Abstract: An integrated circuit structure includes a source or drain region, and a contact for the source or drain region. The contact has (i) an upper portion outside the source or drain region and (ii) a lower portion extending within the source or drain region. For example, the source or drain region wraps around the lower portion of the contact, such that an entire perimeter of the lower portion of the contact is adjacent to the source or drain region.

Abstract: Integrated circuit structures having cavity spacers, and methods of fabricating integrated circuit structures having cavity spacers, are described. For example, an integrated circuit structure includes a sub-fin structure over a stack of nanowires. A gate structure is vertically around the stack of nanowires. An internal gate spacer is between vertically adjacent ones of the nanowires and adjacent to the gate structure. A trench contact structure is laterally adjacent to a side of the gate structure. A cavity spacer is laterally between the gate structure and the trench contact structure.

Abstract: Techniques to form gate-all-around (GAA) and/or forksheet semiconductor devices that have varying semiconductor channel widths and varying numbers of semiconductor channel bodies (e.g., nanoribbons, nanosheets, nanowires). The techniques can be used in any number of transistor technologies, but are particularly useful in vertically stacked transistor configurations (e.g., stacked in a vertical z-direction from the substrate surface) and/or configurations that extend laterally in a horizontal x-or-y-direction). In an example, the n-channel device and the p-channel device may both be GAA or forksheet transistors each having any number of channel bodies extending in the same direction where the n-channel device is located vertically above the p-channel device (or vice versa). Any number of adjacent devices may be patterned from a single fin to include varying channel body widths.

Abstract: Gate-all-around integrated circuit structures having detuned device structures are described. For example, an integrated circuit structure includes a first pair of P-type epitaxial source or drain structures at ends of upper or lower ones of a first vertical arrangement of nanowires and adjacent to a first gate stack. The first pair of P-type epitaxial source or drain structures has a first electrical characteristic. A second pair of P-type epitaxial source or drain structures is at ends of upper or lower ones of a second vertical arrangement of nanowires and adjacent to a second gate stack. The second pair of P-type epitaxial source or drain structures has a second electrical characteristic different than the first electrical characteristic.

Abstract: Techniques are provided herein to form non-planar semiconductor devices in a stacked transistor configuration adjacent to stressor materials. In one example, an n-channel device and a p-channel device may both be gate-all-around transistors each having any number of nanoribbons extending in the same direction, where the n-channel device is located vertically above the p-channel device (or vice versa). Source or drain regions are adjacent to both ends of the n-channel device and both ends of the p-channel device. On the opposite side of the stacked source or drain regions (e.g., opposite from the nanoribbons), stressor materials may be used to fill the gate trench in place of additional semiconductor devices. The stressor materials may include, for instance, a compressive stressor material adjacent to the p-channel device and/or a tensile stressor material adjacent to the n-channel device. The stressor material(s) may form or otherwise be part of a diffusion cut structure.

Abstract: An integrated circuit structure includes a vertical stack including a first device, and a second device above the first device. The first device includes (i) a first source and first drain region, (ii) a first body laterally between the first source and drain regions, (iii) a first source contact including a first conductive material, and (iv) a first drain contact including the first conductive material. The second device includes (i) a second source and second drain region, (ii) a second body laterally between the second source and drain regions, (iii) a second source contact including a second conductive material, and (iv) a second drain contact including the second conductive material. In an example, the first and second conductive materials are compositionally different. In an example, the first conductive material induces compressive strain on the first body, and the second conductive material induces tensile strain on the second body.

Abstract: An integrated circuit structure includes a device layer including an upper device above a lower device. The upper device includes an upper source or drain region, and an upper source or drain contact coupled to the upper source or drain region. The lower device includes a lower source or drain region. A first conductive feature is below the device layer, where the first conductive feature is coupled to the lower source or drain region. A second conductive feature vertically extends through the device layer. In an example, the second conductive feature is to couple (i) the first conductive feature below the device layer and (ii) an interconnect structure above the device layer. Thus, the first and second conductive features facilitate a connection between the interconnect structure on the frontside of the integrated circuit and the lower source or drain region towards the backside of the integrated circuit.

