includes a second substrate layer having an opening through which the fin extends.
    Type: Grant
    Filed: September 30, 2016
    Date of Patent: April 13, 2021
    Assignee: Intel Corporation
    Inventors: Aaron D. Lilak, Rishabh Mehandru, Patrick Morrow, Patrick H. Keys
  • Patent number: 10896907
    Abstract: A transistor including a gate stack and source and drain on opposing sides of the gate stack; and a first material and a second material on the substrate, the first material disposed between the substrate and the second material and the channel of the transistor is defined in the second material between the source and drain, wherein the first material and the second material each include an implant and the implant includes a greater solubility in the first material than in the second material. A method for forming an integrated circuit structure including forming a first material on a substrate; forming a second material on the first material; introducing an implant into the second material, wherein the implant includes a greater solubility in the first material than in the second material; annealing the substrate; and forming a transistor on the substrate, the transistor including a channel including the second material.
    Type: Grant
    Filed: September 30, 2016
    Date of Patent: January 19, 2021
    Assignee: Intel Corporation
    Inventors: Patrick H. Keys, Hei Kam, Rishabh Mehandru, Aaron A. Budrevich
  • Patent number: 10840366
    Abstract: Nanowire structures having wrap-around contacts are described. For example, a nanowire semiconductor device includes a nanowire disposed above a substrate. A channel region is disposed in the nanowire. The channel region has a length and a perimeter orthogonal to the length. A gate electrode stack surrounds the entire perimeter of the channel region. A pair of source and drain regions is disposed in the nanowire, on either side of the channel region. Each of the source and drain regions has a perimeter orthogonal to the length of the channel region. A first contact completely surrounds the perimeter of the source region. A second contact completely surrounds the perimeter of the drain region.
    Type: Grant
    Filed: October 3, 2019
    Date of Patent: November 17, 2020
    Assignee: Intel Corporation
    Inventors: Stephen M. Cea, Cory E. Weber, Patrick H. Keys, Seiyon Kim, Michael G. Haverty, Sadasivan Shankar
  • Publication number: 20200321436
    Abstract: Quantum dot devices, and related systems and methods, are disclosed herein. In some embodiments, a quantum dot device may include a quantum well stack; a plurality of first gates above the quantum well stack; and a plurality of second gates above the quantum well stack; wherein the plurality of first gates are arranged in electrically continuous first rows and the plurality of second gates are arranged in electrically continuous second rows parallel to the first rows. Quantum dot devices according to various embodiments of the present disclosure are based on arranging first and second gates in hexagonal/honeycomb arrays.
    Type: Application
    Filed: December 23, 2017
    Publication date: October 8, 2020
    Applicant: Intel Corporation
    Inventors: Ravi Pillarisetty, Hubert C. George, Nicole K. Thomas, Jeanette M. Roberts, Roman Caudillo, Zachary R. Yoscovits, Kanwaljit Singh, Roza Kotlyar, Patrick H. Keys, James S. Clarke
  • Patent number: 10790281
    Abstract: Disclosed herein are stacked channel structures for metal oxide semiconductor field effect transistors (MOSFETs) and related circuit elements, computing devices, and methods. For example, a stacked channel structure may include: a semiconductor substrate having a substrate lattice constant; a fin extending away from the semiconductor substrate, the fin having an upper region and a lower region; a first transistor in the lower region, wherein the first transistor has a first channel, the first channel has a first lattice constant, and the first lattice constant is different from the substrate lattice constant; and a second transistor in the upper region, wherein the second transistor has a second channel, the second channel has a second lattice constant, and the second lattice constant is different from the substrate lattice constant.
    Type: Grant
    Filed: December 3, 2015
    Date of Patent: September 29, 2020
    Assignee: Intel Corporation
    Inventors: Rishabh Mehandru, Roza Kotlyar, Stephen M. Cea, Patrick H. Keys
  • Publication number: 20200235013
    Abstract: Stacked finFET structures including a fin having at least a first layer of semiconductor material stacked over or under a second layer of semiconductor material. The first and second layers may include a Group IV semiconductor material layer and a Group III-V semiconductor material layer, for example. A stacked finFET may include an N-type finFET stacked over or under a P-type finFET, the two finFETs may have channel portions within the different semiconductor material layers. Channel portions of the first and second layers of semiconductor material may be coupled to separate gate electrodes that are vertically aligned. Channel portions of the first and second layers of semiconductor material may be vertically separated by subfin portions of the first and second layers. Different layers of dielectric material adjacent to the subfin portions may improve electrical isolation between the channel portions, for example as a source of fixed charge or impurity dopants.
