Patents by Inventor Pravin K. Narwankar

Pravin K. Narwankar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11180851
    Abstract: A reactor for coating particles includes one or more motors, a rotary vacuum chamber configured to hold particles to be coated and coupled to the motors, a controller configured to cause the motors to rotate the chamber in a first direction about an axial axis at a rotation speed sufficient to force the particles to be centrifuged against an inner diameter of the chamber, a vacuum port to exhaust gas from the rotary vacuum chamber, a paddle assembly including a rotatable drive shaft extending through the chamber and coupled to the motors and at least one paddle extending radially from the drive shaft, such that rotation of the drive shaft by the motors orbits the paddle about the drive shaft in a second direction, and a chemical delivery system including a gas outlet on the paddle configured inject process gas into the particles.
    Type: Grant
    Filed: June 11, 2019
    Date of Patent: November 23, 2021
    Assignee: Applied Materials, Inc.
    Inventors: Colin C. Neikirk, Pravin K. Narwankar, Kaushal Gangakhedkar, Visweswaren Sivaramakrishnan, Jonathan Frankel, David Masayuki Ishikawa, Quoc Truong, Joseph Yudovsky
  • Patent number: 11174552
    Abstract: A reactor for coating particles includes one or more motors, a rotary vacuum chamber configured to hold particles to be coated, wherein the rotary vacuum chamber is coupled to the motors, a controller configured to cause the motors to rotate the rotary vacuum chamber about an axial axis of the rotary vacuum chamber such that the particles undergo tumbling agitation, a vacuum port to exhaust gas from the rotary vacuum chamber, a paddle assembly including a rotatable drive shaft extending through the rotary vacuum chamber and coupled to the motors and at least one paddle extending radially from the drive shaft, such that rotation of the drive shaft by the motors orbits the paddle about the drive shaft in a second direction, and a chemical delivery system including a gas outlet on the paddle configured inject process gas into the particles.
    Type: Grant
    Filed: June 11, 2019
    Date of Patent: November 16, 2021
    Assignee: Applied Materials, Inc.
    Inventors: Colin C. Neikirk, Pravin K. Narwankar, Kaushal Gangakhedkar, Visweswaren Sivaramakrishnan, Jonathan Frankel, David Masayuki Ishikawa, Quoc Truong, Joseph Yudovsky
  • Publication number: 20210262099
    Abstract: Using the systems and methods discussed herein, CMAS corrosion is inhibited via CMAS interception in an engine environment and/or is prevented or reduced by the formation of a metal oxide protective coating on a hot engine section component. The CMAS interception can occur while the engine is in operation in flight or in a testing or quality control environment. The metal oxide protective coating can be applied over other coatings, including Gd-zirconates (GZO) or yttria-stabilized zirconia (YSZ). The metal oxide protective coating is applied at original equipment manufacturers (OEM) and can also be applied in-situ using a gas injection system during engine use in-flight or during maintenance or quality testing. The metal oxide protective coating contains a rare earth element, aluminum, zirconium, chromium, or combinations thereof.
    Type: Application
    Filed: May 6, 2021
    Publication date: August 26, 2021
    Inventors: David BRITZ, Pravin K. NARWANKAR, David THOMPSON, Yuriy MELNIK, Sukti CHATTERJEE
  • Publication number: 20210254223
    Abstract: Using the systems and methods discussed herein, CMAS corrosion is inhibited via CMAS interception in an engine environment and/or is prevented or reduced by the formation of a metal oxide protective coating on a hot engine section component. The CMAS interception can occur while the engine is in operation in flight or in a testing or quality control environment. The metal oxide protective coating can be applied over other coatings, including Gd-zirconates (GZO) or yttria-stabilized zirconia (YSZ). The metal oxide protective coating is applied at original equipment manufacturers (OEM) and can also be applied in-situ using a gas injection system during engine use in-flight or during maintenance or quality testing. The metal oxide protective coating contains a rare earth element, aluminum, zirconium, chromium, or combinations thereof.
