Patents by Inventor Qian Fan

Qian Fan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200381533
    Abstract: An integrated enhancement/depletion mode high electron mobility transistor (HEMT) includes a substrate, a first buffer layer, a first barrier layer, a first channel layer, a first source, a first drain, a first gate, a second buffer layer, a second barrier layer, a second channel layer, a second source, a second drain, and a second gate. The first buffer layer is on the substrate. The first barrier layer is on a first area of the first buffer layer, the first channel layer is on the first barrier layer, and the first source, the first drain, and the first gate are on the first channel layer. The second buffer layer is on a second area of the first buffer layer, the second bather layer is on the second buffer layer, the second channel layer is on the second barrier layer, and the second source, the second drain, and the second gate are on the second channel layer.
    Type: Application
    Filed: August 5, 2020
    Publication date: December 3, 2020
    Applicant: SUZHOU HAN HUA SEMICONDUCTOR CO., LTD.
    Inventors: Xianfeng Ni, Qian Fan, Wei He
  • Publication number: 20200381543
    Abstract: An integrated enhancement/depletion mode high electron mobility transistor (HEMT) includes a substrate, a buffer layer, a first barrier layer, a second barrier layer, a first source, a first drain a first gate, a second source, a second drain, and a second gate. The buffer layer is on the substrate. The first barrier layer is on the buffer layer, and the second barrier layer is on the first barrier layer. The second barrier layer covers a portion of the first barrier layer. The first source, the first drain, and the first gate are on the first barrier layer, and the second source, the second drain, and the second gate are on the second banner layer.
    Type: Application
    Filed: August 4, 2020
    Publication date: December 3, 2020
    Applicant: SUZHOU HAN HUA SEMICONDUCTOR CO., LTD.
    Inventors: Xianfeng Ni, Qian Fan, Wei He
  • Patent number: 10786117
    Abstract: The present disclosure provides a food processor including a cutter head, on which a cutter is arranged; and a cup body arranged on the cutter head. The intersecting line of the side wall of the cutter head and the cross section of the cutter head is a cutter head contour line, the largest inscribed circle or the smallest circumscribed circle of the cutter head contour line is a cutter head base circle, and the central axis of the cutter head penetrates the center of the cutter head base circle. The intersecting line of the cup wall of the cup body and the cross section of the cup wall is a cup body contour line, the largest inscribed circle or the smallest circumscribed circle of the cup body contour line is a cup body base circle, and the central axis of the cup body penetrates the center of the cup body base circle.
    Type: Grant
    Filed: January 28, 2019
    Date of Patent: September 29, 2020
    Assignees: GUANGDONG MIDEA CONSUMER ELECTRICS MANUFACTURING CO., LTD., MIDEA GROUP CO., LTD.
    Inventors: Qian Fan, Xianghe Zeng, Jianfei Xu
  • Patent number: 10784366
    Abstract: The present invention provides an integrated enhancement/depletion mode HEMT and a method for manufacturing the same, by which method an enhancement mode transistor and a depletion mode transistor can be integrated together, which is beneficial for increasing the application of gallium nitride HEMT devices and improving the characteristics of circuits, and lay a foundation for realizing monolithic integration of high-speed digital/analog mixed signal radio frequency circuits. At the same time, by using a regrowth technology of a barrier layer, electrons generated by impurities are made part of a conductive channel, thus the concentration of the two-dimensional electron gas is increased, and the conductive performance is improved while preventing excessive electrons from interfering with the devices.
    Type: Grant
    Filed: April 30, 2019
    Date of Patent: September 22, 2020
    Inventors: Xianfeng Ni, Qian Fan, Wei He
  • Patent number: 10777654
    Abstract: The present invention relates to a method for manufacturing a nitrogen-face polarity gallium nitride epitaxial structure, which includes: providing a gallium nitride template which includes a substrate and a first nitrogen-face polarity gallium nitride layer positioned on the substrate; re-growing the gallium nitride on a surface of the first nitrogen-face polarity gallium nitride layer to form a second nitrogen-face polarity gallium nitride layer; and sequentially growing a barrier layer and a channel layer on the second nitrogen-face polarity gallium nitride layer. The method for manufacturing the nitrogen-face polarity gallium nitride epitaxial structure provided by the present application enables a simple growth of the nitrogen-face polarity gallium nitride, can effectively eliminate the radio frequency dispersion phenomenon, and is beneficial to large-scale production and utilization of the nitrogen-face polarity gallium nitride epitaxial structure.
