Abstract: An end effector in a robotic arm assembly receives a substrate in a cassette module and moves the substrate into a process module. A turntable rotatable on a fixed axis rotates a stator and a planet in the process chamber to a position of the planet in axial alignment with the end effector in the process chamber. A lifter assembly axially aligned with, and initially axially displaced from, the axially aligned planet is moved axially to lift the substrate from the end effector. The end effector is then withdrawn by the robotic arm assembly from the process chamber and the substrate is deposited by the lifter assembly on the axially aligned planet. When successive substrates have been sequentially deposited on a plurality of planets in the process chamber in the manner described above, the planets are individually rotated by the turntable relative to the stator on a second axis displaced from the first axis. The stator has peripheral teeth which mesh with teeth on the planets, the teeth being constructed (e.g.

Abstract: A robotic arm assembly in a transport module is expansible to have an effector at its end receive a substrate in a cassette module and is then contracted and rotated with the effector to have the effector face a process module. Planets on a turntable in the process module are rotatable on first parallel axes. The turntable is rotatable on a second axis parallel to the first axes to move successive planets to a position facing the effector. At this position, an alignment assembly is aligned with, but axially displaced from, one of the planets. This assembly is moved axially into coupled relationship with such planet and then rotated to a position aligning the substrate on the effector axially with such planet when the arm assembly is expanded. A lifter assembly aligned with, and initially displaced from, such planet is moved axially to lift the substrate from the effector. The arm assembly is then contracted, rotated with the effector and expanded to receive the next cassette module substrate.

Abstract: An electrical field between a positive anode and a negative target in a cavity and a magnetic field in the cavity produce electron flow from the target in a convoluted path for ionizing a gas such as oxygen flowing through the cavity. The ionized oxygen forms positive and negative oxygen ions which flow from the cavity to an aluminum oxide surface on a substrate. The aluminum oxide surface may contain hydrocarbon molecules which prevent a thin magnetizable layer from adhering uniformly on the aluminum oxide surface. The ionized oxygen molecules and atoms flow through the cavity at a reduced rate and react chemically with the hydrocarbon molecules to form water vapor and carbon monoxide and/or carbon dioxide gases. By removing the hydrocarbons from the aluminum oxide surface, the layer of the magnetizable material is deposited adheringly on the aluminum oxide surface. A neutral gas (e.g.

Abstract: A robotic arm assembly in a transport module is expansible to have an effector at its end receive a substrate in a cassette module and is then contracted and rotated with the effector to have the effector face a process module. Planets on a turntable in the process module are rotatable on first parallel axes. The turntable is rotatable on a second axis parallel to the first axes to move successive planets to a position facing the effector. At this position, an alignment assembly is aligned with, but axially displaced from, one of the planets. This assembly is moved axially into coupled relationship with such planet and then rotated to a position aligning the substrate on the effector axially with such planet when the arm assembly is expanded. A lifter assembly aligned with, and initially displaced from, such planet is moved axially to lift the substrate from the effector. The arm assembly is then contracted, rotated with the effector and expanded to receive the next cassette module substrate.

Abstract: A robotic arm assembly in a transport module is expansible to have an effector at its end receive a substrate in a cassette module and is then contracted and rotated with the effector to have the effector face a process module. Planets on a turntable in the process module are rotatable on first parallel axes. The turntable is rotatable on a second axis parallel to the first axes to move successive planets to a position facing the effector. At this position, an alignment assembly is aligned with, but axially displaced from, one of the planets. This assembly is moved axially into coupled relationship with such planet and then rotated to a position aligning the substrate on the effector axially with such planet when the arm assembly is expanded. A lifter assembly aligned with, and initially displaced from, such planet is moved axially to lift the substrate from the effector. The arm assembly is then contracted, rotated with the effector and expanded to receive the next cassette module substrate.

Abstract: A robotic arm assembly in a transport module is expansible to have an effector at its end receive a substrate in a cassette module and is then contracted and rotated with the effector to have the effector face a process module. Planets on a turntable in the process module are rotatable on first parallel axes. The turntable is rotatable on a second axis parallel to the first axes to move successive planets to a position facing the effector. At this position, an alignment assembly is aligned with, but axially displaced from, one of the planets. This assembly is moved axially into coupled relationship with such planet and then rotated to a position aligning the substrate on the effector axially with such planet when the arm assembly is expanded. A lifter assembly aligned with, and initially displaced from, such planet is moved axially to lift the substrate from the effector. The arm assembly is then contracted, rotated with the effector and expanded to receive the next cassette module substrate.

