Patents by Inventor Richard A. Wachnik

Richard A. Wachnik has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10103083
    Abstract: A semiconductor structure comprises one or more semiconductor devices, each of the semiconductor devices having two or more electrical connections; one or more first conductors connected to a first electrical connection on the semiconductor device, the first conductor comprising a first material having a positive Seebeck coefficient; and one or more second conductors connected to a second electrical connection on the semiconductor device, the second conductor comprising a second material having a negative Seebeck coefficient. The first conductor and the second conductor conduct electrical current through the semiconductor device and conduct heat away from the semiconductor device.
    Type: Grant
    Filed: July 25, 2017
    Date of Patent: October 16, 2018
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Siyuranga O. Koswatta, Sungjae Lee, Lan Luo, Scott K. Springer, Richard A. Wachnik
  • Publication number: 20180053707
    Abstract: A semiconductor structure comprises one or more semiconductor devices, each of the semiconductor devices having two or more electrical connections; one or more first conductors connected to a first electrical connection on the semiconductor device, the first conductor comprising a first material having a positive Seebeck coefficient; and one or more second conductors connected to a second electrical connection on the semiconductor device, the second conductor comprising a second material having a negative Seebeck coefficient. The first conductor and the second conductor conduct electrical current through the semiconductor device and conduct heat away from the semiconductor device.
    Type: Application
    Filed: July 25, 2017
    Publication date: February 22, 2018
    Applicant: GLOBALFOUNDRIES INC.
    Inventors: Siyuranga O. Koswatta, Sungjae Lee, Lan Luo, Scott K. Springer, Richard A. Wachnik
  • Patent number: 9773717
    Abstract: A semiconductor structure comprises one or more semiconductor devices, each of the semiconductor devices having two or more electrical connections; one or more first conductors connected to a first electrical connection on the semiconductor device, the first conductor comprising a first material having a positive Seebeck coefficient; and one or more second conductors connected to a second electrical connection on the semiconductor device, the second conductor comprising a second material having a negative Seebeck coefficient. The first conductor and the second conductor conduct electrical current through the semiconductor device and conduct heat away from the semiconductor device.
    Type: Grant
    Filed: August 22, 2016
    Date of Patent: September 26, 2017
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Siyuranga O. Koswatta, Sungjae Lee, Lan Luo, Scott K. Springer, Richard A. Wachnik
  • Patent number: 9484246
    Abstract: A buried conductive layer is formed underneath a buried insulator layer of a semiconductor-on-insulator (SOI) substrate. A deep isolation trench laterally surrounding a portion of the buried conductive layer is formed, and is filled with at least a dielectric liner to form a deep capacitor trench isolation structure. Contact via structures are formed through the buried insulator layer and a top semiconductor layer and onto the portion of the buried conductive layer, which constitutes a buried conductive conduit. The deep capacitor trench isolation structure may be formed concurrently with at least one deep trench capacitor. A patterned portion of the top semiconductor layer may be employed as an additional conductive conduit for signal transmission. Further, the deep capacitor trench isolation structure may include a conductive portion, which can be electrically biased to control the impedance of the signal path including the buried conductive conduit.
    Type: Grant
    Filed: June 18, 2014
    Date of Patent: November 1, 2016
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Anthony I. Chou, Arvind Kumar, Sungjae Lee, Richard A. Wachnik
  • Patent number: 9240406
    Abstract: A capacitor structure can include a parallel connection of a plurality of trench capacitors. First nodes of the plurality of trench capacitors are electrically tied to provide a first node of the capacitor structure. Second nodes of the plurality of trench capacitors are electrically tied together through at least one programmable electrical connection at a second node of the capacitor structure. Each programmable electrical connection can include at least one of a programmable electrical fuse and a field effect transistor, and can disconnect a corresponding trench capacitor temporarily or permanently. The total capacitance of the capacitor structure can be tuned by programming, temporarily or permanently, the at least one programmable electrical connection.
