Patents by Inventor Remco Schoenmakers
Remco Schoenmakers has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12175648Abstract: The invention relates to a method implemented by a data processing apparatus, comprising the steps of receiving an image; providing a set-point for a desired image quality parameter of said image; and processing said image using an image analysis technique for determining a current image quality parameter of said image. In the method, the current image quality parameter is compared with said desired set-point. Based on said comparison, a modified image is generated by using an image modification technique. The generating comprises a step of deteriorating said image in terms of said image quality parameter in case said current image quality parameter exceeds said set-point. The modified image is then output and may be further analysed.Type: GrantFiled: November 30, 2023Date of Patent: December 24, 2024Assignee: FEI CompanyInventors: Remco Schoenmakers, Maurice Peemen, Pavel Potoček
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Patent number: 12136532Abstract: Methods for drift corrected, fast, low dose, adaptive sample imaging with a charged particle microscopy system include scanning a surface region of a sample with a charged particle beam to obtain a first image of the surface region with a first detector modality, and then determining a scan strategy for the surface region. The scan strategy comprises a charged particle beam path, a first beam dwell time associated with at least one region of interest in the first image, the first beam dwell time being sufficient to obtain statistically significant data from a second detector modality, and at least a second beam dwell time associated with other regions of the first image, wherein the first beam dwell time is different than the second beam dwell time. The surface region of the sample is then scanned with the determined scan strategy to obtain data from the first and second detector.Type: GrantFiled: October 12, 2022Date of Patent: November 5, 2024Assignee: FEI CompanyInventors: Pavel Potocek, Remco Schoenmakers, Maurice Peemen, Bert Henning Freitag
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Publication number: 20240110880Abstract: Methods and systems for using dynamic data-driven detector tuning to investigate a sample with a charged particle microscopy system are disclosed herein. Methods and systems according to the present disclosure include acquiring sample data for a region of interest on the sample, and then determining one or more materials present in the region of interest. Once the materials are identified, a differentiation detector window is identified for the one or more materials, and the detector settings of a detector are adjusted such that the detector obtains information within the differentiation detector window. Thus, as the sample is subsequently scanned, the detector obtains an optimal range of information that is allows for efficient differentiation among the one or more materials.Type: ApplicationFiled: September 30, 2022Publication date: April 4, 2024Applicant: FEI CompanyInventors: Maurice PEEMEN, Pavel POTOCEK, Peter TIEMEIJER, Remco SCHOENMAKERS, Herman LEMMENS
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Publication number: 20240095897Abstract: The invention relates to a method implemented by a data processing apparatus, comprising the steps of receiving an image; providing a set-point for a desired image quality parameter of said image; and processing said image using an image analysis technique for determining a current image quality parameter of said image. In the method, the current image quality parameter is compared with said desired set-point. Based on said comparison, a modified image is generated by using an image modification technique. The generating comprises a step of deteriorating said image in terms of said image quality parameter in case said current image quality parameter exceeds said set-point. The modified image is then output and may be further analysed.Type: ApplicationFiled: November 30, 2023Publication date: March 21, 2024Inventors: Remco Schoenmakers, Maurice Peemen, Pavel Potocek
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Publication number: 20240071717Abstract: Disclosed herein are scientific instrument support systems, as well as related methods, computing devices, and computer-readable media. For example, in some embodiments, an example method may comprise receiving, by a first device located at a premises and from a second device located external to the premises, and via a network, configuration data for a charged particle microscope located at the premises. The method may comprise updating, by the first device and based on the configuration data, one or more configuration settings associated with the charged particle microscope. The method may comprise causing, based on the updated one or more configuration settings, one or more operations associated with the charged particle microscope to be performed.Type: ApplicationFiled: August 31, 2022Publication date: February 29, 2024Inventors: Pavel Potocek, Maurice Peemen, Remco Schoenmakers