    Type: Application
    Filed: May 6, 2021
    Publication date: August 19, 2021
    Inventors: David BRITZ, Pravin K. NARWANKAR, David THOMPSON, Yuriy MELNIK, Sukti CHATTERJEE
  • Publication number: 20210254222
    Abstract: Using the systems and methods discussed herein, CMAS corrosion is inhibited via CMAS interception in an engine environment and/or is prevented or reduced by the formation of a metal oxide protective coating on a hot engine section component. The CMAS interception can occur while the engine is in operation in flight or in a testing or quality control environment. The metal oxide protective coating can be applied over other coatings, including Gd-zirconates (GZO) or yttria-stabilized zirconia (YSZ). The metal oxide protective coating is applied at original equipment manufacturers (OEM) and can also be applied in-situ using a gas injection system during engine use in-flight or during maintenance or quality testing. The metal oxide protective coating contains a rare earth element, aluminum, zirconium, chromium, or combinations thereof and can have a thickness from 1 nm to 3,000 nm.
    Type: Application
    Filed: May 6, 2021
    Publication date: August 19, 2021
    Inventors: David BRITZ, Pravin K. NARWANKAR, David THOMPSON, Yuriy MELNIK, Sukti CHATTERJEE
  • Patent number: 11015252
    Abstract: Using the systems and methods discussed herein, CMAS corrosion is inhibited via CMAS interception in an engine environment and/or is prevented or reduced by the formation of a metal oxide protective coating on a hot engine section component. The CMAS interception can occur while the engine is in operation in flight or in a testing or quality control environment. The metal oxide protective coating can be applied over other coatings, including Gd-zirconates (GZO) or yttria-stabilized zirconia (YSZ). The metal oxide protective coating is applied at original equipment manufacturers (OEM) and can also be applied in-situ using a gas injection system during engine use in-flight or during maintenance or quality testing. The metal oxide protective coating contains a rare earth element, aluminum, zirconium, chromium, or combinations thereof, and is from 1 nm to 3 microns in thickness.
    Type: Grant
    Filed: February 22, 2019
    Date of Patent: May 25, 2021
    Inventors: David Britz, Pravin K. Narwankar, David Thompson, Yuriy Melnik, Sukti Chatterjee
  • Publication number: 20210071299
    Abstract: Embodiments of the present disclosure generally relate to protective coatings on substrates and methods for depositing the protective coatings. In one or more embodiments, a method of forming a protective coating on a substrate includes depositing a chromium oxide layer containing amorphous chromium oxide on a surface of the substrate during a first vapor deposition process and heating the substrate containing the chromium oxide layer comprising the amorphous chromium oxide to convert at least a portion of the amorphous chromium oxide to crystalline chromium oxide during a first annealing process. The method also includes depositing an aluminum oxide layer containing amorphous aluminum oxide on the chromium oxide layer during a second vapor deposition process and heating the substrate containing the aluminum oxide layer disposed on the chromium oxide layer to convert at least a portion of the amorphous aluminum oxide to crystalline aluminum oxide during a second annealing process.
    Type: Application
    Filed: October 31, 2019
    Publication date: March 11, 2021
    Inventors: Kenichi OHNO, Eric H. LIU, Sukti CHATTERJEE, Yuriy MELNIK, Thomas KNISLEY, David Alexander BRITZ, Lance A. SCUDDER, Pravin K. NARWANKAR
  • Publication number: 20200392626
    Abstract: Embodiments of the present disclosure generally relate to protective coatings on aerospace components and methods for depositing the protective coatings. In one or more embodiments, a method for producing a protective coating on an aerospace component includes depositing a metal oxide template layer on the aerospace component containing nickel and aluminum (e.g., nickel-aluminum superalloy) and heating the aerospace component containing the metal oxide template layer during a thermal process and/or an oxidation process. The thermal process and/or oxidation process includes diffusing aluminum contained within the aerospace component towards a surface of the aerospace component containing the metal oxide template layer, oxidizing the diffused aluminum to produce an aluminum oxide layer disposed between the aerospace component and the metal oxide template layer, and removing at least a portion of the metal oxide template layer while leaving the aluminum oxide layer.
