Patents by Inventor Patrick H. Keys
Patrick H. Keys has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12230687Abstract: Disclosed herein are lateral gate material arrangements for quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a quantum well stack; and a gate above the quantum well stack, wherein the gate includes a gate electrode, the gate electrode includes a first material proximate to side faces of the gate and a second material proximate to a center of the gate, and the first material has a different material composition than the second material.Type: GrantFiled: December 10, 2020Date of Patent: February 18, 2025Inventors: Roza Kotlyar, Stephanie A. Bojarski, Hubert C. George, Payam Amin, Patrick H. Keys, Ravi Pillarisetty, Roman Caudillo, Florian Luethi, James S. Clarke
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Patent number: 12100623Abstract: Stacked finFET structures including a fin having at least a first layer of semiconductor material stacked over or under a second layer of semiconductor material. The first and second layers may include a Group IV semiconductor material layer and a Group III-V semiconductor material layer, for example. A stacked finFET may include an N-type finFET stacked over or under a P-type finFET, the two finFETs may have channel portions within the different semiconductor material layers. Channel portions of the first and second layers of semiconductor material may be coupled to separate gate electrodes that are vertically aligned. Channel portions of the first and second layers of semiconductor material may be vertically separated by subfin portions of the first and second layers. Different layers of dielectric material adjacent to the subfin portions may improve electrical isolation between the channel portions, for example as a source of fixed charge or impurity dopants.Type: GrantFiled: June 23, 2022Date of Patent: September 24, 2024Assignee: Intel CorporationInventors: Aaron Lilak, Sean Ma, Justin R. Weber, Rishabh Mehandru, Stephen M. Cea, Patrick Morrow, Patrick H. Keys
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Patent number: 11757026Abstract: Nanowire structures having wrap-around contacts are described. For example, a nanowire semiconductor device includes a nanowire disposed above a substrate. A channel region is disposed in the nanowire. The channel region has a length and a perimeter orthogonal to the length. A gate electrode stack surrounds the entire perimeter of the channel region. A pair of source and drain regions is disposed in the nanowire, on either side of the channel region. Each of the source and drain regions has a perimeter orthogonal to the length of the channel region. A first contact completely surrounds the perimeter of the source region. A second contact completely surrounds the perimeter of the drain region.Type: GrantFiled: October 16, 2020Date of Patent: September 12, 2023Assignee: Google LLCInventors: Stephen M. Cea, Cory E. Weber, Patrick H. Keys, Seiyon Kim, Michael G. Haverty, Sadasivan Shankar
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Publication number: 20220336284Abstract: Stacked finFET structures including a fin having at least a first layer of semiconductor material stacked over or under a second layer of semiconductor material. The first and second layers may include a Group IV semiconductor material layer and a Group III-V semiconductor material layer, for example. A stacked finFET may include an N-type finFET stacked over or under a P-type finFET, the two finFETs may have channel portions within the different semiconductor material layers. Channel portions of the first and second layers of semiconductor material may be coupled to separate gate electrodes that are vertically aligned. Channel portions of the first and second layers of semiconductor material may be vertically separated by subfin portions of the first and second layers. Different layers of dielectric material adjacent to the subfin portions may improve electrical isolation between the channel portions, for example as a source of fixed charge or impurity dopants.Type: ApplicationFiled: June 23, 2022Publication date: October 20, 2022Applicant: Intel CorporationInventors: Aaron Lilak, Sean Ma, Justin R. Weber, Rishabh Mehandru, Stephen M. Cea, Patrick Morrow, Patrick H. Keys