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Patent number: 11901155Abstract: The disclosure relates to a method of aligning a charged particle beam apparatus, comprising the steps of providing a charged particle beam apparatus in a first alignment state; using an alignment algorithm, by a processing unit, for effecting an alignment transition from said first alignment state towards a second alignment state of said charged particle beam apparatus; and providing data related to said alignment transition to a modification algorithm for modifying said alignment algorithm in order to effect a modified alignment transition.Type: GrantFiled: August 3, 2021Date of Patent: February 13, 2024Assignee: FEI CompanyInventors: Mykola Kaplenko, Remco Schoenmakers, Oleksii Kaplenko, Ondrej Machek
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Patent number: 11861817Abstract: The invention relates to a method implemented by a data processing apparatus, comprising the steps of receiving an image; providing a set-point for a desired image quality parameter of said image; and processing said image using an image analysis technique for determining a current image quality parameter of said image. In the method, the current image quality parameter is compared with said desired set-point. Based on said comparison, a modified image is generated by using an image modification technique. The generating comprises the steps of improving said image in terms of said image quality parameter in case said current image quality parameter is lower than said set-point; and deteriorating said image in terms of said image quality parameter in case said current image quality parameter exceeds said set-point. The modified image is then output.Type: GrantFiled: April 20, 2021Date of Patent: January 2, 2024Assignee: FEI CompanyInventors: Remco Schoenmakers, Maurice Peemen, Pavel Poto{hacek over (c)}ek
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Publication number: 20230035267Abstract: Methods for drift corrected, fast, low dose, adaptive sample imaging with a charged particle microscopy system include scanning a surface region of a sample with a charged particle beam to obtain a first image of the surface region with a first detector modality, and then determining a scan strategy for the surface region. The scan strategy comprises a charged particle beam path, a first beam dwell time associated with at least one region of interest in the first image, the first beam dwell time being sufficient to obtain statistically significant data from a second detector modality, and at least a second beam dwell time associated with other regions of the first image, wherein the first beam dwell time is different than the second beam dwell time. The surface region of the sample is then scanned with the determined scan strategy to obtain data from the first and second detector.Type: ApplicationFiled: October 12, 2022Publication date: February 2, 2023Applicant: FEI CompanyInventors: Pavel POTOCEK, Remco SCHOENMAKERS, Maurice PEEMEN, Bert Henning FREITAG
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Patent number: 11488800Abstract: Methods for drift corrected, fast, low dose, adaptive sample imaging with a charged particle microscopy system include scanning a surface region of a sample with a charged particle beam to obtain a first image of the surface region with a first detector modality, and then determining a scan strategy for the surface region. The scan strategy comprises a charged particle beam path, a first beam dwell time associated with at least one region of interest in the first image, the first beam dwell time being sufficient to obtain statistically significant data from a second detector modality, and at least a second beam dwell time associated with other regions of the first image, wherein the first beam dwell time is different than the second beam dwell time. The surface region of the sample is then scanned with the determined scan strategy to obtain data from the first and second detector.Type: GrantFiled: March 26, 2021Date of Patent: November 1, 2022Assignee: FEI CompanyInventors: Pavel Potocek, Remco Schoenmakers, Maurice Peemen, Bert Henning Freitag
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Patent number: 11482400Abstract: The present invention relates to a method of training a network for reconstructing and/or segmenting microscopic images comprising the step of training the network in the cloud. Further, for training the network in the cloud training data comprising microscopic images can be uploaded into the cloud and a network is trained by the microscopic images. Moreover, for training the network the network can be benchmarked after the reconstructing and/or segmenting of the microscopic images. Wherein for benchmarking the network the quality of the image(s) having undergone the reconstructing and/or segmenting by the network can be compared with the quality of the image(s) having undergone reconstructing and/or segmenting by already known algorithm and/or a second network.Type: GrantFiled: December 19, 2020Date of Patent: October 25, 2022Inventors: Remco Schoenmakers, Maurice Peeman, Faysal Boughorbel, Pavel Potocek
