Patents by Inventor Ren Zhou

Ren Zhou has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11088012
    Abstract: A plate for supporting wafer has a top for carrying a wafer and a bottom coupled to a pedestal. The plate includes multiple heating units embedded within the plate and at least one set of grooves formed between the top and the bottom of the plate at a radial location between two of neighboring heating units to thereby enhance heat insulation among the heating units.
    Type: Grant
    Filed: April 5, 2019
    Date of Patent: August 10, 2021
    Assignee: PIOTECH INC.
    Inventors: Junichi Arami, Ren Zhou
  • Publication number: 20200381270
    Abstract: The invention provides a wafer heating pedestal including a shaft connected to a bottom of a plate. The shaft holds a contact array being in contact with plural contact pads of the plate. The contact array includes plural contact columns.
    Type: Application
    Filed: May 29, 2020
    Publication date: December 3, 2020
    Inventors: JUNICHI ARAMI, REN ZHOU
  • Publication number: 20200203197
    Abstract: The invention discloses a semiconductor multi-station processing chamber. Each of the multiple station includes a downward concave accommodation defined by walls and receives a pedestal therein. The pedestal and the walls define a first gap. A showerhead plate mounted on an upper lid above the pedestal to define a processing region. A second gap for supply swiping gas is defined between the showerhead plate and the upper lid. An isolation member is liftable between the downward concave accommodation and the showerhead plate to optionally encircle a processing region defined by the pedestal and the showerhead plate or to retract back into the downward concave accommodation. Such that, when the isolation member surrounds and encircles the processing region, the station is able to be structurally isolated from its neighboring one station.
    Type: Application
    Filed: December 12, 2019
    Publication date: June 25, 2020
    Inventors: HUAQIANG TAN, REN ZHOU, ZHUO WANG, DEZAN YANG, GIYOUL KIM, JING LI, JUNICHI ARAMI, ZHONGWU LIU, SI SHEN, BRIAN LU, SEAN CHANG, GREGORY SIU
  • Publication number: 20200176231
    Abstract: A method for temperature measurement used in an RF processing apparatus for semiconductor includes generating by electrodes an RF signal sequence having multiple discontinuous RF signals that are separated by a time interval; and generating a temperature sensing signal by a thermal sensor during the time interval.
    Type: Application
    Filed: November 29, 2019
    Publication date: June 4, 2020
    Inventors: JUNICHI ARAMI, REN ZHOU
  • Publication number: 20200161166
    Abstract: A plate for supporting wafer has a top for carrying a wafer and a bottom coupled to a pedestal. The plate includes multiple heating units embedded within the plate and at least one set of grooves formed between the top and the bottom of the plate at a radial location between two of neighboring heating units to thereby enhance heat insulation among the heating units.
    Type: Application
    Filed: April 5, 2019
    Publication date: May 21, 2020
    Inventors: Junichi Arami, Ren Zhou
  • Patent number: 10497591
    Abstract: Disclosed is a load lock chamber which includes a chamber body including: at least one pair of cavities, defined in a layer structure of the chamber body to carry one or more wafer substrates; at least one internal conduit, defined between and coupled with the paired cavities, such that the paired cavities are communicated with each other and capable of conducting gas refilling and exhaustion; and a plurality of wafer supports for carrying the wafer substrates, the plurality of wafer supports being securely received in the paired cavities and able to calibrate with a machine arm frontend finger, wherein the wafer support includes grooves defined thereon for calibrating the machine arm frontend finger.
    Type: Grant
    Filed: September 16, 2016
    Date of Patent: December 3, 2019
    Assignee: PIOTECH CO., LTD.
    Inventors: Ren Zhou, Xuyen Pham, Brian Lu, Sean Chang, Shicai Fang, Jie Lian, Enguo Men
  • Publication number: 20190341280
    Abstract: The present invention discloses a wafer pedestal including a plate, a heating assembly and a heat insulation assembly embedded in the plate at a radial position that divides the plate into a first heating zone and a second heating zone.
