Abstract: This invention relates to a stable aqueous silane emulsion with constant particle size. The emulsion comprises a continuous water phase, a discontinuous silane phase, and an emulsifier system. The emulsifier system contains a primary surfactant and a cosurfactant. The primary surfactant functions to prevent coalescence of particles, by steric or ionic repulsion between particles. The cosurfactant prevents diffusion of the silane into the aqueous phase. The combination of primary surfactant and cosurfactant results in an adsorbed inner layer of cosurfactant between the silane and the outer layer of a mixture of both surfactants which contacts the water phase. The combination of primary surfactant and cosurfactant provides a barrier which prevents diffusion of silane into the water phase. A method for preparing the emulsion is also disclosed.

Abstract: The present invention provides systems, methods and apparatus for high temperature (at least about 500-800.degree. C.) processing of semiconductor wafers. The systems, methods and apparatus of the present invention allow multiple process steps to be performed in situ in the same chamber to reduce total processing time and to ensure high quality processing for high aspect ratio devices. Performing multiple process steps in the same chamber also increases the control of the process parameters and reduces device damage. In particular, the present invention can provide high temperature deposition, heating and efficient cleaning for forming dielectric films having thickness uniformity, good gap fill capability, high density, low moisture, and other desired characteristics.

Abstract: By using a nonionic surfactant as the primary emulsifier having an hydrophilic-lipophilic balance (HLB) greater than about 13, at a concentration sufficient to provide about 0.5-3 molecules per 100 square .ANG. of surface area of silicone particles; and a nonionic cosurfactant having an HLB less than about 11, at a concentration sufficient to provide 5-15 molecules of emulsifier per 100 square .ANG. of surface area of silicone particles; aqueous emulsions containing low molecular weight silicones can be prepared which possess improved particle size stability. In particular, the low molecular weight silicones have a molecular weight less than about 1,000, and a viscosity of not greater than about 5 mm.sup.2 /sec. These emulsions can be used in applications relating to laundry pre-spotting, automotive bug and tar removal, and hard surface cleaning.

Abstract: This invention relates to a stable aqueous silane emulsion with constant particle size. The emulsion comprises a continuous water phase, a discontinuous silane phase, and an emulsifier system. The emulsifier system contains a primary surfactant and a cosurfactant. The primary surfactant functions to prevent coalescence of particles, by steric or ionic repulsion between particles. The cosurfactant prevents diffusion of the silane into the aqueous phase. The combination of primary surfactant and cosurfactant results in an adsorbed inner layer of cosurfactant between the silane and the outer layer of a mixture of both surfactants which contacts the water phase. The combination of primary surfactant and cosurfactant provides a barrier which prevents diffusion of silane into the water phase. A method for preparing the emulsion is also disclosed.

Abstract: The present invention provides systems, methods and apparatus for high temperature (at least about 500-800.degree. C.) processing of semiconductor wafers. The systems, methods and apparatus of the present invention allow multiple process steps to be performed in situ in the same chamber to reduce total processing time and to ensure high quality processing for high aspect ratio devices. Performing multiple process steps in the same chamber also increases the control of the process parameters and reduces device damage. In particular, the present invention can provide high temperature deposition, heating and efficient cleaning for forming dielectric films having thickness uniformity, good gap fill capability, high density, low moisture, and other desired characteristics.

Abstract: This invention relates to 1,2-diol functional polysiloxane emulsions obtained by a variety of polymerization methods. This invention further relates to an organopolysiloxane emulsion comprising an organopolysiloxane polymer having pendant organic diol groups, at least one nonionic surfactant, at least one anionic surfactant, and water. The emulsions of this invention are useful as fiber treatment agents and provide softness and hydrophilicity to fibers treated with the emulsion.

Abstract: A silicone-based antifoam composition, in the form of an emulsion, is prepared from the reaction of (A) a primary silicone composition and (B) a polydiorganosiloxane having condensable terminal groups in a nonpolar organic medium selected from the group consisting of polyisobutylene and mineral oil. The reaction of the primary silicone composition (A) and the polydiorganosiloxane (B) produces a secondary silicone composition, which forms the discontinuous phase of the emulsion and the nonpolar organic medium forms the continuous phase of the emulsion. The resulting composition of the invention exhibits antifoam efficacy greater than that of the primary silicone composition.

Abstract: A solution of an alcohol stable emulsion or microemulsion containing an organopolysiloxane is made by polymerizing a cyclic siloxane in an aqueous medium containing the cyclic siloxane, a nonionic surfactant, an ionic surfactant, and a catalyst, until an organopolysiloxane of desired molecular weight is obtained; adding a silicone polyether to the emulsion or microemulsion and mixing the silicone polyether and the emulsion or microemulsion to form a blend; and adding the blend of silicone polyether and emulsion or microemulsion to aqueous alcohol. It is beneficial to cool the blend to below 20.degree.-25.degree. C. before adding it to aqueous alcohol. It is also beneficial to mix the silicone polyether and the emulsion or microemulsion without application of mechanically induced shear.

Abstract: The instant invention pertains to a method for making amino-functional polysiloxane emulsions wherein said method comprises the emulsion polymerization of a mixture comprising cyclosiloxanes and an aminosilane having an amino-functional group solubility parameter equal to or less than 10.0. Said emulsion polymerization is carried out in the presence of water, at least one cationic surfactant and a basic polymerization catalyst. By using an aminosilane having an amino-functional group solubility parameter of equal to or less than 10.0 it is possible to produce emulsions with higher amine concentrations in the resulting polymer.

Abstract: A process for permanent waving of hair by a reaction in which cystine bridges are reduced to cysteine, the hair reshaped, and the reaction reversed. The improvement in the process resides in the step of reducing or reversing the reaction by applying to hair a composition which includes an emulsion polymerized mercapto functional silicone. Permanent hair waving with waving lotions, neutralizing solutions, or both, containing such emulsion polymerized mercapto functional silicones, provide waved hair with improved conditioning benefits.

Abstract: Described is a method of preparing microemulsions of organopolysiloxanes, by copolymerizing a cyclic siloxane and a polyfunctional silane, in an aqueous medium containing a nonionic surfactant, an anionic or cationic surfactant, and a catalyst, until the desired increase in molecular weight is obtained. The invention resides in controlling the gel content of the organopolysiloxanes in the microemulsion by control of the concentration of silane and concentration of silanol in the resulting organopolysiloxane, such that a functionality ratio .phi. results in formation of a gel-free polymer molecular weight distribution of finite organopolysiloxane species in the microemulsion.

Abstract: Described is a method of preparing microemulsions of organopolysiloxanes, by copolymerizing a cyclic siloxane and a polyfunctional silane, in an aqueous medium containing a nonionic surfactant, an anionic or cationic surfactant, and a catalyst, until the desired increase in molecular weight is obtained. The invention resides in controlling the gel content of the organopolysiloxanes in the microemulsion by control of the concentration of silane and concentration of silanol in the resulting organopolysiloxane, such that a functionality ratio .phi. results in formation of a gel-free polymer molecular weight distribution of finite organopolysiloxane species in the microemulsion.