    Type: Grant
    Filed: April 21, 2014
    Date of Patent: January 19, 2016
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Kai D. Feng, Dan Moy, Chengwen Pei, Robert R. Robison, Pinping Sun, Richard A. Wachnik, Ping-Chuan Wang
  • Publication number: 20150371893
    Abstract: A buried conductive layer is formed underneath a buried insulator layer of a semiconductor-on-insulator (SOI) substrate. A deep isolation trench laterally surrounding a portion of the buried conductive layer is formed, and is filled with at least a dielectric liner to form a deep capacitor trench isolation structure. Contact via structures are formed through the buried insulator layer and a top semiconductor layer and onto the portion of the buried conductive layer, which constitutes a buried conductive conduit. The deep capacitor trench isolation structure may be formed concurrently with at least one deep trench capacitor. A patterned portion of the top semiconductor layer may be employed as an additional conductive conduit for signal transmission. Further, the deep capacitor trench isolation structure may include a conductive portion, which can be electrically biased to control the impedance of the signal path including the buried conductive conduit.
    Type: Application
    Filed: June 18, 2014
    Publication date: December 24, 2015
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Anthony I. Chou, Arvind Kumar, Sungjae Lee, Richard A. Wachnik
  • Publication number: 20150303191
    Abstract: A capacitor structure can include a parallel connection of a plurality of trench capacitors. First nodes of the plurality of trench capacitors are electrically tied to provide a first node of the capacitor structure. Second nodes of the plurality of trench capacitors are electrically tied together through at least one programmable electrical connection at a second node of the capacitor structure. Each programmable electrical connection can include at least one of a programmable electrical fuse and a field effect transistor, and can disconnect a corresponding trench capacitor temporarily or permanently. The total capacitance of the capacitor structure can be tuned by programming, temporarily or permanently, the at least one programmable electrical connection.
    Type: Application
    Filed: April 21, 2014
    Publication date: October 22, 2015
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kai D. Feng, Dan Moy, Chengwen Pei, Robert R. Robison, Pinping Sun, Richard A. Wachnik, Ping-Chuan Wang
  • Patent number: 8809187
    Abstract: Contact with a floating body of an FET in SOI may be formed in a portion of one of the two diffusions of the FET, wherein the portion of the diffusion (such as N?, for an NFET) which is “sacrificed” for making the contact is a portion of the diffusion which is not immediately adjacent (or under) the gate. This works well with linked body FETs, wherein the diffusion does not extend all the way to BOX, hence the linked body (such as P?) extends under the diffusion where the contact is being made. An example showing making contact for ground to two NFETs (PG and PD) of a 6T SRAM cell is shown.
    Type: Grant
    Filed: September 14, 2012
    Date of Patent: August 19, 2014
    Assignee: International Business Machines Corporation
    Inventors: Yue Tan, Zhibin Ren, Richard A. Wachnik, Haining S. Yang
  • Publication number: 20140027851
    Abstract: Contact with a floating body of an FET in SOI may be formed in a portion of one of the two diffusions of the FET, wherein the portion of the diffusion (such as N?, for an NFET) which is “sacrificed” for making the contact is a portion of the diffusion which is not immediately adjacent (or under) the gate. This works well with linked body FETs, wherein the diffusion does not extend all the way to BOX, hence the linked body (such as P?) extends under the diffusion where the contact is being made. An example showing making contact for ground to two NFETs (PG and PD) of a 6T SRAM cell is shown.
    Type: Application
    Filed: September 14, 2012
    Publication date: January 30, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Yue Tan, Zhibin Ren, Richard A. Wachnik, Haining S. Yang
  • Patent number: 8338292
    Abstract: Contact with a floating body of an FET in SOI may be formed in a portion of one of the two diffusions of the FET, wherein the portion of the diffusion (such as N?, for an NFET) which is “sacrificed” for making the contact is a portion of the diffusion which is not immediately adjacent (or under) the gate. This works well with linked body FETs, wherein the diffusion does not extend all the way to BOX, hence the linked body (such as P?) extends under the diffusion where the contact is being made. An example showing making contact for ground to two NFETs (PG and PD) of a 6T SRAM cell is shown.
