Abstract: A method of using a thermocouple is provided. The method includes, but is not limited to, disposing at least one temperature sensor at each of two or more respective portions of an electrical connector adapted to receive thermocouple signals, measuring temperatures at the two or more portions, and calculating the temperatures at each terminal of the electrical connector based on measured temperature values of the two or more respective portions having the disposed temperature sensors. The method also includes, but is not limited to, calculating a cold junction temperature of a terminal for at least one thermocouple channel carrying the thermocouple signals based on measured or calculated temperature values of the terminals, or a combination thereof.

Abstract: A method of using a thermocouple is provided. The method includes, but is not limited to, disposing at least one temperature sensor at each of two or more respective portions of an electrical connector adapted to receive thermocouple signals, measuring temperatures at the two or more portions, and calculating the temperatures at each terminal of the electrical connector based on measured temperature values of the two or more respective portions having the disposed temperature sensors. The method also includes, but is not limited to, calculating a cold junction temperature of a terminal for at least one thermocouple channel carrying the thermocouple signals based on measured or calculated temperature values of the terminals, or a combination thereof.

Abstract: A method of using a thermocouple is provided. The method includes, but is not limited to, disposing at least one temperature sensor at each of two or more respective portions of an electrical connector adapted to receive thermocouple signals, measuring temperatures at the two or more portions, and calculating the temperatures at each terminal of the electrical connector based on measured temperature values of the two or more respective portions having the disposed temperature sensors. The method also includes, but is not limited to, calculating a cold junction temperature of a terminal for at least one thermocouple channel carrying the thermocouple signals based on measured or calculated temperature values of the terminals, or a combination thereof.

Abstract: A method of using a thermocouple is provided. The method includes, but is not limited to, disposing at least one temperature sensor at each of two or more respective portions of an electrical connector adapted to receive thermocouple signals, measuring temperatures at the two or more portions, and calculating the temperatures at each terminal of the electrical connector based on measured temperature values of the two or more respective portions having the disposed temperature sensors. The method also includes, but is not limited to, calculating a cold junction temperature of a terminal for at least one thermocouple channel carrying the thermocouple signals based on measured or calculated temperature values of the terminals, or a combination thereof.

Abstract: A system for detecting fluid on a substrate is provided. The system includes, but is not limited to, a sensor board, a first capacitive sensor, and a platform upon which the substrate is to be placed. The first capacitive sensor is mounted on the sensor board. The first capacitive sensor has a transmit sensor pad for transmitting a signal, a receive sensor pad for receiving the signal, and an analog-to-digital convertor connected with the receive sensor pad for analyzing the received signal. The platform is a first distance from the transmit and receive sensor pads.

Abstract: Sensors in a vehicle seat provide data for classifying occupants. Information from the sensors may be used to determine the position of an occupant relative to the seat and relative to the vehicle, the weight of the occupant, whether the seat belt is latched, and the position of the occupant relative to an airbag before and during a crash. Situations wherein airbag deployment is not desired are identified. A particularly inexpensive system meets the occupant classification needs of a system comprising a low risk deployment passenger airbag.

Abstract: A system for detecting fluid on a substrate is provided. The system includes, but is not limited to, a sensor board, a first capacitive sensor, and a platform upon which the substrate is to be placed. The first capacitive sensor is mounted on the sensor board. The first capacitive sensor has a transmit sensor pad for transmitting a signal, a receive sensor pad for receiving the signal, and an analog-to-digital convertor connected with the receive sensor pad for analyzing the received signal. The platform is a first distance from the transmit and receive sensor pads.

Abstract: Sensors in a vehicle seat provide data for classifying occupants. Information from the sensors may be used to determine the position of an occupant relative to the seat and relative to the vehicle, the weight of the occupant, whether the seat belt is latched, and the position of the occupant relative to an airbag before and during a crash. Situations wherein airbag deployment is not desired are identified. A particularly inexpensive system meets the occupant classification needs of a system comprising a low risk deployment passenger airbag.

Abstract: Systems and methods for controlling a heater to drive a load temperature to approximate a setpoint. At the beginning of each ½ AC cycle, a sigma delta modulation algorithm is computed to determine whether the AC cycle should be turned on or off. The running estimate of the past actual duty cycle is compared to the desired output duty cycle, and the difference between the two is used to adjust the next ½ cycle's output. This results in a pseudo-random pulse sequence output which does not contain significant periodic components that could cause undesirable small periodic thermal ‘ripples’ on the element being heated.

Abstract: Sensors in a vehicle seat provide data for classifying occupants. Information from the sensors may be used to determine the position of an occupant relative to the seat and relative to the vehicle, the weight of the occupant, whether the seat belt is latched, and the position of the occupant relative to an airbag before and during a crash. Situations wherein airbag deployment is not desired are identified. A particularly inexpensive system meets the occupant classification needs of a system comprising a low risk deployment passenger airbag.

Abstract: Systems and methods for controlling a heater to drive a load temperature to approximate a setpoint. At the beginning of each ½ AC cycle, a sigma delta modulation algorithm is computed to determine whether the AC cycle should be turned on or off. The running estimate of the past actual duty cycle is compared to the desired output duty cycle, and the difference between the two is used to adjust the next ½ cycle's output. This results in a pseudo-random pulse sequence output which does not contain significant periodic components that could cause undesirable small periodic thermal ‘ripples’ on the element being heated.

