Patents by Inventor Rajeev Gupta

Rajeev Gupta has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of fabricating of structures by metastable atom impact desorption of a passivating layer
    Patent number: 6165688
    Abstract: A metastable depassivation lithography process for fabricating microstructures on a surface which utilizes the energy contained in neutral metastable rare gas atoms to remove passivating atoms from selected areas of a surface. Removal of the passivating atoms in a pattern allows further chemical processing to add or remove material to the exposed areas. The neutral metastable rare gas atoms can be directed to the surface using atom optical techniques to effect a desired pattern of exposure by the atoms. Alternatively, a mask can be used to effect a desired pattern of exposure.
    Type: Grant
    Filed: May 12, 1997
    Date of Patent: December 26, 2000
    Assignee: The United States of America, as represented by the Secretary of Commerce
    Inventors: Robert J. Celotta, Jabez J. McClelland, Rajeev Gupta, Harold Craighead