Abstract: The present invention provides a double fiber optic cross connect (OXC) package. The double package includes a substrate with a first surface and a second surface; a micromirror array coupled to the second surface of the substrate; a first cap optically coupled to the micromirror array; and a second cap optically coupled to the micromirror array. The first cap, along with a substrate populated with a micromirror array and a set of sidewalls, form a volume which is preferably hermetically sealed. This volume is further packaged by the second cap with another set of sidewalls. With the first cap, only a short distance is used in redirecting the light. This short distance is uniform for each micromirror in the switch. The major portion of the beam is thus available for scanning. With the second cap, the light beam is folded during the switching operation, resulting in a smaller switch package. By folding the light in the switch architecture, the size of the switch package is reduced.

Abstract: The present invention provides a method and an optical cross connect (OXC) package which minimizes optical loss and crosstalk while also reducing the size of the package. The method includes directing a light beam from a first collimator of a plurality of collimators to a first micromirror of a plurality of micromirrors; folding the light beam from the first micromirror onto a second micromirror of the plurality of micromirrors; and directing the light beam from the second micromirror to a second collimator of the plurality of collimators, wherein a uniform redirection length is provided between each of the plurality of collimators and each of the plurality of micromirror. In the preferred embodiment, the OXC package comprises a first cap with reflecting surfaces and a second cap. With the first cap, only a short distance is used in redirecting the light. This allows for the major portion of the light to be available for scanning.

Abstract: Positive resists sensitive to UV, electron beam, and x-ray radiation which are alkaline developable are formulated from a polymer material comprising recurrent structures having alkaline soluble groups pendent to the polymer backbone, a portion of which groups are substituted with acid labile groups.

Abstract: An optical mirror system in accordance with the present invention is disclosed. The optical mirror system comprises a mirror frame and an optical surface coupled to the mirror frame. The mirror system further includes an electrostatic shield coupled to optical surface and the mirror frame and an electrode system for causing the optical surface to be rotated without being deformed. In operation, primary and secondary electrodes are utilized. Differential capacitive sensing may be used to reduce the noise in the sense signal. The mirror can be fabricated using standard surface-micromachining processes, and aside from one-time assembly operations, the device has no frictional wear.

Abstract: An optical mirror system with multi-axis rotational control is disclosed. The mirror system includes an optical surface assembly, and at least one leg assembly coupled to the optical surface assembly. The at least one leg assembly supports the optical surface above a substrate. A system and method in accordance with the present invention can operate with many different actuator mechanisms, including but not limited to, electrostatic, thermal, piezoelectric, and magnetic. An optical mirror system in accordance with the present invention accommodates large mirrors and rotation angles. Scanning mirrors can be made with this technique using standard surface-micromachining processes, or a deep RIE etch process. A device in accordance with the present invention meets the requirements for a directly scalable, high port count optical switch, utilizing a two mirror per optical I/O port configuration.

Abstract: An optical mirror system with multi-axis rotational control is disclosed. The mirror system includes an optical surface assembly, and at least one leg assembly coupled to the optical surface assembly. The at least one leg assembly supports the optical surface above a substrate. A system and method in accordance with the present invention can operate with many different actuator mechanisms, including but not limited to, electrostatic, thermal, piezoelectric, and magnetic. An optical mirror system in accordance with the present invention accommodates large mirrors and rotation angles. Scanning mirrors can be made with this technique using standard surface-micromachining processes, or a deep RIE etch process. A device in accordance with the present invention meets the requirements for a directly scalable, high port count optical switch, utilizing a two mirror per optical I/O port configuration.

Abstract: A process for the stoichiometric carbonation of a hydroxyaromatic material is provided which comprises the steps of (a) mixing together in a reaction vessel (1) a hydroxyaromatic material, (2) a sufficient amount of a dialkyl dicarbonate to give the desired degree of substitution, (3) a catalytic amount of an unhindered tertiary amine, and (4) a solvent, (b) stirring the reaction mixture, (c) precipitating the alkyl carbonate of the hydroxyaromatic material, and (d) recovering the alkyl carbonate of the hydroxyaromatic material.

Abstract: Positive resists sensitive to UV, electron beam, and x-ray radiation which are alkaline developable are formulated from a polymer material comprising recurrent structures having alkaline soluble groups pendent to the polymer backbone, a portion of which groups are substituted with acid labile groups.