Abstract: A target, preferably frusto-conical, defines a cavity with an anode. Molecules of a neutral gas (e.g. argon) pass through the cavity at a particular rate. An alternating voltage is applied between the anode and the cathode. When the anode voltage is positive relative to the cathode, electrons are emitted from the cathode and are directed to the anode. A magnetic field is produced on the electrons in a direction transverse, preferably substantially perpendicular, to the electrical field. The magnetic field causes the electrons to travel in a spiral path between the anode and the target, thereby enhancing the ionization rate of the argon molecules passing through the cavity. The positive argon ions impinge on the target and cause atoms to be sputtered from the target surface. These atoms become deposited on a surface of a substrate displaced from the target.

Abstract: A robotic arm assembly in a transport module is expansible to have an effector at its end receive a substrate in a cassette module and is then contracted and rotated with the effector to have the effector face a process module. Planets on a turntable in the process module are rotatable on first parallel axes. The turntable is rotatable on a second axis parallel to the first axes to move successive planets to a position facing the effector. At this position, an alignment assembly is aligned with, but axially displaced from, one of the planets. This assembly is moved axially into coupled relationship with such planet and then rotated to a position aligning the substrate on the effector axially with such planet when the arm assembly is expanded. A lifter assembly aligned with, and initially displaced from, such planet is moved axially to lift the substrate from the effector. The arm assembly is then contracted, rotated with the effector and expanded to receive the next cassette module substrate.

Abstract: A robotic arm assembly in a transport module is expansible to have an effector at its end receive a substrate in a cassette module and is then contracted and rotated with the effector to have the effector face a process module. Planets on a turntable in the process module are rotatable on first parallel axes. The turntable is rotatable on a second axis parallel to the first axes to move successive planets to a position facing the effector. At this position, an alignment assembly is aligned with, but axially displaced from, one of the planets. This assembly is moved axially into coupled relationship with such planet and then rotated to a position aligning the substrate on the effector axially with such planet when the arm assembly is expanded. A lifter assembly aligned with, and initially displaced from, such planet is moved axially to lift the substrate from the effector. The arm assembly is then contracted, rotated with the effector and expanded to receive the next cassette module substrate.

Abstract: A robotic arm assembly in a transport module is expansible to have an effector at its end receive a substrate in a cassette module and is then contracted and rotated with the effector to have the effector face a process module. Planets on a turntable in the process module are rotatable on first parallel axes. The turntable is rotatable on a second axis parallel to the first axes to move successive planets to a position facing the effector. At this position, an alignment assembly is aligned with, but axially displaced from, one of the planets. This assembly is moved axially into coupled relationship with such planet and then rotated to a position aligning the substrate on the effector axially with such planet when the arm assembly is expanded. A lifter assembly aligned with, and initially displaced from, such planet is moved axially to lift the substrate from the effector. The arm assembly is then contracted, rotated with the effector and expanded to receive the next cassette module substrate.

Abstract: A method wherein wafers are transferred between a loading chamber and a central vacuum chamber. A plurality of first vacuum processing chambers are disposed in a satellite relationship around the central chamber. A plurality of second non-vacuum chambers are interspersed with the first chambers in a satellite relationship around the central chamber. A second central vacuum chamber communicates with one of the first chambers through a valve. Third and fourth pluralities of chambers are disposed in a satellite relationship around the second central chamber to respectively perform functions similar to those performed by the first and second chambers, the fourth chambers being interspersed with the third chambers.

Abstract: Electrons released by an anode are attracted by an electric field toward a target cathode in a cavity to ionize argon atoms in the space between the anode and target. Magnets produce a magnetic field in the cavity in a direction perpendicular to the electrical field to produce a trapping spiral movement of the electrons in the cavity, thereby enhancing the ionization of the gaseous molecules. The ions bombard the target to emit sputtered atoms which are deposited on a semi-conductor wafer. The target may have a frusto-conical configuration defined by a single member or by a plurality of segmental tiles formed from different materials to provide for a deposition of a mixture of such different materials on the wafer. The target may be magnetizable.