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Publication number: 20220310353Abstract: Methods for drift corrected, fast, low dose, adaptive sample imaging with a charged particle microscopy system include scanning a surface region of a sample with a charged particle beam to obtain a first image of the surface region with a first detector modality, and then determining a scan strategy for the surface region. The scan strategy comprises a charged particle beam path, a first beam dwell time associated with at least one region of interest in the first image, the first beam dwell time being sufficient to obtain statistically significant data from a second detector modality, and at least a second beam dwell time associated with other regions of the first image, wherein the first beam dwell time is different than the second beam dwell time. The surface region of the sample is then scanned with the determined scan strategy to obtain data from the first and second detector.Type: ApplicationFiled: March 26, 2021Publication date: September 29, 2022Applicant: FEI CompanyInventors: Pavel POTOCEK, Remco SCHOENMAKERS, Maurice PEEMEN, Bert Henning FREITAG
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Publication number: 20220283197Abstract: Systems and methods for using smart sample containers to manage complex sample evaluation workflows, are disclosed. An example method for using a smart sample container configured to manage a sample evaluation workflow according to the present invention comprises, obtaining a sample evaluation workflow for the one or more samples, receiving interactions with external devices, and based on the sample evaluation workflow, and causing the external devices to perform actions to advance the sample evaluation workflow. The smart sample container may further modify the sample evaluation workflow based on results of actions performed by the sample evaluation workflow and/or store information relating to the results of such actions. In this way, the smart sample containers are able to dynamically drive the evaluation of a sample through its sample evaluation workflow.Type: ApplicationFiled: March 5, 2021Publication date: September 8, 2022Applicant: FEI CompanyInventors: Remco SCHOENMAKERS, Engelbertus van WILLIGEN, Reinier PERQUIN, Pepijn KRAMER, Egbert ALGRA, James MCCORMACK, Trond K. VARSLOT, Faruk CAGLAR
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Patent number: 11417497Abstract: The invention relates to a method of examining a sample using a charged particle microscope, comprising the steps of providing a charged particle beam, as well as a sample; scanning said charged particle beam over said sample at a plurality of sample positions; and acquiring an EELS spectrum for each of said plurality of sample positions. According to the method, it comprises the further steps of scanning, once more, said charged particle beam over said sample at said plurality of sample positions; acquiring a further EELS spectrum for each of said plurality of sample positions; and combining, for each of said plurality of sample positions, said EELS spectrum with said further EELS spectrum. With this, it is possible to acquire rapid information on the sample being investigated, allowing for faster processing of samples.Type: GrantFiled: June 15, 2020Date of Patent: August 16, 2022Assignee: FEI CompanyInventors: Remco Schoenmakers, Jaydeep Sanjay Belapure
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Publication number: 20220037111Abstract: The disclosure relates to a method of aligning a charged particle beam apparatus, comprising the steps of providing a charged particle beam apparatus in a first alignment state; using an alignment algorithm, by a processing unit, for effecting an alignment transition from said first alignment state towards a second alignment state of said charged particle beam apparatus; and providing data related to said alignment transition to a modification algorithm for modifying said alignment algorithm in order to effect a modified alignment transition.Type: ApplicationFiled: August 3, 2021Publication date: February 3, 2022Applicant: FEI CompanyInventors: Mykola KAPLENKO, Remco SCHOENMAKERS, Oleksii KAPLENKO, Ondrej MACHEK
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Publication number: 20210327677Abstract: The invention relates to a method implemented by a data processing apparatus, comprising the steps of receiving an image; providing a set-point for a desired image quality parameter of said image; and processing said image using an image analysis technique for determining a current image quality parameter of said image. In the method, the current image quality parameter is compared with said desired set-point. Based on said comparison, a modified image is generated by using an image modification technique. The generating comprises the steps of improving said image in terms of said image quality parameter in case said current image quality parameter is lower than said set-point; and deteriorating said image in terms of said image quality parameter in case said current image quality parameter exceeds said set-point. The modified image is then output.Type: ApplicationFiled: April 20, 2021Publication date: October 21, 2021Applicant: FEI CompanyInventors: Remco Schoenmakers, Maurice Peemen, Pavel Potocek