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Patent number: 11404319Abstract: Stacked finFET structures including a fin having at least a first layer of semiconductor material stacked over or under a second layer of semiconductor material. The first and second layers may include a Group IV semiconductor material layer and a Group III-V semiconductor material layer, for example. A stacked finFET may include an N-type finFET stacked over or under a P-type finFET, the two finFETs may have channel portions within the different semiconductor material layers. Channel portions of the first and second layers of semiconductor material may be coupled to separate gate electrodes that are vertically aligned. Channel portions of the first and second layers of semiconductor material may be vertically separated by subfin portions of the first and second layers. Different layers of dielectric material adjacent to the subfin portions may improve electrical isolation between the channel portions, for example as a source of fixed charge or impurity dopants.Type: GrantFiled: August 24, 2017Date of Patent: August 2, 2022Assignee: Intel CorporationInventors: Aaron Lilak, Sean Ma, Justin R. Weber, Rishabh Mehandru, Stephen M. Cea, Patrick Morrow, Patrick H. Keys
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Publication number: 20220190135Abstract: Disclosed herein are lateral gate material arrangements for quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a quantum well stack; and a gate above the quantum well stack, wherein the gate includes a gate electrode, the gate electrode includes a first material proximate to side faces of the gate and a second material proximate to a center of the gate, and the first material has a different material composition than the second material.Type: ApplicationFiled: December 10, 2020Publication date: June 16, 2022Inventors: Roza Kotlyar, Stephanie A. Bojarski, Hubert C. George, Payam Amin, Patrick H. Keys, Ravi Pillarisetty, Roman Caudillo, Florian Luethi, James S. Clarke
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Patent number: 11183564Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a quantum well stack including a quantum well layer and a barrier layer; a first gate metal above the quantum well stack, wherein the barrier layer is between the first gate metal and the quantum well layer; and a second gate metal above the quantum well stack, wherein the barrier layer is between the second gate metal and the quantum well layer, and a material structure of the second gate metal is different from a material structure of the first gate metal.Type: GrantFiled: June 21, 2018Date of Patent: November 23, 2021Assignee: Intel CorporationInventors: Nicole K. Thomas, Ravi Pillarisetty, Payam Amin, Roza Kotlyar, Patrick H. Keys, Hubert C. George, Kanwaljit Singh, James S. Clarke, David J. Michalak, Lester Lampert, Zachary R. Yoscovits, Roman Caudillo, Jeanette M. Roberts
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Patent number: 11107891Abstract: Quantum dot devices, and related systems and methods, are disclosed herein. In some embodiments, a quantum dot device may include a quantum well stack; a plurality of first gates above the quantum well stack; and a plurality of second gates above the quantum well stack; wherein the plurality of first gates are arranged in electrically continuous first rows and the plurality of second gates are arranged in electrically continuous second rows parallel to the first rows. Quantum dot devices according to various embodiments of the present disclosure are based on arranging first and second gates in hexagonal/honeycomb arrays.Type: GrantFiled: December 23, 2017Date of Patent: August 31, 2021Assignee: Intel CorporationInventors: Ravi Pillarisetty, Hubert C. George, Nicole K. Thomas, Jeanette M. Roberts, Roman Caudillo, Zachary R. Yoscovits, Kanwaljit Singh, Roza Kotlyar, Patrick H. Keys, James S. Clarke
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Patent number: 10978590Abstract: Methods and apparatus to remove epitaxial defects in semiconductors are disclosed. A disclosed example multilayered die structure includes a fin having a first material, where the fin is epitaxially grown from a first substrate layer having a second material, and where a defect portion of the fin is etched or polished. The disclosed example multilayered die structure also includes a second substrate layer having an opening through which the fin extends.Type: GrantFiled: September 30, 2016Date of Patent: April 13, 2021Assignee: Intel CorporationInventors: Aaron D. Lilak, Rishabh Mehandru, Patrick Morrow, Patrick H. Keys
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Patent number: 10896907Abstract: A transistor including a gate stack and source and drain on opposing sides of the gate stack; and a first material and a second material on the substrate, the first material disposed between the substrate and the second material and the channel of the transistor is defined in the second material between the source and drain, wherein the first material and the second material each include an implant and the implant includes a greater solubility in the first material than in the second material. A method for forming an integrated circuit structure including forming a first material on a substrate; forming a second material on the first material; introducing an implant into the second material, wherein the implant includes a greater solubility in the first material than in the second material; annealing the substrate; and forming a transistor on the substrate, the transistor including a channel including the second material.Type: GrantFiled: September 30, 2016Date of Patent: January 19, 2021Assignee: Intel CorporationInventors: Patrick H. Keys, Hei Kam, Rishabh Mehandru, Aaron A. Budrevich
