Patents by Inventor Paul A. Grudowski
Paul A. Grudowski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 11222961Abstract: A semiconductor device is disclosed, a substrate structure; a raised source region; a raised drain region; a separation region disposed laterally between the raised source region and the raised drain region; a gate structure, disposed between the raised source region and the raised drain region and above a part of the separation region, the gate structure being spaced apart from the drain region and defining a drain extension region therebetween; a dummy gate structure in the drain extension region; an epitaxial layer, disposed above and in contact with the substrate structure and forming the raised source region, the raised drain region, and a raised region between the gate structure and the dummy gate structure, wherein the raised region between the gate structure and the dummy gate structure is relatively lightly doped to a conductivity of a second conductivity type which is opposite the first conductivity type.Type: GrantFiled: April 14, 2020Date of Patent: January 11, 2022Assignee: NXP B.V.Inventors: Viet Dinh, Guido Sasse, Paul Grudowski
-
Publication number: 20200343368Abstract: A semiconductor device is disclosed, a substrate structure; a raised source region; a raised drain region; a separation region disposed laterally between the raised source region and the raised drain region; a gate structure, disposed between the raised source region and the raised drain region and above a part of the separation region, the gate structure being spaced apart from the drain region and defining a drain extension region therebetween; a dummy gate structure in the drain extension region; an epitaxial layer, disposed above and in contact with the substrate structure and forming the raised source region, the raised drain region, and a raised region between the gate structure and the dummy gate structure, wherein the raised region between the gate structure and the dummy gate structure is relatively lightly doped to a conductivity of a second conductivity type which is opposite the first conductivity type.Type: ApplicationFiled: April 14, 2020Publication date: October 29, 2020Inventors: Viet Dinh, Guido Sasse, Paul Grudowski
-
Patent number: 9847389Abstract: An integrated circuit includes a device including an active region of the device, where the active region of the device includes a channel region having a transverse and a lateral direction. The device further includes an isolation region adjacent to the active region in a traverse direction from the active region, where the isolation region includes a first region located in a transverse direction to the channel region. The isolation region further includes a second region located in a lateral direction from the first region. The first region of the isolation region is under a stress of a first type and the second region of the isolative region is one of under a lesser stress of the first type or of under a stress of a second type being opposite of the first type.Type: GrantFiled: October 25, 2013Date of Patent: December 19, 2017Assignee: NXP USA, Inc.Inventors: Brian A. Winstead, Vance H. Adams, Paul A. Grudowski
-
Patent number: 8980734Abstract: An anti-counterfeiting security circuit is incorporated into an authentic integrated circuit device to induce failure in a counterfeited integrated circuit device by forming the security circuit (e.g., 21, 31, 41, 51) with one or more operatively inert high-k metal gate transistors (e.g., HKMG PMOS 112) having switched or altered work function metal layers (82) where the security circuit defines a first electrical function with the one or more operatively inert high-k metal gate transistors and defines a second different electrical function if the one or more operatively inert high-k metal gate transistors were instead fabricated as operatively functional high-k metal gate transistors of the first polarity type with a work function metal layer of the first polarity type, the security circuit would define a second different electrical function.Type: GrantFiled: March 8, 2013Date of Patent: March 17, 2015Assignee: Freescale Semiconductor, Inc.Inventors: Tab A. Stephens, Perry H. Pelley, Michael B. McShane, Paul A. Grudowski
-
