Abstract: In an aspect, a semiconductor memory cell comprises gate structures separated by source or drain (S/D) structures, a frontside (FS) inter-layer dielectric (FS-ILD) layer above the gate and S/D structures, FS metal zero (FM0) interconnects above the FS-ILD layer, a backside (BS) inter-layer dielectric (BS-ILD) layer below the gate and S/D structures, BS metal zero (BM0) interconnects below the BS-ILD layer, at least one FS source drain contact (FSDC) electrically connecting an FM0 interconnect to a top surface of an S/D structure, and at least one BS S/D contact (BSDC) electrically connecting a BMO interconnect to a bottom surface of an S/D structure. The semiconductor memory cell comprises NFETs and PFETs to form a cross-coupled inverter pair. For each inverter in the pair, one of VDD and VSS are provided by an FSDC and the other of VDD and VSS is provided by a BSDC.

Abstract: A gate-all-around (GAA) field effect transistor (FET) device, and related fabrication methods are disclosed. The GAA FET device includes P-type semiconductor PFET(s) and N-type semiconductor NFET(s) having channels with different crystalline orientation through a substrate. The GAA PFET(s) includes a channel structure of a first type of crystalline orientation (e.g., <110> or <111>) and the GAA NFET(s) include a channel structure of a second type of crystalline orientation (e.g., <100>) different from the first type of crystalline orientation of the GAA PFET(s). The different crystalline orientation channels improve the balance of carrier mobility for both carrier types (i.e., P-type and N-type) of GAA FETs in the GAA FET device. In one aspect, the different crystalline orientation channels are provided through a substrate to increase and/or balance carrier mobility between GAA PFET(s) and NFET(s) to achieve a more balanced drive strength between these types of transistors.

Abstract: Disclosed are gate-all-around (GAA) devices formed on a nanosheet wafer that includes multiple nanosheet (NS) structures including first and second NS structures. The first NS structure may include N nanosheets, where N?2. All N nanosheets may function as channels in the first NS structure. The second NS structure may include one or more nanosheets in which N?M of them function as channels, where 1?M<N.

Abstract: Disclosed are semiconductor devices and fabrication methods. A semiconductor device includes a first gate structure including a first set of channels disposed along a first direction through a first gate metal, and a first set of gate dielectrics disposed between the first set of channels and the first gate metal. The first set of gate dielectrics each have a first thickness. The semiconductor device further includes a second gate structure including a second set of channels disposed along the first direction through a second gate metal, and a second set of gate dielectrics disposed between the second set of channels and the second gate metal. The second set of gate dielectrics each have a second thickness. The second thickness is greater than the first thickness and the second set of channels is less in number than the first set of channels.

Abstract: Enhanced-shaped extension region for gate-all-around (GAA) field-effect transistor (FET) devices and related fabrication methods are disclosed. The GAA FET device includes an extension region of semiconductor material coupled from the respective channel to the source/drain region to facilitate forming a conductive channel between the source and the drain regions when the GAA FET device is activated. The area of the extension region between the source/drain regions and the channel forms a series resistance between source/drain regions and the channel. To reduce channel parasitic resistance, the extension region of the GAA FET device has an enhanced extension portion that has an extended height orthogonal to the channel direction. The extension region with its enhanced extension portion has reduced resistance as compared to an extension region not containing the enhanced extension portion, thus reducing channel parasitic resistance of the GAA FET device for improved performance.

Abstract: A multi-gate HEMT includes at least two gates, with at least one recessed the same depth or at a deeper depth in a barrier layer than at least one other gate. Recessing a gate decreases the thickness of the barrier layer beneath the gate, reducing a density of high mobility carriers in a two-dimensional electron gas layer (2DEG) conductive channel formed at the heterojunction of a barrier layer and a buffer layer below the recessed gate. The recessed gate can increase gate control of the 2DEG conductive channel. The multi-gate HEMT has at least one gate recessed the same depth or a deeper depth into the buffer layer than another gate, which forms at least two different turn-on voltages for different gates. This can achieve improvement of transconductance linearity and a positive shift of the threshold voltage.

