Abstract: Embodiments of the disclosure relate to a method, a device, an apparatus and a storage medium for creating a workflow. An example method provided herein includes: adding, in response to a received edit operation, a session processing node to a node connection graph; acquiring configuration information for the session processing node, the configuration information at least indicating a first session identifier of a first session corresponding to the session processing node; and creating a target workflow based on the node connection graph.

Abstract: In one aspect, a load lock chamber includes a chamber body. The chamber body is internally provided with at least one load-lock, and is provided with an air inlet portion and an air outlet portion which are communicated with each load-lock. The chamber body is provided with at least one dispersion portion, each dispersion portion is arranged to correspond to one load-lock, each dispersion portion comprises a plurality of independently formed dispersion holes, and each dispersion hole is communicated with the air inlet portion and the corresponding load-lock and is used for dispersing airflow entering the corresponding load-lock.

Abstract: The present disclosure relates to a semiconductor device.

Abstract: Embodiments of the disclosure provide a method, apparatus, device, and storage medium for storing data in a digital assistant. The method includes: receiving a configuration request for one or more types of data to be stored in the digital assistant; in response to the configuration request, obtaining configuration information of the one or more types of data, the configuration information comprising at least one of: a field name of the one or more types of data to be stored or a description of the one or more types of data to be stored; receiving a user input for the digital assistant; and updating, using the user input, the one or more types of data based on the configuration information.

Abstract: A multi-coordinate system calibration and equipment alignment method includes: determining a first mapping relationship between a first image pixel coordinate system of an intermediate carrier substrate carrying stage and a world coordinate system; determining a second mapping relationship between a second image pixel coordinate system of a backplane carrying stage and the world coordinate system; determining galvanometer start point coordinates in the world coordinate system; obtaining first template calibration coordinates in the world coordinate system by using the first mapping relationship and the galvanometer start point coordinates; obtaining second template calibration coordinates in the world coordinate system by using the second mapping relationship and the galvanometer start point coordinates; aligning the intermediate carrier substrate based on actual coordinates of the intermediate carrier substrate carrying stage and the first template calibration coordinates; and aligning the backplane based on

Abstract: Embodiments of the disclosure provides a method, apparatus, device, and storage medium for storing data in a digital assistant. The method includes: receiving a configuration request for one or more types of data to be stored in the digital assistant; in response to the configuration request, obtaining configuration information of respective types of data among the one or more types of data via one or more entries on a first user interface, the one or more entries corresponding to the one or more types of data, wherein the one or more types of data are to be extracted and stored, based on the configuration information in an interaction between the digital assistant and a user, for a subsequent interaction between the digital assistant and the user; and creating the digital assistant based at least on the configuration information.

Abstract: The present disclosure relates to a difficult airway evaluation method and device based on a machine learning voice technology. The method includes the following steps: acquiring voice data of a patient; carrying out feature extraction on the voice data, obtaining a pitch period of pronunciations, and acquiring a voiced sound feature and unvoiced sound features based on the pitch period of pronunciations; and constructing a difficult airway evaluation classifier based on the machine learning voice technology, analyzing the received voiced sound feature and unvoiced sound features by the trained difficult airway evaluation classifier, and carrying out scoring on the severity of a difficult airway to obtain an evaluation result of the difficult airway.

Abstract: The present application discloses a display method and apparatus, a data processing method and apparatus, an electronic device and a computer medium. The display method comprises: displaying a first live streaming scene in a set playing field space; and in response to a preset operation, presenting a first display screen at a first location in the playing field space and displaying a second live streaming scene in the first display screen. Therefore, the flexibility of a display mode of a live streaming room can be improved, and the user experience is improved.

Abstract: The present disclosure provides a wafer processing device, a wafer processing system and a control method. The wafer processing device includes a driving unit, a transfer chamber, a plurality of process chambers and a bearing assembly; the bearing assembly is arranged in the transfer chamber, the process chamber is coupled to the transfer chamber, the process chamber is used for processing wafers, the bearing assembly is used for supporting the wafer, the driving unit is used for adjusting a position of the bearing assembly in the transfer chamber, and the driving unit is further used for driving the bearing assembly to move between the transfer chamber and the process chambers.

