Abstract: A vibration control system comprising an actuator, and a sensor useful for controlling vibrations in systems for fabricating electronics equipment. The actuator may comprise one or more plates or elements of electro-active material bonded to an electroded sheet.

Abstract: An apparatus and method for EUV light production is disclosed which may comprise a laser produced plasma (“LPP”) extreme ultraviolet (“EUV”) light source control system comprising a target delivery system adapted to deliver moving plasma initiation targets and an EUV light collection optic having a focus defining a desired plasma initiation site, comprising: a target tracking and feedback system comprising: at least one imaging device providing as an output an image of a target stream track, wherein the target stream track results from the imaging speed of the camera being too slow to image individual plasma formation targets forming the target stream imaged as the target stream track; a stream track error detector detecting an error in the position of the target stream track in at least one axis generally perpendicular to the target stream track from a desired stream track intersecting the desired plasma initiation site.

Abstract: A multi-chambered excimer or molecular halogen gas discharge laser system comprising at least one oscillator chamber and at least one amplifier chamber producing oscillator output laser light pulses that are amplified in the at least one power chamber, having a fluorine injection control system and a method of using same is disclosed, which may comprise: a halogen gas consumption estimator: estimating the amount of halogen gas that has been consumed in one of the at least one oscillator chamber based upon at least a first operating parameter of one of the least one oscillator chamber and the at least one amplifier chamber, and the difference between a second operating parameter of the at least one oscillator chamber and the at least one amplifier chamber, and estimating the amount of halogen gas that has been consumed in the other of the at least one oscillator chamber and the at least one amplifier chamber based upon at least a third operating parameter of the other of the at least one oscillator chamber and

Abstract: An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to model lithographic parameters to determine a desired laser spectrum needed to produce a desired lithographic result. A fast responding tuning mechanism is then used to adjust center wavelength of laser pulses in a burst of pulses to achieve an integrated spectrum for the burst of pulses approximating the desired laser spectrum. The laser beam bandwidth is controlled to produce an effective beam spectrum having at least two spectral peaks in order to produce improved pattern resolution in photo resist film. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection control system having a time response of less than about 2.0 millisecond.

Abstract: An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to model lithographic parameters to determine a desired laser spectrum needed to produce a desired lithographic result. A fast responding tuning mechanism is then used to adjust center wavelength of laser pulses in a burst of pulses to achieve an integrated spectrum for the burst of pulses approximating the desired laser spectrum. The laser beam bandwidth is controlled to produce an effective beam spectrum having at least two spectral peaks in order to produce improved pattern resolution in photo resist film. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection control system having a time response of less than about 2.0 millisecond.

Abstract: The invention is directed to acquiring and processing parameters used to adjust and tune a controller used, for example, to govern and compensate for motion, including vibrations and disturbances, in a physical system, such as a piece of manufacturing equipment. The invention may also be used to control, for example, a robot or other spatially dependent machine. Included in the invention are systems and methods for generating a controller, and for controlling motion in a physical system or apparatus.

Abstract: A motion control system is provided which optimizes the desired motion of a structure being controlled by the system. The system may be used in conjunction with existing structural control systems, or replace such structural control systems entirely. Optimization of a desired motion occurs by applying a mathematical controller to a theoretical desired motion, the controller optimizing the desired motion by taking into account one or more state parameters.

Abstract: A port closure and method of installing the same. The port closure includes, in combination, a tank, a closure member and an actuator. The tank has defining walls, an exterior surface, an interior surface, an interior cavity and an access port. The closure member is disposed within the interior cavity of the tank. The closure member has an access port engaging face that is larger than a cross-sectional area of the access port. The actuator is coupled with the closure member and moves the closure member between a first position in which the access port engaging face closes the access port and a second position laterally spaced from the access port.

Abstract: A port closure is a combination which includes a tank, a closure member and an actuator. The tank has defining walls, an exterior surface, an interior surface, an interior cavity and an access port. The closure member is disposed within the interior cavity of the tank. The closure member has an access port engaging face that is larger than a cross-sectional area of the access port. The actuator is coupled with the closure member and moves the closure member between a first position in which the access port engaging face closes the access port and a second position laterally spaced from the access port.

Abstract: A paint spray rig is disclosed for applying "high gain" reflective paints to a motion picture projection screen. The rig includes a tower which extends vertically of the screen and which can be indexed laterally across the screen. A paint spray head is carried by a carriage assembly that is vertically movable on a tower. The spray head can be moved towards and away from the screen under the control of ultrasonic sensors that measure the distance between the spray head and the screen, for maintaining the distance substantially constant. The spray head can also be moved progressively in the vertical direction with respect to the carriage so that it is at the bottom of the carriage for painting the bottom edge of the screen and at the top of the carriage for painting the top edge of the screen. The spray head can also be swapped from one side of the carriage to the other for painting opposite side edge portions of the screen.

Abstract: The present invention relates to a process for reducing and/or removing inorganic matter from a material containing inorganic matter which comprises the steps of:(i) (a) treating the material with a source of hydrogen fluoride so as to form a first residue and a first solution containing inorganic matter;(b) separating the first residue from the first solution containing the inorganic matter;(c) treating the first residue with an acid so as to form a second residue and a second solution containing further inorganic matter; and(d) separating the second residue from the second solution containing the further inorganic matter; or(ii) (a) treating the material with an acid so as to form a first residue and a first solution containing inorganic matter;(b) separating the first residue from the first solution containing the inorganic matter;(c) treating the first residue with a source of hydrogen fluoride so as to form a second residue and a second solution containing further inorganic matter; and(d) separating the