Patents by Inventor Reiji Niino
Reiji Niino has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11136668Abstract: There is provided a film-forming apparatus, comprising: a process container in which a vacuum atmosphere is formed; a rotary table installed in the process container, the rotary table having substrate mounting regions formed on a side of a top surface of the rotary table and configured to mount a plurality of substrates, and the rotary table including a rotary mechanism configured to rotate the substrate mounting regions around a rotary shaft; a heating mechanism configured to heat the substrates mounted on the substrate mounting regions; a gas supply part installed to face a moving region where the substrates move when the rotary table rotates and including gas discharge holes formed to cross the moving region, the gas discharge holes being configured to discharge a first film-forming gas and a second film-forming gas; and an exhaust part configured to exhaust an interior of the process container.Type: GrantFiled: April 22, 2019Date of Patent: October 5, 2021Assignee: TOKYO ELECTRON LIMITEDInventors: Tatsuya Yamaguchi, Reiji Niino, Yoji Iizuka
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Patent number: 11056349Abstract: There is provided a method of fabricating a semiconductor device by performing a process on a substrate, which includes: forming a masking film made of a polymer having a urea bond by supplying polymerizing raw materials to a surface of the substrate on which an etching target film formed; forming an etching pattern on the masking film; subsequently, etching the etching target film with a processing gas using the etching pattern; and subsequently, removing the masking film by heating the substrate to depolymerize the polymer.Type: GrantFiled: January 17, 2020Date of Patent: July 6, 2021Assignee: TOKYO ELECTRON LIMITEDInventors: Koichi Yatsuda, Takashi Hayakawa, Hiroshi Okuno, Reiji Niino, Hiroyuki Hashimoto, Tatsuya Yamaguchi
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Patent number: 10960435Abstract: A film forming apparatus includes: a film forming gas discharge part; an exhaust port; a rotation mechanism; a heating part configured to heat the interior of a reaction container to a temperature lower than a temperature of a film forming gas discharged from the film forming gas discharge part; first gas discharge holes opened, in the film forming gas discharge part, toward a gas temperature reducing member so that the film forming gas is cooled by colliding with the gas temperature reducing member inside the reaction container before the film forming gas is supplied to substrates; and second gas discharge holes opened, in the film forming gas discharge part, in a direction differing from an opening direction of the first gas discharge holes so that the film forming gas does not collide with the gas temperature reducing member before the film forming gas is supplied to the substrates.Type: GrantFiled: March 8, 2018Date of Patent: March 30, 2021Assignee: TOKYO ELECTRON LIMITEDInventors: Makoto Fujikawa, Reiji Niino, Hiroyuki Hashimoto, Tatsuya Yamaguchi, Syuji Nozawa
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Patent number: 10790135Abstract: There is provided a method of manufacturing a semiconductor device by performing a process on a substrate, comprising: forming a sacrificial film made of a polymer having a urea bond on a surface of the substrate by supplying a precursor for polymerization onto the surface of the substrate; subsequently, performing a step of changing a sectional shape of the sacrificial film and a step of adjusting a film thickness of the sacrificial film by heating the sacrificial film; subsequently, performing the process on the surface of the substrate; and subsequently, removing the sacrificial film.Type: GrantFiled: October 19, 2018Date of Patent: September 29, 2020Assignee: TOKYO ELECTRON LIMITEDInventors: Tatsuya Yamaguchi, Reiji Niino, Syuji Nozawa, Makoto Fujikawa
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Patent number: 10755971Abstract: A method of manufacturing a semiconductor device by performing a process on a substrate includes: forming a protective layer made of a polymer having a urea bond by supplying a raw material for polymerization to a surface of a substrate on which a protected film to be protected is formed; forming a sealing film at a first temperature lower than a second temperature at which the polymer is depolymerized so cover a portion where the protective layer is exposed; subsequently, subjecting the substrate to a treatment at a third temperature equal to or higher than the second temperature at which the polymer as the protective layer is depolymerized; subsequently, performing a treatment which causes damage to the protected film when the protective layer is not present; and after the performing a treatment which causes damage to the protected film, depolymerizing the polymer by heating the substrate.Type: GrantFiled: September 6, 2019Date of Patent: August 25, 2020Assignee: TOKYO ELECTRON LIMITEDInventors: Tatsuya Yamaguchi, Reiji Niino, Hiroyuki Hashimoto, Syuji Nozawa, Makoto Fujikawa
