Patents by Inventor Pei-Hua Wang

Pei-Hua Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11393927
    Abstract: Embodiments herein describe techniques for a semiconductor device including a capacitor and a transistor above the capacitor. A contact electrode may be shared between the capacitor and the transistor. The capacitor includes a first plate above a substrate, and the shared contact electrode above the first plate and separated from the first plate by a capacitor dielectric layer, where the shared contact electrode acts as a second plate for the capacitor. The transistor includes a gate electrode above the substrate and above the capacitor; a channel layer separated from the gate electrode by a gate dielectric layer, and in contact with the shared contact electrode; and a source electrode above the channel layer, separated from the gate electrode by the gate dielectric layer, and in contact with the channel layer. The shared contact electrode acts as a drain electrode of the transistor. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: September 26, 2018
    Date of Patent: July 19, 2022
    Assignee: Intel Coropration
    Inventors: Travis W. Lajoie, Abhishek Sharma, Van H. Le, Chieh-Jen Ku, Pei-Hua Wang, Jack T. Kavalieros, Bernhard Sell, Tahir Ghani, Juan Alzate Vinasco
  • Publication number: 20220208770
    Abstract: Described herein are embedded dynamic random-access memory (eDRAM) memory cells and arrays, as well as corresponding methods and devices. An exemplary eDRAM memory array implements a memory cell that uses a thin-film transistor (TFT) as a selector transistor. One source/drain (S/D) electrode of the TFT is coupled to a capacitor for storing a memory state of the cell, while the other S/D electrode is coupled to a bitline. The bitline may be a shallow bitline in that a thickness of the bitline may be smaller than a thickness of one or more metal interconnects provided in the same metal layer as the bitline but used for providing electrical connectivity for components outside of the memory array. Such a bitline may be formed in a separate process than said one or more metal interconnects. In an embodiment, the memory cells may be formed in a back end of line process.
    Type: Application
    Filed: March 17, 2022
    Publication date: June 30, 2022
    Applicant: Intel Corporation
    Inventors: Yih Wang, Abhishek A. Sharma, Tahir Ghani, Allen B. Gardiner, Travis W. Lajoie, Pei-hua Wang, Chieh-Jen Ku, Bernhard Sell, Juan G. Alzate-Vinasco, Blake C. Lin
  • Publication number: 20220199628
    Abstract: An integrated circuit (IC) structure in a memory device is described. In an example, the IC structure includes a memory cell including a bitline (BL) extending along a first direction and a channel extending along a second direction above and diagonal to the BL. In the example, a wordline (WL) extends in a third direction perpendicular to the first direction of the BL and intersects with the channel to control a current in the channel along a gated channel length. In some examples, the channel is electrically coupled on a first side to a storage capacitor via a storage node contact (SNC) and on a second side to the BL via a bit line contact (BLC) located on an underside or backside of the channel.
    Type: Application
    Filed: December 21, 2020
    Publication date: June 23, 2022
    Inventors: Noriyuki SATO, Sarah ATANASOV, Abhishek A. SHARMA, Bernhard SELL, Chieh-Jen KU, Arnab SEN GUPTA, Matthew V. METZ, Elliot N. TAN, Hui Jae YOO, Travis W. LAJOIE, Van H. LE, Pei-Hua WANG
  • Publication number: 20220199807
    Abstract: Thin film transistors fabricated using a spacer as a fin are described. In an example, a method of forming a fin transistor structure includes patterning a plurality of backbone pillars on a semiconductor substrate. The method may then include conformally depositing a spacer layer over the plurality of backbone pillars and the semiconductor substrate. A spacer etch of the spacer layer is then performed to leave a sidewall of the spacer layer on a backbone pillar to form a fin of the fin transistor structure.
    Type: Application
    Filed: December 21, 2020
    Publication date: June 23, 2022
    Inventors: Noriyuki SATO, Sarah ATANASOV, Abhishek A. Sharma, Bernhard SELL, Chieh-Jen KU, Elliot N. TAN, Hui Jae YOO, Travis W. LAJOIE, Van H. LE, Pei-Hua WANG, Jason PECK, Tobias BROWN-HEFT
  • Publication number: 20220181460
    Abstract: Disclosed herein are transistor source/drain contacts, and related methods and devices. For example, in some embodiments, a transistor may include a channel and a source/drain contact, wherein the source/drain contact includes an interface material and a bulk material, the bulk material has a different material composition than the interface material, the interface material is between the bulk material and the channel, the interface material includes indium and an element different from indium, and the element is aluminum, vanadium, zirconium, magnesium, gallium, hafnium, silicon, lanthanum, tungsten, or cadmium.