    Type: Application
    Filed: May 1, 2019
    Publication date: November 7, 2019
    Inventors: JUNICHI ARAMI, REN ZHOU
  • Patent number: 10410909
    Abstract: The invention discloses a support structure for a wafer pedestal; particularly the wafer pedestal has a wafer carrying surface defining holes for accommodation of the support structure. The support structure includes a first surface and extends therebetween. The first surface includes a rising portion for supporting wafer. A center of the first surface and a center of the second surface define an axis that is not parallel to the normal of the first surface. That is, the first surface extends oblique relatively to the second surface such that the support structure according to the invention can be received in the pedestal in an oblique way relative to the wafer carrying surface of the pedestal.
    Type: Grant
    Filed: September 17, 2018
    Date of Patent: September 10, 2019
    Assignee: PIOTECH CO., LTD.
    Inventors: Ren Zhou, Xuyen Pham, Shichai Fang
  • Publication number: 20190096736
    Abstract: The invention discloses a support structure for a wafer pedestal; particularly the wafer pedestal has a wafer carrying surface defining holes for accommodation of the support structure. The support structure includes a first surface and extends therebetween. The first surface includes a rising portion for supporting wafer. A center of the first surface and a center of the second surface define an axis that is not parallel to the normal of the first surface. That is, the first surface extends oblique relatively to the second surface such that the support structure according to the invention can be received in the pedestal in an oblique way relative to the wafer carrying surface of the pedestal.
    Type: Application
    Filed: September 17, 2018
    Publication date: March 28, 2019
    Inventors: Ren Zhou, Xuyen Pham, Shichai Fang
  • Publication number: 20170271187
    Abstract: Disclosed is a load lock chamber which includes a chamber body including: at least one pair of cavities, defined in a layer structure of the chamber body to carry one or more wafer substrates; at least one internal conduit, defined between and coupled with the paired cavities, such that the paired cavities are communicated with each other and capable of conducting gas refilling and exhaustion; and a plurality of wafer supports for carrying the wafer substrates, the plurality of wafer supports being securely received in the paired cavities and able to calibrate with a machine arm frontend finger, wherein the wafer support includes grooves defined thereon for calibrating the machine arm frontend finger.
    Type: Application
    Filed: September 16, 2016
    Publication date: September 21, 2017
    Inventors: Ren ZHOU, Xuyen Pham, Brian Lu, Sean Chang, Shicai Fang, Jie Lian, Enguo Men
  • Patent number: 9108846
    Abstract: Provided is a method for preparing sulfuric acid by using hydrogen sulfide. The method comprises the following steps: (1) performing a reduction-oxidation reaction between an H2S feed gas and oxygen to prepare SO2; (2) cooling the product acquired in step (1) to a temperature between 390° C. and 430° C., then performing a catalyzed oxidation reaction with oxygen; and (3) cooling the product acquired in step (2), then further cooling to a temperature between 60° C. and 120° C., collecting H2SO4 product. Also provided is a heat exchanger, comprising a housing and several glass pipes arranged within the housing along the direction of a long axis of the housing, arching between two lateral walls thereof; the adjacent glass pipes are connected head-to-tail. The method provides great hydrogen sulfide removal efficiency, simple process flow, and allows for economic efficiency of apparatus and reasonable utilization of energy.
    Type: Grant
    Filed: June 29, 2012
    Date of Patent: August 18, 2015
    Assignee: Shanghai Keyontechs Co., Ltd.
    Inventors: Ren Zhou, Rui Huang
  • Patent number: 9101772
    Abstract: A method of stimulation therapy and an apparatus for providing the therapy which addresses cardiac dysfunction including heart failure. The therapy employs atrial pacing pulses delivered to a heart after the atrial refractory period and timed so that they will not cause a ventricular contraction. These atrial pacing are timed to achieve beneficial effects on myocardial mechanics (efficacy) while maintaining an extremely low level of risk of arrhythmia induction. These methods may be employed individually or in combinations in an external or implantable ESS therapy delivery device.
