Patents by Inventor Richard J. Phillips

Richard J. Phillips has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10781532
    Abstract: Methods for forming single crystal silicon ingots with improved resistivity control. The methods involve growth and resistivity measurement of a sample rod. The sample rod may have a diameter less than the diameter of the product ingot. The resistivity of the sample rod may be measured directly by contacting a resistivity probe with a planar segment formed on the sample rod. The sample rod may be annealed in a thermal donor kill cycle prior to measuring the resistivity.
    Type: Grant
    Filed: June 27, 2018
    Date of Patent: September 22, 2020
    Assignee: GlobalWafers Co., Ltd.
    Inventors: Carissima Marie Hudson, JaeWoo Ryu, Richard J. Phillips, Robert Standley, HyungMin Lee, YoungJung Lee
  • Publication number: 20200208294
    Abstract: Methods for forming single crystal silicon ingots with improved resistivity control are disclosed. The methods involve growth of a sample rod. The sample rod may have a diameter less than the diameter of the product ingot. The sample rod is cropped to form a center slab. The resistivity of the center slab may be measured directly such as by a four-point probe. The sample rod or optionally the center slab may be annealed in a thermal donor kill cycle prior to measuring the resistivity, and the annealed rod or slab is irradiated with light in order to enhance the relaxation rate and enable more rapid resistivity measurement.
    Type: Application
    Filed: December 11, 2019
    Publication date: July 2, 2020
    Inventors: Carissima Marie Hudson, HyungMin Lee, JaeWoo Ryu, Richard J. Phillips, Robert Wendell Standley
  • Patent number: 10557213
    Abstract: A system for growing a crystal ingot from a melt includes a crucible assembly configured to contain the melt and a susceptor configured to support the crucible assembly. The crucible assembly includes a substantially transparent crucible. The system further includes a heating system for generating thermal energy and disposed to supply thermal energy to the susceptor via thermal radiation. The susceptor enables transfer of thermal energy to the melt via radiation through the transparent crucible.
    Type: Grant
    Filed: March 14, 2018
    Date of Patent: February 11, 2020
    Assignee: GLOBALWAFERS CO., LTD.
    Inventors: Richard J. Phillips, Soubir Basak, Gaurab Samanta
  • Publication number: 20200002835
    Abstract: Methods for forming single crystal silicon ingots with improved resistivity control. The methods involve growth and resistivity measurement of a sample rod. The sample rod may have a diameter less than the diameter of the product ingot. The resistivity of the sample rod may be measured directly by contacting a resistivity probe with a planar segment formed on the sample rod. The sample rod may be annealed in a thermal donor kill cycle prior to measuring the resistivity.
    Type: Application
    Filed: June 27, 2018
    Publication date: January 2, 2020
    Inventors: Carissima Marie Hudson, JaeWoo Ryu, Richard J. Phillips, Robert Standley, HyungMin Lee, YoungJung Lee
  • Publication number: 20200002836
    Abstract: Methods for forming single crystal silicon ingots with improved resistivity control. The methods involve growth and resistivity measurement of a sample rod. The sample rod may have a diameter less than the diameter of the product ingot. The resistivity of the sample rod may be measured directly by contacting a resistivity probe with a planar segment formed on the sample rod. The sample rod may be annealed in a thermal donor kill cycle prior to measuring the resistivity.
    Type: Application
    Filed: June 27, 2018
    Publication date: January 2, 2020
    Inventors: Carissima Marie Hudson, JaeWoo Ryu, Richard J. Phillips, Robert Standley, HyungMin Lee, YoungJung Lee
  • Patent number: 10407797
    Abstract: A system for forming an ingot from a melt includes a first crucible defining a cavity for receiving the melt and a second crucible in the cavity. The second crucible separates an outer zone from an inner zone. The second crucible includes a passageway therethrough to allow the melt located within the outer zone to move into the inner zone. The inner zone defines a growth area for the ingot. The system also includes a barrier located within the outer zone to limit movement of the melt through the outer zone. The barrier includes members that are arranged to define a labyrinth for melt flow.
    Type: Grant
    Filed: May 4, 2017
    Date of Patent: September 10, 2019
    Assignee: Corner Start Limited
    Inventors: Salvador Zepeda, Richard J. Phillips, Christopher Vaughn Luers
  • Publication number: 20190153615
    Abstract: Systems and methods for forming an ingot from a melt are disclosed. A method includes placing conditioning members within a cavity defined by a crucible and placing feedstock material into the cavity. The method also includes melting the feedstock material to form the melt. A melt line is defined by a surface of the melt. The conditioning members including quartz bodies arranged at the melt line to contact the melt and reduce the number of micro-voids in the melt.