Abstract: An integrated circuit structure includes a first device, and a second device laterally adjacent to the first device. The first device includes (i) a first source region, and a first source contact including a first conductive material, (ii) a first drain region, and a first drain contact including the first conductive material, and (iii) a first body laterally between the first source region and the first drain region. The second device includes (i) a second source region, and a second source contact including a second conductive material, (ii) a second drain region, and a second drain contact including the second conductive material, and (iii) a second body laterally between the second source region and the second drain region. The first and second conductive materials are compositionally different. The first conductive material induces compressive strain on the first body, and the second conductive material induces tensile strain on the second body.

Abstract: Techniques are provided herein to form gate-all-around (GAA) semiconductor devices utilizing a metal fill in an epi region of a stacked transistor configuration. In one example, an n-channel device and the p-channel device may both be GAA transistors each having any number of nanoribbons extending in the same direction where the n-channel device is located vertically above the p-channel device (or vice versa). Source or drain regions are adjacent to both ends of the n-channel device and the p-channel device. A metal fill may be provided around the source or drain region of the bottom semiconductor device to provide a high contact area between the highly conductive metal fill and the epitaxial material of that source or drain region. Metal fill may also be used around the top source or drain region to further improve conductivity throughout both of the stacked source or drain regions.

Abstract: Integrated circuit structures having deep via bars and flyover structures are described. For example, an integrated circuit structure includes a first vertical stack of horizontal nanowires over a second vertical stack of horizontal nanowires. A gate structure is over the first vertical stack of horizontal nanowires and the second vertical stack of horizontal nanowires. A conductive via bar is laterally adjacent to the first vertical stack of horizontal nanowires and the second vertical stack of horizontal nanowires. A conductive link is laterally adjacent to and in contact with the gate structure, the conductive link extending over and isolated from the conductive via bar.

Abstract: Gate-all-around integrated circuit structures having depopulated channel structures and isolation structures are described. For example, an integrated circuit structure includes a first vertical arrangement of nanowires, the first vertical arrangement of nanowires having a dielectric structure or a conductive via in place of one or more of the nanowires, the dielectric structure having a dielectric liner and a dielectric fill. A first gate stack is over the first vertical arrangement of nanowires. A second vertical arrangement of nanowires is laterally spaced apart from the first vertical arrangement of nanowires, the second vertical arrangement of nanowires having nanowires horizontally corresponding to the nanowires and the conductive via of the first vertical arrangement of nanowires. A second gate stack is over the second vertical arrangement of nanowires.

Abstract: Substrate-less diode, bipolar and feedthrough integrated circuit structures, and methods of fabricating substrate-less diode, bipolar and feedthrough integrated circuit structures, are described. For example, a substrate-less integrated circuit structure includes a semiconductor structure. A plurality of gate structures is over the semiconductor structure. A plurality of P-type epitaxial structures is over the semiconductor structure. A plurality of N-type epitaxial structures is over the semiconductor structure. One or more open locations is between corresponding ones of the plurality of gate structures. A backside contact is connected directly to one of the pluralities of P-type and N-type epitaxial structures.

Abstract: An integrated circuit structure includes a device layer including an upper device above a lower device. The upper device includes an upper source or drain region, and an upper source or drain contact coupled to the upper source or drain region. The lower device includes a lower source or drain region. A first conductive feature is below the device layer, where the first conductive feature is coupled to the lower source or drain region. A second conductive feature vertically extends through the device layer. In an example, the second conductive feature is to couple (i) the first conductive feature below the device layer and (ii) an interconnect structure above the device layer. Thus, the first and second conductive features facilitate a connection between the interconnect structure on the frontside of the integrated circuit and the lower source or drain region towards the backside of the integrated circuit.