    Type: Application
    Filed: September 4, 2019
    Publication date: December 17, 2020
    Inventors: Sukti CHATTERJEE, Kenichi OHNO, Lance A. SCUDDER, Yuriy MELNIK, David A. BRITZ, Pravin K. NARWANKAR, Thomas KNISLEY, Mark SALY, Jeffrey ANTHIS
  • Publication number: 20200338008
    Abstract: A method of preparing a pharmaceutical composition having a drug-containing core enclosed by one or more metal oxide materials is provided. The method includes the sequential atomic layer deposition of a metal oxide layer(s) followed by molecular level deposition of a polymer layer(s).
    Type: Application
    Filed: April 24, 2020
    Publication date: October 29, 2020
    Inventors: Fei Wang, Colin C. Neikirk, Jonathan Frankel, Pravin K. Narwankar
  • Publication number: 20200338517
    Abstract: A reactor for coating particles includes a stationary vacuum chamber to hold a bed of particles to be coated, a vacuum port in an upper portion of the chamber, a chemical delivery system configured to inject a reactant or precursor gas into a lower portion of the chamber, a paddle assembly, and a motor to rotate a drive shaft of the paddle assembly. The lower portion of the chamber forms a half-cylinder. The paddle assembly includes a rotatable drive shaft extending through the chamber along the axial axis of the half cylinder, and a plurality of paddles extending radially from the drive shaft such that rotation of the drive shaft by the motor orbits the plurality of paddles about the drive shaft.
    Type: Application
    Filed: April 22, 2020
    Publication date: October 29, 2020
    Inventors: Jonathan Frankel, Colin C. Neikirk, Pravin K. Narwankar, Quoc Truong, Govindraj Desai, Sekar Krishnasamy
  • Publication number: 20200338521
    Abstract: A reactor for coating particles includes a stationary vacuum chamber having a lower portion that forms a half-cylinder and an upper portion to hold a bed of particles to be coated, a vacuum port in the upper portion of the chamber, a paddle assembly, a motor to rotate a drive shaft of the paddle assembly, a chemical delivery system to deliver a first fluid, and a first gas injection assembly to receive the first fluid from the chemical delivery system and having apertures configured to inject a first reactant or precursor gas into the lower portion of the chamber and such that the first reactant or precursor gas flows substantially tangent to a curved inner surface of the half-cylinder.
    Type: Application
    Filed: April 22, 2020
    Publication date: October 29, 2020
    Inventors: Jonathan Frankel, Colin C. Neikirk, Pravin K. Narwankar, Quoc Truong, Govindraj Desai, Sekar Krishnasamy
  • Publication number: 20200340107
    Abstract: Embodiments of the present disclosure generally relate to protective coatings on an aerospace component and methods for depositing the protective coatings. In one or more embodiments, a method for depositing a coating on an aerospace component includes depositing one or more layers on a surface of the aerospace component using an atomic layer deposition or chemical vapor deposition process, and performing a partial oxidation and annealing process to convert the one or more layers to a coalesced layer having a preferred phase crystalline assembly. During oxidation cycles, an aluminum depleted region is formed at the surface of the aerospace component, and an aluminum oxide region is formed between the aluminum depleted region and the coalesced layer. The coalesced layer forms a protective coating, which decreases the rate of aluminum depletion from the aerospace component and the rate of new aluminum oxide scale formation.
    Type: Application
    Filed: April 16, 2020
    Publication date: October 29, 2020
    Applicant: Applied Materials, Inc.