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Patent number: 10840366Abstract: Nanowire structures having wrap-around contacts are described. For example, a nanowire semiconductor device includes a nanowire disposed above a substrate. A channel region is disposed in the nanowire. The channel region has a length and a perimeter orthogonal to the length. A gate electrode stack surrounds the entire perimeter of the channel region. A pair of source and drain regions is disposed in the nanowire, on either side of the channel region. Each of the source and drain regions has a perimeter orthogonal to the length of the channel region. A first contact completely surrounds the perimeter of the source region. A second contact completely surrounds the perimeter of the drain region.Type: GrantFiled: October 3, 2019Date of Patent: November 17, 2020Assignee: Intel CorporationInventors: Stephen M. Cea, Cory E. Weber, Patrick H. Keys, Seiyon Kim, Michael G. Haverty, Sadasivan Shankar
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Publication number: 20200321436Abstract: Quantum dot devices, and related systems and methods, are disclosed herein. In some embodiments, a quantum dot device may include a quantum well stack; a plurality of first gates above the quantum well stack; and a plurality of second gates above the quantum well stack; wherein the plurality of first gates are arranged in electrically continuous first rows and the plurality of second gates are arranged in electrically continuous second rows parallel to the first rows. Quantum dot devices according to various embodiments of the present disclosure are based on arranging first and second gates in hexagonal/honeycomb arrays.Type: ApplicationFiled: December 23, 2017Publication date: October 8, 2020Applicant: Intel CorporationInventors: Ravi Pillarisetty, Hubert C. George, Nicole K. Thomas, Jeanette M. Roberts, Roman Caudillo, Zachary R. Yoscovits, Kanwaljit Singh, Roza Kotlyar, Patrick H. Keys, James S. Clarke
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Patent number: 10790281Abstract: Disclosed herein are stacked channel structures for metal oxide semiconductor field effect transistors (MOSFETs) and related circuit elements, computing devices, and methods. For example, a stacked channel structure may include: a semiconductor substrate having a substrate lattice constant; a fin extending away from the semiconductor substrate, the fin having an upper region and a lower region; a first transistor in the lower region, wherein the first transistor has a first channel, the first channel has a first lattice constant, and the first lattice constant is different from the substrate lattice constant; and a second transistor in the upper region, wherein the second transistor has a second channel, the second channel has a second lattice constant, and the second lattice constant is different from the substrate lattice constant.Type: GrantFiled: December 3, 2015Date of Patent: September 29, 2020Assignee: Intel CorporationInventors: Rishabh Mehandru, Roza Kotlyar, Stephen M. Cea, Patrick H. Keys
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Publication number: 20200235013Abstract: Stacked finFET structures including a fin having at least a first layer of semiconductor material stacked over or under a second layer of semiconductor material. The first and second layers may include a Group IV semiconductor material layer and a Group III-V semiconductor material layer, for example. A stacked finFET may include an N-type finFET stacked over or under a P-type finFET, the two finFETs may have channel portions within the different semiconductor material layers. Channel portions of the first and second layers of semiconductor material may be coupled to separate gate electrodes that are vertically aligned. Channel portions of the first and second layers of semiconductor material may be vertically separated by subfin portions of the first and second layers. Different layers of dielectric material adjacent to the subfin portions may improve electrical isolation between the channel portions, for example as a source of fixed charge or impurity dopants.Type: ApplicationFiled: August 24, 2017Publication date: July 23, 2020Applicant: Intel CorporationInventors: Aaron Lilak, Sean Ma, Justin R. Weber, Rishabh Mehandru, Stephen M. Cea, Patrick Morrow, Patrick H. Keys
