Patents by Inventor Perrine Batude
Perrine Batude has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11888007Abstract: An image sensor including a plurality of pixels, each pixel including a photodetector coupled to a control circuit, the photodetector being formed inside and on top of a first semiconductor substrate, and the control circuit including at least one first MOS transistor formed inside and on top of a second semiconductor substrate arranged on the first substrate, the sensor being intended to be illuminated on the side of the surface of the first substrate opposite to the second substrate, the sensor further comprising a shield arranged between the first and second substrates and extending over substantially the entire surface of the sensor, said shield including at least one electrically-conductive layer.Type: GrantFiled: September 10, 2020Date of Patent: January 30, 2024Assignee: Commissariat à l'Énergie Atomique et aux Énergies AlternativesInventors: Lina Kadura, François Andrieu, Perrine Batude, Christophe Licitra
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Patent number: 11658260Abstract: An optoelectronic device manufacturing method including the steps of: a) forming an active diode stack including first and second of opposite conductivity types; b) forming an integrated control circuit including a plurality of elementary control cells each including at least one MOS transistor; c) after steps a) and b), transferring the integrated control circuit onto the upper surface of the active diode stack; and d) after step c), forming trenches extending vertically through the integrated control circuit and emerging into or onto the first layer and delimiting a plurality of pixels each including a diode and an elementary control cell.Type: GrantFiled: May 21, 2021Date of Patent: May 23, 2023Assignee: Commissariat à l'Énergie Atomique et aux Énergies AlternativesInventors: Perrine Batude, Hubert Bono
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Patent number: 11552125Abstract: A method of manufacturing an optoelectronic device, including the steps of: a) providing an active diode stack comprising a first doped semiconductor layer of a first conductivity type and a second doped semiconductor layer of the first conductivity type, coating the upper surface of the first layer; b) arranging a third semiconductor layer on the upper surface of the active stack; c) after step b), forming at least one MOS transistor inside and on top of the third semiconductor layer; and d) after step b), before or after step c), forming trenches vertically extending from the upper surface of the third layer and emerging into or onto the upper surface of the first layer and delimiting a plurality of pixels, each including a diode and an elementary diode control cell.Type: GrantFiled: December 18, 2019Date of Patent: January 10, 2023Assignee: Commissariat à l'Énergie Atomique et aux Énergies AlternativesInventors: Perrine Batude, Hubert Bono
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Publication number: 20220093671Abstract: A microelectronic circuit comprising: a stack of lower, intermediate and upper circuit tiers, a matrix of devices outputting and/or receiving analogue electrical signals, made in the upper circuit tier, an analogue amplification and/or processing circuit made in the lower circuit tier, a digital processing circuit made in the intermediate circuit tier, an analogue-to-digital and/or digital-to-analogue conversion circuit made in the lower and/or intermediate circuit tier, electrically coupled to the analogue circuit and the digital circuit, electrical interconnections passing through the intermediate circuit tier and coupling the analogue circuit to the devices.Type: ApplicationFiled: September 16, 2021Publication date: March 24, 2022Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Gilles SICARD, Perrine BATUDE, Didier LATTARD
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Publication number: 20210376185Abstract: An optoelectronic device manufacturing method including the steps of: a) forming an active diode stack including first and second of opposite conductivity types; b) forming an integrated control circuit including a plurality of elementary control cells each including at least one MOS transistor; c) after steps a) and b), transferring the integrated control circuit onto the upper surface of the active diode stack; and d) after step c), forming trenches extending vertically through the integrated control circuit and emerging into or onto the first layer and delimiting a plurality of pixels each including a diode and an elementary control cell.Type: ApplicationFiled: May 21, 2021Publication date: December 2, 2021Applicant: Commissariat à l'Énergie Atomique et aux Énergies AlternativesInventors: Perrine Batude, Hubert Bono
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Patent number: 11139209Abstract: A production of a device with superimposed levels of components including in this order providing on a given level N1 provided with one or more components produced at least partially in a first semiconductor layer: a stack including a second semiconductor layer capable of receiving at least one transistor channel of level N2, above said given level N1, the stack including a ground plane layer situated between the first and second semiconductor layers as well as an insulator layer separating the ground plane layer from the second semiconductor layer, one or more islands being defined in the second semiconductor layer. A gate is formed on at least one island. Distinct portions are etched in the second semiconductor ground plane layer. An isolation zone is formed around the island by the gate and the island.Type: GrantFiled: December 17, 2019Date of Patent: October 5, 2021Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Perrine Batude, Francois Andrieu
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Patent number: 11011425Abstract: A method of production of a 3D microelectronic device includes assembling a structure comprising a lower level with a component partially formed in a first semiconductor layer with a support provided with a second semiconductor layer in which a transistor channel of an upper level is capable of being produced, the second semiconductor layer being capped with a dielectric material layer capable of forming a gate dielectric, forming a capping layer arranged on the dielectric material layer, and potentially capable of forming a lower gate portion of the transistor, and defining a gate dielectric zone and an active zone of said transistor by etching the dielectric material layer and the second semiconductor layer, the capping layer protecting said dielectric material layer during this etching.Type: GrantFiled: July 29, 2019Date of Patent: May 18, 2021Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Perrine Batude, Francois Andrieu, Maud Vinet
