Patents by Inventor R. Lowe

R. Lowe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7236244
    Abstract: An alignment target includes periodic patterns on two elements. The periodic patterns are aligned when the two elements are properly aligned. By measuring the two periodic patterns at multiple polarization states and comparing the resulting intensities of the polarization states, it can be determined if the two elements are aligned. A reference measurement location may be used that includes third periodic pattern on the first element and a fourth periodic pattern on the second element, which have a designed in offset, i.e., an offset when there is an offset of a known magnitude when the first and second element are properly aligned. The reference measurement location is measured at two polarization states. The difference in the intensities of the polarization states at reference measurement location and is used to determine the amount of the alignment error.
    Type: Grant
    Filed: March 9, 2005
    Date of Patent: June 26, 2007
    Assignee: Nanometrics Incorporated
    Inventors: Weidong Yang, Roger R. Lowe-Webb
  • Patent number: 7230705
    Abstract: An alignment target includes periodic patterns on two elements. The alignment target includes two locations, at least one of which has a designed in offset. In one embodiment, both measurement locations have a designed in offset of the same magnitude but opposite directions. For example, two separate overlay patterns that are mirror images of each other may be used. Alternatively, the magnitudes and/or directions may vary between the measurement locations. The radiation that interacts with the measurement locations is compared. The calculated difference is extremely sensitive to any alignment error. If the difference between the patterns is approximately zero, the elements are properly aligned. When an alignment error is introduced, however, calculated difference can be used to determine the error. In one embodiment, the alignment target is modeled to determine the alignment error. In another embodiment, additional overlay patterns with additional reference offsets are used to determine the alignment error.
    Type: Grant
    Filed: March 7, 2005
    Date of Patent: June 12, 2007
    Assignee: Nanometrics Incorporated
    Inventors: Weidong Yang, Roger R. Lowe-Webb, John D. Heaton, Guonguang Li
  • Patent number: 7191207
    Abstract: An apparatus and a method to allocate device adapter bandwidth, where that device adapter is disposed in an information storage and retrieval system capable of communicating with one or more host computers, and where that device adapter interconnects a data cache with information storage devices. The data storage and retrieval system receives a plurality of requests from the host computers to read information from, or to write information to, information storage devices. The method determines a read/write request ratio and a non-volatile storage utilization ratio. The method allocates device adapter bandwidth based upon the read/write request ratio and/or the non-volatile storage utilization ratio.
    Type: Grant
    Filed: June 11, 2003
    Date of Patent: March 13, 2007
    Assignee: International Business Machines Corporation
    Inventors: Lawrence C. Blount, Thomas C. Jarvis, Steven R. Lowe, David F. Mannenbach
  • Patent number: 7171516
    Abstract: A data storage control unit is coupled to one or more host devices and to one or more physical storage units, the physical storage units collectives configured as a plurality of logical storage ranks. The storage control unit receives and processes write requests from the host devices and directs that data updates be stored in a temporary storage. The data updates are subsequently destaged to the logical ranks. Write requests are processed at a predetermined rate relative to the rate at which destages are performed (destage mode or rate). The storage control unit evaluates workload conditions of the temporary storage and modifies the destage mode if the temporary storage is in danger of becoming backlogged or if an actual backlog is created, thereby applying a “throttle” to the host write requests. Thus, method, apparatus and program product are provided to dynamically modify a level of throttling whereby through-put of a host device is substantially maintained.
    Type: Grant
    Filed: September 29, 2003
    Date of Patent: January 30, 2007
    Assignee: International Business Machines Corporation
    Inventors: Steven R. Lowe, Kevin J. Ash
  • Patent number: 7115858
    Abstract: A normal incidence reflectometer includes a rotatable analyzer/polarizer, which permits measurement of a diffracting structure. Relative rotation of the analyzer/polarizer with respect to the diffracting structure permits analysis of the diffracted radiation at multiple polarity orientations. A spectograph detects the intensity of the spectral components at different polarity orientations. Because the normal incidence reflectometer uses normally incident radiation and an analyzer/polarizer that rotates relative to the diffracting structure, or vice-versa, the orientation of the diffracting structure does not affect the accuracy of the measurement. Thus, the sample holding stage may use X, Y, and Z, as well as r-? type movement and there is no requirement that the polarization orientation of the incident light be aligned with the grating of the diffraction structure.