Abstract: The invention discloses a semiconductor multi-station processing chamber. Each of the multiple station includes a downward concave accommodation defined by walls and receives a pedestal therein. The pedestal and the walls define a first gap. A showerhead plate mounted on an upper lid above the pedestal to define a processing region. A second gap for supply swiping gas is defined between the showerhead plate and the upper lid. An isolation member is liftable between the downward concave accommodation and the showerhead plate to optionally encircle a processing region defined by the pedestal and the showerhead plate or to retract back into the downward concave accommodation. Such that, when the isolation member surrounds and encircles the processing region, the station is able to be structurally isolated from its neighboring one station.

Abstract: The present disclosure relates to a difficult airway evaluation method and device based on a machine learning voice technology. The method includes the following steps: acquiring voice data of a patient; carrying out feature extraction on the voice data, obtaining a pitch period of pronunciations, and acquiring a voiced sound feature and unvoiced sound features based on the pitch period of pronunciations; and constructing a difficult airway evaluation classifier based on the machine learning voice technology, analyzing the received voiced sound feature and unvoiced sound features by the trained difficult airway evaluation classifier, and carrying out scoring on the severity of a difficult airway to obtain an evaluation result of the difficult airway.

Abstract: A method for temperature measurement used in an RF processing apparatus for semiconductor includes generating by electrodes an RF signal sequence having multiple discontinuous RF signals that are separated by a time interval; and generating a temperature sensing signal by a thermal sensor during the time interval.

Abstract: This application provides a plate for a semiconductor processing apparatus, the plate including a first electrode and a second electrode, where the first electrode is selectively coupled to a first ground terminal via a first switch, the second electrode is selectively coupled to a second ground terminal via a second switch, and the first electrode and the second electrode are electrically isolated from each other.

Abstract: The disclosure relates to an artificial intelligence-based difficult airway evaluation method and device. The method includes the following steps: acquiring facial images of various postures; constructing a feature extraction network based on facial recognition, and extracting feature information of the facial images through the trained feature extraction network; and constructing a difficult airway classifier based on a machine learning algorithm, and performing difficult airway severity scoring on the extracted feature information of the facial images through the trained difficult airway classifier to obtain an evaluation result of a difficult airway. According to the present disclosure, early warning can be accurately provided for difficult airways in clinical anesthesia.

Abstract: The invention provides a wafer heating pedestal including a shaft connected to a bottom of a plate. The shaft holds a contact array being in contact with plural contact pads of the plate. The contact array includes plural contact columns.

Abstract: A plate for supporting wafer has a top for carrying a wafer and a bottom coupled to a pedestal. The plate includes multiple heating units embedded within the plate and at least one set of grooves formed between the top and the bottom of the plate at a radial location between two of neighboring heating units to thereby enhance heat insulation among the heating units.

Abstract: The invention provides a wafer heating pedestal including a shaft connected to a bottom of a plate. The shaft holds a contact array being in contact with plural contact pads of the plate. The contact array includes plural contact columns.

Abstract: The invention discloses a semiconductor multi-station processing chamber. Each of the multiple station includes a downward concave accommodation defined by walls and receives a pedestal therein. The pedestal and the walls define a first gap. A showerhead plate mounted on an upper lid above the pedestal to define a processing region. A second gap for supply swiping gas is defined between the showerhead plate and the upper lid. An isolation member is liftable between the downward concave accommodation and the showerhead plate to optionally encircle a processing region defined by the pedestal and the showerhead plate or to retract back into the downward concave accommodation. Such that, when the isolation member surrounds and encircles the processing region, the station is able to be structurally isolated from its neighboring one station.

Abstract: A method for temperature measurement used in an RF processing apparatus for semiconductor includes generating by electrodes an RF signal sequence having multiple discontinuous RF signals that are separated by a time interval; and generating a temperature sensing signal by a thermal sensor during the time interval.

Abstract: A plate for supporting wafer has a top for carrying a wafer and a bottom coupled to a pedestal. The plate includes multiple heating units embedded within the plate and at least one set of grooves formed between the top and the bottom of the plate at a radial location between two of neighboring heating units to thereby enhance heat insulation among the heating units.