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Publication number: 20210082983Abstract: An image sensor including a plurality of pixels, each pixel including a photodetector coupled to a control circuit, the photodetector being formed inside and on top of a first semiconductor substrate, and the control circuit including at least one first MOS transistor formed inside and on top of a second semiconductor substrate arranged on the first substrate, the sensor being intended to be illuminated on the side of the surface of the first substrate opposite to the second substrate, the sensor further comprising a shield arranged between the first and second substrates and extending over substantially the entire surface of the sensor, said shield including at least one electrically-conductive layer.Type: ApplicationFiled: September 10, 2020Publication date: March 18, 2021Applicant: Commissariat à l'Énergie Atomique et aux Énergies AlternativesInventors: Lina Kadura, François Andrieu, Perrine Batude, Christophe Licitra
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Publication number: 20200203422Abstract: A method of manufacturing an optoelectronic device, including the steps of: a) providing an active diode stack comprising a first doped semiconductor layer of a first conductivity type and a second doped semiconductor layer of the first conductivity type, coating the upper surface of the first layer; b) arranging a third semiconductor layer on the upper surface of the active stack; c) after step b), forming at least one MOS transistor inside and on top of the third semiconductor layer; and d) after step b), before or after step c), forming trenches vertically extending from the upper surface of the third layer and emerging into or onto the upper surface of the first layer and delimiting a plurality of pixels, each including a diode and an elementary diode control cell.Type: ApplicationFiled: December 18, 2019Publication date: June 25, 2020Applicant: Commissariat à l'Énergie Atomique et aux Énergies AlternativesInventors: Perrine Batude, Hubert Bono
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Publication number: 20200203229Abstract: Production of a device with superimposed levels of components including in this order: a) providing on a given level N1 provided with one or more components produced at least partially in a first semiconductor layer: a stack including a second semiconductor layer capable of receiving at least one transistor channel of level N2 above said given level N1, said stack including a so-called ground plane layer made of conductor or semiconductor material or doped semiconductor material situated between the first semiconductor layer and the second semiconductor layer as well as an insulator layer separating the ground plane layer from the second semiconductor layer, one or more islands being defined in the second semiconductor layer, b) forming a gate of a transistor on at least one island among said one or more islands, c) defining by etching distinct portions in the second semiconductor ground plane layer so as to free a space around at least one first etched portion of the ground plane layer arranged under anType: ApplicationFiled: December 17, 2019Publication date: June 25, 2020Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Perrine BATUDE, Francois Andrieu
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Patent number: 10651202Abstract: An integrated circuit is provided with several superimposed levels of transistors, the circuit including an upper level provided with transistors having a rear gate electrode laid out on a first semiconducting layer, and a second semiconducting layer, a first transistor among the transistors of the upper level being provided with a contact pad traversing the second semiconducting layer, the contact pad being connected to a connection zone disposed between the first semiconducting layer and the second semiconducting layer, the first transistor being polarised by and connected to at least one power supply line disposed on a side of a front face of the second semiconducting layer that is opposite to the rear face.Type: GrantFiled: November 20, 2018Date of Patent: May 12, 2020Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Francois Andrieu, Perrine Batude, Maud Vinet
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Patent number: 10586740Abstract: Method for producing a device provided with FinFET transistors, comprising the following steps: a) making amorphous and doping a first portion of a semiconductor in via a tilted beam oriented toward a first lateral face of the fin, while retaining a first crystalline semiconductor block against a second lateral face of the fin, then b) carrying out at least one recrystallization annealing of said first portion, then c) making amorphous and doping a second portion via a tilted beam oriented toward the second lateral face of the fin, while retaining a second crystalline semiconductor block against said first lateral face of the fin, then d) carrying out at least one recrystallization annealing of the second portion.Type: GrantFiled: November 15, 2018Date of Patent: March 10, 2020Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Benoit Mathieu, Perrine Batude
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Patent number: 10553702Abstract: A method for producing a microelectronic device with one or more transistor(s) including forming a first gate on a region of a semiconductor layer, forming a first cavity in the semiconductor layer, the first cavity having a wall contiguous with the given region, filling the first cavity in such a way as to form a first semiconductor block wherein a source or drain region of the first transistor is capable of being produced, by epitaxial growth of a first semiconductor material in the first cavity, the growth being carried out such that a first zone of predetermined thickness of the layer of first semiconductor material lines the wall contiguous with the given region, epitaxial growth of a second zone made of a second semiconductor material on the first zone.Type: GrantFiled: April 12, 2017Date of Patent: February 4, 2020Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Perrine Batude, Nicolas Posseme
