Patents by Inventor Robert B. Hammond
Robert B. Hammond has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11967945Abstract: Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a substrate and a single-crystal piezoelectric plate. A back surface of a supported portion of the piezoelectric plate is attached to a surface of the substrate. A portion of the piezoelectric plate forms a diaphragm that spans a cavity in the substrate. An interdigital transducer (IDT) is formed on a front surface of the piezoelectric plate. The IDT includes first and second busbars, and interleaved fingers extending alternately from the first and second busbars. Overlapping portions of the interleaved fingers are disposed on the diaphragm. At least portions of both the first and second busbars are disposed on the supported portion of the piezoelectric plate.Type: GrantFiled: December 2, 2020Date of Patent: April 23, 2024Assignee: MURATA MANUFACTURING CO., LTD.Inventors: Viktor Plesski, Soumya Yandrapalli, Robert B. Hammond, Bryant Garcia, Patrick Turner, Jesson John, Ventsislav Yantchev
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Patent number: 11942922Abstract: Acoustic resonator devices and acoustic filter devices. An acoustic resonator includes a piezoelectric plate having front and back surfaces, a portion of the piezoelectric plate forming a diaphragm, and a conductor pattern on the front surface, the conductor pattern comprising an interdigital transducer (IDT), interleaved fingers of the IDT on the diaphragm. A ratio of a mark of the interleaved fingers to a pitch of the interleaved fingers is greater than or equal to 0.12 and less than or equal to 0.3. A thickness of the interleaved fingers is greater than or equal to 0.85 times a thickness of the piezoelectric plate and less than or equal to 2.5 times the thickness of the piezoelectric plate.Type: GrantFiled: March 16, 2022Date of Patent: March 26, 2024Assignee: MURATA MANUFACTURING CO., LTD.Inventors: Bryant Garcia, Ventsislav Yantchev, Patrick Turner, Viktor Plesski, Julius Koskela, Soumya Yandrapalli, Neal Fenzi, Robert B. Hammond
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Publication number: 20240097649Abstract: An acoustic wave device is provided that includes a piezoelectric layer and first and second resonators. The first resonator includes a first functional electrode and a first dielectric film on the piezoelectric layer. The second resonator includes a second functional electrode and a second dielectric film on the piezoelectric layer. The piezoelectric layer includes first and second resonator portions respectively including portions of the first and second resonators. Moreover, a resonant frequency of the first resonator is lower than that of the second resonator. A thickness of the first resonator portion is greater than that of the second resonator portion, and ts1/tp1?ts2/tp2 is satisfied, where tp1, tp2, ts1, and ts2 are respectively thicknesses of the first and second resonator portions and the first and second dielectric films.Type: ApplicationFiled: November 16, 2023Publication date: March 21, 2024Inventors: Sho NAGATOMO, Bryant GARCIA, Ventsislav YANTCHEV, Patrick TURNER, Robert B. HAMMOND, Douglas JACHOWSKI
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Patent number: 11929735Abstract: Acoustic resonator devices, filter devices, and methods of fabrication are disclosed. An acoustic resonator includes a substrate having a surface and a single-crystal piezoelectric plate having front and back surfaces. The back surface is attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. An interdigital transducer (IDT) is formed on the front surface of the single-crystal piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. The IDT is configured to excite a primary acoustic mode in the diaphragm in response to a radio frequency signal applied to the IDT. At least a portion of an edge of the diaphragm is at an oblique angle to the fingers.Type: GrantFiled: December 14, 2020Date of Patent: March 12, 2024Assignee: MURATA MANUFACTURING CO., LTD.Inventors: Ventsislav Yantchev, Patrick Turner, Viktor Plesski, Julius Koskela, Robert B. Hammond
