Abstract: A method for determining an emission coefficient of a device under test (DUT) using a test circuit comprises coupling a parameter measurement circuit associated with the test circuit to an input pin associated with the DUT, wherein the input pin is coupled to a diode element within the DUT and performing voltage and current measurements associated with the input pin using the parameter measurement circuit. In some embodiments, the method further comprises determining a plurality of contact resistance values respectively based on the voltage and current measurements and an emission coefficient estimate using a contact resistance estimation circuit; and determining an emission coefficient associated with the DUT based on the determined plurality of contact resistance values using an emission coefficient determination circuit.

Abstract: In an electrical traction drive for a vehicle comprising at least two individual wheel drives that are to be controlled independently of each other, the drives are able to be operated redundantly in order for an emergency operating function to be implemented.

Abstract: A method for determining an emission coefficient of a device under test (DUT) using a test circuit is disclosed. The method comprises coupling a parameter measurement circuit associated with the test circuit to an input pin associated with the DUT, wherein the input pin is coupled to a diode element within the DUT and performing voltage and current measurements associated with the input pin using the parameter measurement circuit. In some embodiments, the method further comprises determining a plurality of contact resistance values respectively based on the voltage and current measurements and an emission coefficient estimate using a contact resistance estimation circuit; and determining an emission coefficient associated with the DUT based on the determined plurality of contact resistance values using an emission coefficient determination circuit.

Abstract: In an electrical traction drive for a vehicle comprising at least two individual wheel drives that are to be controlled independently of each other, the drives are able to be operated redundantly in order for an emergency operating function to be implemented.

Abstract: A signal generating circuit, may include an analog signal generator having an output and a control input, the analog signal generator configured to generate at the output an analog output signal in accordance with a timing parameter; an analog-to-digital converter (ADC) having an input and an output, the input coupled to the output of the analog signal generator, the ADC configured to generate a sequence of signal values dependent on the analog signal received at the input; a configurable digital signal generator comprising an output and a control input, the digital signal generator configured to generate a digital output signal in accordance with signal parameters received at the control input; and a control circuit having an input coupled to the output of the ADC.

Abstract: A beam regulating apparatus for an EUV illumination beam has a position sensor device and a control/regulating device, which is signal-connected to the position sensor device. Furthermore, at least one beam regulating component which influences the beam path of the illumination beam is signal-connected to the control/regulating device. The position sensor device has at least one diffraction grating for generating at least two reference partial beams from the illumination beam. Furthermore, the position sensor device has a respective position sensor assigned to one of the reference partial beams, for detecting the assigned reference partial beam. This results in a beam regulating apparatus which enables well-controllable illumination in conjunction with a simple construction.

Abstract: A test circuit may include an analog signal generator having an output and configured to generate an analog output signal at the output in accordance with a timing parameter; an analog-to-digital converter (ADC) having an input connected to the output of the analog signal generator, and an output and configured to generate a first digital output signal dependent on the analog signal; and a configurable digital signal generator comprising an output and configured to generate a second digital output signal in accordance with the timing parameter at the output.

Abstract: A signal generating circuit, may include an analog signal generator having an output and a control input, the analog signal generator configured to generate at the output an analog output signal in accordance with a timing parameter; an analog-to-digital converter (ADC) having an input and an output, the input coupled to the output of the analog signal generator, the ADC config-ured to generate a sequence of signal values dependent on the analog signal received at the input; a configurable digital signal generator comprising an output and a control input, the digital signal generator configured to generate a digital output signal in accordance with signal parameters received at the control input; and a control circuit having an input coupled to the output of the ADC.

Abstract: A beam regulating apparatus for an EUV illumination beam has a position sensor device and a control/regulating device, which is signal-connected to the position sensor device. Furthermore, at least one beam regulating component which influences the beam path of the illumination beam is signal-connected to the control/regulating device. The position sensor device has at least one diffraction grating for generating at least two reference partial beams from the illumination beam. Furthermore, the position sensor device has a respective position sensor assigned to one of the reference partial beams, for detecting the assigned reference partial beam. This results in a beam regulating apparatus which enables well-controllable illumination in conjunction with a simple construction.

