Patents by Inventor Pushkara R. Varanasi

Pushkara R. Varanasi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20020012869
    Abstract: The invention provides novel cross-linked polymers and positive chemically-amplified photoresist compositions that comprise a photoactive component and such crosslinked polymers. Resists of the invention can exhibit enhanced lithographic results relative to comparable compositions where the polymers are not crosslinked.
    Type: Application
    Filed: February 9, 2001
    Publication date: January 31, 2002
    Applicant: Shipley Company, L.L.C.
    Inventors: Timothy G. Adams, Martha M. Rajaratnam, Ashish A. Pandya, Roger F. Sinta, Pushkara R. Varanasi, Kathleen Cornett, Ahmad D. Katnani
  • Patent number: 6265134
    Abstract: Acid-catalyzed positive photoresist compositions having generally improved performance (especially photoresist compositions having improved contrast (solubility differential), shrinkage and processing kinetics on radiation exposure) are obtained by use of polymers containing pendant polar-functionalized aromatic groups and acid-labile light crosslinking. The photoresist compositions also may contain a photosensitive acid-generating component as well as a solvent and possibly other auxiliary components. The polymers may contain other functional groups or components designed to impart alkaline-solubility, to provide alkaline-solubility protection in the absence of generated acid, etc. The photoresist compositions can be used to create patterned photoresist structures and further to make conductive, semiconductive or insulative structures by photolithography.
    Type: Grant
    Filed: October 30, 2000
    Date of Patent: July 24, 2001
    Assignee: International Business Machines Corporation
    Inventors: Pushkara R. Varanasi, Ahmad D. Katnani, Mahmoud M. Khojasteh, Ranee W. Kwong
  • Patent number: 6140015
    Abstract: Acid-catalyzed positive photoresist compositions having generally improved performance (especially photoresist compositions having improved contrast (solubility differential), shrinkage and processing kinetics on radiation exposure) are obtained by use of polymers containing pendant polar-functionalized aromatic groups and acid-labile light crosslinking. The photoresist compositions also may contain a photosensitive acid-generating component as well as a solvent and possibly other auxiliary components. The polymers may contain other functional groups or components designed to impart alkaline-solubility, to provide alkaline-solubility protection in the absence of generated acid, etc.The photoresist compositions can be used to create patterned photoresist structures and further to make conductive, semiconductive or insulative structures by photolithography.
    Type: Grant
    Filed: December 10, 1998
    Date of Patent: October 31, 2000
    Assignee: International Business Machines Corporation
    Inventors: Pushkara R. Varanasi, Ahmad D. Katnani, Mahmoud M. Khojasteh, Ranee W. Kwong
  • Patent number: 5514799
    Abstract: Nonlinear optical compounds having structures with delocalized resonance configurations corresponding to: ##STR1## wherein A.sub.1 and A.sub.2 are independently selected from electron withdrawing moieties; R.sub.1 and R.sub.2 are independently selected from aromatic rings, heteroaromatic rings and fused ring systems consisting of two or three aromatic or heteroaromatic rings; n and m are integers from one to five, and D.sub.1 and D.sub.2 are independently selected from hydrogen, electron donating groups and polymer attachment groups, with the proviso that at least one of D.sub.1 and D.sub.2 is an electron donating group. Polymers blended with, cured with, or having pendant side chains of the disclosed nonlinear optical materials and exhibiting second order nonlinear optical properties are also disclosed.
    Type: Grant
    Filed: August 2, 1993
    Date of Patent: May 7, 1996
    Assignee: Enichem S.p.A.
    Inventors: Pushkara R. Varanasi, Kwan-Yue A. Jen, King Y. Wong, Robert M. Mininni
  • Patent number: 5395556
    Abstract: Base polymers devoid of non-linear optical properties exhibiting second order non-linear optical properties after the covalent attachment of tricyanovinyl groups to pendant side chains of the base polymer. Methods of preparing a polymer having second order non-linear optical properties by reacting the base polymers of the present invention with tetracyanoethylene in a basic solvent at elevated temperatures.
    Type: Grant
    Filed: October 9, 1991
    Date of Patent: March 7, 1995
    Assignee: Enichem S.p.A.
    Inventors: Kevin J. Drost, Pushkara R. Varanasi, Kwan-Yue A. Jen, Michael A. Drzewinski