Abstract: Gate-all-around (GAA) transistors with shallow source/drain regions and methods of fabricating the same provide a GAA transistor that includes one or more channels positioned between a source region and a drain region. The one or more channels, which may be nanowire, nanosheet, or nanoslab semiconductors, are surrounded along a longitudinal axis by gate material. At a first end of the channel is a source region and at an opposite end of the channel is a drain region. To reduce parasitic capacitance between a bottom gate and the source and drain regions, a filler material is provided adjacent the bottom gate, and the source and drain regions are grown on top of the filler material. In this fashion, the bottom gate does not abut the source region or the drain region, reducing geometries which would contribute to parasitic capacitance.

Abstract: An integrated device that includes a substrate, a first transistor, and a second transistor. The second transistor is configured to be coupled to the first transistor. The first transistor is configured to operate as a N-type channel metal oxide semiconductor transistor (NMOS) transistor. The first transistor includes a dielectric layer disposed over the substrate; a first source disposed over the dielectric layer; a first drain disposed over the dielectric layer; a first plurality of channels coupled to the first source and the first drain; and a first gate surrounding the plurality of channels. The second transistor is configured to operate as a P-type channel metal oxide semiconductor transistor (PMOS). The second transistor includes the dielectric layer; a second source disposed over the dielectric layer; a second drain disposed over the dielectric layer; a second plurality of channels coupled to the second source and the second drain; and a second gate.

Abstract: Field-effect transistor (FET) circuits employing topside and backside contacts for topside and backside routing of FET power and logic signals. A FET circuit is provided that includes a FET that includes a conduction channel, a source, a drain, and a gate. The FET circuit also includes a topside metal contact electrically coupled with at least one of the source, drain, and gate of the FET. The FET circuit also includes a backside metal contact electrically coupled with at least one of the source, drain, and gate of the FET. The FET circuit also includes topside and backside metal lines electrically coupled to the respective topside and backside metal contacts to provide power and signal routing to the FET. A complementary metal oxide semiconductor (CMOS) circuit is also provided that includes a PFET and NFET that each includes a topside and backside contact for power and signal routing.

Abstract: An integrated device that includes a substrate and a first transistor formed over the substrate. The first transistor includes a first source disposed over the substrate, a first drain disposed over the substrate, a first plurality of channels coupled to the first source and the first drain, where the first plurality of channels is located between the first source and the first drain; at least one inner spacer located between two adjacent channels from the first plurality of channels; at least two voids located between the two adjacent channels; and a first gate surrounding the first plurality of channels.

Abstract: Disclosed are optimized contract structures and fabrication techniques thereof. At least one aspect includes a semiconductor die. The semiconductor die includes a substrate and a contact disposed within the substrate. The contact includes a first portion with a first vertical cross-section having a first cross-sectional area. The first vertical cross-section has a first width and a first height. The contact also includes a second portion with a second vertical cross-section having a second cross-sectional area less than the first cross-sectional area. The second vertical cross-section includes a lower portion having the first width and a second height less than the first height, and an upper portion disposed above the lower portion and having a second width less than the first width and having a third height less than the first height.

Abstract: Certain aspects of the present disclosure relate to a semiconductor device (e.g., a gate-all-around (GAA) semiconductor device) comprising at least one superlattice fin. One example superlattice fin includes a first plurality of nanosheets composed of a first semiconductor material and a second plurality of nanosheets composed of a second semiconductor material, the second semiconductor material being different from the first semiconductor material, wherein a width of a first nanosheet in the first plurality of nanosheets differs from a width of a second nanosheet in the second plurality of nanosheets, the second nanosheet being adjacent to the first nanosheet.

Abstract: Certain aspects of the present disclosure relate to a semiconductor device (e.g., a gate-all-around (GAA) semiconductor device) comprising at least one superlattice fin. One example superlattice fin includes a first plurality of nanosheets composed of a first semiconductor material and a second plurality of nanosheets composed of a second semiconductor material, the second semiconductor material being different from the first semiconductor material, wherein a width of a first nanosheet in the first plurality of nanosheets differs from a width of a second nanosheet in the second plurality of nanosheets, the second nanosheet being adjacent to the first nanosheet.