    Type: Grant
    Filed: December 9, 2009
    Date of Patent: August 11, 2015
    Assignee: Medtronic, Inc.
    Inventors: Karen J. Kleckner, Kathleen A. Prieve, Jeffrey M. Gillberg, Ren Zhou, Kenneth M. Anderson, D. Curtis Deno, Glenn C. Zillmer, Ruth N. Klepfer, Vincent E. Splett, David E. Euler, Lawrence J. Mulligan, Edwin G. Duffin, David A. Igel, John E. Burnes
  • Patent number: 8789493
    Abstract: An electrode assembly for a plasma reaction chamber used in semiconductor substrate processing having a backing member having a bonding surface, an inner electrode having a lower surface on one side and a bonding surface on the other side, and an outer electrode having a lower surface on one side and a bonding surface on the other side. At least one of the electrodes has a flange, which extends underneath at least a portion of the lower surface of the other electrode.
    Type: Grant
    Filed: February 13, 2006
    Date of Patent: July 29, 2014
    Assignee: Lam Research Corporation
    Inventors: Daxing Ren, Enrico Magni, Eric Lenz, Ren Zhou
  • Publication number: 20140205534
    Abstract: Provided is a method for preparing sulfuric acid by using hydrogen sulfide. The method comprises the following steps: (1) performing a reduction-oxidation reaction between an H2S feed gas and oxygen comprised in an oxygen-rich air to prepare SO2, controlling residual oxygen after the reduction-oxidation reaction step at a molar percentage of ?2%; (2) cooling the product acquired in step (1) to a temperature between 390° C. and 430° C., and then performing a catalyzed oxidation reaction with oxygen, wherein the catalyzed oxidation reaction is performed in stages until the conversion rate of SO2 is ?98.7% or the outlet concentration of SO2 is ?550 mg/Nm3; and (3) cooling the product acquired in step (2) to a temperature ?10° C. over the dew point temperature of H2SO4, then further cooling to a temperature between 60° C. and 120° C., collecting H2SO4 product, and subjecting the gas acquired after cooling to a coalescent separation before discharging directly into the atmosphere.
    Type: Application
    Filed: June 29, 2012
    Publication date: July 24, 2014
    Applicant: SHANGHAI KEYONTECHS CO., LTD.
    Inventors: Ren Zhou, Rui Huang
  • Publication number: 20120303084
    Abstract: The above-described methods and apparatus are believed to be of particular benefit for patients suffering heart failure including cardiac dysfunction, chronic HF, and the like and all variants as described herein and including those known to those of skill in the art to which the invention is directed. It will understood that the present invention offers the possibility of monitoring and therapy of a wide variety of acute and chronic cardiac dysfunctions. The current invention provides systems and methods for delivering therapy for cardiac hemodynamic dysfunction via the innervated myocardial substrate receives one or more discrete pulses of electrical stimulation during the refractory period of said innervated myocardial substrate.
    Type: Application
    Filed: August 8, 2012
    Publication date: November 29, 2012
    Applicant: Medtronic, Inc.
    Inventors: Karen J. Kleckner, Kathleen A. Prieve, Jeffrey M. Gillberg, Ren Zhou, Kenneth M. Anderson, D. Curtis Deno, Glenn C. Zillmer, Ruth N. Klepfer, Vincent E. Splett, David E. Euler, Lawrence J. Mulligan, Edwin G. Duffin, David A. Igel, John E. Burnes
  • Publication number: 20120116617
    Abstract: A method for providing traction control on a wheeled vehicle involves receiving a speed reference signal. A variance in wheel size between a first and at least one other wheel of the vehicle is determined. Lastly, a drive control signal operable to control power to each of the first and at least one other wheel is output, the drive control signal being based on the speed reference signal and determined variance in wheel size and operable to provide that a tractive force exerted by each of the wheels on a corresponding surface during traction and/or braking is substantially similar.