Abstract: An interfacial force microscope includes a differential-capacitance displacement sensor having a tip mounted on an oscillating member. The sensor generates displacement signals in response to oscillations of the member. A scanner is adjacent the sensor and supports a sample to be imaged. The scanner is actuable to move the sample relative to the sensor to bring the tip into intermittent contact with said sample as the member oscillates. A controller is in communication with the sensor and the scanner. The controller includes a sensor feedback circuit receiving the displacement signals and an AC setpoint signal. The AC setpoint signal has a frequency generally equal to the frequency at the peak of the displacement versus frequency curve of the sensor. The output of the sensor feedback circuit is applied to the sensor to oscillate the member. The controller also provides output to the scanner in response to the displacement signals to control the separation distance between the sensor and the sample.

Abstract: A sensor for measuring yaw rate or roll rate of an automotive vehicle comprises a freely rotating inertial disk and an angular rate sensor responsive to the rotation of the inertial disk relative to a housing. In one embodiment the inertial disk presents an alternating magnetic field at its circumference. The rate and direction of rotation of the inertial disk relative to its housing is determined by three magnetic field sensors such as linear Hall Effect sensors responsive to the field presented by the inertial disk. In another embodiment electronic cameras measure movement of fiducial marks on the inertial disk. Air surrounds the inertial disk and air viscosity gradually brings rotation to a stop. For yaw rate measurement the disk axis is oriented vertically and the inertial disk is supported in the radial direction by low friction bearings such as ball bearings or magnetic bearings and in the axial direction by substantially frictionless bearings such as magnetic bearings.

Abstract: A load cell particularly useful for a seat occupant weight sensing system includes a liquid filled chamber and a pressure sensor providing an electric signal indicating the pressure in the liquid. Four load cells supporting a seat provide four signals that are added to determine the weight of the seat occupant. The load cell comprises two flanged conical springs stressed to provide preload. One of the springs also forms part of the surface of the liquid filled chamber. The two springs operate in concert to resist side forces and moments. The load cell is responsive to both compressive and tensile forces while being substantially unaffected by lateral forces and moments. A seat belt tension sensor may be included to measure seat belt tension.

Abstract: Apparatus and methods control CMP to uniformly polish a series of wafers. Average motor current I(avg) drawn by, and related average work W(avg) performed by, motors during CMP on the wafers reliably indicate quality of a roughness polishing characteristic of a polishing surface of a polishing pad. A conditioner controller controls a rate at which the quality of the polishing surface is restored by conditioning in relation to a rate of change of the quality of the polishing surface due to the CMP. Motor current is measured and averaged over many CMP-processed wafers. The method defines a baseline range of values of average work and controls conditioning according to whether average work is within the baseline range. When the polishing surface moves at constant velocity relative to each of the wafers that are being polished, a control signal based on average motor current represents the quality of the polishing characteristic.

Abstract: An interfacial force microscope includes a differential-capacitance displacement sensor having a tip mounted on an oscillating member. The sensor generates displacement signals in response to oscillations of the member. A scanner is adjacent the sensor and supports a sample to be imaged. The scanner is actuable to move the sample relative to the sensor to bring the tip into intermittent contact with said sample as the member oscillates. A controller is in communication with the sensor and the scanner. The controller includes a sensor feedback circuit receiving the displacement signals and an AC setpoint signal. The AC setpoint signal has a frequency generally equal to the frequency at the peak of the displacement versus frequency curve of the sensor. The output of the sensor feedback circuit is applied to the sensor to oscillate the member. The controller also provides output to the scanner in response to the displacement signals to control the separation distance between the sensor and the sample.

Abstract: The invention characterizes a seat occupant. Sensors in the seat determine the position of a seat occupant relative to the seat. The position of the seat relative to the vehicle combined with the position of the seat occupant relative to the seat determines the location of the seat occupant relative to the vehicle. The seat occupant is characterized by the magnitude and Q of capacitance between electrodes in the seat and other indications. Situations wherein airbag deployment is not desired are identified. The position of the occupant relative to the seat, the weight of the seat occupant, whether the seat belt is latched, the track position and recline angle of the vehicle seat and vehicle deceleration during a crash are combined with capacitance and other measurements to estimate the position of the occupant relative to a possible deploying airbag as the occupant moves toward the airbag during a crash.

Abstract: Apparatus and methods are disclosed that promote greater polishing uniformity in linear CMP systems by introducing a relative lateral motion between a CMP belt and a rotating polish head securing a wafer. A belt polish module comprises a linear CMP belt forming a loop around an idle roller and a drive roller, first and second pistons engaging, respectively, first and second ends of the idle roller, and a controller configured to vary the forces applied by the first and second pistons to the ends of the idle roller in order to laterally translate the linear CMP belt. A method for linear CMP comprises rotating a wafer about a vertical axis, contacting the rotating wafer against a linear CMP belt moving in a longitudinal direction, and causing a relative lateral motion between the rotating wafer and the linear CMP belt.