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Patent number: 10748782Abstract: There is provided a method of manufacturing a semiconductor device by processing a substrate, which includes: embedding a polymer having a urea bond in a recess formed in the substrate by supplying a material for polymerization from above a sacrificial film to the substrate and forming a polymer film made of the polymer having the urea bond, wherein a surface of the substrate is covered with the sacrificial film, the recess including an opening of the sacrificial film that is formed by a patterning; removing the polymer film formed on the sacrificial film while leaving the polymer embedded in the recess; removing the sacrificial film in a state in which the polymer is embedded in the recess; and subsequently, removing the polymer embedded in the recess.Type: GrantFiled: October 19, 2018Date of Patent: August 18, 2020Assignee: TOKYO ELECTRON LIMITEDInventors: Tatsuya Yamaguchi, Reiji Niino, Makoto Fujikawa, Yoshihiro Hirota, Rong Yang, Tomonari Yamamoto
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Publication number: 20200152475Abstract: There is provided a method of fabricating a semiconductor device by performing a process on a substrate, which includes: forming a masking film made of a polymer having a urea bond by supplying polymerizing raw materials to a surface of the substrate on which an etching target film formed; forming an etching pattern on the masking film; subsequently, etching the etching target film with a processing gas using the etching pattern; and subsequently, removing the masking film by heating the substrate to depolymerize the polymer.Type: ApplicationFiled: January 17, 2020Publication date: May 14, 2020Inventors: Koichi YATSUDA, Takashi HAYAKAWA, Hiroshi OKUNO, Reiji NIINO, Hiroyuki HASHIMOTO, Tatsuya YAMAGUCHI
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Patent number: 10629448Abstract: A method for manufacturing a semiconductor device by processing a substrate, the method includes forming a first film of a polymer having urea bonds by supplying a polymerization raw material to a surface of the substrate, subsequently, forming a pattern by etching the first film, and subsequently, forming a second film of a material different from the polymer of the first film by performing a substitution processing to the first film by supplying a reaction gas, which reacts with the polymerization raw material to generate a product, to the substrate while heating the substrate to depolymerize the polymer.Type: GrantFiled: March 13, 2018Date of Patent: April 21, 2020Assignee: TOKYO ELECTRON LIMITEDInventors: Tatsuya Yamaguchi, Reiji Niino, Hiroyuki Hashimoto, Syuji Nozawa, Makoto Fujikawa
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Patent number: 10593556Abstract: There is provided a method of fabricating a semiconductor device by performing a process on a substrate, which includes: forming a masking film made of a polymer having a urea bond by supplying polymerizing raw materials to a surface of the substrate on which an etching target film formed; forming an etching pattern on the masking film; subsequently, etching the etching target film with a processing gas using the etching pattern; and subsequently, removing the masking film by heating the substrate to depolymerize the polymer.Type: GrantFiled: July 19, 2017Date of Patent: March 17, 2020Assignee: TOKYO ELECTRON LIMITEDInventors: Koichi Yatsuda, Takashi Hayakawa, Hiroshi Okuno, Reiji Niino, Hiroyuki Hashimoto, Tatsuya Yamaguchi
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Publication number: 20190393083Abstract: A method of manufacturing a semiconductor device by performing a process on a substrate includes: forming a protective layer made of a polymer having a urea bond by supplying a raw material for polymerization to a surface of a substrate on which a protected film to be protected is formed; forming a sealing film at a first temperature lower than a second temperature at which the polymer is depolymerized so cover a portion where the protective layer is exposed; subsequently, subjecting the substrate to a treatment at a third temperature equal to or higher than the second temperature at which the polymer as the protective layer is depolymerized; subsequently, performing a treatment which causes damage to the protected film when the protective layer is not present; and after the performing a treatment which causes damage to the protected film, depolymerizing the polymer by heating the substrate.Type: ApplicationFiled: September 6, 2019Publication date: December 26, 2019Inventors: Tatsuya YAMAGUCHI, Reiji NIINO, Hiroyuki HASHIMOTO, Syuji NOZAWA, Makoto FUJIKAWA