    Type: Application
    Filed: December 7, 2020
    Publication date: June 9, 2022
    Applicant: Intel Corporation
    Inventors: Chieh-Jen Ku, Kendra Souther, Andre Baran, Pei-hua Wang, Bernhard Sell
  • Publication number: 20220175437
    Abstract: A tool for a bone implant includes a rod and an adaptor. The rod includes a coupling portion having a through-hole. The rod further includes a measuring arm connected to the coupling portion and a force applying arm connected to the coupling portion. The measuring arm includes a first extension section having a first indicator portion, and the force applying arm includes a second extension section having a second indicator portion. The force applying arm is elastically deformable away from the measuring arm to displace the second extension section relative to the first extension section. The adaptor is coupled in the through-hole and includes an outer ring and an inner ring. The outer ring is rotatable relative to the inner ring in a single direction.
    Type: Application
    Filed: December 3, 2020
    Publication date: June 9, 2022
    Inventors: Tung-Lin TSAI, Chun-Chieh TSENG, Chun-Ming CHEN, Yue-Jun WANG, Hsin-Fei WANG, Pei-Hua WANG
  • Patent number: 11329047
    Abstract: Described herein are embedded dynamic random-access memory (eDRAM) memory cells and arrays, as well as corresponding methods and devices. An exemplary eDRAM memory array implements a memory cell that uses a thin-film transistor (TFT) as a selector transistor. One source/drain (S/D) electrode of the TFT is coupled to a capacitor for storing a memory state of the cell, while the other S/D electrode is coupled to a bitline. The bitline may be a shallow bitline in that a thickness of the bitline may be smaller than a thickness of one or more metal interconnects provided in the same metal layer as the bitline but used for providing electrical connectivity for components outside of the memory array. Such a bitline may be formed in a separate process than said one or more metal interconnects. In an embodiment, the memory cells may be formed in a back end of line process.
    Type: Grant
    Filed: April 18, 2018
    Date of Patent: May 10, 2022
    Assignee: Intel Corporation
    Inventors: Yih Wang, Abhishek A. Sharma, Tahir Ghani, Allen B. Gardiner, Travis W. Lajoie, Pei-hua Wang, Chieh-jen Ku, Bernhard Sell, Juan G. Alzate-Vinasco, Blake C. Lin
  • Publication number: 20220133336
    Abstract: A tool for a bone implant includes a sleeve and a transmission rod including a transmission member disposed on an end of a shaft. Another end of the shaft is located outside of the sleeve. The transmission member is received in the sleeve and includes a first compartment and a plurality of first teeth surrounding the first compartment. A drilling rod includes a second compartment and a plurality of second teeth surrounding the second compartment. A coupling portion is disposed between the second compartment and a bit. The coupling portion is coupled with the sleeve. The bit is located outside of the sleeve. Two magnets are disposed in the first and second compartments, respectively. Two same poles respectively of the two magnets face each other.
    Type: Application
    Filed: February 2, 2021
    Publication date: May 5, 2022
    Inventors: Tung-Lin Tsai, Chun-Chieh Tseng, Yue-Jun Wang, Chun-Ming Chen, Li-Wen Weng, Pei-Hua Wang
  • Publication number: 20220102271
    Abstract: Tunable resistance thin film resistors for integrated circuits, related systems, and methods of fabrication are disclosed. Such tunable resistance thin film resistors include electrodes coupled to a resistive thin film that includes a base metal oxide and a second metal element. The resistors are tunable based on the concentration of the second metal element in the composition of the resistive thin film.
    Type: Application
    Filed: September 25, 2020
    Publication date: March 31, 2022
    Applicant: Intel Corporation
    Inventors: Chieh-Jen Ku, Bernhard Sell, Pei-Hua Wang
  • Publication number: 20220059704
    Abstract: Disclosed herein are transistor cap-channel arrangements, and related methods and devices. For example, in some embodiments, a transistor cap-channel arrangement may include a channel material having a conductivity type; an insulating material; and a cap material between the channel material and the insulating material, wherein the cap material is different from the channel material and the insulating material, and the cap material has a conductivity type that is a same conductivity type as the channel material.