    Type: Application
    Filed: February 16, 2009
    Publication date: May 10, 2012
    Applicant: Schaffler IP Pty Limited
    Inventors: Bernard Schaffler, Ren Zhou
  • Publication number: 20100152804
    Abstract: The above-described methods and apparatus are believed to be of particular benefit for patients suffering heart failure including cardiac dysfunction, chronic HF, and the like and all variants as described herein and including those known to those of skill in the art to which the invention is directed. It will understood that the present invention offers the possibility of monitoring and therapy of a wide variety of acute and chronic cardiac dysfunctions. The current invention provides systems and methods for delivering therapy for cardiac hemodynamic dysfunction via the innervated myocardial substrate receives one or more discrete pulses of electrical stimulation during the refractory period of said innervated myocardial substrate.
    Type: Application
    Filed: December 9, 2009
    Publication date: June 17, 2010
    Applicant: Medtronic, Inc.
    Inventors: Karen J. Kleckner, Kathleen A. Prieve, Jeffrey M. Gillberg, Ren Zhou, Kenneth M. Anderson, D. Curtis Deno, Glenn C. Zillmer, Ruth N. Klepfer, Vincent E. Splett, David E. Euler, Lawrence J. Mulligan, Edwin G. Duffin, David A. Igel, John E. Burnes
  • Publication number: 20070299477
    Abstract: The above-described methods and apparatus are believed to be of particular benefit for patients suffering heart failure including cardiac dysfunction, chronic HF, and the like and all variants as described herein and including those known to those of skill in the art to which the invention is directed. It will understood that the present invention offers the possibility of monitoring and therapy of a wide variety of acute and chronic cardiac dysfunctions. The current invention provides systems and methods for delivering therapy for cardiac hemodynamic dysfunction via the innervated myocardial substrate receives one or more discrete pulses of electrical stimulation during the refractory period of said innervated myocardial substrate.
    Type: Application
    Filed: June 19, 2007
    Publication date: December 27, 2007
    Inventors: Karen Kleckner, Kathleen Prieve, Jeffrey Gillberg, Ren Zhou, Kenneth Anderson, D. Deno, Glenn Zillmer, Ruth Klepfer, Vincent Splett, David Euler, Lawrence Mulligan, Edwin Duffin, David Igel, John Burnes
  • Publication number: 20070187038
    Abstract: An electrode assembly for a plasma reaction chamber used in semiconductor substrate processing having a backing member having a bonding surface, an inner electrode having a lower surface on one side and a bonding surface on the other side, and an outer electrode having a lower surface on one side and a bonding surface on the other side. At least one of the electrodes has a flange, which extends underneath at least a portion of the lower surface of the other electrode.
    Type: Application
    Filed: February 13, 2006
    Publication date: August 16, 2007
    Inventors: Daxing Ren, Enrico Magni, Eric Lenz, Ren Zhou
  • Patent number: 7233824
    Abstract: An extra-systolic stimulation (ESS) therapy addresses cardiac dysfunction including heart failure. ESS therapy employs atrial and/or ventricular extra-systoles via pacing-level stimulation to a heart. These extra-systoles must be timed correctly to achieve beneficial effects on myocardial mechanics (efficacy) while maintaining an extremely low level of risk of arrhythmia induction and excellent ICD-like arrhythmia sensing and detection (security). The present invention relates to therapy delivery guidance and options for improved ESS therapy delivery. These methods may be employed individually or in combinations in an external or implantable ESS therapy delivery device.
    Type: Grant
    Filed: November 7, 2003
    Date of Patent: June 19, 2007
    Assignee: Medtronic, Inc.
    Inventors: Karen J. Kleckner, Kathleen A. Prieve, Jeffrey M. Gillberg, Ren Zhou, Kenneth M. Anderson, D. Curtis Deno, Glenn C. Zillmer, Ruth N. Klepfer, Vincent E. Splett