Abstract: Systems for processing articles are essential for semiconductor fabrication. These systems employ a variety of apparatuses for controlling flow. In one implementation, an apparatus for controlling flow may utilize a body having a flow path extending from an inlet to an outlet. A valve, a flow restrictor, and a pressure sensor are operably coupled to the flow path. The valve incorporates first and second actuators which enable control of mass flow rates of fluid flowing through the flow path.

Abstract: Fluid delivery systems are important component assemblies used for semiconductor fabrication. These fluid delivery systems rely on assemblies of components, requiring seals which must be installed and replaced during assembly and maintenance of the fluid delivery systems. Seals may be arranged as seal rings which engage substrate blocks and active components. The seal rings may incorporate an interior sleeve and an outer ring, the interior sleeve having a sleeve fluid passageway. In some implementations, the sleeve fluid passageway may have a constant or varying diameter and the outer ring may incorporate features to improve seal retention within seal cavities in the substrate blocks and active components.

Abstract: Systems for manufacturing semiconductors are essential to enabling modern technologies. Such systems may include a central controller, a plurality of fluid supplies, a plurality of apparatus for controlling flow, and a processing chamber. The central controller may have a processor, a memory, and a communication module. The plurality of apparatus for controlling flow may have a device controller having an active component, a sensor, and a communication module. The communication may have a communication module, a memory, a sensor drive circuit operably coupled to the sensor, and an active component drive operably coupled to the active component. The central controller is configured to receive sensor data from the sensors of the plurality of apparatus for controlling flow and transmit active component commands to the active component drives of the device controllers to control the plurality of apparatus for controlling flow.

Abstract: A distributed voice controlled system has a primary assistant and at least one secondary assistant. The primary assistant has a housing to hold one or more microphones, one or more speakers, and various computing components. The secondary assistant is similar in structure, but is void of speakers. The voice controlled assistants perform transactions and other functions primarily based on verbal interactions with a user. The assistants within the system are coordinated and synchronized to perform acoustic echo cancellation, selection of a best audio input from among the assistants, and distributed processing.

Abstract: A method of manufacturing a substrate block for a fluid delivery system is disclosed. First, a mold is provided, the mold having a cavity. The cavity of the mold is filled with a fluoropolymer to form a substrate block having an upper surface. A curved insert is withdrawn from the cavity to form a substrate fluid passageway extending from an inlet substrate port to an outlet substrate port. The substrate fluid passageway extends between the inlet substrate port and the outlet substrate port in a smooth arc free of corners or angular walls.

Abstract: Systems for processing articles are essential for semiconductor fabrication. In one embodiment, a system is disclosed comprising a plurality of fluid supplies configured to supply process fluids, a plurality of apparatuses for controlling flow, a plurality of mounting substrates, a vacuum manifold fluidly coupled to the plurality of mounting substrates, an outlet manifold fluidly coupled to the plurality of mounting substrates, a vacuum source fluidly coupled to the vacuum manifold, and a processing chamber fluidly coupled to the outlet manifold. The plurality of apparatuses for controlling flow have a bleed port and an outlet. The outlets of the plurality of apparatuses are fluidly coupled to corresponding outlet ports of the plurality of mounting substrates. The bleed ports of the plurality of apparatuses are fluidly coupled to the corresponding vacuum ports of the plurality of mounting substrates.

Abstract: Systems for processing articles are essential for semiconductor fabrication. In one embodiment, a system is disclosed comprising a plurality of fluid supplies configured to supply process fluids, a plurality of apparatuses for controlling flow, a plurality of mounting substrates, a vacuum manifold fluidly coupled to the plurality of mounting substrates, an outlet manifold fluidly coupled to the plurality of mounting substrates, a vacuum source fluidly coupled to the vacuum manifold, and a processing chamber fluidly coupled to the outlet manifold. The plurality of apparatuses for controlling flow have a bleed port and an outlet. The outlets of the plurality of apparatuses are fluidly coupled to corresponding outlet ports of the plurality of mounting substrates. The bleed ports of the plurality of apparatuses are fluidly coupled to the corresponding vacuum ports of the plurality of mounting substrates.

Abstract: Techniques for improving adaptive interference cancellation (AIC) using cascaded AIC algorithms are described. To improve an accuracy of detecting speech, a device may perform a first stage of AIC to generate isolated audio data and may generate speech mask data indicating time windows when speech is detected in the isolated audio data. Based on the speech mask data, the device may perform second AIC to generate output audio data, with adaptation of the adaptive filter enabled when the speech is not detected and disabled when the speech is detected. Thus, the first AIC improves the accuracy with which the device detects that speech is present and the second AIC reduces distortion in the output audio data by not updating filter coefficient values when the speech is present. The first AIC may use playback audio data, microphone audio data or beamformed audio data as reference signals.

Abstract: Methods, systems, and apparatus, including computer programs encoded on computer storage media, for determining a transfer option for transferring a call. One of the methods include receiving, by a call assistant engine, a keyword related to information provided by a user to an agent during a call; generating, by the call assistant engine, follow-up questions to be displayed on a user device of the agent in an interactive format, the first follow-up question being generated based on the keyword, each of the following follow-up questions being generated based on an answer of the agent to the previous question; and determining, by the call assistant engine, based on answers of the agent to the follow-up questions, a transfer option for transferring the call.