    Type: Application
    Filed: August 21, 2020
    Publication date: February 24, 2022
    Applicant: INTEL CORPORATION
    Inventors: Chieh-jen Ku, Bernhard Sell, Pei-hua Wang, Christopher J. Wiegand
  • Publication number: 20220042082
    Abstract: Methods are provided for multiplexed amplification of selected targets and analysis of the amplified targets. In preferred aspects the amplification and analysis take place on the same solid support and preferably in a localized area such as a bead or a feature of an array. Targets are circularized by hybridization to probes followed by ligation of the ends of the target to form a closed circle. The targets are then used as template for extension of an array bound probe resulting in extended probes having multiple copies of the target. The extended probes can then be analyzed. The methods may be used for genotyping, sequencing and analysis of copy number.
    Type: Application
    Filed: January 19, 2021
    Publication date: February 10, 2022
    Inventors: Glenn K. Fu, Glenn H. Mcgall, Robert G. Kuimelis, Jing Hu, Pei-Hua Wang
  • Publication number: 20210408291
    Abstract: A thin film transistor (TFT) structure includes a gate electrode, a gate dielectric layer on the gate electrode, a channel layer including a semiconductor material with a first polarity on the gate dielectric layer. The TFT structure also includes a multi-layer material stack on the channel layer, opposite the gate dielectric layer, an interlayer dielectric (ILD) material over the multi-layer material stack and beyond a sidewall of the channel layer. The TFT structure further includes source and drain contacts through the interlayer dielectric material, and in contact with the channel layer, where the multi-layer material stack includes a barrier layer including oxygen and a metal in contact with the channel layer, where the barrier layer has a second polarity. A sealant layer is in contact with the barrier layer, where the sealant layer and the ILD have a different composition.
    Type: Application
    Filed: June 26, 2020
    Publication date: December 30, 2021
    Applicant: Intel Corporation
    Inventors: Abhishek A. Sharma, Arnab Sen Gupta, Travis W. LaJoie, Sarah Atanasov, Chieh-Jen Ku, Bernhard Sell, Noriyuki Sato, Van Le, Matthew Metz, Hui Jae Yoo, Pei-Hua Wang
  • Publication number: 20210408002
    Abstract: An integrated circuit capacitor array includes a plurality of first electrodes, wherein individual ones of the first electrodes are substantially cylindrical with a base over a substrate and an open top end over the base. A first dielectric material layer spans a distance between the first electrodes but is absent from an interior of the first electrodes, where the first dielectric material layer is substantially planar and bifurcates a height of first electrodes. A second dielectric material layer lines the interior of the first electrodes, and lines portions of an exterior of the first electrodes above and below the first dielectric material layer and a second electrode is within the interior of the first electrodes and is around the exterior of the first electrodes above and below the first dielectric material layer.
    Type: Application
    Filed: June 26, 2020
    Publication date: December 30, 2021
    Applicant: Intel Corporation
    Inventors: Travis W. LaJoie, Abhishek A. Sharma, Van Le, Chieh-Jen Ku, Pei-Hua Wang, Bernhard Sell, Juan G. Alzate-Vinasco
  • Publication number: 20210366821
    Abstract: An interconnect structure is disclosed. The interconnect structure includes a first metal interconnect in a bottom dielectric layer, a via that extends through a top dielectric layer, a metal plate, an intermediate dielectric layer, and an etch stop layer, and a metal in the via to extend through the top dielectric layer, the metal plate, the intermediate dielectric layer and the etch stop layer to the top surface of the first metal interconnect. The metal plate is coupled to an MIM capacitor that is parallel to the via. The second metal interconnect is on top of the metal in the via.
    Type: Application
    Filed: August 10, 2021
    Publication date: November 25, 2021
    Inventors: Travis LAJOIE, Abhishek SHARMA, Juan ALZATE-VINASCO, Chieh-Jen KU, Shem OGADHOH, Allen GARDINER, Blake LIN, Yih WANG, Pei-Hua WANG, Jack T. KAVALIEROS, Bernhard SELL, Tahir GHANI
  • Publication number: 20210305255
    Abstract: Embodiments herein describe techniques for a memory device including at least two memory cells. A first memory cell includes a first storage cell and a first transistor to control access to the first storage cell. A second memory cell includes a second storage cell and a second transistor to control access to the second storage cell. A shared contact electrode is shared between the first transistor and the second transistor, the shared contact electrode being coupled to a source area or a drain area of the first transistor, coupled to a source area or a drain area of the second transistor, and further being coupled to a bit line of the memory device. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: March 24, 2020
    Publication date: September 30, 2021
    Inventors: Juan G. ALZATE VINASCO, Travis W. LAJOIE, Abhishek A. SHARMA, Kimberly L. PIERCE, Elliot N. TAN, Yu-Jin CHEN, Van H. LE, Pei-Hua WANG, Bernhard SELL
  • Patent number: 11121073
    Abstract: An interconnect structure is disclosed. The interconnect structure includes a first metal interconnect in a bottom dielectric layer, a via that extends through a top dielectric layer, a metal plate, an intermediate dielectric layer, and an etch stop layer, and a metal in the via to extend through the top dielectric layer, the metal plate, the intermediate dielectric layer and the etch stop layer to the top surface of the first metal interconnect. The metal plate is coupled to an MIM capacitor that is parallel to the via. The second metal interconnect is on top of the metal in the via.
