Patents by Inventor Pei-Hsun Wang

Pei-Hsun Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10993973
    Abstract: The present invention provides a lactobacillus strain-containing pharmaceutical composition and food composition for improving of kidney disease and inhibiting inflammation, which comprises an isolated lactic acid bacteria strain. The isolated lactic acid bacteria strain is at least one selected from a group including BLI-02 strain, CGMCC No. 15212, Bifidobacterium longum subsp. infantis, TYCA06 strain, CGMCC No. 15210, Lactobacillus acidophilus, VDD088 strain, CGMCC No. 15211, Bifidobacterium bifidum, and combinations thereof.
    Type: Grant
    Filed: July 19, 2018
    Date of Patent: May 4, 2021
    Assignee: Glac Biotech Co., Ltd.
    Inventors: Pei-Shan Hsieh, Yi-Chun Tsai, Chung-Wei Kuo, Hsieh-Hsun Ho, Hung-Chih Lin, Jiu-Yao Wang
  • Publication number: 20210104441
    Abstract: Provided are FinFET devices and methods of forming the same. A FinFET device includes a substrate, a first gate strip and a second gate strip. The substrate has at least one first fin in a first region, at least one second fin in a second region and an isolation layer covering lower portions of the first and second fins. The first fin includes a first material layer and a second material layer over the first material layer, and the interface between the first material layer and the second material layer is uneven. The first gate strip is disposed across the first fin. The second gate strip is disposed across the second fin.
    Type: Application
    Filed: November 23, 2020
    Publication date: April 8, 2021
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Hao Wang, Jui-Chien Huang, Kuo-Cheng Ching, Chun-Hsiung Lin, Pei-Hsun Wang
  • Publication number: 20210098625
    Abstract: A method for forming a semiconductor device structure is provided. The method includes forming a first gate stack and a second gate stack over a substrate. The substrate has a base, a first fin structure, and a second fin structure over the base, the second fin structure is wider than the first fin structure. The method includes partially removing the first fin structure, which is not covered by the first gate stack, and the second fin structure, which is not covered by the second gate stack. The method includes forming an inner spacer layer over the first fin structure, which is not covered by the first gate stack. The method includes forming a first stressor and a second stressor respectively over the inner spacer layer and the second fin structure, which is not covered by the second gate stack.
    Type: Application
    Filed: September 27, 2019
    Publication date: April 1, 2021
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ching-Wei TSAI, Yu-Xuan HUANG, Kuan-Lun CHENG, Chih-Hao WANG, Min CAO, Jung-Hung CHANG, Lo-Heng CHANG, Pei-Hsun WANG, Kuo-Cheng CHIANG
  • Publication number: 20210098605
    Abstract: A semiconductor device according to the present disclosure includes first gate-all-around (GAA) devices in a first device area and a second GAA devices in a second device area. Each of the first GAA devices includes a first vertical stack of channel members, a first gate structure over and around the first vertical stack of channel members, and a plurality of inner spacer features. Each of the second GAA devices includes a second vertical stack of channel members and a second gate structure over and around the second vertical stack of channel members. Two adjacent channel members of the first vertical stack of channel members are separated by a portion of the first gate structure and at least one of the plurality of inner spacer features. Two adjacent channel members of the second vertical stack of channel members are separated only by a portion of the second gate structure.
    Type: Application
    Filed: September 26, 2019
    Publication date: April 1, 2021
    Inventors: Pei-Hsun Wang, Kuo-Cheng Chiang, Lo-Heng Chang, Jung-Hung Chang, Chih-Hao Wang
  • Publication number: 20210098304
    Abstract: Provided is a method of manufacturing a semiconductor device including providing a semiconductor substrate, and forming an epitaxial stack on the semiconductor substrate. The epitaxial stack comprises a plurality of first epitaxial layers interposed by a plurality of second epitaxial layers. The method further includes patterning the epitaxial stack and the semiconductor substrate to form a semiconductor fin, recessing a portion of the semiconductor fin to form source/drain spaces; and laterally removing portions of the plurality of first epitaxial layers exposed by the source/drain spaces to form a plurality of cavities. The method further includes forming inner spacers in the plurality of cavities, performing a treatment process to remove an inner spacer residue in the source/drain spaces, forming S/D features in the source/drain spaces, and forming a gate structure engaging the semiconductor fin.