Abstract: Disclosed are optimized contract structures and fabrication techniques thereof. At least one aspect includes a semiconductor die. The semiconductor die includes a substrate and a contact disposed within the substrate. The contact includes a first portion with a first vertical cross-section having a first cross-sectional area. The first vertical cross-section has a first width and a first height. The contact also includes a second portion with a second vertical cross-section having a second cross-sectional area less than the first cross-sectional area. The second vertical cross-section includes a lower portion having the first width and a second height less than the first height, and an upper portion disposed above the lower portion and having a second width less than the first width and having a third height less than the first height.

Abstract: Field-effect transistor (FET) circuits employing topside and backside contacts for topside and backside routing of FET power and logic signals. A FET circuit is provided that includes a FET that includes a conduction channel, a source, a drain, and a gate. The FET circuit also includes a topside metal contact electrically coupled with at least one of the source, drain, and gate of the FET. The FET circuit also includes a backside metal contact electrically coupled with at least one of the source, drain, and gate of the FET. The FET circuit also includes topside and backside metal lines electrically coupled to the respective topside and backside metal contacts to provide power and signal routing to the FET. A complementary metal oxide semiconductor (CMOS) circuit is also provided that includes a PFET and NFET that each includes a topside and backside contact for power and signal routing.

Abstract: Gate-all-around (GAA) transistors with an additional bottom channel for reduced parasitic capacitance and methods of fabricating the same include one or more channels positioned between a source region and a drain region. The one or more channels, which may be nanowire or nanoslab semiconductors, are surrounded by gate material. The GAA transistor further includes an additional semiconductor channel between a bottom section of a gate material and a silicon on insulator (SOI) substrate in a GAA transistor. This additional channel, sometimes referred to as a bottom channel, may be thinner than other channels in the GAA transistor and may have a thickness less than its length.

Abstract: Gate-all-around (GAA) transistors with shallow source/drain regions and methods of fabricating the same provide a GAA transistor that includes one or more channels positioned between a source region and a drain region. The one or more channels, which may be nanowire, nanosheet, or nanoslab semiconductors, are surrounded along a longitudinal axis by gate material. At a first end of the channel is a source region and at an opposite end of the channel is a drain region. To reduce parasitic capacitance between a bottom gate and the source and drain regions, a filler material is provided adjacent the bottom gate, and the source and drain regions are grown on top of the filler material. In this fashion, the bottom gate does not abut the source region or the drain region, reducing geometries which would contribute to parasitic capacitance.

Abstract: Gate-all-around (GAA) transistors with an additional bottom channel for reduced parasitic capacitance and methods of fabricating the same include one or more channels positioned between a source region and a drain region. The one or more channels, which may be nanowire or nanoslab semiconductors, are surrounded by gate material. The GAA transistor further includes an additional semiconductor channel between a bottom section of a gate material and a silicon on insulator (SOI) substrate in a GAA transistor. This additional channel, sometimes referred to as a bottom channel, may be thinner than other channels in the GAA transistor and may have a thickness less than its length.

Abstract: Certain aspects of the present disclosure generally relate to a gate-all-around (GAA) semiconductor device. The GAA semiconductor device generally includes a substrate, a first nanosheet stack structure, a second nanosheet stack structure, the first and second nanosheet stack structures being disposed above a horizontal plane of the substrate and each comprising one or more nanosheet structures, and a dielectric structure disposed between the first nanosheet stack structure and the second nanosheet stack structure.

Abstract: An integrated device that includes a substrate and a first transistor formed over the substrate. The first transistor includes a first source disposed over the substrate, a first drain disposed over the substrate, a first plurality of channels coupled to the first source and the first drain, where the first plurality of channels is located between the first source and the first drain; at least one inner spacer located between two adjacent channels from the first plurality of channels; at least two voids located between the two adjacent channels; and a first gate surrounding the first plurality of channels.