Abstract: Embodiments of the disclosure provide methods of bonding silicon wafers. An exemplary method may include cleaning the silicon wafers to remove residues. The method may also include performing a hydrophilic treatment to surfaces of the silicon wafers to increase surface energy. The method may also include pre-bonding the silicon wafers at room temperature. In addition, the method may include performing a rapid thermal annealing treatment to the pre-bonded silicon wafers to bond the silicon wafers.

Abstract: This disclosure provides systems, methods, and device associated with an electrostatically driven graphene speaker. In one aspect, the device includes a graphene membrane having a diameter of about 3 millimeters to about 11 millimeters, and a first electrode proximate a first side of the graphene membrane, the first electrode being electrically conductive. The device is a microphone or a loudspeaker.

Abstract: Disclosed are a method and system for controlling a display condition which is pre-written into a passive light board by a mobile device. A display status is pre-written into a passive light board which is not powered by electricity before, and a control application program loaded into the mobile device is provided for a user to input a brightness parameter and a color temperature parameter. The light board which is not powered by electricity before can carry out the presetting of the display condition, and related manufacturers can set the light boards quickly and easily after the light boards exit the factory, and the light boards can display according to the conditions in compliance with the brightness parameter and the color temperature parameter after the light boards are powered on.

Abstract: Embodiments of the disclosure provide a micromachined mirror assembly having a mirror-base layer, a first reflective layer on a top surface of the mirror-base layer, and a second reflective layer on a bottom surface of the mirror-base layer. In an example, the first reflective layer is reflective to incident light of the micromachined mirror assembly, and the first reflective layer and the second reflective layer are made of a same material and have same dimensions.

Abstract: Embodiments of the disclosure provide a micromachined mirror assembly having a mirror-base layer, a first reflective layer on a top surface of the mirror-base layer, and a second reflective layer on a bottom surface of the mirror-base layer. In an example, the first reflective layer is reflective to incident light of the micromachined mirror assembly, and the first reflective layer and the second reflective layer are made of a same material and have same dimensions.

Abstract: Embodiments of the disclosure provide micromachined mirror assemblies and hybrid driving methods thereof. In one example, a micromachined mirror assembly includes a base and an array of micro mirrors affixed on the base. The base is configured to tilt around a base tilting axis. Each micro mirror in the array of micro mirrors is configured to tilt around a respective mirror tilting axis. Each of the mirror tilting axes is parallel to one another and is nonparallel to the base tilting axis.

Abstract: Embodiments of the disclosure provide a design method for a LiDAR scanning mirror. The design method may include receiving, by a communication interface, design parameters of the LiDAR scanning mirror. The design method may further include setting, by at least one processor, an initial value and a step size for each design parameter. The design method may also include adjusting the design parameters according to the respective step sizes. The design method may additionally include computing one or more mirror performance indexes, by the at least one processor, by applying a Finite Element Analysis (FEA) model to the adjusted design parameters. The design method may further include determining that the mirror performance indexes meet a predetermined target performance. The design method may also include providing, by the at least one processor, the adjusted design parameters and the mirror performance indexes for making the LiDAR scanning mirror.

Abstract: In one example, an apparatus that is part of a Light Detection and Ranging (LiDAR) module of a vehicle comprises a semiconductor integrated circuit comprising a microelectromechanical system (MEMS) and a substrate. The MEMS comprises an array of micro-mirror assemblies, each micro-mirror assembly comprising: a micro-mirror having a first thickness; and an actuator comprising first fingers and second fingers, the first fingers being connected with the substrate, the second fingers being mechanically connected to the micro-mirror having a second thickness smaller than the first thickness, the actuator being configured to generate an electrostatic force between the first fingers and the second fingers to rotate the micro-mirror to reflect light emitted by a light source out of the LiDAR module or light received by the LiDAR module to a receiver.

Abstract: A Light Detection and Ranging (LiDAR) module for a vehicle can include a semiconductor integrated circuit with a microelectromechanical system (MEMS) and a substrate, the MEMS comprising a micro-mirror assembly including a mirror and a gimbal structure. The gimbal can be configured concentrically around and coplanar with the mirror. When rotated, the gimbal drives the mirror to oscillate at or near a resonant frequency and is coupled to the mirror via mirror-gimbal connectors. A support structure can be coupled to a backside of the mirror and gimbal structures and can increase the stiffness of the mirror to help the mirror better resist dynamic deformation. To limit the added rotational moment of inertia, the support structure can be etched to form a matrix of cells (e.g., formed by a mesh of circumferential and radial ridges) such that up to approximately 90% of the support structure material forming the support structure is removed.

Abstract: In one example, an apparatus being part of a Light Detection and Ranging (LiDAR) module is provided. The apparatus comprises a microelectromechanical system (MEMS) and a substrate. The MEMS comprising an array of micro-mirror assemblies, each micro-mirror assembly comprises: a first flexible support structure and a second flexible support structure connected to the substrate; a micro-mirror comprising a first connection structure and a second connection structure, the first connection structure being connected to the first flexible support structure at a first connection point, the second connection structure being connected to the second flexible support structure at a second connection point, the first and second connection points being aligned with a rotation axis around which the micro-mirror rotates, the first flexible support structure and the second flexible support structure being configured to allow the first and second connection points to move when the micro-mirror rotates.

