Patents by Inventor Po-Kai Hsu

Po-Kai Hsu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220336735
    Abstract: A method for fabricating a semiconductor device includes the steps of: forming a first inter-metal dielectric (IMD) layer on a substrate; forming a first metal interconnection and a second metal interconnection in the first IMD layer; forming a channel layer on the first metal interconnection and the second metal interconnection; forming a magnetic tunneling junction (MTJ) stack on the channel layer; and removing the MTJ stack to form a MTJ.
    Type: Application
    Filed: July 5, 2022
    Publication date: October 20, 2022
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Hui-Lin Wang, Wei Chen, Po-Kai Hsu, Yu-Ping Wang, Hung-Yueh Chen
  • Publication number: 20220310697
    Abstract: A semiconductor memory device includes a substrate having a memory area and a logic circuit area thereon, a first interlayer dielectric layer on the substrate, and a second interlayer dielectric layer on the substrate. An embedded memory cell structure is disposed within the memory area between the first interlayer dielectric layer and the second interlayer dielectric layer. The second interlayer dielectric layer includes a first portion covering the embedded memory cell structure within the memory area and a second portion covering the logic circuit area. A top surface of the first portion is coplanar with a top surface of the second portion.
    Type: Application
    Filed: April 13, 2021
    Publication date: September 29, 2022
    Inventors: Hui-Lin Wang, Si-Han Tsai, Ching-Hua Hsu, Chen-Yi Weng, Po-Kai Hsu
  • Publication number: 20220310902
    Abstract: A magnetoresistive random access memory (MRAM) structure, including a substrate and multiple MRAM cells on the substrate, wherein the MRAM cells are arranged in a memory region adjacent to a logic region. An ultra low-k (ULK) layer covers the MRAM cells, wherein the surface portion of ultra low-k layer is doped with fluorine, and dents are formed on the surface of ultra low-k layer at the boundaries between the memory region and the logic region.
    Type: Application
    Filed: April 28, 2021
    Publication date: September 29, 2022
    Inventors: Hui-Lin Wang, Ching-Hua Hsu, Si-Han Tsai, Shun-Yu Huang, Chen-Yi Weng, Ju-Chun Fan, Che-Wei Chang, Yi-Yu Lin, Po-Kai Hsu, Jing-Yin Jhang, Ya-Jyuan Hung
  • Publication number: 20220271088
    Abstract: A memory array includes at least one strap region having therein a plurality of source line straps and a plurality of word line straps, and at least two sub-arrays having a plurality of staggered, active magnetic storage elements. The at least two sub-arrays are separated by the strap region. A plurality of staggered, dummy magnetic storage elements is disposed within the strap region.
    Type: Application
    Filed: March 15, 2021
    Publication date: August 25, 2022
    Inventors: Po-Kai Hsu, Hui-Lin Wang, Kun-I Chou, Ching-Hua Hsu, Ju-Chun Fan, Yi-Yu Lin, Hung-Yueh Chen
  • Publication number: 20220263017
    Abstract: A semiconductor device includes a magnetic tunneling junction (MTJ) on a substrate, a cap layer adjacent to and directly contacting the MTJ, a first inter-metal dielectric (IMD) layer around the MTJ, a top electrode on the MTJ, a metal interconnection under the MTJ, and a second IMD layer around the metal interconnection. Preferably, the cap layer is a single layer structure made of dielectric material and an edge of the cap layer contacts the first IMD layer directly.
    Type: Application
    Filed: May 5, 2022
    Publication date: August 18, 2022
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Hui-Lin Wang, Po-Kai Hsu, Hung-Yueh Chen, Yu-Ping Wang
  • Publication number: 20220263016
    Abstract: A method for fabricating semiconductor device includes the steps of: forming a magnetic tunneling junction (MTJ) stack on a substrate; forming a top electrode on the MTJ stack; performing a first patterning process to remove the MTJ stack for forming a first MTJ; forming a first inter-metal dielectric (IMD) layer around the first MTJ; and performing a second patterning process to remove the first MTJ for forming a second MTJ and a third MTJ.