    Type: Grant
    Filed: February 17, 2010
    Date of Patent: December 25, 2012
    Assignee: International Business Machines Corporation
    Inventors: Yue Tan, Zhibin Ren, Richard A. Wachnik, Haining S. Yang
  • Patent number: 8020138
    Abstract: A method is provided for characterizing performance of a chip having at least one voltage island and at least one performance screen ring oscillator (PSRO). An on-chip performance monitor (OCPM) is incorporated on the voltage island. Performance measurements of the voltage island are generated with only the voltage island under power. Performance measurements of the performance screen ring oscillator (PSRO) are generated with only the voltage island under power. Performance measurements of the performance screen ring oscillator (PSRO) is compared to the performance measurements of the on-chip performance monitor (OCPM) to determine a systematic offset due to the voltage island. Performance models are adjusted using the systematic offset due to the voltage island.
    Type: Grant
    Filed: June 2, 2008
    Date of Patent: September 13, 2011
    Assignee: International Business Machines Corporation
    Inventors: Bruce Balch, Nazmul Habib, Susan K. Lichtensteiger, Daniel L. Stasiak, Richard A. Wachnik
  • Patent number: 7989922
    Abstract: An array of deep trenches is formed in a doped portion of the semiconductor substrate, which forms a lower electrode. A dielectric layer is formed on the sidewalls of the array of deep trenches. The array of deep trenches is filled with a doped semiconductor material to form an upper electrode comprising a top plate portion and a plurality of extension portions into the array of trenches. In a depletion mode, the bias condition across the dielectric layer depletes majority carriers within the top electrode, thus providing a low capacitance. In an accumulation mode, the bias condition attracts majority carriers toward the dielectric layer, providing a high capacitance. Thus, the trench metal-oxide-semiconductor (MOS) varactor provides a variable capacitance depending on the polarity of the bias.
    Type: Grant
    Filed: February 8, 2008
    Date of Patent: August 2, 2011
    Assignee: International Business Machines Corporation
    Inventors: Randy W. Mann, Jae-Eun Park, Richard A. Wachnik
  • Publication number: 20100207213
    Abstract: Contact with a floating body of an FET in SOI may be formed in a portion of one of the two diffusions of the FET, wherein the portion of the diffusion (such as N?, for an NFET) which is “sacrificed” for making the contact is a portion of the diffusion which is not immediately adjacent (or under) the gate. This works well with linked body FETs, wherein the diffusion does not extend all the way to BOX, hence the linked body (such as P?) extends under the diffusion where the contact is being made. An example showing making contact for ground to two NFETs (PG and PD) of a 6T SRAM cell is shown.
    Type: Application
    Filed: February 17, 2010
    Publication date: August 19, 2010
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Yue Tan, Zhibin Ren, Richard A. Wachnik, Haining S. Yang
  • Publication number: 20090295402
    Abstract: A method is provided for characterizing performance of a chip having at least one voltage island and at least one performance screen ring oscillator (PSRO). An on-chip performance monitor (OCPM) is incorporated on the voltage island. Performance measurements of the voltage island are generated with only the voltage island under power. Performance measurements of the performance screen ring oscillator (PSRO) are generated with only the voltage island under power. Performance measurements of the performance screen ring oscillator (PSRO) is compared to the performance measurements of the on-chip performance monitor (OCPM) to determine a systematic offset due to the voltage island. Performance models are adjusted using the systematic offset due to the voltage island.
    Type: Application
    Filed: June 2, 2008
    Publication date: December 3, 2009
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Bruce Balch, Nazmul Habib, Susan K. Lichtensteiger, Daniel L. Stasiak, Richard A. Wachnik
  • Patent number: 7470613
    Abstract: A method for forming an interconnect structure, the interconnect structure comprising: a lower level wire having a side and a bottom, the lower level wire comprising: a lower core conductor and a lower conductive liner, the lower conductive liner on the side and the bottom of the lower level wire; an upper level wire having a side and a bottom, the upper level wire comprising an upper core conductor and an upper conductive liner, the upper conductive liner on the side and the bottom of the upper level wire; and the upper conductive liner in contact with the lower core conductor and also in contact with the lower conductive liner in a liner-to-liner contact region.