    Type: Application
    Filed: January 17, 2019
    Publication date: May 23, 2019
    Inventors: Salvador Zepeda, Richard J. Phillips, Christopher Vaughn Luers, Steven Lawrence Kimbel, Harold W. Korb, John D. Holder, Carissima Marie Hudson, Hariprasad Sreedharamurthy, Stephan Haringer, Marco Zardoni
  • Patent number: 10221500
    Abstract: Systems and methods for forming an ingot from a melt are disclosed. A system includes a crucible defining a cavity for receiving the melt, and a first and second barrier to inhibit movement of the melt. A first passageway and a second passageway are arranged to allow the melt located within an outer zone to move into and through a transition zone and into an inner zone. Conditioning members are placed in at least one of the zones and arranged to contact the melt to reduce the number of micro-voids in the melt.
    Type: Grant
    Filed: January 4, 2017
    Date of Patent: March 5, 2019
    Assignee: Corner Star Limited
    Inventors: Salvador Zepeda, Richard J. Phillips, Christopher Vaughn Luers, Steven Lawrence Kimbel, Harold W. Korb, John D. Holder, Carissima Marie Hudson, Hariprasad Sreedharamurthy, Stephan Haringer, Marco Zardoni
  • Publication number: 20180320287
    Abstract: A system for forming an ingot from a melt includes a first crucible defining a cavity for receiving the melt and a second crucible in the cavity. The second crucible separates an outer zone from an inner zone. The second crucible includes a passageway therethrough to allow the melt located within the outer zone to move into the inner zone. The inner zone defines a growth area for the ingot. The system also includes a barrier located within the outer zone to limit movement of the melt through the outer zone. The barrier includes members that are arranged to define a labyrinth for melt flow.
    Type: Application
    Filed: May 4, 2017
    Publication date: November 8, 2018
    Inventors: Salvador Zepeda, Richard J. Phillips, Christopher Vaughn Luers
  • Publication number: 20180291524
    Abstract: Methods for growing single crystal ingots doped with volatile dopants and ingots grown according to the methods are described herein.
    Type: Application
    Filed: April 29, 2016
    Publication date: October 11, 2018
    Inventors: Soubir Basak, Gaurab Samanta, Salvador Zepeda, Christopher V. Luers, Steven L. Kimbel, Carissima Marie Hudson, Hariprasad Sreedharamurthy, Roberto Scala, Richard J. Phillips, Tirumani N. Swaminathan, Jihong Chen, Stephen Wayne Palmore, Peter Drury Wildes
  • Patent number: 10066314
    Abstract: A system for growing a crystal ingot from a melt includes a crucible assembly configured to contain the melt and a susceptor configured to support the crucible assembly. The crucible assembly includes a substantially transparent crucible. The system further includes a heating system for generating thermal energy and disposed to supply thermal energy to the susceptor via thermal radiation. The susceptor enables transfer of thermal energy to the melt via radiation through the transparent crucible.
    Type: Grant
    Filed: July 21, 2016
    Date of Patent: September 4, 2018
    Assignee: GlobalWafers Co., Ltd.
    Inventors: Richard J. Phillips, Soubir Basak, Gaurab Samanta
  • Publication number: 20180202065
    Abstract: A system for growing a crystal ingot from a melt includes a crucible assembly configured to contain the melt and a susceptor configured to support the crucible assembly. The crucible assembly includes a substantially transparent crucible. The system further includes a heating system for generating thermal energy and disposed to supply thermal energy to the susceptor via thermal radiation. The susceptor enables transfer of thermal energy to the melt via radiation through the transparent crucible.
    Type: Application
    Filed: March 14, 2018
    Publication date: July 19, 2018
    Inventors: Richard J. Phillips, Soubir Basak, Gaurab Samanta
  • Publication number: 20180187329
    Abstract: Systems and methods for forming an ingot from a melt are disclosed. A system includes a crucible defining a cavity for receiving the melt, and a first and second barrier to inhibit movement of the melt. A first passageway and a second passageway are arranged to allow the melt located within an outer zone to move into and through a transition zone and into an inner zone. Conditioning members are placed in at least one of the zones and arranged to contact the melt to reduce the number of micro-voids in the melt.