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Patent number: 10490405Abstract: There is provided a semiconductor device manufacturing method including: forming a first mask film composed of a polymer having a urea bond by supplying a raw material to a surface of the substrate for polymerization; forming a second mask inorganic film to be laminated on the first mask film; forming a pattern on the first mask film and the second mask inorganic film and performing an ion implantation on the surface of the substrate; removing the second mask inorganic film after the ion implantation; and removing the first mask film by heating the substrate after the ion implantation and depolymerizing the polymer.Type: GrantFiled: March 2, 2018Date of Patent: November 26, 2019Assignee: TOKYO ELECTRON LIMITEDInventors: Tatsuya Yamaguchi, Reiji Niino, Hiroyuki Hashimoto, Syuji Nozawa, Makoto Fujikawa
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Publication number: 20190323124Abstract: There is provided a film-forming apparatus, comprising: a process container in which a vacuum atmosphere is formed; a rotary table installed in the process container, the rotary table having substrate mounting regions formed on a side of a top surface of the rotary table and configured to mount a plurality of substrates, and the rotary table including a rotary mechanism configured to rotate the substrate mounting regions around a rotary shaft; a heating mechanism configured to heat the substrates mounted on the substrate mounting regions; a gas supply part installed to face a moving region where the substrates move when the rotary table rotates and including gas discharge holes formed to cross the moving region, the gas discharge holes being configured to discharge a first film-forming gas and a second film-forming gas; and an exhaust part configured to exhaust an interior of the process container.Type: ApplicationFiled: April 22, 2019Publication date: October 24, 2019Inventors: Tatsuya YAMAGUCHI, Reiji NIINO, Yoji IIZUKA
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Patent number: 10446438Abstract: A method of manufacturing a semiconductor device by performing a process on a substrate includes: forming a protective layer made of a polymer having a urea bond by supplying a raw material for polymerization to a surface of a substrate on which a protected film to be protected is formed; forming a sealing film at a first temperature lower than a second temperature at which the polymer is depolymerized so cover a portion where the protective layer is exposed; subsequently, subjecting the substrate to a treatment at a third temperature equal to or higher than the second temperature at which the polymer as the protective layer is depolymerized; subsequently, performing a treatment which causes damage to the protected film when the protective layer is not present; and after the performing a treatment which causes damage to the protected film, depolymerizing the polymer by heating the substrate.Type: GrantFiled: March 27, 2018Date of Patent: October 15, 2019Assignee: TOKYO ELECTRON LIMITEDInventors: Tatsuya Yamaguchi, Reiji Niino, Hiroyuki Hashimoto, Syuji Nozawa, Makoto Fujikawa
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Publication number: 20190122883Abstract: There is provided a method of manufacturing a semiconductor device by performing a process on a substrate, comprising: forming a sacrificial film made of a polymer having a urea bond on a surface of the substrate by supplying a precursor for polymerization onto the surface of the substrate; subsequently, performing a step of changing a sectional shape of the sacrificial film and a step of adjusting a film thickness of the sacrificial film by heating the sacrificial film; subsequently, performing the process on the surface of the substrate; and subsequently, removing the sacrificial film.Type: ApplicationFiled: October 19, 2018Publication date: April 25, 2019Inventors: Tatsuya YAMAGUCHI, Reiji NIINO, Syuji NOZAWA, Makoto FUJIKAWA
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Publication number: 20190122894Abstract: There is provided a method of manufacturing a semiconductor device by processing a substrate, which includes: embedding a polymer having a urea bond in a recess formed in the substrate by supplying a material for polymerization from above a sacrificial film to the substrate and forming a polymer film made of the polymer having the urea bond, wherein a surface of the substrate is covered with the sacrificial film, the recess including an opening of the sacrificial film that is formed by a patterning; removing the polymer film formed on the sacrificial film while leaving the polymer embedded in the recess; removing the sacrificial film in a state in which the polymer is embedded in the recess; and subsequently, removing the polymer embedded in the recess.Type: ApplicationFiled: October 19, 2018Publication date: April 25, 2019Inventors: Tatsuya YAMAGUCHI, Reiji NIINO, Makoto FUJIKAWA, Yoshihiro HIROTA, Rong YANG, Tomonari YAMAMOTO