    Type: Grant
    Filed: May 16, 2019
    Date of Patent: September 15, 2020
    Assignee: SUZHOU HAN HUA SEMICONDUCTOR CO., LTD.
    Inventors: Xianfeng Ni, Qian Fan, Wei He
  • Patent number: 10777653
    Abstract: The present invention provides an integrated enhancement/depletion mode HEMT and a method for manufacturing the same, according to which an enhancement mode transistor and a depletion mode transistor can be integrated together, which is beneficial for increasing the application of gallium nitride HEMT devices and improving the characteristics of circuits, and lay a foundation for realizing monolithic integration of high-speed digital/analog mixed signal radio frequency circuits. At the same time, by utilizing the regrowth of the buffer layer and the doping requirements, electrons generated by impurities are made part of the doping layer, thus the doping concentration is improved while preventing excessive electrons from interfering with the devices.
    Type: Grant
    Filed: May 16, 2019
    Date of Patent: September 15, 2020
    Assignee: SUZHOU HAN HUA SEMICONDUCTOR CO., LTD.
    Inventors: Xianfeng Ni, Qian Fan, Wei He
  • Patent number: 10763174
    Abstract: A method for recovering carbon-face-polarized silicon carbide substrates, including: providing an epitaxial structure, the epitaxial structure includes a carbon-face-polarized silicon carbide substrate to be recovered, as well as a nitrogen-face-polarized gallium nitride buffer layer, a barrier layer and a nitrogen-face-polarized gallium nitride channel layer that are sequentially deposited on the silicon carbide substrate; removing the nitrogen-face-polarized gallium nitride buffer layer, the barrier layer and the nitrogen-face-polarized gallium nitride channel layer by wet etching; and cleaning and blowing dry the carbon-face-polarized silicon carbide substrate.
    Type: Grant
    Filed: September 6, 2019
    Date of Patent: September 1, 2020
    Assignee: SUZHOU HAN HUA SEMICONDUCTOR CO., LTD.
    Inventors: Xianfeng Ni, Qian Fan, Wei He
  • Patent number: 10749020
    Abstract: The invention relates to the group III-nitride semiconductor device and corresponding fabricating method. Specifically, a method to reduce RF dispersion in a group III-nitride high electron mobility transistor (HEMT), especially for reduced barrier thickness epi materials and scaled deices for higher frequency applications. Periodic n-type doping within barrier is used to screen surface state traps, which are responsible for the above-mentioned RF dispersion, without introducing additional gate leakage current path. Within the method, the barrier (typically AlGaN, AlInN) layer is periodically n-type doped with its composition (such as Al % within AlGaN) periodically modulated. The periodic structure is effective in both screening surface state traps and reducing the leakage current within the AlGaN/gate Schottky barrier.
    Type: Grant
    Filed: March 22, 2019
    Date of Patent: August 18, 2020
    Assignee: SUZHOU HAN HUA SEMICONDUCTOR CO., LTD.
    Inventors: Xian-Feng Ni, Qian Fan, Wei He
  • Patent number: 10727053
    Abstract: A method of fabricating a semiconductor structure includes: growing a dielectric layer on a substrate; defining an epitaxial region and a gap region on the dielectric layer; etching a dielectric layer of the epitaxial region to expose the substrate; sequentially growing a gallium nitride buffer layer and an aluminum gallium nitride barrier layer on the exposed substrate. The method of fabricating a semiconductor structure provided by the present application divides the aluminum gallium nitride barrier layer into a plurality of independent portions, thus preventing the microcracks from occurring in the aluminum gallium nitrogen film while increasing the aluminum component, thereby improving the yield rate and reliability of the device.
    Type: Grant
    Filed: July 10, 2019
    Date of Patent: July 28, 2020
    Assignee: SUZHOU HAN HUA SEMICONDUCTOR CO., LTD.
    Inventors: Xianfeng Ni, Qian Fan, Wei He
  • Publication number: 20200203506
    Abstract: The present application provides a semiconductor device and a method for manufacturing the same. The method includes: sequentially forming a buffer layer and a barrier layer on a substrate, wherein a two-dimensional electron gas is formed between the buffer layer and the barrier layer; etching a source region and a drain region of the barrier layer to form a trench on the buffer layer, and doped layers are formed on the trench; forming a passivation layer on the barrier layer and the doped layers, and etching the passivation layer to expose a portion of the barrier layer, wherein the portion of the barrier layer is in contact with the doped layers; and doping ions into a portion of the buffer layer in contact with the portion of the buffer layer.