Publication number: 20140252487Abstract: An anti-counterfeiting security circuit is incorporated into an authentic integrated circuit device to induce failure in a counterfeited integrated circuit device by forming the security circuit (e.g., 21, 31, 41, 51) with one or more operatively inert high-k metal gate transistors (e.g., HKMG PMOS 112) having switched or altered work function metal layers (82) where the security circuit defines a first electrical function with the one or more operatively inert high-k metal gate transistors and defines a second different electrical function if the one or more operatively inert high-k metal gate transistors were instead fabricated as operatively functional high-k metal gate transistors of the first polarity type with a work function metal layer of the first polarity type, the security circuit would define a second different electrical function.Type: ApplicationFiled: March 8, 2013Publication date: September 11, 2014Applicant: FREESCALE SEMICONDUCTOR, INC.Inventors: Tab A. Stephens, Perry H. Pelley, Michael B. McShane, Paul A. Grudowski
-
Publication number: 20140054704Abstract: An integrated circuit includes a device including an active region of the device, where the active region of the device includes a channel region having a transverse and a lateral direction. The device further includes an isolation region adjacent to the active region in a traverse direction from the active region, where the isolation region includes a first region located in a transverse direction to the channel region. The isolation region further includes a second region located in a lateral direction from the first region. The first region of the isolation region is under a stress of a first type and the second region of the isolative region is one of under a lesser stress of the first type or of under a stress of a second type being opposite of the first type.Type: ApplicationFiled: October 25, 2013Publication date: February 27, 2014Applicant: FREESCALE SEMICONDUCTOR, INC.Inventors: Brian A. Winstead, Vance H. Adams, Paul A. Grudowski
-
Patent number: 8569858Abstract: An integrated circuit includes a device including an active region of the device, where the active region of the device includes a channel region having a transverse and a lateral direction. The device further includes an isolation region adjacent to the active region in a traverse direction from the active region, where the isolation region includes a first region located in a transverse direction to the channel region. The isolation region further includes a second region located in a lateral direction from the first region. The first region of the isolation region is under a stress of a first type and the second region of the isolative region is one of under a lesser stress of the first type or of under a stress of a second type being opposite of the first type.Type: GrantFiled: December 20, 2006Date of Patent: October 29, 2013Assignee: Freescale Semiconductor, Inc.Inventors: Brian A. Winstead, Vance H. Adams, Paul A. Grudowski
-
Patent number: 8021957Abstract: An electronic device can include a field isolation region and a first insulating layer having a first strain and having a portion, which from a top view, lies entirely within the field isolation region. The electronic device can also include a second insulating layer having a second strain different from the first strain and including an opening. From a top view, the portion of the first insulating layer can lie within the opening in the second insulating layer. In one embodiment, the field isolation region can include a dummy structure and the portion of the first insulating layer can overlie the dummy structure. A process of forming the electronic device can include forming an island portion of an insulating layer wherein from a top view, the island portion lies entirely within the field isolation region.Type: GrantFiled: September 15, 2010Date of Patent: September 20, 2011Assignee: Freescale Semiconductor, Inc.Inventors: Paul A. Grudowski, Venkat R. Kolagunta, Mehul D. Shroff
-
Publication number: 20110210401Abstract: A method for making a semiconductor device is provided which comprises (a) providing a semiconductor structure equipped with a gate (209) and a channel region, said channel region being associated with the gate; (b) depositing a first sub-layer (231) of a first stressor material over the semiconductor structure, said first stressor material containing silicon- nitrogen bonds and imparting tensile stress to the semiconductor structure; (c) curing the first stressor material through exposure to a radiation source; (d) depositing a second sub-layer (233) of a second stressor material over the first sub-layer, said second stressor material containing silicon-nitrogen bonds and imparting tensile stress to the semiconductor structure; and (e) curing the second sub-layer of stressor material through exposure to a radiation source.Type: ApplicationFiled: February 26, 2010Publication date: September 1, 2011Inventors: Kurt H. Junker, Paul A. Grudowski, Xiang-Zheng Bo, Tien Ying Luo
-