Abstract: Optical fibre based cables 1 and 2 are jointed by fixing their axial strength members 3 to a perforated connecting member 9. Fibre tails to be joined are stored on the connecting member by winding around guides 16 engageable with perforations 11. Fibre end parts are joined and positioned in ferrules 24 also engaged with perforations 11.

Abstract: A motor vehicle fuel system operable selectively to supply metered quantities of petrol or LPG in its gaseous state to a carburetter induction passage. The LPG system includes a single stage pressure regulator and an injection valve which may be a digital or an analogue valve. The regulator operates to vary the pressure of gaseous LPG with variations in engine loading by referring that pressure across a single diaphragm to the pressure established in the induction passage downstream of the throttle valve by operation of the engine, while maintaining that regulated gas pressure above that subsisting in the induction passage upstream of the throttle valve.

Abstract: A sputter coating machine (11) includes a rectilinearly translatable load-lock door (16) closing off one end of a vacuumable chamber (12). Wafers (21) to be coated are loaded and unloaded by an elevated blade (24) onto a chuck (57) carried from the inside surface of the door (16). A clamping ring (85) clamps the wafer (21) to the chuck (57) and advances the wafer (21) to the open throat of a gate-valve portion (15) of the chamber (12) into position opposite a magnetron-sputter gun (105) carried from a second door end of the chamber (12). The second door (13) is moveable away from the chamber (12) on guide rails (141) and pivotable about an axis (138) for ease of maintenance.

Abstract: A motor vehicle fuel system operable selectively to supply metered quantities of petrol or LPG in its gaseous state to a carburetter induction passage. The LPG system includes a single stage pressure regulator and an injection valve which may be a digital or an analogue valve. The regulator operates to vary the pressure of gaseous LPG with variations in engine loading by referring that pressure across a single diaphragm to the pressure established in the induction passage downstream of the throttle valve by operation of the engine, while maintaining that regulated gas pressure above that subsisting in the induction passage upstream of the throttle valve.

Abstract: A two stage moulding procedure for the production of foil video discs. In a first pressing operation a satin finish consisting of a surface irregularity is applied to a surface of the foil, and then, in a second pressing operation, the foil is pressed between stamper plates to impart thereto, at one or both surfaces an impression of the information or data to be recorded. The satin finish may be formed by pressing the foil between stamper plates bearing the satin finish at their inwardly facing surfaces or alternatively between a pair of rollers bearing the satin finish at their surfaces.

Abstract: In a magnetron sputter gun for sputtering cathode material at subatmospheric pressure from a target onto a workpiece, the sputter cathode target comprises a pair of rings disposed in the inner magnetic gap between a pair of axially spaced annular pole pieces of a magnetic circuit. The pair of cathode target rings include a main target ring, which is to receive a preponderance of the cathode erosion, and an auxiliary ring disposed within a counter bore at the inner lip of one of the pole pieces. The main and auxiliary target rings are disposed relative to the counter bored pole piece so as to shape the magnetic field in the region of the sputter target rings such that a nearly constant sputtering rate is attained from the target with constant applied anode to cathode potential and constant current during the time to produce erosion of a preponderance of the volume of the main target ring, whereby a controlled sputtering rate is obtained concurrently with a relatively high utilization of target material.

Abstract: The sputtering apparatus includes a concentric anode and cathode electrode and a magnetic structure for producing a magnetic field crossed with the electric field (magnetron type discharge) over the cathode region to be sputtered for enhancing the sputtering operation. The magnetic structure includes field shaping means, such as shunts or bucking magnets, to limit the cathode dark space substantially to the effective sputter surface of the cathode. A ground shield surrounding the cathode, but not extending into the dark space, is utilized to contribute to the effect produced by the magnetic field, and means are provided for cooling the anode and cathode. In the case of sputtering ferromagnetic material, a ferromagnetic sputter cathode has its thickness dimensioned so as to be magnetically saturated by the applied magnetic field in a region of relatively low sputter erosion and to be thicker in regions of more intense sputter erosion.