    Type: Application
    Filed: March 2, 2020
    Publication date: April 1, 2021
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Lo-Heng Chang, Chih-Hao Wang, Kuo-Cheng Chiang, Jung-Hung Chang, Pei-Hsun Wang
  • Publication number: 20210083090
    Abstract: Methods for manufacturing a semiconductor structure is provided. The method for manufacturing the semiconductor structure includes forming nanowire structures over a substrate and forming a gate structure across nanowire structures. The method for manufacturing the semiconductor structure also includes forming a source/drain structure adjacent to the gate structure and forming a Si layer over the source/drain structure. The method for manufacturing the semiconductor structure also includes forming a SiGe layer over the Si layer and oxidizing the SiGe layer to form an oxide layer. The method for manufacturing the semiconductor structure also includes forming a contact through the Si layer over the source/drain structure.
    Type: Application
    Filed: September 16, 2019
    Publication date: March 18, 2021
    Inventors: Chen-Han WANG, Pei-Hsun WANG, Chun-Hsiung LIN, Chih-Hao WANG
  • Patent number: 10944009
    Abstract: The present disclosure provides a semiconductor device that includes a semiconductor fin disposed over a substrate; an isolation structure at least partially surrounding the fin; an epitaxial source/drain (S/D) feature disposed over the semiconductor fin, wherein an extended portion of the epitaxial S/D feature extends over the isolation structure; and a silicide layer disposed on the epitaxial S/D feature, the silicide layer continuously surrounding the extended portion of the epitaxial S/D feature over the isolation structure.
    Type: Grant
    Filed: September 25, 2019
    Date of Patent: March 9, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Pei-Hsun Wang, Chih-Chao Chou, Shih-Cheng Chen, Jung-Hung Chang, Jui-Chien Huang, Chun-Hsiung Lin, Chih-Hao Wang
  • Publication number: 20210066473
    Abstract: A semiconductor device is provided. The semiconductor device includes a plurality of channel layers stacked over a semiconductor substrate and spaced apart from one another, a source/drain structure adjoining the plurality of channel layers, a gate structure wrapping around the plurality of channel layers, and a first inner spacer between the gate structure and the source/drain structure and between the plurality of channel layers. The first inner spacer is made of an oxide of a semiconductor material.
    Type: Application
    Filed: October 27, 2020
    Publication date: March 4, 2021
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun-Hsiung LIN, Pei-Hsun WANG, Chih-Hao WANG, Kuo-Cheng CHING, Jui-Chien HUANG
  • Publication number: 20210050429
    Abstract: A semiconductor device is provided. The semiconductor device includes a fin protruding from a semiconductor substrate and a gate structure over the fin. The semiconductor device also includes a source region and a drain region in the fin and at opposite sides of the gate structure. The semiconductor device further includes a gate spacer on a sidewall of the gate structure. The gate spacer includes an air-gap spacer and a sealing spacer above the air-gap spacer, an upper portion of the gate structure is laterally overlapping with the sealing spacer, and the bottom portion of the gate structure is laterally overlapping with the air gap spacer.
    Type: Application
    Filed: October 19, 2020
    Publication date: February 18, 2021
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chun-Hsiung LIN, Pei-Hsun WANG, Chih-Chao CHOU, Chia-Hao CHANG, Chih-Hao WANG
  • Patent number: 10923598
    Abstract: Semiconductor device and the manufacturing method thereof are disclosed herein. An exemplary method comprises forming a fin over a substrate, wherein the fin comprises a first semiconductor layer and a second semiconductor layer including different semiconductor materials, and the fin comprises a channel region and a source/drain region; forming a dummy gate structure over the channel region of the fin and over the substrate; etching a portion of the fin in the source/drain region to form a trench therein, wherein a bottom surface of the trench is below a bottom surface of the second semiconductor layer; selectively removing an edge portion of the second semiconductor layer in the channel region such that the second semiconductor layer is recessed; forming a sacrificial structure around the recessed second semiconductor layer and over the bottom surface of the trench; and epitaxially growing a source/drain feature in the source/drain region of the fin.
