Abstract: A method for changing test substrates in a continuous-flow vacuum system in a multiple-treatment-step process cycle for treating a substrate, a treatment method using the method for changing test substrates, and systems for treating a plurality of substrates (61) and for changing test substrates. For at least two treatment steps, at least two test substrates (66) are transferred to a vacuum treatment system at the beginning of the process cycle and are transferred back out once the process cycle is concluded. Subsequently, the first test substrate (66) concurrently treated in this step is removed from the measurement position (70) it occupied during the treatment and is deposited in an empty position (71) without a test substrate (66). Subsequently, the second test substrate (66) which has not been treated yet is deposited in the resulting free measurement position (70) for the purpose of supplying the second test substrate to the subsequent treatment step.

Abstract: A manufacturing system includes a tape advancing through the manufacturing system and a station of the manufacturing system. The tape includes a first portion having grains of an inorganic material bound by an organic binder. The station of the manufacturing system receives the first portion of the tape and prepares the tape for sintering by chemically changing the organic binder and/or removing the organic binder from the first portion of the tape, leaving the grains of the inorganic material, to form a second portion of the tape and, at least in part, prepare the tape for sintering.

Abstract: An interface, apparatus, and method are described for communication between a radio control (REC) node and first and second radio equipment (RE) nodes in a radio base station that transceives information over radio interface using multiple antenna carriers. The REC node is separate from and coupled to the first RE node by a first transmission link, and the second RE node coupled to the first RE by a second transmission link. Both control information and user information intended for communication between the REC node and the first RE node and the REC and the second RE node are conveyed over the first transmission link. The first RE node also conveys information between the REC and second RE node. Many advantageous features are described.

Abstract: The invention relates to a micromechanical Coriolis rate of rotation sensor for detecting rates of rotation with components around measuring axes in three spatial directions which are orthogonal to one another. The Coriolis rate of rotation sensor has a substrate, a detection mass and at least two drive masses, wherein the drive masses can each be driven to perform a primary movement relative to the substrate. The direction of the primary movement of one of the at least two drive masses is perpendicular to the direction of the primary movement of another of the at least two drive masses. The detection mass is coupled to the drive masses. The invention also relates to an Inertial Measurement Unit (IMU) and to a method for detecting rates of rotation in three spatial directions which are orthogonal to one another.

Abstract: The present application relates to a multiple component which is to be subsequently individualized by forming components containing active structures, in addition to a corresponding component which can be used in microsystem technology systems. The multiple component and/or component comprises a flat substrate and also a flat cap structure which are bound to each other such that they surround at least one first and one second cavity per component, which are sealed against each other and towards the outside. The first of the two cavities is provided with getter material and due to the getter material has a different internal pressure and/or a different gas composition than the second cavity. The present application also relates to a method for producing the type of component and/or components for which gas mixtures of various types of gas have a different absorption ratio in relation to the getter material.

Abstract: A rotation rate sensor for sensing a rotation ? by which the sensor is rotated has a substrate and a driving and sensing arrangement located substantially flat in an X-Y plane above a substrate surface of the substrate and having a center. The driving and sensing arrangement has a drive mass and a sense mass that are arranged at different spacings from the center of the driving and sensing arrangement symmetrically about the center. The oscillation modes of the drive mass and the sense mass are partially transmittable onto one another and are partially decoupled. The rotation ? is sensed in that a tilting of the sense mass out of a surface plane of the driving and sensing arrangement is sensed.

Abstract: The invention relates to a micromechanical Coriolis rate of rotation sensor for detecting rates of rotation with components around measuring axes in three spatial directions which are orthogonal to one another. The Coriolis rate of rotation sensor has a substrate, a detection mass and at least two drive masses, wherein the drive masses can each be driven to perform a primary movement relative to the substrate. The direction of the primary movement of one of the at least two drive masses is perpendicular to the direction of the primary movement of another of the at least two drive masses. The detection mass is coupled to the drive masses. The invention also relates to an Inertial Measurement Unit (IMU) and to a method for detecting rates of rotation in three spatial directions which are orthogonal to one another.

Abstract: Two-component adhesives (K), which includes two components K1 and K2. Component K1 includes at least one epoxy resin A with more than one epoxy group per molecule on average; at least one epoxy adduct B with more than one epoxy group per molecule on average that is an epoxy adduct of type B1 and optionally combined with an epoxy adduct of type B2; at least one reaction product F between an epoxy adduct B and a compound C, which has at least two isocyanate groups, in addition to at least one curing agent D for epoxy resins, which is activated by increased temperature. The component K2 comprises a compound E, which includes at least two isocyanate groups.

Abstract: The invention relates to a cover wafer with a core and with an inside, whereby the inside has one or more annular outer areas, (an) annular area(s), which inwardly adjoin(s) the outer area(s), and has (a) inner area(s), and to a component cover with only one annular outer area on its inside. The invention is characterized in that at least area(s) has/have a buffer layer, which has a wetting angle of <35° for a metallic eutectic solution that melts in a range of >265° C. to 450° C. The invention also relates to a component cover having one of the areas which has said buffer layer in a comparable manner. The invention additionally relates to a wafer component or to a component, which can be inserted using microsystem technology and which has a cover wafer or component cover applied with the aid of a solder material, and to a method for the production thereof.