    Type: Application
    Filed: May 3, 2022
    Publication date: August 18, 2022
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Hui-Lin Wang, Po-Kai Hsu, Hung-Yueh Chen, Yu-Ping Wang
  • Patent number: 11417838
    Abstract: A method for fabricating a semiconductor device includes the steps of: forming a first inter-metal dielectric (IMD) layer on a substrate; forming a first metal interconnection and a second metal interconnection in the first IMD layer; forming a channel layer on the first metal interconnection and the second metal interconnection; forming a magnetic tunneling junction (MTJ) stack on the channel layer; and removing the MTJ stack to form a MTJ.
    Type: Grant
    Filed: May 27, 2020
    Date of Patent: August 16, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Hui-Lin Wang, Wei Chen, Po-Kai Hsu, Yu-Ping Wang, Hung-Yueh Chen
  • Publication number: 20220246212
    Abstract: A memory device and an operation method thereof are provided. The operation method comprises: in performing a multiply accumulate (MAC) operation, inputting a plurality of inputs into a plurality of memory cells via a plurality of first signal lines; outputting a plurality of cell currents from the memory cells to a plurality of second signal lines based on a plurality of weights of the memory cells; summing the cell currents on each of the second signal lines into a plurality of signal line currents: summing the signal line currents into a global signal line current: and converting the global signal line current into an output, wherein the output represents a MAC operation result of the inputs and the weights.
    Type: Application
    Filed: September 15, 2021
    Publication date: August 4, 2022
    Inventors: Hang-Ting LUE, Po-Kai HSU
  • Publication number: 20220246195
    Abstract: A three-dimension (3D) memory device and an operation method thereof are provided. The 3D memory device includes: a memory array including a plurality of memory cells; a controller coupled to the memory array; and a match circuit coupled to memory array, wherein in data search and match, the controller selects from the memory cells a plurality of target memory cells sharing a same target global signal line, and the controller selects a plurality of target word lines sharing the target global signal line as a plurality of target search lines, wherein a search data sends to the target memory cells via the target search lines for data matching; the target global signal line is precharged; and outputting a match address based on whether a voltage on the target global signal line is pulled down or not.
    Type: Application
    Filed: May 17, 2021
    Publication date: August 4, 2022
    Inventors: Po-Kai HSU, Teng-Hao YEH, Hang-Ting LUE
  • Patent number: 11398268
    Abstract: A three-dimension (3D) memory device and an operation method thereof are provided. The 3D memory device includes: a memory array including a plurality of memory cells; a controller coupled to the memory array; and a match circuit coupled to memory array, wherein in data search and match, the controller selects from the memory cells a plurality of target memory cells sharing a same target global signal line, and the controller selects a plurality of target word lines sharing the target global signal line as a plurality of target search lines, wherein a search data sends to the target memory cells via the target search lines for data matching; the target global signal line is precharged; and outputting a match address based on whether a voltage on the target global signal line is pulled down or not.
    Type: Grant
    Filed: May 17, 2021
    Date of Patent: July 26, 2022
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Po-Kai Hsu, Teng-Hao Yeh, Hang-Ting Lue
  • Patent number: 11355700
    Abstract: A method for fabricating semiconductor device includes the steps of: forming a magnetic tunneling junction (MTJ) stack on a substrate; forming a top electrode on the MTJ stack; performing a first patterning process to remove the MTJ stack for forming a first MTJ; forming a first inter-metal dielectric (IMD) layer around the first MTJ; and performing a second patterning process to remove the first MTJ for forming a second MTJ and a third MTJ.