Publication number: 20110003444Abstract: An electronic device can include a field isolation region and a first insulating layer having a first strain and having a portion, which from a top view, lies entirely within the field isolation region. The electronic device can also include a second insulating layer having a second strain different from the first strain and including an opening. From a top view, the portion of the first insulating layer can lie within the opening in the second insulating layer. In one embodiment, the field isolation region can include a dummy structure and the portion of the first insulating layer can overlie the dummy structure. A process of forming the electronic device can include forming an island portion of an insulating layer wherein from a top view, the island portion lies entirely within the field isolation region.Type: ApplicationFiled: September 15, 2010Publication date: January 6, 2011Applicant: FREESCALE SEMICONDUCTOR, INC.Inventors: Paul A. Grudowski, Venkat R. Kolagunta, Mehul D. Shroff
-
Patent number: 7843011Abstract: An electronic device can include a field isolation region and a first insulating layer having a first strain and having a portion, which from a top view, lies entirely within the field isolation region. The electronic device can also include a second insulating layer having a second strain different from the first strain and including an opening. From a top view, the portion of the first insulating layer can lie within the opening in the second insulating layer. In one embodiment, the field isolation region can include a dummy structure and the portion of the first insulating layer can overlie the dummy structure. A process of forming the electronic device can include forming an island portion of an insulating layer wherein from a top view, the island portion lies entirely within the field isolation region.Type: GrantFiled: January 31, 2007Date of Patent: November 30, 2010Assignee: Freescale Semiconductor, Inc.Inventors: Paul A. Grudowski, Venkat R. Kolagunta, Mehul D. Shroff
-
Patent number: 7745298Abstract: A method for forming a via includes forming a gate electrode over a semiconductor substrate, forming a source/drain region in the semiconductor substrate adjacent the gate electrode, forming a silicide region in the source/drain region, forming a post-silicide spacer adjacent the gate electrode after forming the silicide region, forming an interlayer dielectric layer over the gate electrode, the post-silicide spacer, and the silicide region, and forming a conductive via in the interlayer dielectric layer, extending to the silicide region.Type: GrantFiled: November 30, 2007Date of Patent: June 29, 2010Assignee: Freescale Semiconductor, Inc.Inventors: Tab A. Stephens, Olubunmi O. Adetutu, Paul A. Grudowski, Matthew T. Herrick
-
Patent number: 7736957Abstract: A method for forming a semiconductor device includes providing a semiconductor substrate; forming a gate dielectric over the semiconductor substrate; forming a gate electrode over the gate dielectric; forming an insulating layer over a sidewall of the gate electrode; defining source and drain regions in the semiconductor substrate adjacent to the insulating layer; implanting a dopant in the source and drain regions of the semiconductor substrate to form doped source and drain regions; forming a sidewall spacer adjacent to the insulating layer; forming a recess in the semiconductor substrate in the source and drain regions, wherein the recess extends directly underneath the spacer a predetermined distance from a channel regions; and forming a stressor material in the recess. The method allows the stressor material to be formed closer to a channel region, thus improving carrier mobility in the channel while not degrading short channel effects.Type: GrantFiled: May 31, 2007Date of Patent: June 15, 2010Assignee: Freescale Semiconductor, Inc.Inventors: Paul A. Grudowski, Veeraraghavan Dhandapani, Darren V. Goedeke, Voon-Yew Thean, Stefan Zollner
-
Patent number: 7714318Abstract: An electronic device can include a transistor structure of a first conductivity type, a field isolation region, and a layer of a first stress type overlying the field isolation region. For example, the transistor structure may be a p-channel transistor structure and the first stress type may be tensile, or the transistor structure may be an n-channel transistor structure and the first stress type may be compressive. The transistor structure can include a channel region that lies within an active region. An edge of the active region includes the interface between the channel region and the field isolation region. From a top view, the layer can include an edge the lies near the edge of the active region. The positional relationship between the edges can affect carrier mobility within the channel region of the transistor structure.Type: GrantFiled: July 28, 2008Date of Patent: May 11, 2010Assignee: Freescale Semiconductor, IncInventors: Vance H. Adams, Paul A. Grudowski, Venkat R. Kolagunta, Brian A. Winstead
-