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Patent number: 10665770Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a base; a fin extending away from the base, wherein the fin includes a quantum well layer; a gate above the fin; and a material on side faces of the fin; wherein the fin has a width between its side faces, and the fin is strained in the direction of the width.Type: GrantFiled: March 6, 2018Date of Patent: May 26, 2020Assignee: Intel CorporationInventors: Ravi Pillarisetty, Kanwaljit Singh, Patrick H. Keys, Roman Caudillo, Hubert C. George, Zachary R. Yoscovits, Nicole K. Thomas, James S. Clarke, Roza Kotlyar, Payam Amin, Jeanette M. Roberts
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Patent number: 10636907Abstract: Embodiments of the invention include a non-planar transistor with a strained channel and methods of forming such a transistor. In an embodiment, the non-planar transistor may include a semiconductor substrate. According to an embodiment, a first source/drain (S/D) region and a second S/D region may be formed over the semiconductor substrate and separated from each other by a channel region. A gate stack may be formed over the channel region. In order to increase the amount of strain that may be induced in the channel region, embodiments may include forming a strain enhancement opening in the semiconductor substrate that removes at least a portion of the semiconductor substrate from below the channel region.Type: GrantFiled: September 25, 2015Date of Patent: April 28, 2020Assignee: Intel CorporationInventors: Aaron D. Lilak, Stephen M. Cea, Rishabh Mehandru, Patrick Morrow, Patrick H. Keys
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Patent number: 10483385Abstract: Nanowire structures having wrap-around contacts are described. For example, a nanowire semiconductor device includes a nanowire disposed above a substrate. A channel region is disposed in the nanowire. The channel region has a length and a perimeter orthogonal to the length. A gate electrode stack surrounds the entire perimeter of the channel region. A pair of source and drain regions is disposed in the nanowire, on either side of the channel region. Each of the source and drain regions has a perimeter orthogonal to the length of the channel region. A first contact completely surrounds the perimeter of the source region. A second contact completely surrounds the perimeter of the drain region.Type: GrantFiled: December 23, 2011Date of Patent: November 19, 2019Assignee: Intel CorporationInventors: Stephen M. Cea, Cory E. Weber, Patrick H. Keys, Seiyon Kim, Michael G. Haverty, Sadasivan Shankar
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Publication number: 20190189795Abstract: Methods and apparatus to remove epitaxial defects in semiconductors are disclosed. A disclosed example multilayered die structure includes a fin having a first material, where the fin is epitaxially grown from a first substrate layer having a second material, and where a defect portion of the fin is etched or polished. The disclosed example multilayered die structure also includes a second substrate layer having an opening through which the fin extends.Type: ApplicationFiled: September 30, 2016Publication date: June 20, 2019Inventors: Aaron D. Lilak, Rishabh Mehandru, Patrick Morrow, Patrick H. Keys
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Publication number: 20190043951Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a quantum well stack including a quantum well layer and a barrier layer; a first gate metal above the quantum well stack, wherein the barrier layer is between the first gate metal and the quantum well layer; and a second gate metal above the quantum well stack, wherein the barrier layer is between the second gate metal and the quantum well layer, and a material structure of the second gate metal is different from a material structure of the first gate metal.Type: ApplicationFiled: June 21, 2018Publication date: February 7, 2019Applicant: Intel CorporationInventors: Nicole K. Thomas, Ravi Pillarisetty, Payam Amin, Roza Kotlyar, Patrick H. Keys, Hubert C. George, Kanwaljit Singh, James S. Clarke, David J. Michalak, Lester Lampert, Zachary R. Yoscovits, Roman Caudillo, Jeanette M. Roberts
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Publication number: 20190044050Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a base; a fin extending away from the base, wherein the fin includes a quantum well layer; a gate above the fin; and a material on side faces of the fin; wherein the fin has a width between its side faces, and the fin is strained in the direction of the width.Type: ApplicationFiled: March 6, 2018Publication date: February 7, 2019Applicant: Intel CorporationInventors: Ravi Pillarisetty, Kanwaljit Singh, Patrick H. Keys, Roman Caudillo, Hubert C. George, Zachary R. Yoscovits, Nicole K. Thomas, James S. Clarke, Roza Kotlyar, Payam Amin, Jeanette M. Roberts