    Type: Grant
    Filed: September 25, 2000
    Date of Patent: October 3, 2006
    Assignee: Nanometrics Incorporated
    Inventors: James M. Holden, William A. McGahan, Richard A. Yarussi, Pablo I. Rovira, Roger R. Lowe-Webb
  • Publication number: 20060196303
    Abstract: An arm of a variable radius handle of a screw operated lifting mechanism such as a jack has a pivot hub with a universal opening to fit on existing screw drives. The handle on the arm may be slidably adjustable along the arm or the arm itself may be slidably adjustable relative to the pivot point for variable leverage and turning speed.
    Type: Application
    Filed: February 14, 2005
    Publication date: September 7, 2006
    Inventors: R. Lowe, Ron Lowe
  • Patent number: 7061615
    Abstract: An overlay target for spectroscopic measurement includes at least two diffraction gratings, one grating overlying the other. The diffraction gratings may include an asymmetry relative to each other in order to improve resolution of the presence as well as the direction of any mis-registration. For example, the asymmetry between the two diffraction gratings may be a phase offset, a difference in pitch, line width, etc. The overlay target may be spectroscopically measuring, for example, using an optical model and a best fit analysis. Moreover, the overlay target may be optimized by modeling the overlay target and adjusting the variable parameters and calculating the sensitivity of the overlay target to changes in variable parameters.
    Type: Grant
    Filed: September 20, 2001
    Date of Patent: June 13, 2006
    Assignee: Nanometrics Incorporated
    Inventor: Roger R. Lowe-Webb
  • Patent number: 7046361
    Abstract: An alignment system for aligning two elements includes an alignment target with periodic patterns on each element. The alignment target includes two locations, at least one of which has a designed in offset. If desired, both locations may have designed in offsets of the same magnitude but in opposite directions. The diffraction patterns produced at the two locations are compared. If the difference between the patterns is at a minimum, the elements are properly aligned. When an alignment error is introduced, however, the calculated difference can be used to determine the error. In another embodiment, bands in the moiré fringes from the different locations may be compared to determine the alignment error. The two elements may then be moved relative to each other to minimize the alignment error. Thus, the alignment target may advantageously be used in any alignment system, such as an exposure tool.
    Type: Grant
    Filed: April 4, 2002
    Date of Patent: May 16, 2006
    Assignee: Nanometrics Incorporated
    Inventors: Weidong Yang, Roger R. Lowe-Webb, John D. Heaton
  • Patent number: 7014543
    Abstract: An apparatus for resurfacing and buffing the playable surface of an optical disc is provided. The apparatus includes a reciprocally mounted disc support having a rotatably mounted platen or turntable on which a disc may be received, a resurfacing wheel, a buffing wheel, and a power-driven and timed drive assembly for driving the disc support member between a loading/unloading station, a resurfacing station for engagement with the resurfacing wheel, and a buffing station for engagement with a buffing wheel.
    Type: Grant
    Filed: December 9, 2004
    Date of Patent: March 21, 2006
    Assignee: Digital Innovations, LLC
    Inventors: Paul R. Holbrook, Tony J. Abfall, Sigurd A. Nelson, II, David R. Low
  • Patent number: 6992764
    Abstract: An alignment target includes periodic patterns on two elements. The periodic patterns are aligned when the two elements are properly aligned. By measuring the two periodic patterns with an incident beam having a single polarization state and detecting the intensity of the resulting polarized light, it can be determined if the two elements are aligned. The same polarization state may be detected as is incident or different polarization states may be used. A reference measurement location may be used that includes a third periodic pattern on the first element and a fourth periodic pattern on the second element, which have a designed in offset, i.e., an offset when there is an offset of a known magnitude when the first and second element are properly aligned. The reference measurement location is similarly measured with a single polarization state.