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Patent number: 11929731Abstract: Acoustic resonators and filter devices. An acoustic resonator includes a piezoelectric plate having front and back surfaces, a portion of the piezoelectric plate forming a diaphragm, and a conductor pattern on the front surface, the conductor pattern including an interdigital transducer (IDT), interleaved fingers of the IDT on the diaphragm. A ratio of a mark of the interleaved fingers to a pitch of the interleaved fingers is greater than or equal to 0.12 and less than or equal to 0.3. The pitch of the interleaved fingers is greater than or equal to 6 times a thickness of the piezoelectric plate and less than or equal to 12.5 times the thickness of the piezoelectric plate.Type: GrantFiled: December 24, 2021Date of Patent: March 12, 2024Assignee: MURATA MANUFACTURING CO., LTD.Inventors: Bryant Garcia, Ventsislav Yantchev, Patrick Turner, Viktor Plesski, Julius Koskela, Soumya Yandrapalli, Neal Fenzi, Robert B. Hammond
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Publication number: 20240039506Abstract: Resonator devices are disclosed. An acoustic resonator device includes a piezoelectric plate having front and back surfaces, an acoustic Bragg reflector on the back surface, and an interdigital transducer (IDT) on the front surface. The acoustic Bragg reflector reflects a primary shear acoustic mode excited by the IDT in the piezoelectric plate over a frequency range including a resonance frequency and an anti-resonance frequency of the acoustic resonator device.Type: ApplicationFiled: October 16, 2023Publication date: February 1, 2024Inventors: Ventsislav Yantchev, Bryant Garcia, Viktor Plesski, Soumya Yandrapalli, Robert B. Hammond, Patrick Turner, Jesson John
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Patent number: 11888465Abstract: An acoustic filter includes a piezoelectric plate on a substrate. Portions of the piezoelectric plate form one or more diaphragms, each diaphragm spanning a respective cavity in the substrate. A conductor pattern on a front surface of the piezoelectric plate includes interdigital transducers (IDTs) of acoustic resonators including a shunt resonator and a series resonator. Interleaved fingers of each IDT are on a diaphragm of the one or more diaphragms. A first dielectric layer with a first thickness is between the fingers of the IDT of the shunt resonator, and a second dielectric layer with a second thickness less than the first thickness is between the fingers of the IDT of the series resonator. The piezoelectric plate and the IDTs are configured such that radio frequency signals applied to the IDTs excite respective primary shear acoustic modes within the diaphragms.Type: GrantFiled: August 20, 2021Date of Patent: January 30, 2024Assignee: Murata Manufacturing Co., Ltd.Inventors: Viktor Plesski, Soumya Yandrapalli, Robert B. Hammond, Bryant Garcia, Patrick Turner, Jesson John, Ventsislav Yantchev
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Publication number: 20240030892Abstract: Acoustic resonators and filter devices. An acoustic resonator includes a piezoelectric plate having front and back surfaces, a portion of the piezoelectric plate forming a diaphragm, and a conductor pattern on the front surface, the conductor pattern including an interdigital transducer (IDT), fingers of the IDT on the diaphragm. A thickness of the interleaved fingers is greater than or equal to 0.85 times a thickness of the piezoelectric plate and less than or equal to 2.5 times the thickness of the piezoelectric plate. The IDT comprises a first portion having a first pitch and a first mark and a second portion having a second pitch and a second mark not equal to the first pitch and first mark.Type: ApplicationFiled: September 29, 2023Publication date: January 25, 2024Inventors: Bryant GARCIA, Robert B. HAMMOND, Patrick TURNER, Viktor PLESSKI, Ventsislav YANTCHEV, Neal FENZI