    Type: Grant
    Filed: July 15, 2019
    Date of Patent: February 16, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Pei-Hsun Wang, Chun-Hsiung Lin, Chih-Hao Wang
  • Publication number: 20210020524
    Abstract: A method includes forming an epitaxy semiconductor layer over a semiconductor substrate, and etching the epitaxy semiconductor layer and the semiconductor substrate to form a semiconductor strip, which includes an upper portion acting as a mandrel, and a lower portion under the mandrel. The upper portion is a remaining portion of the epitaxy semiconductor layer, and the lower portion is a remaining portion of the semiconductor substrate. The method further includes growing a first semiconductor fin starting from a first sidewall of the mandrel, growing a second semiconductor fin starting from a second sidewall of the mandrel. The first sidewall and the second sidewall are opposite sidewalls of the mandrel. A first transistor is formed based on the first semiconductor fin. A second transistor is formed based on the second semiconductor fin.
    Type: Application
    Filed: July 18, 2019
    Publication date: January 21, 2021
    Inventors: Pei-Hsun Wang, Shih-Cheng Chen, Chun-Hsiung Lin, Chih-Hao Wang
  • Publication number: 20200381545
    Abstract: A semiconductor device and a method of forming the same are provided. A semiconductor device according to the present disclosure includes a first source/drain feature, a second source/drain feature, a first semiconductor channel member and a second semiconductor channel member extending between the first and second source/drain features, and a first dielectric feature and a second dielectric feature each including a first dielectric layer and a second dielectric layer different from the first dielectric layer. The first and second dielectric features are sandwiched between the first and second semiconductor channel members.
    Type: Application
    Filed: December 5, 2019
    Publication date: December 3, 2020
    Inventors: Kuo-Cheng Chiang, Zhi-Chang Lin, Shih-Cheng Chen, Chih-Hao Wang, Pei-Hsun Wang, Lo-Heng Chang, Jung-Hung Chang
  • Patent number: 10847426
    Abstract: Provided are FinFET devices and methods of forming the same. A FinFET device includes a substrate, a first gate strip and a second gate strip. The substrate has at least one first fin in a first region, at least one second fin in a second region and an isolation layer covering lower portions of the first and second fins. The first fin includes a first material layer and a second material layer over the first material layer, and the interface between the first material layer and the second material layer is uneven. The first gate strip is disposed across the first fin. The second gate strip is disposed across the second fin.
    Type: Grant
    Filed: October 28, 2018
    Date of Patent: November 24, 2020
    Assignee: Taiwan Semicondutor Manufacturing Company, Ltd.
    Inventors: Chih-Hao Wang, Jui-Chien Huang, Kuo-Cheng Ching, Chun-Hsiung Lin, Pei-Hsun Wang
  • Patent number: 10825919
    Abstract: A method of fabricating semiconductor devices is provided. The method includes forming a fin structure on a substrate, in which the fin structure includes a fin stack of alternating first and second semiconductor layers and forming recesses in the fin stack at source and drain regions. The method also includes etching the second semiconductor layers to form recessed second semiconductor layers, and forming third semiconductor layers on sidewalls of the recessed second semiconductor layers. The method further includes epitaxially growing source and drain structures in the recesses, removing the recessed second semiconductor layers to form spaces between the first semiconductor layers, and oxidizing the third semiconductor layers to form inner spacers. In addition, the method includes forming a gate structure to fill the spaces and to surround the first semiconductor layers.
    Type: Grant
    Filed: February 21, 2019
    Date of Patent: November 3, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chun-Hsiung Lin, Pei-Hsun Wang, Chih-Hao Wang, Kuo-Cheng Ching, Jui-Chien Huang
  • Publication number: 20200343140
    Abstract: Semiconductor structures and methods for forming the same are provided. The method includes forming a fin protruding from a substrate and forming an isolation structure surrounding the fin. The method also includes epitaxially growing channel fins on sidewalls of the fin over the isolation structure and etching the fin to form a space between the channel fins. The method further includes forming a gate structure to fill the space between the channel fins.