    Type: Grant
    Filed: January 2, 2020
    Date of Patent: June 7, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Hui-Lin Wang, Po-Kai Hsu, Hung-Yueh Chen, Yu-Ping Wang
  • Patent number: 11309028
    Abstract: An inference operation method and a controlling circuit of a 3D NAND artificial intelligence accelerator are provided. The 3D NAND artificial intelligence accelerator includes a plurality of memory cells, a plurality of bit lines, a plurality of word lines and a plurality of string selecting line groups each of which includes at least one string selecting line. The inference operation method includes the following steps: The patterns are inputted to the bit lines. The word lines are switched to switch the filters. The string selecting line groups are switched to switch the filters. In a word line pioneering scheme and a string selecting line group pioneering scheme, when the patterns inputted to each of the bit lines are switched, any one of the word lines is not switched and any one of the string selecting line groups is not switched.
    Type: Grant
    Filed: September 3, 2020
    Date of Patent: April 19, 2022
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Po-Kai Hsu, Teng-Hao Yeh
  • Publication number: 20220115587
    Abstract: A semiconductor device includes a substrate, a first dielectric layer, a second dielectric layer, and a third dielectric layer. The first dielectric layer is disposed on the substrate, around a first metal interconnection. The second dielectric layer is disposed on the first dielectric layer, around a via and a second metal interconnection. The second metal interconnection directly contacts the first metal interconnection. The third dielectric layer is disposed on the second dielectric layer, around a first magnetic tunneling junction (MTJ) structure and a third metal interconnection. The third metal interconnection directly contacts the first MTJ structure and the second metal interconnection, and the first MTJ structure directly contacts the via.
    Type: Application
    Filed: November 5, 2020
    Publication date: April 14, 2022
    Inventors: Hui-Lin Wang, Po-Kai Hsu, Ju-Chun Fan, Yi-Yu Lin, Ching-Hua Hsu, Hung-Yueh Chen
  • Publication number: 20220115584
    Abstract: A method for fabricating a semiconductor device includes the steps of first forming a first inter-metal dielectric (IMD) layer on a substrate and a metal interconnection in the first IMD layer, forming a magnetic tunneling junction (MTJ) and a top electrode on the metal interconnection, forming a spacer adjacent to the MTJ and the top electrode, forming a second IMD layer around the spacer, forming a cap layer on the top electrode, the spacer, and the second IMD layer, and then patterning the cap layer to form a protective cap on the top electrode and the spacer.
    Type: Application
    Filed: November 3, 2020
    Publication date: April 14, 2022
    Inventors: Hui-Lin Wang, Po-Kai Hsu, Ju-Chun Fan, Ching-Hua Hsu, Yi-Yu Lin, Hung-Yueh Chen
  • Publication number: 20220102621
    Abstract: A method for fabricating a semiconductor device includes the steps of forming a magnetic tunneling junction (MTJ) on a MRAM region of a substrate, forming a first inter-metal dielectric (IMD) layer around the MTJ, forming a patterned mask on a logic region of the substrate, performing a nitridation process to transform part of the first IMD layer to a nitride layer, forming a first metal interconnection on the logic region, forming a stop layer on the first IMD layer, forming a second IMD layer on the stop layer, and forming a second metal intercom in the second IMD layer to connect to the MTJ.
    Type: Application
    Filed: November 1, 2020
    Publication date: March 31, 2022
    Inventors: Hui-Lin Wang, Chen-Yi Weng, Si-Han Tsai, Che-Wei Chang, Po-Kai Hsu, Jing-Yin Jhang, Yu-Ping Wang, Ju-Chun Fan, Ching-Hua Hsu, Yi-Yu Lin, Hung-Yueh Chen
  • Patent number: 11289152
    Abstract: An in-memory computing device including a plurality of memory cell arrays and a plurality of sensing amplifiers are provided. The memory cell arrays respectively receive a plurality of input signals. The input signals are divided into a plurality of groups. The groups respectively have at least one partial input signal. The at least one partial input signal of each of the groups has a same value. Numbers of the at least one partial input signal in the groups sequentially form a geometric sequence with a common ration equal to 2. The memory cell arrays respectively provide a plurality of weightings, and perform multiply-add operations respectively according to the received input signals and the weightings to generate a plurality of computation results. The sensing amplifiers respectively generate a plurality of sensing results according to the computation results.