Abstract: A method of measuring a deviation of an optical surface from a target shape and a method of manufacturing an optical element. This method of measuring the deviation includes: performing a first interferometric measurement using a first diffractive measurement structure, which is arranged to cover a first area of the optical surface, to provide a first interferometric measurement result, performing a second interferometric measurement using a second diffractive measurement structure, which is arranged to cover a second area of the optical surface different from the first area, to provide a second interferometric measurement result, and determining a deviation of the optical surface from the target shape.

Abstract: A method of measuring a deviation of an optical surface from a target shape and a method of manufacturing an optical element. The method of measuring the deviation includes:—performing a first interferometric measurement using a first diffractive measurement structure, which is arranged to cover a first area of the optical surface, to provide a first interferometric measurement result,—performing a second interferometric measurement using a second diffractive measurement structure, which is arranged to cover a second area of the optical surface different from the first area, to provide a second interferometric measurement result, and—determining a deviation of the optical surface from the target shape.

Abstract: A method of aligning at least two wave shaping elements, a method of measuring a deviation of an optical surface from a target shape and a measuring apparatus for interferometrically measuring a deviation of an optical surface from a target shape.

Abstract: A method of aligning at least two wave shaping elements, a method of measuring a deviation of an optical surface from a target shape and a measuring apparatus for interferometrically measuring a deviation of an optical surface from a target shape.

Abstract: A method of aligning at least two wave shaping elements, a method of measuring a deviation of an optical surface from a target shape and a measuring apparatus for interferometrically measuring a deviation of an optical surface from a target shape.

Abstract: A method of aligning at least two wave shaping elements, a method of measuring a deviation of an optical surface from a target shape and a measuring apparatus for interferometrically measuring a deviation of an optical surface from a target shape.

Abstract: A method of aligning at least two wave shaping elements, a method of measuring a deviation of an optical surface from a target shape and a measuring apparatus for interferometrically measuring a deviation of an optical surface from a target shape.

Abstract: A method of manufacturing an optical element includes testing the optical element by using an interferometer optics generating a beam of measuring light illuminating only a sub-aperture of the tested optical element. The interferometer optics comprises a hologram. Results of the sub-aperture measurement are stitched together to obtain a measuring result with respect to the full surface of the optical element. Further, a method of calibrating the interferometer optics includes performing an interferometric measurement using a calibrating optics having a hologram covering only a sub-aperture of the full cross section of the beam of measuring light generated by the interferometer optics and stitching together the sub-aperture measurements to obtain a result indicative for the full cross section of the interferometer optics.

Abstract: An electronic element, test system and method of testing an electronic circuit are provided. The electronic circuit has input and output terminals. The input terminals receive a test signal sequence to test the electronic circuit. Actual value signals of a 3-value logic of the electronic circuit are provided at the output terminals in response to the test signal sequence. A comparator circuit has first and second input terminals and an output terminal. Each of the output terminals of the electronic circuit are coupled to a first input terminal. The second input terminals receive desired value signals. The comparator circuit compares the actual value signals with the desired value signals and provides the comparison to the output terminal of the comparator circuit.

Abstract: A method of positioning optical elements relative to each other uses an interferometer apparatus comprising a plurality of holograms generating beams of adjustment measuring light which are incident on optical surfaces of the optical elements. Interference patterns generated by superimposing adjustment measuring light of the beams reflected from the surfaces are indicative of positioning errors of the optical elements. The beams of adjustment measuring light may comprise focused beams forming a point focus on the optical surface and beams of light which is orthogonally incident on extended portions on the optical surface.

Abstract: An integrated circuit includes at least one input and output circuit including: a signal terminal that provides an external contact; a protective circuit coupled to the signal terminal; an input driver and/or an output driver coupled to the signal terminal via the protective circuit; and an additional circuit including a first input coupled to the signal terminal via the protective circuit, and an output that provides a test value for operation of the input and output circuit.