    Type: Application
    Filed: March 3, 2020
    Publication date: June 25, 2020
    Applicant: SUZHOU HAN HUA SEMICONDUCTOR CO., LTD.
    Inventors: Xianfeng Ni, Qian Fan, Wei He
  • Patent number: 10622456
    Abstract: The present application provides a semiconductor device and a method for manufacturing the same. The method includes: sequentially forming a buffer layer and a barrier layer on a substrate, wherein a two-dimensional electron gas is formed between the buffer layer and the barrier layer; etching a source region and a drain region of the barrier layer to form a trench on the buffer layer, and doped layers are formed on the trench; forming a passivation layer on the barrier layer and the doped layers, and etching the passivation layer to expose a portion of the barrier layer, wherein the portion of the barrier layer is in contact with the doped layers; and doping ions into a portion of the buffer layer in contact with the portion of the buffer layer.
    Type: Grant
    Filed: May 9, 2019
    Date of Patent: April 14, 2020
    Assignee: SUZHOU HANHUA SEMICONDUCTOR CO., LTD.
    Inventors: Xianfeng Ni, Qian Fan, Wei He
  • Publication number: 20200052076
    Abstract: The present disclosure includes but is not limited to the III-Nitride semiconductor devices including a barrier layer, a gallium nitride or indium gallium nitride channel layer having a Ga-face coupled with the barrier layer, and a patterned thermoconductive layer having a thermal conductivity of at least 500 W/(m-K) within 1000 nanometers of a Ga-face of the gallium nitride channel layer. The semiconductor device may be a high-electron-mobility transistor or a semiconductor wafer. Methods for making the same also are described.
    Type: Application
    Filed: December 21, 2018
    Publication date: February 13, 2020
    Inventors: Xian-Feng Ni, Qian Fan, Wei He
  • Publication number: 20200052102
    Abstract: The invention relates to the group III-nitride semiconductor device and corresponding fabricating method. Specifically, a method to reduce RF dispersion in a group III-nitride high electron mobility transistor (HEMT), especially for reduced barrier thickness epi materials and scaled deices for higher frequency applications. Periodic n-type doping within barrier is used to screen surface state traps, which are responsible for the above-mentioned RF dispersion, without introducing additional gate leakage current path. Within the method, the barrier (typically AlGaN, AlInN) layer is periodically n-type doped with its composition (such as Al % within AlGaN) periodically modulated. The periodic structure is effective in both screening surface state traps and reducing the leakage current within the AlGaN/gate Schottky barrier.
    Type: Application
    Filed: March 22, 2019
    Publication date: February 13, 2020
    Inventors: Xian-Feng Ni, Qian Fan, Wei He
  • Publication number: 20190393090
    Abstract: A method for recovering carbon-face-polarized silicon carbide substrates, including: providing an epitaxial structure, the epitaxial structure includes a carbon-face-polarized silicon carbide substrate to be recovered, as well as a nitrogen-face-polarized gallium nitride buffer layer, a barrier layer and a nitrogen-face-polarized gallium nitride channel layer that are sequentially deposited on the silicon carbide substrate; removing the nitrogen-face-polarized gallium nitride buffer layer, the barrier layer and the nitrogen-face-polarized gallium nitride channel layer by wet etching; and cleaning and blowing dry the carbon-face-polarized silicon carbide substrate.
    Type: Application
    Filed: September 6, 2019
    Publication date: December 26, 2019
    Applicant: Suzhou Han Hua Semiconductor Co.,Ltd
    Inventors: Xianfeng NI, Qian FAN, Wei HE
  • Publication number: 20190378957
    Abstract: Solid state light emitting micropixels array structures having hydrogen barrier layers to minimize or eliminate undesirable passivation of doped GaN structures due to hydrogen diffusion.