Abstract: Embodiments of the disclosure provide a comb drive, a comb drive system, and a method of operating the comb drive to rotate bi-directionally in a MEMS environment. An exemplary comb drive system may include a comb drive, at least one power source, and a controller. The comb drive may include a stator comb having a first electrically conductive layer spaced apart from a second electrically conductive layer. The comb drive may also include a rotor comb having a first electrically conductive layer spaced apart from a second electrically conductive layer. The controller may be configured to apply first and second voltage levels having opposite polarities to the first and second electrically conductive layers of the rotor comb, respectively. The controller may also be configured to apply an intermediate voltage level to one of the first or second electrically conductive layers of the stator comb.

Abstract: Embodiments of the disclosure provide micromachined mirror assemblies and hybrid driving methods thereof. In one example, a micromachined mirror assembly includes a base and an array of micro mirrors affixed on the base. The base is configured to tilt around a base tilting axis. Each micro mirror in the array of micro mirrors is configured to tilt around a respective mirror tilting axis. Each of the mirror tilting axes is parallel to one another and is nonparallel to the base tilting axis.

Abstract: Disclosed herein are techniques for improving structural stability and duration of light beam steering components in a LiDAR system. A galvo mirror assembly for light detection and ranging includes a top bracket including a first rotatable unit configured to rotate around an axis; a bottom bracket aligned with the top bracket and including a second rotatable unit configured to rotate around the axis; a mirror including a top end and a bottom end, where the top end of the mirror is coupled to the first rotatable unit of the top bracket and the bottom end of the mirror is coupled to the second rotatable unit of the bottom bracket, such that the mirror is rotatable around the axis; and an enhance plate extending between and non-rotatably coupled to the top bracket and the bottom bracket. The enhance plate is spaced apart from the mirror.

Abstract: Methods and systems for light steering are proposed. In one example, an apparatus comprises: a light source; a receiver; a microelectromechanical system (MEMS) and a controller. The MEMS comprises: an array of first rotatable mirrors to receive and reflect the light beam from the light source and a second rotatable mirror to receive the light beam reflected by the array of first rotatable mirrors. The controller is configured to rotate, respectively, the array of first rotatable mirrors and the second rotatable mirror to set a first angle of light path with respect to a first dimension and to set a second angle of the light path with respect to a second dimension orthogonal to the first dimension to perform at least one of: reflecting light from the light source along the light path, or reflecting input light propagating along the light path to the receiver.

Abstract: Methods and systems for using a MEMS mirror for steering a LiDAR beam and for minimizing statically emitted light from a LiDAR system are disclosed. A LiDAR system includes a light source that emits a light beam directed at a MEMS device. The MEMS device includes a manipulable mirror that reflects the emitted light beam in a scanning pattern. The MEMS device also includes a stabilization ring positioned adjacent to and at least partially surrounding the mirror. An attenuation layer is disposed on a top surface of the stabilization ring and is configured to attenuate light reflected by the stabilization ring.

Abstract: A method comprising: adhering a first surface of a mask to a carrier substrate via a first adhesive layer; forming a second adhesive layer on at least one of a second surface of the mask or a third surface of a wafer having a second alignment mark; bringing the carrier substrate and the wafer towards each other along a vertical axis such that the second surface of the mask and the third surface of the wafer is separated by an alignment gap based on a thickness of the second adhesive layer; performing an alignment operation based on imaging the first alignment mark and the second alignment mark; configuring the second surface of the mask to adhere to the third surface of the wafer via the second adhesive; and disconnecting the carrier substrate from the mask.

Abstract: This disclosure provides systems, methods, and apparatus related to an ultrasonic microphone and an ultrasonic acoustic radio. In one aspect a system includes a transmitter and a receiver. The receiver comprises a membrane. The membrane comprises a single layer or multiple layers of a two-dimensional material. The receiver is operable to receive sound waves in a frequency range, with the frequency range being the ultrasonic frequency range.

Abstract: This application provides an all-metal downhole power drilling tool based on a multi-stage dual plunger eccentric gear mechanism, which includes a flow distribution shaft, an outer pipe and a multi-stage eccentric gear driving mechanism which are coaxially arranged, the flow distribution shaft is suspended and supported in the outer pipe by the multi-stage eccentric gear driving mechanism. This application provides a novel rotary plunger type power drilling tool hydraulically driven by drilling fluid. The plunger structure is high in processing precision, low in cost and good in plunger type movable sealing effect. A planetary gear train with an eccentric structure is adopted to transmit torque, improving the working efficiency of the power drilling tool. The power drilling tool driven by the multi-stage dual plunger eccentric gear mechanism is of an all-metal structure and can withstand a high temperature environment.

Abstract: Embodiments of the disclosure provide a Light Detection and Ranging (LiDAR) system that includes a light source configured to emit a light beam, a first apparatus configured to adjust the light beam and a second apparatus configured to adjust the light beam and receive the reflected light beam from the first apparatus and an object. The first apparatus includes a first rotatable mirror configured to receive and reflect the light beam, and a first actuator configured to rotate the first rotatable mirror. The second apparatus includes a second adjustable mirror configured to receive and propagate the light beam, and a second actuator configured to adjust the second adjustable mirror, and a detector configured to receive the light beam reflected by objects.

Abstract: Embodiments of the disclosure provide a comb drive, a comb drive system, and a method of operating the comb drive to rotate bi-directionally in a MEMS environment. An exemplary comb drive system may include a comb drive, at least one power source, and a controller. The comb drive may include a stator comb having a first electrically conductive layer spaced apart from a second electrically conductive layer. The comb drive may also include a rotor comb having a first electrically conductive layer spaced apart from a second electrically conductive layer. The controller may be configured to apply first and second voltage levels having opposite polarities to the first and second electrically conductive layers of the rotor comb, respectively. The controller may also be configured to apply an intermediate voltage level to one of the first or second electrically conductive layers of the stator comb.