Abstract: A coating source for physical vapor deposition to produce doped carbon layers. The coating source is produced by way of sintering from pulverulent components and is formed of carbon as matrix material in a proportion of at least 75 mol % and at least one dopant in a proportion in the range from 1 mol % to 25 mol %.

Abstract: A tubular target formed of molybdenum or a molybdenum alloy has an oxygen content of less than 50 ?g/g, a density of greater than 99% of the theoretical density, and an average grain size of less than 100 ?m. The molybdenum or molybdenum alloy tube may be produced by extrusion. In one embodiment, the molybdenum tube has a backing tube of titanium or titanium alloy. In an embodiment, the molybdenum tube has a varying wall thickness with an increase towards its ends.

Abstract: A coating including a multilayer film, which includes a multi-layered structure including layers of the type I and layers of the type II. The layers of the type I are metal nitride with a chemical composition given by the formula Me11-aMe2aZI and the layers of the type II are a Mo-comprising material with chemical composition given by the formula Mo1-b-cSicBbZII or Mo1-b-cSicBb. Also described is a method for depositing the above mentioned coating.

Abstract: A coating including a multilayer film, which includes a multi-layered structure including layers of the type I and layers of the type II. The layers of the type I are metal nitride with a chemical composition given by the formula Me11-aMe2aZI and the layers of the type II are a Mo-comprising material with chemical composition given by the formula Mo1-b-cSicBbZII or Mo1-b-cSicBb. Also described is a method for depositing the above mentioned coating.

Abstract: A target includes a target plate and a stabilizing layer which is joined to the rear side of the target plate. The stabilizing layer was produced by high-kinetic-energy spraying of stabilizing material onto the target plate. A process for producing a target is also provided.

Abstract: A target, in particular a sputtering target, includes a target plate of a brittle material and a back plate. The back plate is connected to the target plate over an area and the target plate has micro cracks which pass through from the front side to the rear side of the target plate and divide the target plate into adjacent fragments. A process is also provided for producing such a target which is suitable, in particular, for the use of extremely high power densities. A vacuum coating process uses at least one such target as a sputtering target and as a result particularly high power densities can be used on the target during the sputtering.

Abstract: The present invention concerns substrates coated with an Mo1-x-ySixBy layer, said layer comprising the T2 phase, and a method for the production thereof.

Abstract: A conductive target material includes substantially one lithium compound, preferably lithium phosphate, and carbon, as well as typical impurities. A process for producing a conductive target material and a thin-film battery using a conductive target material for deposition of a lithium ion electrolyte layer are also provided.

Abstract: An arc evaporation coating source includes a target made of a coating material to be vapor-deposited, a ferromagnetic yoke for influencing the vapor deposition of the coating material to be vapor-deposited and at least one permanent-magnetic body for influencing the vapor deposition of the coating material to be vapor-deposited. The ferromagnetic yoke is disposed in contact with the target. The permanent-magnetic body is fastened to the target by the ferromagnetic yoke.

Abstract: Arc vaporization of targets produced by means of powder metallurgy in Which the components are in the form of intermetallic compounds. The target is produced using a powder that contains a first and second intermetaallic compound and/or a first and second ceramic compound.

Abstract: A tubular target is formed of molybdenum or a molybdenum alloy which has an oxygen content of less than 50 ?g/g, a density of greater than 99% of the theoretical density and an average grain size of less than 100 ?m. The molybdenum or molybdenum alloy tube may be produced by extrusion and it is formed with walls having a wall thickness that increases towards the ends of the tube. The molybdenum tube has a backing tube of titanium or titanium alloy that is attached inside with a material bond connection. Alternatively, the backing tube is formed of austenitic steel or a copper alloy.

Abstract: A coating source for physical vapor deposition has at least one component, which has been produced from at least one pulverulent starting material in a powder metallurgy production process and at least one ferromagnetic region embedded in the component. The at least one ferromagnetic region, is introduced into the component and fixedly connected to the component during the powder metallurgy production process.

Abstract: A tubular target formed of molybdenum or a molybdenum alloy has an oxygen content of less than 50 ?g/g, a density of greater than 99% of the theoretical density, and an average grain size of less than 100 ?m. The molybdenum or molybdenum alloy tube may be produced by extrusion. In one embodiment, the molybdenum tube has a backing tube of titanium or titanium alloy. In an embodiment, the molybdenum tube has a varying wall thickness with an increase towards its ends.

Abstract: A tubular target is formed of molybdenum or a molybdenum alloy which has an oxygen content of less than 50 ?g/g, a density of greater than 99% of the theoretical density and an average grain size of less than 100 ?m. The molybdenum or molybdenum alloy tube may be produced by extrusion and it is formed with walls having a wall thickness that increases towards the ends of the tube. The molybdenum tube has a backing tube of titanium or titanium alloy that is attached inside with a material bond connection. Alternatively, the backing tube is formed of austenitic steel or a copper alloy.

Abstract: A tool consists of a base material selected from cemented carbide, tool steels, cermet, or hard materials, and a coating of two or more layers. At least one coating layer has the composition Ti—Al—Ta—N and at least one further coating layer has the composition Ti—Al—Ta-Me-N. The component Me is one more elements selected from the group consisting of Si, V, B. The tool, which is preferably a wearing part, is distinguished by a high wear resistance that improves the service life, in particular where high demands are imposed on the tool.

Abstract: A method for producing a tubular target formed of molybdenum or a molybdenum alloy which has an oxygen content of less than 50 ?g/g, a density of greater than 99% of the theoretical density and an average grain size of less than 100 ?m and which is connected to a supporting tube. The molybdenum or molybdenum alloy tube is produced by extrusion.

Abstract: A tool consists of a base material selected from cemented carbide, tool steels, cermet, or hard materials, and a coating of two or more layers. At least one coating layer has the composition Ti—Al—Ta—N and at least one further coating layer has the composition Ti—Al—Ta—Me—N. The component Me is one more elements selected from the group consisting of Si, V, B. The tool, which is preferably a wearing part, is distinguished by a high wear resistance that improves the service life, in particular where high demands are imposed on the tool.

Abstract: The invention relates to a process for manufacturing an evaporation source for physical vapor deposition. The evaporation source is formed of the actual sputtering target with an aluminum component and one or more further components as well as of a backing plate made from a material having better thermal conductivity than the target. The backing plate made of a powdery starting material is pressed, together with the powdery components of the sputtering target, into sandwiched powder fractions and then formed.

Abstract: The invention relates to a process for manufacturing an evaporation source for physical vapor deposition. The evaporation source is formed of the actual sputtering target with an aluminum component and one or more further components as well as of a backing plate made from a material having better thermal conductivity than the target. The backing plate made of a powdery starting material is pressed, together with the powdery components of the sputtering target, into sandwiched powder fractions and then formed.