    Type: Application
    Filed: August 24, 2017
    Publication date: July 23, 2020
    Applicant: Intel Corporation
    Inventors: Aaron Lilak, Sean Ma, Justin R. Weber, Rishabh Mehandru, Stephen M. Cea, Patrick Morrow, Patrick H. Keys
  • Patent number: 10665770
    Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a base; a fin extending away from the base, wherein the fin includes a quantum well layer; a gate above the fin; and a material on side faces of the fin; wherein the fin has a width between its side faces, and the fin is strained in the direction of the width.
    Type: Grant
    Filed: March 6, 2018
    Date of Patent: May 26, 2020
    Assignee: Intel Corporation
    Inventors: Ravi Pillarisetty, Kanwaljit Singh, Patrick H. Keys, Roman Caudillo, Hubert C. George, Zachary R. Yoscovits, Nicole K. Thomas, James S. Clarke, Roza Kotlyar, Payam Amin, Jeanette M. Roberts
  • Patent number: 10636907
    Abstract: Embodiments of the invention include a non-planar transistor with a strained channel and methods of forming such a transistor. In an embodiment, the non-planar transistor may include a semiconductor substrate. According to an embodiment, a first source/drain (S/D) region and a second S/D region may be formed over the semiconductor substrate and separated from each other by a channel region. A gate stack may be formed over the channel region. In order to increase the amount of strain that may be induced in the channel region, embodiments may include forming a strain enhancement opening in the semiconductor substrate that removes at least a portion of the semiconductor substrate from below the channel region.
    Type: Grant
    Filed: September 25, 2015
    Date of Patent: April 28, 2020
    Assignee: Intel Corporation
    Inventors: Aaron D. Lilak, Stephen M. Cea, Rishabh Mehandru, Patrick Morrow, Patrick H. Keys
  • Patent number: 10483385
    Abstract: Nanowire structures having wrap-around contacts are described. For example, a nanowire semiconductor device includes a nanowire disposed above a substrate. A channel region is disposed in the nanowire. The channel region has a length and a perimeter orthogonal to the length. A gate electrode stack surrounds the entire perimeter of the channel region. A pair of source and drain regions is disposed in the nanowire, on either side of the channel region. Each of the source and drain regions has a perimeter orthogonal to the length of the channel region. A first contact completely surrounds the perimeter of the source region. A second contact completely surrounds the perimeter of the drain region.
    Type: Grant
    Filed: December 23, 2011
    Date of Patent: November 19, 2019
    Assignee: Intel Corporation
    Inventors: Stephen M. Cea, Cory E. Weber, Patrick H. Keys, Seiyon Kim, Michael G. Haverty, Sadasivan Shankar
  • Publication number: 20190189795
    Abstract: Methods and apparatus to remove epitaxial defects in semiconductors are disclosed. A disclosed example multilayered die structure includes a fin having a first material, where the fin is epitaxially grown from a first substrate layer having a second material, and where a defect portion of the fin is etched or polished. The disclosed example multilayered die structure also includes a second substrate layer having an opening through which the fin extends.
    Type: Application
    Filed: September 30, 2016
    Publication date: June 20, 2019
    Inventors: Aaron D. Lilak, Rishabh Mehandru, Patrick Morrow, Patrick H. Keys
  • Publication number: 20190043951
    Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a quantum well stack including a quantum well layer and a barrier layer; a first gate metal above the quantum well stack, wherein the barrier layer is between the first gate metal and the quantum well layer; and a second gate metal above the quantum well stack, wherein the barrier layer is between the second gate metal and the quantum well layer, and a material structure of the second gate metal is different from a material structure of the first gate metal.
    Type: Application
    Filed: June 21, 2018
    Publication date: February 7, 2019
    Applicant: Intel Corporation
    Inventors: Nicole K. Thomas, Ravi Pillarisetty, Payam Amin, Roza Kotlyar, Patrick H. Keys, Hubert C. George, Kanwaljit Singh, James S. Clarke, David J. Michalak, Lester Lampert, Zachary R. Yoscovits, Roman Caudillo, Jeanette M. Roberts
  • Publication number: 20190044050
    Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a base; a fin extending away from the base, wherein the fin includes a quantum well layer; a gate above the fin; and a material on side faces of the fin; wherein the fin has a width between its side faces, and the fin is strained in the direction of the width.
    Type: Application
    Filed: March 6, 2018
    Publication date: February 7, 2019
    Applicant: Intel Corporation
    Inventors: Ravi Pillarisetty, Kanwaljit Singh, Patrick H. Keys, Roman Caudillo, Hubert C. George, Zachary R. Yoscovits, Nicole K. Thomas, James S. Clarke, Roza Kotlyar, Payam Amin, Jeanette M. Roberts