    Type: Application
    Filed: July 9, 2020
    Publication date: October 29, 2020
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Pei-Hsun WANG, Chun-Hsiung LIN, Chih-Hao WANG, Chih-Chao CHOU
  • Patent number: 10811515
    Abstract: Methods of fabricating semiconductor devices are provided. The method includes forming a gate structure over a substrate, forming a disposable spacer on a sidewall of the gate structure, and forming a source region and a drain region at opposite sides of the gate structure. The method also includes depositing an interlayer dielectric layer around the disposable spacer, and forming a first hard mask on the interlayer dielectric layer. The method further includes removing an upper portion of the gate structure, and removing the disposable spacer to form a trench between the gate structure and the interlayer dielectric layer. In addition, the method includes sealing the trench to form an air-gap spacer, and forming a second hard mask on the gate structure.
    Type: Grant
    Filed: November 2, 2018
    Date of Patent: October 20, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chun-Hsiung Lin, Pei-Hsun Wang, Chih-Chao Chou, Chia-Hao Chang, Chih-Hao Wang
  • Patent number: 10804162
    Abstract: A method that includes forming first semiconductor layers and second semiconductor layers disposed over a substrate, wherein the first and second semiconductor layers have different material compositions, are alternatingly disposed, and extend over first and second regions of the substrate; patterning the first and the second semiconductor layers to form a first fin in the first region and a second fin in the second region; removing the first semiconductor layers from the first and second fins such that a first portion of the patterned second semiconductor layers becomes first suspended nanostructures in the first fin and that a second portion of the patterned second semiconductor layers becomes second suspended nanostructures in the second fin; forming third semiconductor layers on the second suspended nanostructures in the second fin; and performing an anneal process to drive materials contained in the third semiconductor layers into corresponding second suspended nanostructures in the second fin.
    Type: Grant
    Filed: March 27, 2019
    Date of Patent: October 13, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chih-Hao Wang, Jui-Chien Huang, Chun-Hsiung Lin, Kuo-Cheng Chiang, Chih-Chao Chou, Pei-Hsun Wang
  • Publication number: 20200273964
    Abstract: A method of fabricating semiconductor devices is provided. The method includes forming a fin structure on a substrate, in which the fin structure includes a fin stack of alternating first and second semiconductor layers and forming recesses in the fin stack at source and drain regions. The method also includes etching the second semiconductor layers to form recessed second semiconductor layers, and forming third semiconductor layers on sidewalls of the recessed second semiconductor layers. The method further includes epitaxially growing source and drain structures in the recesses, removing the recessed second semiconductor layers to form spaces between the first semiconductor layers, and oxidizing the third semiconductor layers to form inner spacers. In addition, the method includes forming a gate structure to fill the spaces and to surround the first semiconductor layers.
    Type: Application
    Filed: February 21, 2019
    Publication date: August 27, 2020
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chun-Hsiung LIN, Pei-Hsun WANG, Chih-Hao WANG, Kuo-Cheng CHING, Jui-Chien HUANG
  • Patent number: 10727134
    Abstract: A method of fabricating semiconductor devices is provided. The method includes forming a fin protruding from a substrate, and forming a disposable mandrel fin on the fin. The method also includes epitaxially growing channel fins on sidewalls of the disposable mandrel fin. The method further includes removing the disposable mandrel fin to form a space between the channel fins, and forming a gate structure to fill the space between the channel fins and to wrap the channel fins. In addition, the method includes forming source and drain structures on opposite sides of the gate structure.
    Type: Grant
    Filed: February 25, 2019
    Date of Patent: July 28, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Pei-Hsun Wang, Chun-Hsiung Lin, Chih-Hao Wang, Chih-Chao Chou
  • Publication number: 20200168742
    Abstract: Semiconductor device and the manufacturing method thereof are disclosed herein. An exemplary method comprises forming a fin over a substrate, wherein the fin comprises a first semiconductor layer and a second semiconductor layer including different semiconductor materials, and the fin comprises a channel region and a source/drain region; forming a dummy gate structure over the channel region of the fin and over the substrate; etching a portion of the fin in the source/drain region to form a trench therein, wherein a bottom surface of the trench is below a bottom surface of the second semiconductor layer; selectively removing an edge portion of the second semiconductor layer in the channel region such that the second semiconductor layer is recessed; forming a sacrificial structure around the recessed second semiconductor layer and over the bottom surface of the trench; and epitaxially growing a source/drain feature in the source/drain region of the fin.
    Type: Application
    Filed: July 15, 2019
    Publication date: May 28, 2020
    Inventors: Pei-Hsun Wang, Chun-Hsiung Lin, Chih-Hao Wang