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Patent number: 11100612Abstract: Methods and systems for neural network based image restoration are disclosed herein. An example method at least includes acquiring a plurality of training image pairs of a sample, where each training image of each of the plurality of training image pairs are images of a same location of a sample, and where each image of the plurality of training image pairs are acquired using same acquisition parameters, updating an artificial neural network based on the plurality of training image pairs, and denoising a plurality of sample images using the updated artificial neural network, where the plurality of sample images are acquired using the same acquisition parameters as used to acquire the plurality of training image pairs.Type: GrantFiled: May 7, 2019Date of Patent: August 24, 2021Assignee: FEI CompanyInventors: Maurice Peemen, Pavel Poto{hacek over (c)}ek, Remco Schoenmakers
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Publication number: 20210151289Abstract: The present invention relates to a method of training a network for reconstructing and/or segmenting microscopic images comprising the step of training the network in the cloud. Further, for training the network in the cloud training data comprising microscopic images can be uploaded into the cloud and a network is trained by the microscopic images. Moreover, for training the network the network can be benchmarked after the reconstructing and/or segmenting of the microscopic images. Wherein for benchmarking the network the quality of the image(s) having undergone the reconstructing and/or segmenting by the network can be compared with the quality of the image(s) having undergone reconstructing and/or segmenting by already known algorithm and/or a second network.Type: ApplicationFiled: December 19, 2020Publication date: May 20, 2021Inventors: Remco SCHOENMAKERS, Maurice PEEMAN, Faysal BOUGHORBEL, Pavel POTOCEK
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Patent number: 10937625Abstract: The invention relates to a method of imaging a sample, said sample mounted on a sample holder in an electron microscope, the electron microscope comprising an electron source for generating a beam of energetic electrons along an optical axis and optical elements for focusing and deflecting the beam so as to irradiate the sample with a beam of electrons. The sample holder is capable of positioning and tilting the sample with respect to the electron beam. The method comprises the step of acquiring a tilt series of images by irradiating the sample with the beam of electrons, and concurrently changing a position of the sample during acquisition of the images, so that each image is acquired at an associated unique tilt angle and an associated unique position.Type: GrantFiled: November 21, 2019Date of Patent: March 2, 2021Assignee: FEI CompanyInventors: Erik Michiel Franken, Remco Schoenmakers, Bart Jozef Janssen, Martin Verheijen, Holger Kohr, Yuchen Deng, Andreas Voigt
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Patent number: 10903043Abstract: The present invention relates to a method of training a network for reconstructing and/or segmenting microscopic images comprising the step of training the network in the cloud. Further, for training the network in the cloud training data comprising microscopic images can be uploaded into the cloud and a network is trained by the microscopic images. Moreover, for training the network the network can be benchmarked after the reconstructing and/or segmenting of the microscopic images. Wherein for benchmarking the network the quality of the image(s) having undergone the reconstructing and/or segmenting by the network can be compared with the quality of the image(s) having undergone reconstructing and/or segmenting by already known algorithm and/or a second network.Type: GrantFiled: December 14, 2018Date of Patent: January 26, 2021Assignee: FEI CompanyInventors: Remco Schoenmakers, Maurice Peemen, Faysal Boughorbel, Pavel Potocek
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Publication number: 20200395192Abstract: The invention relates to a method of examining a sample using a charged particle microscope, comprising the steps of providing a charged particle beam, as well as a sample; scanning said charged particle beam over said sample at a plurality of sample positions; and acquiring an EELS spectrum for each of said plurality of sample positions. According to the method, it comprises the further steps of scanning, once more, said charged particle beam over said sample at said plurality of sample positions; acquiring a further EELS spectrum for each of said plurality of sample positions; and combining, for each of said plurality of sample positions, said EELS spectrum with said further EELS spectrum. With this, it is possible to acquire rapid information on the sample being investigated, allowing for faster processing of samples.Type: ApplicationFiled: June 15, 2020Publication date: December 17, 2020Applicant: FEI CompanyInventors: Remco Schoenmakers, Jaydeep Sanjay Belapure