Abstract: Sophisticated gate electrode structures for N-channel transistors and P-channel transistors are patterned on the basis of substantially the same configuration while, nevertheless, the work function adjustment may be accomplished in an early manufacturing stage. For this purpose, diffusion layer and cap layer materials are removed after incorporating the desired work function metal species into the high-k dielectric material and subsequently a common gate layer stack is deposited and subsequently patterned.

Abstract: Generally, the present disclosure is directed work function adjustment in high-k metal gate electrode structures. In one illustrative embodiment, a method is disclosed that includes removing a placeholder material of a first gate electrode structure and a second gate electrode structure, and forming a first work function adjusting material layer in the first and second gate electrode structures, wherein the first work function adjusting material layer includes a tantalum nitride layer. The method further includes removing a portion of the first work function adjusting material layer from the second gate electrode structure by using the tantalum nitride layer as an etch stop layer, removing the tantalum nitride layer by performing a wet chemical etch process, and forming a second work function adjusting material layer in the second gate electrode structure and above a non-removed portion of the first work function adjusting material layer in the first gate electrode structure.

Abstract: In a replacement gate approach, one work function metal may be provided in an early manufacturing stage, i.e., upon depositing the gate layer stack, thereby reducing the number of deposition steps required in a later manufacturing stage. Consequently, the further work function metal and the electrode metal may be filled into the gate trenches on the basis of superior process conditions compared to conventional replacement gate approaches.

Abstract: The work function of a high-k gate electrode structure may be adjusted in a late manufacturing stage on the basis of a lanthanum species in an N-channel transistor, thereby obtaining the desired high work function in combination with a typical conductive barrier material, such as titanium nitride. For this purpose, in some illustrative embodiments, the lanthanum species may be formed directly on the previously provided metal-containing electrode material, while an efficient barrier material may be provided in the P-channel transistor, thereby avoiding undue interaction of the lanthanum species in the P-channel transistor.

Abstract: Generally, the subject matter disclosed herein relates to modern sophisticated semiconductor devices and methods for forming the same, wherein a reduced threshold voltage (Vt) may be achieved in HK/MG transistor elements that are manufactured based on replacement gate electrode integrations. One illustrative method disclosed herein includes forming a first metal gate electrode material layer above a gate dielectric material layer having a dielectric constant of approximately 10 or greater. The method further includes exposing the first metal gate electrode material layer to an oxygen diffusion process, forming a second metal gate electrode material layer above the first metal gate electrode material layer, and adjusting an oxygen concentration gradient and a nitrogen concentration gradient in at least the first metal gate electrode material layer and the gate dielectric material layer.

Abstract: During a manufacturing sequence for forming a sophisticated high-k metal gate structure, a cover layer, such as a silicon layer, may be deposited on a metal cap layer in an in situ process in order to enhance integrity of the metal cap layer. The cover layer may provide superior integrity during the further processing, for instance in view of performing wet chemical cleaning processes and the subsequent deposition of a silicon gate material.

Abstract: In a replacement gate approach in sophisticated semiconductor devices, a tantalum nitride etch stop material may be efficiently removed on the basis of a wet chemical etch recipe using ammonium hydroxide. Consequently, a further work function adjusting material may be formed with superior uniformity, while the efficiency of the subsequent adjusting of the work function may also be increased. Thus, superior uniformity, i.e., less pronounced transistor variability, may be accomplished on the basis of a replacement gate approach in which the work function of the gate electrodes of P-channel transistors and N-channel transistors is adjusted after completing the basic transistor configuration.

Abstract: When forming sophisticated high-k metal gate electrode structures, for instance on the basis of a replacement gate approach, superior interface characteristics may be obtained on the basis of using a thermally grown base material, wherein the electrically effective thickness may be reduced on the basis of a low temperature anneal process. Consequently, the superior interface characteristics of a thermally grown base material may be provided without requiring high temperature anneal processes, as are typically applied in conventional strategies using a very thin oxide layer formed on the basis of a wet oxidation chemistry.

Abstract: A metal silicide in sophisticated semiconductor devices may be provided in a late manufacturing stage on the basis of contact openings, wherein the deposition of the contact material, such as tungsten, may be efficiently combined with the silicidation process. In this case, the thermally activated deposition process may initiate the formation of a metal silicide in highly doped semiconductor regions.

Abstract: In a replacement gate approach, one work function metal may be provided in an early manufacturing stage, i.e., upon depositing the gate layer stack, thereby reducing the number of deposition steps required in a later manufacturing stage. Consequently, the further work function metal and the electrode metal may be filled into the gate trenches on the basis of superior process conditions compared to conventional replacement gate approaches.