Abstract: Heat sink incorporation in integrated circuit layers using high accuracy bonding is described. In an example, an integrated circuit structure includes a first device layer. A second device layer is below the first device layer. An interconnect structure is between the first device layer and the second device layer. A heat sink material layer is between the interconnect structure and the second device layer.

Abstract: Gate-all-around integrated circuit structures having three-dimensional (3D) conductive contact structures are described. For example, an integrated circuit structure includes a first vertical stack of horizontal nanowires over a second vertical stack of horizontal nanowires. A first epitaxial source or drain structure is at an end of the first vertical stack of horizontal nanowires. A second epitaxial source or drain structure is at an end of the second vertical stack of horizontal nanowires. The second epitaxial source or drain structure is vertically beneath the first epitaxial source or drain structure. A conductive contact structure is through the first epitaxial source or drain structure and extending only partially into the second epitaxial source or drain structure.

Abstract: Integrated circuit structures having varied percentage-Ge silicon germanium nanowires, and methods of fabricating integrated circuit structures having varied percentage-Ge silicon germanium nanowires, are described. For example, an integrated circuit structure includes a stack of horizontal nanowires. A lower one of the horizontal nanowires has a relatively higher percentage-Ge silicon and germanium composition. An upper one of the horizontal nanowires has a relatively lower percentage-Ge silicon and germanium composition. An intermediate horizontal nanowire is vertically between the lower one of the horizontal nanowires and the upper one of the horizontal nanowires and has an intermediate percentage-Ge silicon and germanium composition between the relatively higher percentage-Ge silicon and germanium composition and the relatively lower percentage-Ge silicon and germanium composition. A gate structure is vertically around the stack of horizontal nanowires.

Abstract: Gate-all-around integrated circuit structures having a heterogeneous or mixed cFET architecture are described. For example, an integrated circuit structure includes a first vertical stack of horizontal nanowires over a second vertical stack of horizontal nanowires, the first vertical stack of horizontal nanowires including (110) silicon nanowires, and the second vertical stack of horizontal nanowires including (100) silicon nanowires, or the first vertical stack of horizontal nanowires including (100) silicon nanowires, and the second vertical stack of horizontal nanowires including (110) silicon nanowires. First epitaxial source or drain structures are at ends of the first vertical stack of horizontal nanowires. Second epitaxial source or drain structures are at ends of the second vertical stack of horizontal nanowires, the second epitaxial source or drain structures vertically beneath and having a different composition than the first epitaxial source or drain structures.

Abstract: Integrated circuits including vertical diodes. In an example, a first transistor is above a second transistor. The first transistor includes a first semiconductor body extending laterally from a first source or drain region. The first source or drain region includes one of a p-type dopant or an n-type dopant. The second transistor includes a second semiconductor body extending laterally from a second source or drain region. The second source or drain region includes the other of the p-type dopant or the n-type dopant. The first source or drain region and second source or drain region are at least part of a diode structure, which may have a PN junction (e.g., first and second source/drain regions are merged) or a PIN junction (e.g., first and second source/drain regions are separated by an intrinsic semiconductor layer, or a dielectric layer and the first and second semiconductor bodies are part of the junction).

Abstract: Device stacking in integrated circuit layers using high accuracy bonding is described. In an example, an integrated circuit structure includes a first device layer above a first interconnect structure, the first device layer including nanowire-based transistors or fin-based transistors. The integrated circuit structure includes a second device layer below a second interconnect structure, the second device layer including nanowire-based transistors or fin-based transistors, and the second interconnect structure bonded directly to the first interconnect structure.

Abstract: An IC device includes a metal layer that includes staggered metal lines. The metal lines are in two or more levels along a direction. There may be one or more metal lines in each level. At least some of the metal lines are aligned along the direction so that widths of the metal lines may be maximized for a given total width of the metal layer. The alignment of the metal lines may be achieved through DSA of a diblock copolymer. The metal layer may be connected to vias in two or more levels. The vias may be also connected to another metal layer or a semiconductor device in a FEOL section of the IC device. A via and the metal line connected to the via may be formed through a same recess and deposition process to eliminate interface between the via and metal line.