Abstract: An improved fluid delivery system and method that directly controls the concentration of constituent components in a fluid mixture delivered, for example, to a process chamber. Pressure of the fluid mixture can also be directly controlled. A concentration sensor capable of measuring concentration of all of the constituent components in a fluid mixture is used to provide signals used to vary the flow rate of constituent gases under a closed loop feedback system. The signal output of one or more pressure sensors can also be used to provide a signal used to vary the flow rate of constituent gases under a closed loop feedback system. By directly controlling these two extremely important process variables, embodiments of the present invention provide a significant advantage in measurement accuracy over the prior art, enable real-time process control, reduce system level response time, and allow for a system with a significant footprint reduction.

Abstract: An improved fluid delivery system and method that directly controls the concentration of constituent components in a fluid mixture delivered, for example, to a process chamber. Pressure of the fluid mixture can also be directly controlled. A concentration sensor capable of measuring concentration of all of the constituent components in a fluid mixture is used to provide signals used to vary the flow rate of constituent gases under a closed loop feedback system. The signal output of one or more pressure sensors can also be used to provide a signal used to vary the flow rate of constituent gases under a closed loop feedback system. By directly controlling these two extremely important process variables, embodiments of the present invention provide a significant advantage in measurement accuracy over the prior art, enable real-time process control, reduce system level response time, and allow for a system with a significant footprint reduction.

Abstract: A speech-based audio device may be configured to detect a user-uttered wake expression. For example, the audio device may generate a parameter indicating whether output audio is currently being produced by an audio speaker, whether the output audio contains speech, whether the output audio contains a predefined expression, loudness of the output audio, loudness of input audio, and/or an echo characteristic. Based on the parameter, the audio device may determine whether an occurrence of the predefined expression in the input audio is a result of an utterance of the predefined expression by a user.

Abstract: A speech-based audio device may be configured to detect a user-uttered wake expression. For example, the audio device may generate a parameter indicating whether output audio is currently being produced by an audio speaker, whether the output audio contains speech, whether the output audio contains a predefined expression, loudness of the output audio, loudness of input audio, and/or an echo characteristic. Based on the parameter, the audio device may determine whether an occurrence of the predefined expression in the input audio is a result of an utterance of the predefined expression by a user.

Abstract: In one embodiment, a device in a network observes traffic between a client and a server for an encrypted session. The device makes a determination that a server certificate should be obtained from the server. The device, based on the determination, sends a handshake probe to the server. The device extracts server certificate information from a handshake response from the server that the server sent in response to the handshake probe. The device uses the extracted server certificate information to analyze the traffic between the client and the server.

Abstract: Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow require a variety of fluid flow components which are tightly packaged within the apparatuses for controlling flow. In an effort to improve packaging density, fluid delivery modules preferably incorporate both active and passive components into a single substrate block. This enables increases in packaging density as well as enabling reduced cost through greater simplification of the fluid delivery module. For instance, incorporating a filter to filter incoming fluid with a valve or other component in a single monolithic block avoids the need for separate components which add cost and complexity.

Abstract: A distributed voice controlled system has a primary assistant and at least one secondary assistant. The primary assistant has a housing to hold one or more microphones, one or more speakers, and various computing components. The secondary assistant is similar in structure, but is void of speakers. The voice controlled assistants perform transactions and other functions primarily based on verbal interactions with a user. The assistants within the system are coordinated and synchronized to perform acoustic echo cancellation, selection of a best audio input from among the assistants, and distributed processing.

Abstract: Techniques for improving beamforming using filter coefficient values corresponding to virtual microphones are described. A system may define “virtual” microphone positions and determine corresponding filter coefficient values. These filter coefficient values may be applied to input audio data captured by actual physical microphones, enabling the system to improve performance of beamforming and/or to reduce a number of physical microphones without degrading performance. Offline testing and simulations may be performed to identify the best combination of virtual microphones and/or filter coefficient values for a particular look-direction. For example, the simulations may identify that a first filter coefficient corresponding to a first virtual microphone and a first direction will be associated with a first physical microphone and the first direction.

Abstract: Systems for processing articles are essential for semiconductor fabrication. In one embodiment, a system is disclosed comprising a plurality of fluid supplies configured to supply process fluids, a plurality of apparatuses for controlling flow, a plurality of mounting substrates, a vacuum manifold fluidly coupled to the plurality of mounting substrates, an outlet manifold fluidly coupled to the plurality of mounting substrates, a vacuum source fluidly coupled to the vacuum manifold, and a processing chamber fluidly coupled to the outlet manifold. The plurality of apparatuses for controlling flow have a bleed port and an outlet. The outlets of the plurality of apparatuses are fluidly coupled to corresponding outlet ports of the plurality of mounting substrates. The bleed ports of the plurality of apparatuses are fluidly coupled to the corresponding vacuum ports of the plurality of mounting substrates.

Abstract: Methods, systems, and apparatus, including computer programs encoded on computer storage media, for determining a transfer option for transferring a call. One of the methods include receiving, by a call assistant engine, a keyword related to information provided by a user to an agent during a call; generating, by the call assistant engine, follow-up questions to be displayed on a user device of the agent in an interactive format, the first follow-up question being generated based on the keyword, each of the following follow-up questions being generated based on an answer of the agent to the previous question; and determining, by the call assistant engine, based on answers of the agent to the follow-up questions, a transfer option for transferring the call.