Patents by Inventor Pawan Kumar Nimmakayala

Pawan Kumar Nimmakayala has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate Support Method
    Publication number: 20080204693
    Abstract: The present invention includes a method for supporting a substrate that features a chuck body having a body surface with a pin extending therefrom having a contact surface lying in a plane, with the pin being movably coupled to the chuck body to move with respect to the plane. To that end, the method includes disposing the substrate upon two spaced-apart bodies; and moving one of the two spaced-apart bodies away from the substrate.
    Type: Application
    Filed: August 13, 2007
    Publication date: August 28, 2008
    Applicant: BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM
    Inventors: Pawan Kumar Nimmakayala, Sidlgata V. Sreenivasan
  • Interferometric analysis for the manufacture of nano-scale devices
    Patent number: 7292326
    Abstract: The present invention features a system to determine relative spatial parameters between two coordinate systems, which may be a mold and a region of a substrate in which mold is employed to generate a pattern. The system senses relative alignment between the two coordinate systems at multiple points and determines relative spatial parameters therebetween. The relative spatial parameters include a relative area and a relative shape.
    Type: Grant
    Filed: November 30, 2004
    Date of Patent: November 6, 2007
    Assignee: Molecular Imprints, Inc.
    Inventors: Pawan Kumar Nimmakayala, Tom H. Rafferty, Alireza Aghili, Byung-Jin Choi, Philip D. Schumaker, Daniel A. Babbs
  • Enhanced Multi Channel Alignment
    Publication number: 20070231421
    Abstract: A imprint lithography system operable for imprinting a pattern into a material deposited between an imprint mold and a substrate, the system including, inter alia, a first set of imaging units positioned at a first angle relative to normal of the substrate; and a second set of imaging units positioned at a second angle relative to normal of the substrate, wherein the first and second angles are not equal to each other.
    Type: Application
    Filed: March 30, 2007
    Publication date: October 4, 2007
    Applicant: Molecular Imprints, Inc.
    Inventors: Pawan Kumar Nimmakayala, Byung-Jin Choi, Tom H. Rafferty, Philip D. Schumaker
  • Substrate support method
    Patent number: 7259833
    Abstract: The present invention includes a method for supporting a substrate that features a chuck body having a body surface with a pin extending therefrom having a contact surface lying in a plane, with the pin being movably coupled to the chuck body to move with respect to the plane. To that end, the method includes disposing the substrate upon two spaced-apart bodies; and moving one of the two spaced-apart bodies away from the substrate.
    Type: Grant
    Filed: May 25, 2005
    Date of Patent: August 21, 2007
    Assignee: Board of Regents, The Universtiy of Texas System
    Inventors: Pawan Kumar Nimmakayala, Sidlgata V. Sreenivasan
  • Substrate support system
    Patent number: 7245358
    Abstract: The present invention includes a substrate support system that features a chuck body having a body surface with a pin extending therefrom having a contact surface lying in a plane, with the pin being movably coupled to the chuck body to move with respect to the plane. As a result the substrate support system attenuates if not avoids generating non-planarity in a substrate that results from a presence of particulate contaminants. This is achieved by fabricating the pin to be compliant, allowing the same to move to accommodate the presence of the particle while maintaining sufficient planarity in the substrate.
    Type: Grant
    Filed: May 25, 2005
    Date of Patent: July 17, 2007
    Assignee: Board of Regents, The University of Texas System
    Inventors: Pawan Kumar Nimmakayala, Sidlgata V. Sreenivasan