    Type: Grant
    Filed: January 4, 2007
    Date of Patent: December 30, 2008
    Assignee: International Business Machines Corporation
    Inventors: Birendra N. Agarwala, Eric M. Coker, Anthony Correale, Jr., Hazara S. Rathore, Timothy D. Sullivan, Richard A. Wachnik
  • Patent number: 7224063
    Abstract: An interconnect structure, comprising: a lower level wire having a side and a bottom, the lower level wire comprising: a lower core conductor and a lower conductive liner, the lower conductive liner on the side and the bottom of the lower level wire; an upper level wire having a side and a bottom, the upper level wire comprising an upper core conductor and an upper conductive liner, the upper conductive liner on the side and the bottom of the upper level wire; and the upper conductive liner in contact with the lower core conductor and also in contact with the lower conductive liner in a liner-to-liner contact region.
    Type: Grant
    Filed: June 1, 2001
    Date of Patent: May 29, 2007
    Assignee: International Business Machines Corporation
    Inventors: Birendra N. Agarwala, Eric M. Coker, Anthony Correale, Jr., Hazara S. Rathore, Timothy D. Sullivan, Richard A. Wachnik
  • Publication number: 20070111510
    Abstract: An interconnect structure, comprising: a lower level wire having a side and a bottom, the lower level wire comprising: a lower core conductor and a lower conductive liner, the lower conductive liner on the side and the bottom of the lower level wire; an upper level wire having a side and a bottom, the upper level wire comprising an upper core conductor and an upper conductive liner, the upper conductive liner on the side and the bottom of the upper level wire; and the upper conductive liner in contact with the lower core conductor and also in contact with the lower conductive liner in a liner-to-liner contact region.
    Type: Application
    Filed: January 4, 2007
    Publication date: May 17, 2007
    Inventors: Birendra Agarwala, Eric Coker, Anthony Correale, Hazara Rathore, Timothy Sullivan, Richard Wachnik
  • Publication number: 20060157788
    Abstract: The present invention generally concerns fabrication methods and device architectures for use in memory circuits, and more particularly concerns hybrid silicon-on-insulator (SOI) and bulk architectures for use in memory circuits. Once aspect of the invention concerns CMOS SRAM cell architectures where at least one pair of adjacent NFETs in an SRAM cell have body regions linked by a leakage path diffusion region positioned beneath shallow source/drain diffusions, where the leakage path diffusion region extends from the bottom of the source/drain diffusion to the buried oxide layer, and at least one pair of NFETs from adjacent SRAM cells which have body regions linked by a similar leakage path diffusion region beneath adjacent source/drain diffusions.
    Type: Application
    Filed: January 19, 2005
    Publication date: July 20, 2006
    Applicant: International Business Machines Corporation
    Inventors: Rajiv Joshi, Richard Wachnik, Yue Tan, Kerry Bernstein
  • Publication number: 20050086628
    Abstract: A method for analyzing circuit designs includes discretizing a design representation into pixel elements representative of a structure in the design and determining at least one property for each pixel element representing a portion of the design. Then, a response of the design is determined due to local properties across the design.
    Type: Application
    Filed: October 16, 2003
    Publication date: April 21, 2005
    Inventors: Ronald Filippi, Giovanni Fiorenza, Xiao Liu, Conal Murray, Gregory Northrop, Thomas Shaw, Richard Wachnik, Mary Yvonne Wisniewski
  • Patent number: 6531759
    Abstract: An integrated circuit, comprising: a semiconductor substrate, a plurality of last metal conductors disposed above said substrate, a bottom metallic layer disposed on said last metal conductors, a top metallic layer, and an alpha absorber disposed between said bottom and top metallic layers, said alpha absorber consisting essentially of a high-purity metal which is an alpha-particle absorber. The metal is, for example, of Ta, W, Re, Os or Ir.
    Type: Grant
    Filed: February 6, 2001
    Date of Patent: March 11, 2003
    Assignee: International Business Machines Corporation
    Inventors: Richard A. Wachnik, Henry A. Nye, III, Charles R. Davis, Theodore H. Zabel, Phillip J. Restle