    Type: Application
    Filed: January 4, 2017
    Publication date: July 5, 2018
    Inventors: Salvador Zepeda, Richard J. Phillips, Christopher Vaughn Luers, Steven Lawrence Kimbel, Harold W. Korb, John D. Holder, Carissima Marie Hudson, Hariprasad Sreedharamurthy, Stephan Haringer, Marco Zardoni
  • Publication number: 20180179660
    Abstract: Methods for forming single crystal silicon ingots with improved resistivity control and, in particular, methods that involve gallium or indium doping are disclosed. In some embodiments, the ingots are characterized by a relatively high resistivity.
    Type: Application
    Filed: December 27, 2017
    Publication date: June 28, 2018
    Inventors: Richard J. Phillips, Parthiv Daggolu, Eric Gitlin, Robert Standley, HyungMin Lee, Nan Zhang, Jae-Woo Ryu, Soubir Basak
  • Publication number: 20170022631
    Abstract: A system for growing a crystal ingot from a melt includes a crucible assembly configured to contain the melt and a susceptor configured to support the crucible assembly. The crucible assembly includes a substantially transparent crucible. The system further includes a heating system for generating thermal energy and disposed to supply thermal energy to the susceptor via thermal radiation. The susceptor enables transfer of thermal energy to the melt via radiation through the transparent crucible.
    Type: Application
    Filed: July 21, 2016
    Publication date: January 26, 2017
    Inventors: Richard J. Phillips, Soubir Basak, Gaurab Samanta
  • Patent number: 9458551
    Abstract: Silicon nitride coated crucibles for holding melted semiconductor material and for use in preparing multicrystalline silicon ingots by a directional solidification process; methods for coating crucibles; methods for preparing silicon ingots and wafers; compositions for coating crucibles and silicon ingots and wafers with a low oxygen content.
    Type: Grant
    Filed: July 16, 2010
    Date of Patent: October 4, 2016
    Assignee: MEMC Singapore Pte. Ltd.
    Inventors: Richard J. Phillips, Steven L. Kimbel, Aditya J. Deshpande, Gang Shi
  • Patent number: 8857214
    Abstract: Methods for producing crucibles for holding molten material that contain a reduced amount of gas pockets are disclosed. The methods may involve use of molten silica that may be outgassed prior to or during formation of the crucible. Crucibles produced from such methods and ingots and wafers that are produced from crucibles with a reduced amount of gas pockets are also disclosed.
    Type: Grant
    Filed: November 18, 2011
    Date of Patent: October 14, 2014
    Assignee: SunEdison Semiconductor Limited
    Inventors: Steven L. Kimbel, Harold W. Korb, Richard J. Phillips, Shailendra B. Rathod
  • Publication number: 20140182511
    Abstract: A susceptor for supporting a crucible includes a body with an interior surface defining a cavity. A coating is disposed on the interior surface to provide a barrier for preventing contact between the body of the susceptor and the crucible disposed within the cavity.
    Type: Application
    Filed: December 26, 2013
    Publication date: July 3, 2014
    Inventors: Shailendra B. Rathod, Richard J. Phillips
  • Publication number: 20140174338
    Abstract: A method of bonding a first silica part to a second silica part includes coating contacting surfaces of the first and second silica parts with a solution having one of silica and silica precursors. The coated surfaces of the first silica part are placed adjacent to the coated surfaces of the second silica part to form an assembly, and the assembly is heated.
    Type: Application
    Filed: December 19, 2013
    Publication date: June 26, 2014
    Inventors: Richard J. Phillips, Shailendra B. Rathod
  • Patent number: 8691008
    Abstract: Pulling systems are disclosed for measuring the weight of an object coupled to a first end of a cable. The cable is routed over a pulley suspended from a load cell. The force exerted by the cable on the pulley is used to calculate the weight of the object. The second end of the cable is coupled to a drum which when rotated pulls the object by wrapping the cable around the drum. An arm is coupled to the pulley at one end and to a frame at another end. A path travelled by the cable between the pulley and the drum is substantially parallel to a longitudinal axis of the arm. Horizontal force components are transmitted by the arm to the frame and do not affect a force component measured by the load cell, thus increasing the accuracy of the calculated weight of the object.
    Type: Grant
    Filed: March 18, 2010
    Date of Patent: April 8, 2014
    Assignee: MEMC Electronic Materials, Inc.
    Inventors: Harold Korb, Richard J. Phillips