    Type: Grant
    Filed: October 22, 2020
    Date of Patent: March 29, 2022
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Ming-Liang Wei, Po-Kai Hsu, Hang-Ting Lue, Teng-Hao Yeh
  • Publication number: 20220068387
    Abstract: An inference operation method and a controlling circuit of a 3D NAND artificial intelligence accelerator are provided. The 3D NAND artificial intelligence accelerator includes a plurality of memory cells, a plurality of bit lines, a plurality of word lines and a plurality of string selecting line groups each of which includes at least one string selecting line. The inference operation method includes the following steps: The patterns are inputted to the bit lines. The word lines are switched to switch the filters. The string selecting line groups are switched to switch the filters. In a word line pioneering scheme and a string selecting line group pioneering scheme, when the patterns inputted to each of the bit lines are switched, any one of the word lines is not switched and any one of the string selecting line groups is not switched.
    Type: Application
    Filed: September 3, 2020
    Publication date: March 3, 2022
    Inventors: Po-Kai HSU, Teng-Hao YEH
  • Publication number: 20220059618
    Abstract: A hybrid random access memory for a system-on-chip (SOC), including a semiconductor substrate with a MRAM region and a ReRAM region, a first dielectric layer on the semiconductor substrate, multiple ReRAM cells in the first dielectric layer on the ReRAM region, a second dielectric layer above the first dielectric layer, and multiple MRAM cells in the second dielectric layer on the MRAM region.
    Type: Application
    Filed: September 27, 2020
    Publication date: February 24, 2022
    Inventors: Po-Kai Hsu, Hui-Lin Wang, Ching-Hua Hsu, Yi-Yu Lin, Ju-Chun Fan, Hung-Yueh Chen
  • Publication number: 20220059761
    Abstract: A method of fabricating a semiconductor device includes the steps of: providing a semiconductor structure including a memory region and a logic region. The semiconductor structure includes a first interlayer dielectric and at least one magnetoresistive random access memory (MRAM) cell disposed on the first interlayer dielectric, and the MRAM cell is disposed in the memory region; depositing a second interlayer dielectric covering the first interlayer dielectric and the at least one MRAM cell; depositing a mask layer conformally covering the second interlayer dielectric; perform a planarization process to remove the mask layer in the memory region; after the step of performing the planarization process, removing the mask layer in the logic region.
    Type: Application
    Filed: November 1, 2021
    Publication date: February 24, 2022
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Hui-Lin Wang, Po-Kai Hsu, Hung-Yueh Chen, Chen-Yi Weng, Si-Han Tsai, Jing-Yin Jhang, Yu-Ping Wang
  • Patent number: 11257547
    Abstract: Provided is an operation method for a memory device, the operation method comprising: performing an erase operation; performing a verify-read operation on a memory cell to generate a cell current, the memory cell including a first transistor and a second transistor; checking whether the cell current is lower than a first cell current threshold; when the cell current is not lower than the first cell current threshold, increasing a memory gate voltage until the cell current is lower than the first cell current threshold, wherein the memory gate voltage is applied to the first transistor; fixing the memory gate voltage and increasing a drain voltage; checking whether the cell current is lower than a second cell current threshold; and if the cell current is not lower than the second cell current threshold, increasing the drain voltage until the cell current is lower than the second cell current threshold.
    Type: Grant
    Filed: November 27, 2020
    Date of Patent: February 22, 2022
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Tzu-Hsuan Hsu, Po-Kai Hsu, Teng-Hao Yeh, Hang-Ting Lue