    Type: Grant
    Filed: April 2, 2018
    Date of Patent: September 14, 2021
    Assignee: Intel Corporation
    Inventors: Travis Lajoie, Abhishek Sharma, Juan Alzate-Vinasco, Chieh-Jen Ku, Shem Ogadhoh, Allen Gardiner, Blake Lin, Yih Wang, Pei-Hua Wang, Jack T. Kavalieros, Bernhard Sell, Tahir Ghani
  • Publication number: 20210125992
    Abstract: Embodiments herein describe techniques for a semiconductor device having an interconnect structure above a substrate. The interconnect structure may include an inter-level dielectric (ILD) layer and a separation layer above the ILD layer. A first conductor and a second conductor may be within the ILD layer. The first conductor may have a first physical configuration, and the second conductor may have a second physical configuration different from the first physical configuration. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: December 22, 2017
    Publication date: April 29, 2021
    Inventors: Travis LAJOIE, Tahir GHANI, Jack T. KAVALIEROS, Shem O. OGADHOH, Yih WANG, Bernhard SELL, Allen GARDINER, Blake LIN, Juan G. ALZATE VINASCO, Pei-Hua WANG, Chieh-Jen KU, Abhishek A. SHARMA
  • Publication number: 20210098373
    Abstract: Integrated circuit structures having differentiated interconnect lines in a same dielectric layer, and methods of fabricating integrated circuit structures having differentiated interconnect lines in a same dielectric layer, are described. In an example, an integrated circuit structure includes an inter-layer dielectric (ILD) layer above a substrate. A plurality of conductive interconnect lines is in the ILD layer. The plurality of conductive interconnect lines includes a first interconnect line having a first height, and a second interconnect line immediately laterally adjacent to but spaced apart from the first interconnect line, the second interconnect line having a second height less than the first height.
    Type: Application
    Filed: September 26, 2019
    Publication date: April 1, 2021
    Inventors: Travis W. LAJOIE, Abhishek A. SHARMA, Juan G. ALZATE VINASCO, Chieh-Jen KU, Shem O. OGADHOH, Allen B. GARDINER, Blake C. LIN, Yih WANG, Pei-Hua WANG, Jack T. KAVALIEROS, Bernhard SELL, Tahir GHANI
  • Patent number: 10920269
    Abstract: Methods are provided for multiplexed amplification of selected targets and analysis of the amplified targets. In preferred aspects the amplification and analysis take place on the same solid support and preferably in a localized area such as a bead or a feature of an array. Targets are circularized by hybridization to probes followed by ligation of the ends of the target to form a closed circle. The targets are then used as template for extension of an array bound probe resulting in extended probes having multiple copies of the target. The extended probes can then be analyzed. The methods may be used for genotyping, sequencing and analysis of copy number.
    Type: Grant
    Filed: April 23, 2018
    Date of Patent: February 16, 2021
    Assignee: AFFYMETRIX, INC.
    Inventors: Glenn K. Fu, Glenn H. Mcgall, Robert G. Kuimelis, Jing Hu, Pei-Hua Wang
  • Publication number: 20200411697
    Abstract: Embodiments herein describe techniques for a transistor above a substrate. The transistor includes a channel layer above the substrate. The channel layer includes a first channel material of a first conductivity. In addition, the channel layer further includes elements of one or more additional materials distributed within the channel layer. The channel layer including the elements of the one or more additional materials has a second conductivity different from the first conductivity. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: June 28, 2019
    Publication date: December 31, 2020
    Inventors: Chieh-Jen KU, Pei-Hua WANG, Bernhard SELL, Martin M. MITAN, Leonard C. PIPES