    Inventors: Sukti CHATTERJEE, Lance A. SCUDDER, Yuriy MELNIK, David A. BRITZ, Thomas KNISLEY, Kenichi OHNO, Pravin K. NARWANKAR
  • Patent number: 10794853
    Abstract: The present disclosure relates to a method of depositing a polymer layer, including: providing a substrate, having a sensor structure disposed on the substrate, to a substrate support within a hot wire chemical vapor deposition (HWCVD) chamber; providing a process gas comprising an initiator gas and a monomer gas and a carrier gas to the HWCVD chamber; heating a plurality of filaments disposed in the HWCVD chamber to a first temperature sufficient to activate the initiator gas without decomposing the monomer gas; and exposing the substrate to initiator radicals from the activated initiator gas and to the monomer gas to deposit a polymer layer atop the sensor structure.
    Type: Grant
    Filed: December 6, 2017
    Date of Patent: October 6, 2020
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Colin Neikirk, Yuriy Melnik, Pravin K. Narwankar
  • Publication number: 20200272047
    Abstract: Embodiments of the present disclosure generally relate to nanocomposite pellicles for extreme ultraviolet lithography systems. A pellicle comprises a plurality of carbon nanotubes arranged in a planar sheet formed from a plurality of metal catalyst droplets. The plurality of carbon nanotubes are coated in a first conformal layer of boron nitride. The pellicle may comprise a plurality of boron nitride nanotubes formed simultaneously as the first conformal layer of boron nitride. The pellicle may comprise a carbon nanotube coating disposed on the first conformal layer of boron nitride and a second conformal layer of boron nitride or boron nitride nanotubes disposed on the carbon nanotube coating. The pellicle is UV transparent and is non-reactive in hydrogen radical environments.
    Type: Application
    Filed: May 7, 2019
    Publication date: August 27, 2020
    Applicant: Applied Materials, Inc.
    Inventors: Sukti CHATTERJEE, Yuriy MELNIK, Pravin K. NARWANKAR
  • Publication number: 20200240018
    Abstract: Protective coatings on an aerospace component are provided. An aerospace component includes a surface containing nickel, nickel superalloy, aluminum, chromium, iron, titanium, hafnium, alloys thereof, or any combination thereof, and a coating disposed on the surface, where the coating contains a nanolaminate film stack having two or more pairs of a first deposited layer and a second deposited layer. The first deposited layer contains chromium oxide, chromium nitride, aluminum oxide, aluminum nitride, or any combination thereof, the second deposited layer contains aluminum oxide, aluminum nitride, silicon oxide, silicon nitride, silicon carbide, yttrium oxide, yttrium nitride, yttrium silicon nitride, hafnium oxide, hafnium nitride, hafnium silicide, hafnium silicate, titanium oxide, titanium nitride, titanium silicide, titanium silicate, or any combination thereof, and the first deposited layer and the second deposited layer have different compositions from each other.
    Type: Application
    Filed: April 8, 2020
    Publication date: July 30, 2020
    Inventors: Yuriy MELNIK, Sukti CHATTERJEE, Kaushal GANGAKHEDKAR, Jonathan FRANKEL, Lance A. SCUDDER, Pravin K. NARWANKAR, David Alexander BRITZ, Thomas KNISLEY, Mark SALY, David THOMPSON
  • Patent number: 10633740
    Abstract: Protective coatings on an aerospace component and methods for depositing the protective coatings are provided. A method for depositing a coating on an aerospace component includes exposing an aerospace component to a first precursor and a first reactant to form a first deposited layer on a surface of the aerospace component by a chemical vapor deposition (CVD) process or a first atomic layer deposition (ALD) process and exposing the aerospace component to a second precursor and a second reactant to form a second deposited layer on the first deposited layer by a second ALD process, where the first deposited layer and the second deposited layer have different compositions from each other.