Abstract: In a replacement gate approach, the oxygen contents of a cap material may be increased, thereby providing more stable characteristics of the cap material itself and of the high-k dielectric material. Consequently, upon providing a work function adjusting metal species at a very advanced manufacturing stage, corresponding additional treatments may be reduced in number or may even be completely avoided, while at the same time threshold voltage variations may be reduced.

Abstract: Sophisticated gate electrode structures for N-channel transistors and P-channel transistors are patterned on the basis of substantially the same configuration while, nevertheless, the work function adjustment may be accomplished in an early manufacturing stage. For this purpose, diffusion layer and cap layer materials are removed after incorporating the desired work function metal species into the high-k dielectric material and subsequently a common gate layer stack is deposited and subsequently patterned.

Abstract: In a replacement gate approach in sophisticated semiconductor devices, a tantalum nitride etch stop material may be efficiently removed on the basis of a wet chemical etch recipe using ammonium hydroxide. Consequently, a further work function adjusting material may be formed with superior uniformity, while the efficiency of the subsequent adjusting of the work function may also be increased. Thus, superior uniformity, i.e., less pronounced transistor variability, may be accomplished on the basis of a replacement gate approach in which the work function of the gate electrodes of P-channel transistors and N-channel transistors is adjusted after completing the basic transistor configuration.

Abstract: During a manufacturing sequence for forming a sophisticated high-k metal gate structure, a cover layer, such as a silicon layer, may be deposited on a metal cap layer in an in situ process in order to enhance integrity of the metal cap layer. The cover layer may provide superior integrity during the further processing, for instance in view of performing wet chemical cleaning processes and the subsequent deposition of a silicon gate material.

Abstract: The work function of a high-k gate electrode structure may be adjusted in a late manufacturing stage on the basis of a lanthanum species in an N-channel transistor, thereby obtaining the desired high work function in combination with a typical conductive barrier material, such as titanium nitride. For this purpose, in some illustrative embodiments, the lanthanum species may be formed directly on the previously provided metal-containing electrode material, while an efficient barrier material may be provided in the P-channel transistor, thereby avoiding undue interaction of the lanthanum species in the P-channel transistor.

Abstract: A heatable steering wheel includes a steering wheel blank, a heating mat wrapped around the steering wheel blank, a first, visible hard sheathing whose surface is refinished after having been installed, a second, visible softer sheathing, both of the sheathings abutting each other in an abutting area, and a coupling element in the abutting area. The coupling element, as seen from the outside, has a depression and that, starting from the first sheathing, extends under the abutting area all the way to an abutting edge of the second sheathing. The heating mat extends continuously under the first sheathing and under the coupling element all the way to under the second sheathing.

Abstract: A method for producing a steering wheel (10) including a multilayered decorative trim (16) comprises the following steps: providing a multilayered body composed of flat layers joined to each other, the body being bent transversely or perpendicular to the plane of the layers into a shape adapted to the geometry of a steering wheel body part (14), cutting off a thin arcuate decorative layer (26) from a lateral surface of the body, in particular essentially perpendicular to the bending axis, and adapting said decorative layer (26) to and applying it onto said steering wheel body part (14).

Abstract: A kit for use in securing a vehicular handicap permit to the interior of a vehicle windshield so that the permit is visible through the windshield includes a strip having Velcro on one side and a pressure-sensitive adhesive on the opposite side. The kit also includes a permit holder with pressure-sensitive adhesive on one side and a Velcro strip on the opposite side. The holder is secured to the permit by folding the holder so that two sections of the adhesive coating face one another and pressing the two sections against two sides of the permit adjacent to edges of the permit. The Velcro on the exposed side of the holder may then be secured to the Velcro on the strip, which is attached to the windshield by its pressure-sensitive coating so that the permit hangs downwardly behind the windshield.

Abstract: A kit for use in securing a vehicular handicap permit to the interior of a vehicle windshield so that the permit is visible through the windshield includes a strip having Velcro on one side and a pressure-sensitive adhesive on the opposite side. The kit also includes a permit holder with pressure-sensitive adhesive on one side and a Velcro strip on the opposite side. The holder is secured to the permit by folding the holder so that two sections of the adhesive coating face one another and pressing the two sections against two sides of the permit adjacent to edges of the permit. The Velcro on the exposed side of the holder may then be secured to the Velcro on the strip, which is attached to the windshield by its pressure-sensitive coating so that the permit hangs downwardly behind the windshield.

Abstract: The present invention provides a method and system for evaluating wireless applications utilizing a test console, an application model builder, a test repository manager, a simulator, a test controller, test agents, and a comparator in order to test the performance of a plurality of mobile user devices on a wireless network.