Abstract: A resonator structure (FBAR) made of electrodes sandwich a piezoelectric material. The intersection of the two conducting electrodes defines the active area of the acoustic resonator. The active area is divided into two concentric areas; a perimeter or frame, and a central region. An annulus is added to one of the two conducting electrodes to improve the electrical performance (in terms of Q).

Abstract: Monolithic devices that include an acoustic resonator vertically integrated with electronic circuitry are described. In one aspect, a monolithic integrated device includes a substrate, electronic circuitry supported by the substrate, an acoustic isolator over the electronic circuitry, and an acoustic resonator on the acoustic isolator. A method of fabricating the monolithic device also is described.

Abstract: An improved linear scan geometry laminography system that allows for generation of high speed and high resolution X-ray laminographs using an electronic detector operating in a time-domain integration mode coupled with a moving source of X-rays. In one embodiment, the improved scanning laminography system does not require any mechanical motion of the object being inspected, the X-ray source or detectors. Higher speed is achieved over conventional laminography systems due to the electronic nature of the scan. The same architecture also allows for both two-dimensional radiography and digital reconstruction techniques. Usage of the technique provides for higher throughput, higher resolution, and simpler designs than do currently available systems. An analysis of different system design parameters for the basic X-ray imaging architecture utilizing time-domain integration to generate cross-sectional images is included to facilitate specific design configurations.