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Publication number: 20240022234Abstract: Filter devices are disclosed. A filter device includes a piezoelectric plate comprising a supported portion, a first diaphragm, and a second diaphragm. The supported portion is attached to a substrate and the first and second diaphragms spans respective cavities in the substrate. A first interdigital transducer (IDT) has interleaved fingers on the first diaphragm. A second interdigital transducer (IDT) has interleaved fingers on the second diaphragm. A first dielectric layer is between the interleaved fingers of the first IDT, and a second dielectric layer is between the interleaved fingers of the second IDT. A thickness of the first dielectric layer is greater than a thickness of the second dielectric layer. The piezoelectric plate and the first and second IDTs are configured such that radio frequency signals applied to first and second IDTs excite primary shear acoustic modes in the respective diaphragms.Type: ApplicationFiled: September 28, 2023Publication date: January 18, 2024Inventors: Viktor PLESSKI, Soumya YANDRAPALLI, Robert B. HAMMOND, Bryant GARCIA, Patrick TURNER, Jesson JOHN, Ventsislav YANTCHEV
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Patent number: 11876498Abstract: Filter devices and methods are disclosed. A filter device includes a substrate and a piezoelectric plate attached to the substrate, the piezoelectric plate forming diaphragms spanning respective cavities in the substrate. A first portion of the piezoelectric plate has a first thickness. A front surface of a second portion of the piezoelectric plate is recessed relative to a front surface of the first portion of the piezoelectric plate such that the second portion of the piezoelectric plate has a second thickness less than the first thickness. A conductor pattern is formed on the front surfaces of the first and second portions of the piezoelectric plate. The conductor pattern includes a first interdigital transducer (IDT) with interleaved fingers on a diaphragm having the first thickness, and a second IDT with interleaved fingers on a diaphragm having the second thickness.Type: GrantFiled: June 17, 2021Date of Patent: January 16, 2024Assignee: MURATA MANUFACTURING CO., LTD.Inventors: Ventsislav Yantchev, Patrick Turner, Robert B. Hammond
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Patent number: 11870424Abstract: Filter devices are disclosed. A filter device includes a piezoelectric plate comprising a supported portion, a first diaphragm, and a second diaphragm. The supported portion is attached to a substrate and the first and second diaphragms spans respective cavities in the substrate. A first interdigital transducer (IDT) has interleaved fingers on the first diaphragm. A second interdigital transducer (IDT) has interleaved fingers on the second diaphragm. A first dielectric layer is between the interleaved fingers of the first IDT, and a second dielectric layer is between the interleaved fingers of the second IDT. A thickness of the first dielectric layer is greater than a thickness of the second dielectric layer. The piezoelectric plate and the first and second IDTs are configured such that radio frequency signals applied to first and second IDTs excite primary shear acoustic modes in the respective diaphragms.Type: GrantFiled: May 11, 2021Date of Patent: January 9, 2024Assignee: MURATA MANUFACTURING CO., LTD.Inventors: Viktor Plesski, Soumya Yandrapalli, Robert B. Hammond, Bryant Garcia, Patrick Turner, Jesson John, Ventsislav Yantchev
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Patent number: 11824520Abstract: Acoustic resonators and filter devices. An acoustic resonator includes a piezoelectric plate having front and back surfaces, a portion of the piezoelectric plate forming a diaphragm, and a conductor pattern on the front surface, the conductor pattern including an interdigital transducer (IDT), fingers of the IDT on the diaphragm. A thickness of the interleaved fingers is greater than or equal to 0.85 times a thickness of the piezoelectric plate and less than or equal to 2.5 times the thickness of the piezoelectric plate. The IDT comprises a first portion having a first pitch and a first mark and a second portion having a second pitch and a second mark not equal to the first pitch and first mark.Type: GrantFiled: December 28, 2021Date of Patent: November 21, 2023Assignee: MURATA MANUFACTURING CO., LTD.Inventors: Bryant Garcia, Robert B. Hammond, Patrick Turner, Viktor Plesski, Ventsislav Yantchev, Neal Fenzi