    Type: Grant
    Filed: September 30, 2002
    Date of Patent: January 31, 2006
    Assignee: Nanometrics Incorporated
    Inventors: Weidong Yang, Roger R. Lowe-Webb, Silvio J. Rabello, John D. Heaton
  • Patent number: 6982793
    Abstract: An alignment target includes periodic patterns on two elements. The alignment target includes two locations, at least one of which has a designed in offset. In one embodiment, both measurement locations have a designed in offset of the same magnitude but opposite directions. For example, two separate overlay patterns that are mirror images of each other may be used. Alternatively, the magnitudes and/or directions may vary between the measurement locations. The radiation that interacts with the measurement locations is compared. The calculated difference is extremely sensitive to any alignment error. If the difference between the patterns is approximately zero, the elements are properly aligned. When an alignment error is introduced, however, calculated difference can be used to determine the error. In one embodiment, the alignment target is modeled to determine the alignment error. In another embodiment, additional overlay patterns with additional reference offsets are used to determine the alignment error.
    Type: Grant
    Filed: April 4, 2002
    Date of Patent: January 3, 2006
    Assignee: Nanometrics Incorporated
    Inventors: Weidong Yang, Roger R. Lowe-Webb, John D. Heaton, Guoguang Li
  • Patent number: 6970255
    Abstract: An encoder includes a layer on the scale that has a thickness that varies as a function of position along the length of the scale. The position of the sensor head with respect to the scale may be determined by measuring the thickness of the layer or index of refraction, e.g., using a reflectometer, and converting the thickness to the lateral position. In one embodiment, the thickness of the layer is used to provide a rough position of the sensor head with respect to the scale and an alignment target that includes periodic patterns on both the sensor head and scale is used to provide a refined position.
    Type: Grant
    Filed: April 23, 2003
    Date of Patent: November 29, 2005
    Assignee: Nanometrics Incorporated
    Inventors: Blaine R. Spady, John D. Heaton, Weidong Yang, Roger R. Lowe-Webb
  • Patent number: 6958819
    Abstract: An encoder uses an alignment target that includes periodic patterns on the movable element and the stationary element. The alignment target may include at least two measurement locations, each location having a different offset between the periodic pattern on the movable element with respect to the periodic pattern on the stationary element. Alternatively, two measurements using different polarization states may be made at one location. When the periodic patterns on the movable element and the stationary element are aligned, the difference between the two measurements will produce a minimum, i.e., approximately a zero value plus noise. By counting the minima, the precise position of the movable element with respect to the stationary element can be determined. The resolution of the encoder may be further increased using reference measurements.
    Type: Grant
    Filed: April 4, 2002
    Date of Patent: October 25, 2005
    Assignee: Nanometrics Incorporated
    Inventors: John D. Heaton, Weidong Yang, Roger R. Lowe-Webb
  • Patent number: 6949462
    Abstract: An alignment target includes periodic patterns on two elements. The periodic patterns are aligned when the two elements are properly aligned. By measuring the two periodic patterns at multiple polarization states and comparing the resulting intensities of the polarization states, it can be determined if the two elements are aligned. A reference measurement location may be used that includes third periodic pattern on the first element and a fourth periodic pattern on the second element, which have a designed in offset, i.e., an offset when there is an offset of a known magnitude when the first and second element are properly aligned. The reference measurement location is measured at two polarization states. The difference in the intensities of the polarization states at reference measurement location and is used to determine the amount of the alignment error.
    Type: Grant
    Filed: April 4, 2002
    Date of Patent: September 27, 2005
    Assignee: Nanometrics Incorporated
    Inventors: Weidong Yang, Roger R. Lowe-Webb
  • Publication number: 20040255026
    Abstract: An apparatus and a method to allocate device adapter bandwidth, where that device adapter is disposed in an information storage and retrieval system capable of communicating with one or more host computers, and where that device adapter interconnects a data cache with information storage devices. The data storage and retrieval system receives a plurality of requests from the host computers to read information from, or to write information to, information storage devices. The method determines a read/write request ratio and a non-volatile storage utilization ratio. The method allocates device adapter bandwidth based upon the read/write request ratio and/or the non-volatile storage utilization ratio.