Patent number: 7700499Abstract: A method for making a semiconductor device is provided which comprises (a) providing a semiconductor structure equipped with a gate (209) and a channel region, said channel region being associated with the gate; (b) depositing a first sub-layer (231) of a first stressor material over the semiconductor structure, said first stressor material containing silicon-nitrogen bonds and imparting tensile stress to the semiconductor structure; (c) curing the first stressor material through exposure to a radiation source; (d) depositing a second sub-layer (233) of a second stressor material over the first sub-layer, said second stressor material containing silicon-nitrogen bonds and imparting tensile stress to the semiconductor structure; and (e) curing the second sub-layer of stressor material through exposure to a radiation source.Type: GrantFiled: January 11, 2008Date of Patent: April 20, 2010Assignee: Freescale Semiconductor, Inc.Inventors: Kurt H. Junker, Paul A. Grudowski, Xiang-Zheng Bo, Tien Ying Luo
-
Patent number: 7687354Abstract: In a semiconductor fabrication process, an epitaxial layer is formed overlying a substrate, wherein there is a lattice mismatch between the epitaxial layer and the substrate. A hard mask having an opening is formed overlying the epitaxial layer. A recess is formed through the epitaxial layer and into the substrate. The recess is substantially aligned to the opening in the hard mask. A channel region of a semiconductor device is formed in the recess.Type: GrantFiled: February 29, 2008Date of Patent: March 30, 2010Assignee: Freescale Semiconductor, Inc.Inventors: Paul A. Grudowski, Veeraraghavan Dhandapani, Stefan Zollner
-
Patent number: 7678698Abstract: A semiconductor device has at least two tensile stressor layers that are cured with UV radiation. A second tensile stressor layer is formed after a first stressor layer. In some examples, the tensile stressor layers include silicon nitride and hydrogen. In some examples, the second tensile stressor layer has a greater shrinkage percentage due to the curing than the first tensile stressor layer. In one form, the second tensile stressor layer after the curing exerts a greater tensile stress than the first tensile stressor layer. The tensile stressors layers are utilized to improve carrier mobility in an N-channel transistor and thus enhance transistor performance. In one form a single group of overlying tensile stressor layers is provided with each layer being increasingly thicker and having increasingly more hydrogen prior to being cured. In other embodiments multiple overlying groups are formed, each group having a similar repeating depth and hydrogen profile.Type: GrantFiled: May 4, 2007Date of Patent: March 16, 2010Assignee: Freescale Semiconductor, Inc.Inventors: Xiangzheng Bo, Tien Ying Luo, Kurt H. Junker, Paul A. Grudowski, Venkat R. Kolagunta
-
Publication number: 20090221119Abstract: In a semiconductor fabrication process, an epitaxial layer is formed overlying a substrate, wherein there is a lattice mismatch between the epitaxial layer and the substrate. A hard mask having an opening is formed overlying the epitaxial layer. A recess is formed through the epitaxial layer and into the substrate. The recess is substantially aligned to the opening in the hard mask. A channel region of a semiconductor device is formed in the recess.Type: ApplicationFiled: February 29, 2008Publication date: September 3, 2009Inventors: Paul A. Grudowski, Veeraraghavan Dhandapani, Stefan Zollner
-
Patent number: 7579228Abstract: A method for making a semiconductor device is provided, comprising (a) providing a semiconductor structure comprising a first gate electrode (210); (b) forming a first set of organic spacers (213) adjacent to said first electrode; (c) depositing a first photo mask (215) over the structure; and (d) simultaneously removing the first set of organic spacers and the first photo mask.Type: GrantFiled: July 10, 2007Date of Patent: August 25, 2009Assignee: Freescale Semiconductor, Inc.Inventors: Paul A. Grudowski, Kurt H. Junker, Thomas J. Kropewnicki, Andrew G. Nagy
-
Publication number: 20090142895Abstract: A method for forming a via includes forming a gate electrode over a semiconductor substrate, forming a source/drain region in the semiconductor substrate adjacent the gate electrode, forming a silicide region in the source/drain region, forming a post-silicide spacer adjacent the gate electrode after forming the silicide region, forming an interlayer dielectric layer over the gate electrode, the post-silicide spacer, and the silicide region, and forming a conductive via in the interlayer dielectric layer, extending to the silicide region.Type: ApplicationFiled: November 30, 2007Publication date: June 4, 2009Inventors: Tab A. Stephens, Olubunmi O. Adetutu, Paul A. Grudowski, Matthew T. Herrick