    Type: Grant
    Filed: March 18, 2019
    Date of Patent: April 28, 2020
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Yuriy Melnik, Sukti Chatterjee, Kaushal Gangakhedkar, Jonathan Frankel, Lance A. Scudder, Pravin K. Narwankar, David Alexander Britz, Thomas Knisley, Mark Saly, David Thompson
  • Publication number: 20200024736
    Abstract: A reactor for coating particles includes a vacuum chamber configured to hold particles to be coated, a vacuum port to exhaust gas from the vacuum chamber via the outlet of the vacuum chamber, a chemical delivery system configured to flow a process gas into the particles via a gas inlet on the vacuum chamber, one or more vibrational actuators located on a first mounting surface of the vacuum chamber, and a controller configured to cause the one or more vibrational actuators to generate a vibrational motion in the vacuum chamber sufficient to induce a vibrational motion in the particles held within the vacuum chamber.
    Type: Application
    Filed: July 18, 2019
    Publication date: January 23, 2020
    Inventors: Kaushal Gangakhedkar, Jonathan Frankel, Colin C. Neikirk, Pravin K. Narwankar
  • Publication number: 20190376181
    Abstract: A reactor for coating particles includes one or more motors, a rotary vacuum chamber configured to hold particles to be coated, wherein the rotary vacuum chamber is coupled to the motors, a controller configured to cause the motors to rotate the rotary vacuum chamber about an axial axis of the rotary vacuum chamber such that the particles undergo tumbling agitation, a vacuum port to exhaust gas from the rotary vacuum chamber, a paddle assembly including a rotatable drive shaft extending through the rotary vacuum chamber and coupled to the motors and at least one paddle extending radially from the drive shaft, such that rotation of the drive shaft by the motors orbits the paddle about the drive shaft in a second direction, and a chemical delivery system including a gas outlet on the paddle configured inject process gas into the particles.
    Type: Application
    Filed: June 11, 2019
    Publication date: December 12, 2019
    Inventors: Colin C. Neikirk, Pravin K. Narwankar, Kaushal Gangakhedkar, Visweswaren Sivaramakrishnan, Jonathan Frankel, David Masayuki Ishikawa, Quoc Truong, Joseph Yudovsky
  • Publication number: 20190376182
    Abstract: A reactor for coating particles includes one or more motors, a rotary vacuum chamber configured to hold particles to be coated and coupled to the motors, a controller configured to cause the motors to rotate the chamber in a first direction about an axial axis at a rotation speed sufficient to force the particles to be centrifuged against an inner diameter of the chamber, a vacuum port to exhaust gas from the rotary vacuum chamber, a paddle assembly including a rotatable drive shaft extending through the chamber and coupled to the motors and at least one paddle extending radially from the drive shaft, such that rotation of the drive shaft by the motors orbits the paddle about the drive shaft in a second direction, and a chemical delivery system including a gas outlet on the paddle configured inject process gas into the particles.
    Type: Application
    Filed: June 11, 2019
    Publication date: December 12, 2019
    Inventors: Colin C. Neikirk, Pravin K. Narwankar, Kaushal Gangakhedkar, Visweswaren Sivaramakrishnan, Jonathan Frankel, David Masayuki Ishikawa, Quoc Truong, Joseph Yudovsky
  • Publication number: 20190330746
    Abstract: Using the systems and methods discussed herein, CMAS corrosion is inhibited via CMAS interception in an engine environment and/or is prevented or reduced by the formation of a metal oxide protective coating on a hot engine section component. The CMAS interception can occur while the engine is in operation in flight or in a testing or quality control environment. The metal oxide protective coating can be applied over other coatings, including Gd-zirconates (GZO) or yttria-stabilized zirconia (YSZ). The metal oxide protective coating is applied at original equipment manufacturers (OEM) and can also be applied in-situ using a gas injection system during engine use in-flight or during maintenance or quality testing. The metal oxide protective coating contains a rare earth element, aluminum, zirconium, chromium, or combinations thereof, and is from 1 nm to 3 microns in thickness.
    Type: Application
    Filed: February 22, 2019
    Publication date: October 31, 2019
    Inventors: David BRITZ, Pravin K. NARWANKAR, David THOMPSON, Yuriy MELNIK, Sukti CHATTERJEE