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Patent number: 11817840Abstract: Acoustic resonator devices, filter devices, and methods of fabrication are disclosed. An acoustic resonator includes a substrate having a surface and a single-crystal piezoelectric plate having front and back surfaces. The back surface is attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. An interdigital transducer (IDT) is formed on the front surface of the single-crystal piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. The IDT is configured to excite a primary acoustic mode in the diaphragm in response to a radio frequency signal applied to the IDT. At least a portion of an edge of the diaphragm is at an oblique angle to the fingers. The IDT includes a busbar disposed parallel to the edge of the diaphragm such that the interleaved fingers extend at the oblique angle from the busbar.Type: GrantFiled: December 14, 2020Date of Patent: November 14, 2023Assignee: MURATA MANUFACTURING CO., LTD.Inventors: Ventsislav Yantchev, Patrick Turner, Viktor Plesski, Julius Koskela, Robert B. Hammond
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Publication number: 20230336141Abstract: An acoustic wave device is provided that includes a cavity in a substrate, an overlapping region in which portions of adjacent first and second interdigitated electrodes oppose each other, a first gap region between a first busbar and the overlapping region and that includes the first interdigitated electrodes but not the second interdigitated electrodes, and a second gap region between a second busbar and the overlapping region and that includes the second interdigitated electrodes but not the first interdigitated electrodes. A ratio d/p is about 0.5 or less, where d is a thickness of the piezoelectric layer and p is a distance between centers of adjacent first and second interdigitated electrodes. A first wall of the cavity is located under the first busbar or the first gap region, and a second wall of the cavity is located under the second busbar or the second gap region.Type: ApplicationFiled: June 23, 2023Publication date: October 19, 2023Inventors: Tetsuya KIMURA, Ventsislav YANTCHEV, Patrick TURNER, Robert B. HAMMOND, Viktor PLESSKI, Soumya YANDRAPALLI, Bryant GARCIA, Jesson JOHN
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Publication number: 20230308072Abstract: An acoustic wave device is provided that includes a support substrate including top and bottom surfaces and a cavity or air gap, a piezoelectric layer supported by the support substrate and including top and bottom surfaces, and an electrode on a surface of the piezoelectric layer and including top and bottom surfaces. At least a portion of the electrode is over the cavity or the air gap, and an equation 0.002 Tg?0.5(Lb?Ls)<Te is satisfied, where Ls is a maximum length of the top surface of the electrode, Lb is a maximum length of the bottom surface of the electrode, Tg is a distance between the top surface of the piezoelectric layer and the top surface of the support substrate, and Te is a thickness of the electrode.Type: ApplicationFiled: June 2, 2023Publication date: September 28, 2023Inventors: Takashi YAMANE, Patrick TURNER, Ventsislav YANTCHEV, Bryant GARCIA, Robert B. HAMMOND
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Publication number: 20230261630Abstract: An acoustic wave device is provided that includes a piezoelectric layer including lithium niobate or lithium tantalate, and a series arm resonator and a parallel arm resonator that each include at least a pair of a first electrode and a second electrode on the piezoelectric layer. The acoustic wave device uses a bulk wave in a first thickness-shear mode. Moreover, a film thickness of a first portion of the piezoelectric layer in the series arm resonator is different from a film thickness of a second portion of the piezoelectric layer in the parallel arm resonator. In each of the series arm resonator and the parallel arm resonator, assuming a film thickness of the piezoelectric layer is d and a distance between centers of the first electrode and the second electrode adjacent to each other is p, a ratio d/p is less than or equal to about 0.5.Type: ApplicationFiled: April 21, 2023Publication date: August 17, 2023Inventors: Seiji KAI, Robert B. HAMMOND, Ventsislav YANTCHEV, Patrick TURNER