    Type: Application
    Filed: June 6, 2019
    Publication date: December 12, 2019
    Inventors: Hussein S. El-Ghoroury, Kameshwar Yadavalli, Andrew Teren, Qian Fan
  • Publication number: 20190371598
    Abstract: The invention relates to a method to reduce the contact resistance of ohmic contact in group III-nitride high-electron mobility transistor (HEMT). A heavily n-type doped nitride layer with modulation doping is epitaxially grown on selected contact regions for use as ohmic contact layer. The method for producing the n++ ohmic contact layer includes at least the following: deposition of nitride HEMT epitaxial structure on substrates (such as SiC, silicon, sapphire, GaN etc), deposition in-situ or ex-situ mask for selective growth of n-contact, selective etching to create of openings within the mask layer, deposition of modulation doped n++ nitride ohmic contact layer followed by ohmic metal deposition. The modulation doping involves alternating epitaxy of high and low doped nitride layers with common n-type dopant such as Ge, Si etc. The modulation doping significantly increases the range of n-type doping without detrimental effect on the material quality of the contact layer.
    Type: Application
    Filed: March 6, 2019
    Publication date: December 5, 2019
    Inventors: Xian-Feng Ni, Qian Fan, Wei He
  • Publication number: 20190333766
    Abstract: A method of fabricating a semiconductor structure includes: growing a dielectric layer on a substrate; defining an epitaxial region and a gap region on the dielectric layer; etching a dielectric layer of the epitaxial region to expose the substrate; sequentially growing a gallium nitride buffer layer and an aluminum gallium nitride barrier layer on the exposed substrate. The method of fabricating a semiconductor structure provided by the present application divides the aluminum gallium nitride barrier layer into a plurality of independent portions, thus preventing the microcracks from occurring in the aluminum gallium nitrogen film while increasing the aluminum component, thereby improving the yield rate and reliability of the device.
    Type: Application
    Filed: July 10, 2019
    Publication date: October 31, 2019
    Applicant: Suzhou Han Hua Semiconductor Co.,Ltd
    Inventors: Xianfeng NI, Qian FAN, Wei HE
  • Publication number: 20190304772
    Abstract: A method of fabricating a high-crystalline-quality and high-uniformity AlN layer within a high electron mobility transistor (HEMT) device with a metalorganic chemical vapor deposition (MOCVD) technique, includes: raising a temperature of a substrate to an ultra-high growth temperature; and supplying an Al source and an N source in pulses over the substrate under the ultra-high growth temperature, wherein the ultra-high growth temperature is at least 1300° C. At least for a first predetermined period of time in each cycle of the pulses, the Al source is switched on when the N source is switched off.
    Type: Application
    Filed: June 12, 2019
    Publication date: October 3, 2019
    Applicant: Suzhou Han Hua Semiconductor Co.,Ltd
    Inventors: Xianfeng NI, Qian FAN, Wei HE
  • Publication number: 20190267468
    Abstract: The present application provides a semiconductor device and a method for manufacturing the same. The method includes: sequentially forming a buffer layer and a barrier layer on a substrate, wherein a two-dimensional electron gas is formed between the buffer layer and the barrier layer; etching a source region and a drain region of the barrier layer to form a trench on the buffer layer, and doped layers are formed on the trench; forming a passivation layer on the barrier layer and the doped layers, and etching the passivation layer to expose a portion of the barrier layer, wherein the portion of the barrier layer is in contact with the doped layers; and doping ions into a portion of the buffer layer in contact with the portion of the buffer layer.
    Type: Application
    Filed: May 9, 2019
    Publication date: August 29, 2019
    Applicant: Suzhou Han Hua Semiconductor Co.,Ltd
    Inventors: Xianfeng NI, Qian FAN, Wei HE
  • Publication number: 20190267470
    Abstract: The present invention relates to a method for manufacturing a nitrogen-face polarity gallium nitride epitaxial structure, which includes: providing a gallium nitride template which includes a substrate and a first nitrogen-face polarity gallium nitride layer positioned on the substrate; re-growing the gallium nitride on a surface of the first nitrogen-face polarity gallium nitride layer to form a second nitrogen-face polarity gallium nitride layer; and sequentially growing a barrier layer and a channel layer on the second nitrogen-face polarity gallium nitride layer. The method for manufacturing the nitrogen-face polarity gallium nitride epitaxial structure provided by the present application enables a simple growth of the nitrogen-face polarity gallium nitride, can effectively eliminate the radio frequency dispersion phenomenon, and is beneficial to large-scale production and utilization of the nitrogen-face polarity gallium nitride epitaxial structure.
    Type: Application
    Filed: May 16, 2019
    Publication date: August 29, 2019
    Applicant: Suzhou Han Hua Semiconductor Co.,Ltd
    Inventors: Xianfeng NI, Qian FAN, Wei HE