Abstract: A method and a device are disclosed for follow-up treatment of the contour of the surface of at least one optical lens, in particular a microlens which is made of glass or a glass-type material and which has a convex lens surface delimited by a circumferential line abutting on a plane section surrounding the circumferential line and which has a lens underside facing the convex lens surface. Along the circumferential line of the optical lens on the plane section is placed a device perfectly matching the circumferential line and at least laterally bordering the convex lens surface, the optical lens is heated to a temperature of at least the transformation temperature of glass or glass-type material, pressure equalization prevails between the convex lens surface and the lens underside, after a certain period of time, during which the optical lens undergoes the temperature treatment and subsequent cooling below the transformation temperature, the device is removed from the optical lens.

Abstract: An interface, apparatus, and method are described for communication between a radio equipment control (REC) node and first and second radio equipment (RE) nodes in a radio base station that transceives information over radio interface using multiple antenna carriers. The REC node is separate from and coupled to the first RE node by a first transmission link, and the second RE node coupled to the first RE by a second transmission link. Both control information and user information intended for communication between the REC node and the first RE node and the REC and the second RE node are conveyed over the first transmission link. The first RE node also conveys information between the REC and second RE node. Many advantageous features are described.

Abstract: The present invention is directed to a method for testing the leakage rate of an encapsulated device comprising the step: bombing the device with a neon and/or argon atmosphere using a bombing pressure of at least more than environmental pressure and measuring the quality factor before and after bombing. Preferably, the bombing time is about 10 to 100 hours, and the bombing pressure is 1.5 to 100 bar, more preferably 1.5 to 5 bar and most preferably about 4 bar. With this test, the leakage rate of fine leaks of the device may be determined.

Abstract: Disclosed is a method for producing single microlenses or an arrays of microlenses composed of a glass-type material, in which method a first substrate is provided with a surface containing impressions over which a second substrate composed of a glass-type material is placed at least partially overlapping it and is joined therewith under vacuum conditions. The substrate composite is tempered in such a manner that the second substrate softens and flows into the impressions of the first substrate, thereby structuring the side of the second substrate facing away from the first substrate in order to form at least one microlens surface.

Abstract: Disclosed is a method for producing single microlenses or an arrays of microlenses composed of a glass-type material, in which method a first substrate is provided with a surface containing impressions over which a second substrate composed of a glass-type material is placed at least partially overlapping it and is joined therewith under vacuum conditions. The substrate composite is tempered in such a manner that the second substrate softens and flows into the impressions of the first substrate, thereby structuring the side of the second substrate facing away from the first substrate in order to form at least one microlens surface.

Abstract: A rotation rate sensor for sensing a rotation ? by which the sensor is rotated has a substrate and a driving and sensing arrangement located substantially flat in an X-Y plane above a substrate surface of the substrate and having a center. The driving and sensing arrangement has a drive mass and a sense mass that are arranged at different spacings from the center of the driving and sensing arrangement symmetrically about the center. The oscillation modes of the drive mass and the sense mass are partially transmittable onto one another and are partially decoupled. The rotation ? is sensed in that a tilting of the sense mass out of a surface plane of the driving and sensing arrangement is sensed.

Abstract: The present application relates to a multiple component which is to be subsequently individualized by forming components containing active structures, in addition to a corresponding component which can be used in microsystem technology systems. The multiple component and/or component comprises a flat substrate and also a flat cap structure which are bound to each other such that they surround at least one first and one second cavity per component, which are sealed against each other and towards the outside. The first of the two cavities is provided with getter material and due to the getter material has a different internal pressure and/or a different gas composition than the second cavity. The present application also relates to a method for producing the type of component and/or components for which gas mixtures of various types of gas have a different absorption ratio in relation to the getter material.

Abstract: An interface, apparatus, and method are described for communication between a radio equipment control (REC) node and a radio equipment (RE) node in a radio base station that tranceives information over radio interface using multiple antenna carriers. The REC node is separate from and coupled to the RE node by a transmission link. Both control information and user information are generated for transmission over the transmission link from one of the REC node and the RE node to the other. Many advantageous interface features are described.

Abstract: Disclosed is a method for producing single microlenses or an arrays of microlenses composed of a glass-type material, in which method a first substrate is provided with a surface containing impressions over which a second substrate composed of a glass-type material is placed at least partially overlapping it and is joined therewith under vacuum conditions. The substrate composite is tempered in such a manner that the second substrate softens and flows into the impressions of the first substrate, thereby structuring the side of the second substrate facing away from the first substrate in order to form at least one microlens surface.

Abstract: The invention relates to a sound-absorbing coating for an elastic structure (1) made of at least two polymers, comprising at least one coating layer (2) closer to the elastic structure (1) and made of at least one polymer A and at least one coating layer (3) farther from the elastic structure (1) and made of at least one polymer B, the latter coating layer (3) being applied immediately on said at least one polymer A so as to form an integral composite effecting a loss factor in the range of from 0.01 to 0.6 in a temperature range of from ?20° C. to +80° C. The invention also relates to a process for preparing such a coating and the use of such a coating for making sound-absorbing coatings, for example on automotive vehicles.

Abstract: The invention relates to a cover wafer with a core (1) and with an inside (7, 10, 11), whereby the inside has one or more annular outer areas (7), (an) annular area(s) (10), which inwardly adjoin(s) the outer area(s), and has (a) inner area(s) (11), and to a component cover with only one annular outer area on its inside. The invention is characterized in that at least area(s) (10) has/have a buffer layer, which has a wetting angle of <35° for a metallic eutectic solution that melts in a range of >265° C. to 450° C. The invention also relates to a component cover having one of the areas (7), (10) and (11), which has said buffer layer in a comparable manner. The invention additionally relates to a wafer component or to a component, which can be inserted using microsystem technology and which has a cover wafer or component cover applied with the aid of the solder material, and to a method for the production thereof.