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Publication number: 20220393666Abstract: Filter devices are disclosed. A filter device includes a piezoelectric plate comprising a supported portion, a first diaphragm, and a second diaphragm. The supported portion is attached to a substrate and the first and second diaphragms spans respective cavities in the substrate. A first interdigital transducer (IDT) has interleaved fingers on the first diaphragm. A second interdigital transducer (IDT) has interleaved fingers on the second diaphragm. A first dielectric layer is between the interleaved fingers of the first IDT, and a second dielectric layer is between the interleaved fingers of the second IDT. A thickness of the first dielectric layer is greater than a thickness of the second dielectric layer. The piezoelectric plate and the first and second IDTs are configured such that radio frequency signals applied to first and second IDTs excite primary shear acoustic modes in the respective diaphragms.Type: ApplicationFiled: June 16, 2022Publication date: December 8, 2022Inventors: Viktor Plesski, Soumya Yandrapalli, Sean McHugh, Gregory L. Hey-Shipton, Garrett Williams, Ventsislav Yantchev, Andrew Guyette, Neal Fenzi, Jesson John, Bryant Garcia, Robert B. Hammond, Patrick Turner, Douglas Jachowski, Greg Dyer, Chris O'Brien, Andrew Kay, Albert Cardona, Dylan Kelly, Wei Yang, Marie Chantal Mukandatimana, Luke Myers
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Publication number: 20220376669Abstract: Methods of fabricating resonator and filter devices. A first conductor pattern formed on a front surface of a piezoelectric plate includes a first plurality of contact pads and an interdigital transducer (IDT). The IDT and the piezoelectric plate are configured such that a radio frequency signal applied to the IDT excites a shear primary acoustic mode within the piezoelectric plate. An acoustic Bragg reflector is between a substrate and a back surface of the piezoelectric plate, the acoustic Bragg reflector configured to reflect the shear primary acoustic mode. A second conductor pattern including a second plurality of contact pads is formed on a back surface of the interposer. The first plurality of contact pads is directly connected to respective contact pads of the second plurality of contact pads. A perimeter of the acoustic resonator chip is sealed to a perimeter of the interposer.Type: ApplicationFiled: November 7, 2021Publication date: November 24, 2022Inventors: Ventsislav Yantchev, Bryant Garcia, Viktor Plesski, Soumya Yandrapalli, Robert B. Hammond, Patrick Turner, Jesson John
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Publication number: 20220209740Abstract: Acoustic resonator devices and acoustic filter devices. An acoustic resonator includes a piezoelectric plate having front and back surfaces, a portion of the piezoelectric plate forming a diaphragm, and a conductor pattern on the front surface, the conductor pattern comprising an interdigital transducer (IDT), interleaved fingers of the IDT on the diaphragm. A ratio of a mark of the interleaved fingers to a pitch of the interleaved fingers is greater than or equal to 0.12 and less than or equal to 0.3. A thickness of the interleaved fingers is greater than or equal to 0.85 times a thickness of the piezoelectric plate and less than or equal to 2.5 times the thickness of the piezoelectric plate.Type: ApplicationFiled: March 16, 2022Publication date: June 30, 2022Inventors: Bryant Garcia, Ventsislav Yantchev, Patrick Turner, Viktor Plesski, Julius Koskela, Soumya Yandrapalli, Neal Fenzi, Robert B. Hammond
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Publication number: 20220149814Abstract: Acoustic resonators and filter devices. An acoustic resonator includes a piezoelectric plate having front and back surfaces, a portion of the piezoelectric plate forming a diaphragm, a conductor pattern on the front surface, the conductor pattern including an interdigital transducer (IDT), fingers of the IDT on the diaphragm, and a front-side dielectric layer on the front surface of the piezoelectric plate between the interleaved fingers. A resonant frequency is determined, in part, by a thickness of the front-side dielectric layer. A ratio of a mark of the interleaved fingers to a pitch of the interleaved fingers is greater than or equal to 0.12 and less than or equal to 0.3.Type: ApplicationFiled: January 26, 2022Publication date: May 12, 2022Inventors: Bryant Garcia, Julius Koskela, Robert B. Hammond, Patrick Turner, Viktor Plesski, Ventsislav Yantchev, Soumya Yandrapalli