Publication number: 20090039336
Abstract: The performance of a semiconductor device capable of storing information is improved. A memory layer of a memory element is formed by a first layer at a bottom electrode side and a second layer at a top electrode side. The first layer contains 20-70 atom % of at least one element of a first element group of Cu, Ag, Au, Al, Zn, and Cd, contains 3-40 atom % of at least one element of a second element group of V, Nb, Ta, Cr, Mo, W, Ti, Zr, Hf, Fe, Co, Ni, Pt, Pd, Rh, Ir, Ru, Os, and lanthanoid elements, and contains 20-60 atom % of at least one element of a third element group of S, Se, and Te. The second layer contains 5-50 atom % of at least one element of the first element group, 10-50 atom % of at least one element of the second element group, and 30-70 atom % of oxygen.
Type:
Application
Filed:
July 21, 2008
Publication date:
February 12, 2009
Inventors:
Motoyasu Terao, Yoshitaka Sasago, Kenzo Kurotsuchi, Kazuo Ono, Yoshihisa Fujisaki, Norikatsu Takaura, Riichiro Takemura