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Publication number: 20200035561Abstract: Production of a 3D microelectronic device including: assembling a structure comprising a lower level with a component partially formed in a first semiconductor layer with a support provided with a second semiconductor layer in which a transistor channel of an upper level is capable of being produced, the second semiconductor layer being capped with a dielectric material layer capable of forming a gate dielectric, forming a capping layer arranged on the dielectric material layer, and potentially capable of forming a lower gate portion of the transistor, defining a gate dielectric zone and an active zone of said transistor by etching the dielectric material layer and the second semiconductor layer, the capping layer protecting said dielectric material layer during this etching.Type: ApplicationFiled: July 29, 2019Publication date: January 30, 2020Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Perrine BATUDE, Francois ANDRIEU, Maud VINET
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Patent number: 10497627Abstract: A method is provided for forming a transistor from a stack including the following successive layers: an electrically insulating layer, an active zone including at least one semiconductor layer, and a gate, sides of which are configured to be covered by at least one spacer, the method including: a phase of forming lateral cavities; and forming a raised drain and a raised source that fill the lateral cavities by growing the semiconductor layer via epitaxy, the forming of the lateral cavities includes, after a step of partially removing the semiconductor layer: forming a sacrificial layer, partially removing the sacrificial layer; forming spacers against the sides of the gate resting on a residual sacrificial layer; and totally removing the residual sacrificial layer in order to form the lateral cavities.Type: GrantFiled: February 1, 2017Date of Patent: December 3, 2019Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Nicolas Posseme, Laurent Brunet, Perrine Batude
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Patent number: 10319628Abstract: A method of fabrication of an integrated circuit is provided, including: providing a substrate including a first active layer and a first metallic level of interconnection arranged on top of the active layer and including first lines of interconnection separated by a first filling of sacrificial material; forming a superposition of an insulator layer and second lines of interconnection; providing access to the first filling through the insulator layer; filling the provided access with a second filling of sacrificial material; forming a second active layer on top of the second metallic level of interconnection; providing access to the second filling through the second active layer; and removing the first and the second fillings by a chemical etching through the provided access to the second filling.Type: GrantFiled: September 26, 2017Date of Patent: June 11, 2019Assignee: Commissariat a l'energie atomique et aux energies alternativesInventors: Fabien Deprat, Perrine Batude, Laurent Brunet, Claire Fenouillet-Beranger, Maud Vinet
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Publication number: 20190157300Abstract: Integrated circuit provided with several superimposed levels of transistors including: an upper level provided with transistors with a rear gate electrode laid out on a first semiconducting layer and a second semiconducting layer, a first transistor among said transistors of said upper level being provided with a contact pad traversing the second semiconducting layer, said contact pad being connected to a connection zone arranged between the first semiconducting layer and the second semiconducting layer, the first transistor being polarised by and connected to at least one power supply line arranged on the side of a front face of the second semiconducting layer opposite to said rear face.Type: ApplicationFiled: November 20, 2018Publication date: May 23, 2019Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Francois ANDRIEU, Perrine BATUDE, Maud VINET
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Publication number: 20190157164Abstract: Method for producing a device provided with FinFET transistors, comprising the following steps: a) making amorphous and doping a first portion of a semiconductor in via a tilted beam oriented toward a first lateral face of the fin, while retaining a first crystalline semiconductor block against a second lateral face of the fin, then b) carrying out at least one recrystallization annealing of said first portion, then c) making amorphous and doping a second portion via a tilted beam oriented toward the second lateral face of the fin, while retaining a second crystalline semiconductor block against said first lateral face of the fin, then d) carrying out at least one recrystallization annealing of the second portion.Type: ApplicationFiled: November 15, 2018Publication date: May 23, 2019Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Benoit MATHIEU, Perrine BATUDE
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Publication number: 20190148367Abstract: Production of an integrated circuit provided with several superposed levels of transistors, comprising: providing a structure provided with transistors of a lower level covered by an insulating layer itself covered by a stack with a first doped semi-conducting layer according to a doping of a first type, and a second doped semi-conducting layer according to a doping of opposite type, the first doped semi-conducting layer and the second doped semi-conducting layer being superposed and in contact with one another, etching the stack so as to form, on the insulating layer, a first block and a second block, then, removing in a given zone of the second block, the second given doped semi-conducting layer, forming a first gate on the second doped semi-conducting layer of the first block and a second gate on the first doped semi-conducting layer of the second block.Type: ApplicationFiled: November 8, 2018Publication date: May 16, 2019Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Jean-Pierre Colinge, Sylvain Barraud, Perrine Batude
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Patent number: 10170621Abstract: Method of making a transistor, comprising the following steps: make a gate and a first spacer on a first channel region of a first crystalline semiconducting layer; make first crystalline semiconductor portions on the second source and drain regions; make the second regions amorphous and dope them; recrystallise the second regions and activate the dopants present in the second regions; remove the first portions; make a second spacer thicker than the first spacer; make second doped crystalline semiconductor portions on the second regions, said second portions and the second regions of the first layer together form the source and drain of the transistor.Type: GrantFiled: May 23, 2017Date of Patent: January 1, 2019Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Shay Reboh, Perrine Batude, Flavia Piegas Luce