    Type: Application
    Filed: June 11, 2003
    Publication date: December 16, 2004
    Applicant: International Business Machines Corporation
    Inventors: Lawrence C. Blount, Thomas C. Jarvis, Steven R. Lowe, David F. Mannenbach
  • Patent number: 6832007
    Abstract: An image processing method and system compensates for artifacts in scaling operations of mixed raster content data representations. In such data representations, a document is segmented into data portions generally segregated by data types. At least one of the segments is dilated so that upon scaling reconstruction, there are additional pixels available for interpolation operations, thereby avoiding artifacts caused by discontinuity.
    Type: Grant
    Filed: November 21, 2000
    Date of Patent: December 14, 2004
    Assignee: Xerox Corporation
    Inventors: Yeqing Zhang, Martin E. Banton, James R. Low, Steven J. Harrington, William A. Fuss
  • Publication number: 20040172427
    Abstract: A system and method for executing a participating application from media coupled to a computing device. The participating application may be executed automatically or manually. When the application is executed, a task disk control file is read from the removable media. The task disk control file contains all of the configuration information necessary to run the participating application from the coupled media. The participating application is then launched for use by a user. After the user is finished using the participating application, all data files are saved, temporary files deleted and configuration information removed prior to the termination of the application to return the computing device to an original state.
    Type: Application
    Filed: March 2, 2004
    Publication date: September 2, 2004
    Inventors: Trent M. Thomas, Christopher R. Low, Stephen Larry McBride, Troy Taylor Davidson
  • Publication number: 20040083473
    Abstract: A system and method for automatically executing a participating application upon insertion of a removable media into a computing device. When the computing device detects that the removable media containing has been inserted, a task disk control file is read from the removable media. The task disk control file contains all of the configuration information necessary to run the participating application from the removable media The participating application is then launched for use by a user. After the user is finished using the participating application, the removable disk is automatically ejected. In addition to monitoring for insertion of the removable media, events such as a completion of the self-contained application and a request to eject the media are monitored. When a completion event is encountered, all data files are saved, temporary files deleted and configuration information removed prior to the removable disk ejection.
    Type: Application
    Filed: February 14, 2003
    Publication date: April 29, 2004
    Applicant: Iomega Corporation
    Inventors: Trent M. Thomas, Christopher R. Low, Stephen Larrry McBride, Troy Taylor Davidson
  • Patent number: 6662736
    Abstract: A seeding device for tilling the ground and distributing seed. The device includes a handle having a bracket with a seed container, the tilling plate and tilling tines mounted on the bracket. A seed distributor is provided to distribute seed over the ground. The seed distributor includes a plunger with a distribution plate. To use the seeding device, the user first inserts the tilling tines into the ground which moves the plunger upward toward the seed container and then removes the seeding device from the ground. The down and up movement moves seed from the seed container to the ground or the distribution plate. Seed on the distribution plate is moved off of the plate then moves the plunger into the extended position.
    Type: Grant
    Filed: September 24, 2002
    Date of Patent: December 16, 2003
    Inventors: Patrick R. Lowe, Ray H. Grumme
  • Patent number: 6529992
    Abstract: A system and method for automatically executing a participating application upon insertion of a removable media into a computing device. When the computing device detects that the removable media containing has been inserted, a task disk control file is read from the removable media. The task disk control file contains all of the configuration information necessary to run the participating application from the removable media. The participating application is then launched for use by a user. After the user is finished using the participating application, the removable disk is automatically ejected. In addition to monitoring for insertion of the removable media, events such as a completion of the self-contained application and a request to eject the media are monitored. When a completion event is encountered, all data files are saved, temporary files deleted and configuration information removed prior to the removable disk ejection.
    Type: Grant
    Filed: July 26, 1999
    Date of Patent: March 4, 2003
    Assignee: Iomega Corporation
    Inventors: Trent M. Thomas, Christopher R. Low, Stephen Larry McBride, Troy Taylor Davidson