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Publication number: 20180286744Abstract: A method of manufacturing a semiconductor device by performing a process on a substrate includes: forming a protective layer made of a polymer having a urea bond by supplying a raw material for polymerization to a surface of a substrate on which a protected film to be protected is formed; forming a sealing film at a first temperature lower than a second temperature at which the polymer is depolymerized so cover a portion where the protective layer is exposed; subsequently, subjecting the substrate to a treatment at a third temperature equal to or higher than the second temperature at which the polymer as the protective layer is depolymerized; subsequently, performing a treatment which causes damage to the protected film when the protective layer is not present; and after the performing a treatment which causes damage to the protected film, depolymerizing the polymer by heating the substrate.Type: ApplicationFiled: March 27, 2018Publication date: October 4, 2018Inventors: Tatsuya YAMAGUCHI, Reiji NIINO, Hiroyuki HASHIMOTO, Syuji NOZAWA, Makoto FUJIKAWA
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Publication number: 20180264516Abstract: A film forming apparatus includes: a film forming gas discharge part; an exhaust port; a rotation mechanism; a heating part configured to heat the interior of a reaction container to a temperature lower than a temperature of a film forming gas discharged from the film forming gas discharge part; first gas discharge holes opened, in the film forming gas discharge part, toward a gas temperature reducing member so that the film forming gas is cooled by colliding with the gas temperature reducing member inside the reaction container before the film forming gas is supplied to substrates; and second gas discharge holes opened, in the film forming gas discharge part, in a direction differing from an opening direction of the first gas discharge holes so that the film forming gas does not collide with the gas temperature reducing member before the film forming gas is supplied to the substrates.Type: ApplicationFiled: March 8, 2018Publication date: September 20, 2018Inventors: Makoto FUJIKAWA, Reiji NIINO, Hiroyuki HASHIMOTO, Tatsuya YAMAGUCHI, Syuji NOZAWA
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Publication number: 20180269069Abstract: A method for manufacturing a semiconductor device by processing a substrate, the method includes forming a first film of a polymer having urea bonds by supplying a polymerization raw material to a surface of the substrate, subsequently, forming a pattern by etching the first film, and subsequently, forming a second film of a material different from the polymer of the first film by performing a substitution processing to the first film by supplying a reaction gas, which reacts with the polymerization raw material to generate a product, to the substrate while heating the substrate to depolymerize the polymer.Type: ApplicationFiled: March 13, 2018Publication date: September 20, 2018Inventors: Tatsuya YAMAGUCHI, Reiji NIINO, Hiroyuki HASHIMOTO, Syuji NOZAWA, Makoto FUJIKAWA
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Publication number: 20180261458Abstract: There is provided a semiconductor device manufacturing method including: forming a first mask film composed of a polymer having a urea bond by supplying a raw material to a surface of the substrate for polymerization; forming a second mask inorganic film to be laminated on the first mask film; forming a pattern on the first mask film and the second mask inorganic film and performing an ion implantation on the surface of the substrate; removing the second mask inorganic film after the ion implantation; and removing the first mask film by heating the substrate after the ion implantation and depolymerizing the polymer.Type: ApplicationFiled: March 2, 2018Publication date: September 13, 2018Inventors: Tatsuya YAMAGUCHI, Reiji NIINO, Hiroyuki HASHIMOTO, Syuji NOZAWA, Makoto FUJIKAWA
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Publication number: 20180025917Abstract: There is provided a method of fabricating a semiconductor device by performing a process on a substrate, which includes: forming a masking film made of a polymer having a urea bond by supplying polymerizing raw materials to a surface of the substrate on which an etching target film formed; forming an etching pattern on the masking film; subsequently, etching the etching target film with a processing gas using the etching pattern; and subsequently, removing the masking film by heating the substrate to depolymerize the polymer.Type: ApplicationFiled: July 19, 2017Publication date: January 25, 2018Inventors: Koichi YATSUDA, Takashi HAYAKAWA, Hiroshi OKUNO, Reiji NIINO, Hiroyuki HASHIMOTO, Tatsuya YAMAGUCHI