Abstract: Various embodiments of improved systems and methods are provided herein to monitor process chemicals used in a semiconductor process. More specifically, new semiconductor processing systems and methods that utilize infrared (IR) spectroscopy techniques are provided herein to monitor the composition and/or concentration of process chemicals utilized to process a substrate and/or the by-products produced during substrate processing. By monitoring the process chemicals and/or the by-products in real-time, the systems and methods described herein can be used to provide better process control and/or end-point detection for a wide variety of semiconductor processes.

Abstract: Aspects of the present disclosure provide a method for fabricating a grating coupler. For example, the method can include providing a substrate, forming a plurality of grating elements and a photosensitive material above the substrate, and projecting actinic radiation of varied intensities to expose different regions of the photosensitive material, causing the photosensitive material to generate a solubility-changing agent. The method can also include removing the solubility-changing agent. The actinic radiation of varied intensities can correspond to depths of grooves between the grating elements.

Abstract: Systems and methods are provided to control operational parameter(s) of a spin-on process based on a localized fluid velocity of a processing liquid dispensed onto a surface of a spinning semiconductor substrate. In the present disclosure, a perturbation is introduced within a processing liquid dispensed onto the spinning semiconductor substrate. Movement of the perturbation is tracked over time, as the perturbation flows along with the processing liquid across the spinning substrate surface, to determine a localized fluid velocity of the processing liquid at one or more radial positions on the substrate surface. The localized fluid velocity is then used to control one or more operational parameters of a spin-on process.

Abstract: Embodiments of processing systems and methods are provided to control operational parameter(s) of a spin-on process based on a fluid height and/or a fluid velocity of a processing liquid dispensed onto a surface of a spinning semiconductor substrate. The disclosed embodiments determine the fluid height and/or the fluid velocity of the processing liquid by: (a) monitoring an intensity of light, which is transmitted through the processing liquid as the processing liquid flows across the surface of the spinning substrate or leaves the periphery of the spinning substrate, or (b) monitoring how long it takes for the processing liquid to flow from a dispensed location to the periphery of the spinning substrate. Once determined, the fluid velocity is used to control one or more operational parameters of a spin-on process.

Abstract: Techniques herein include methods for planarizing films including films used in the fabrication of semiconductor devices. Such fabrication can generate structures on a surface of a substrate, and these structures can have a spatially variable density across the surface. Planarization methods herein include depositing a first acid-labile film overtop the structures and the substrate, the first acid-labile film filling between the structures. A second acid-labile film is deposited overtop the first acid-labile film. An acid source film is deposited overtop the second acid-labile film, the acid source film including an acid generator configured to generate an acid in response to receiving radiation having a predetermined wavelength of light. A pattern of radiation is projected over the acid source film, the pattern of radiation having a spatially variable intensity at predetermined areas of the pattern of radiation.

Abstract: A method of planarizing a substrate includes receiving a substrate having structures formed on a target layer on a working surface of a substrate where the structures and the target layer are formed of different materials. Depositing a grafting material, including a solubility-shifting agent, on the substrate, the grafting material adhering to uncovered surfaces of the target layer without adhering to surfaces of the structures, depositing a fill material on the substrate that covers the grafting material, causing the solubility-shifting agent to diffuse a predetermined distance into the fill material, where the solubility-shifting agent causes the fill material to become insoluble to a predetermined solvent, and using the predetermined solvent to remove soluble portions of the fill material where the remaining portions of the fill material form a surface parallel to the working surface of the substrate.

Abstract: A system for analysis of gaps between modeled parts of an assembly to be produced is provided. The system generates a three-dimensional (3D) visualization environment of 3D models of a plurality of parts in the assembly and performs an analysis of those of the 3D models within a given proximity to each other to determine gaps therebetween, including any non-acceptable gaps with gap distances that exceed an acceptable gap threshold. The system generates, for a non-acceptable gap, an instruction and automatically implements the instruction to correct the non-acceptable gap and confirms that the non-acceptable gap as corrected does not have a gap distance that exceeds the acceptable gap threshold. The system generates an output of a 3D model of the assembly populated with the 3D models and with the non-acceptable gap as corrected for use in connection with production of the assembly.

Abstract: Techniques herein include methods for planarizing films including films used in the fabrication of semiconductor devices. Such fabrication can generate structures on a surface of a substrate, and these structures can have a spatially variable density across the surface. Planarization methods herein include depositing a first acid-labile film overtop the structures and the substrate, the first acid-labile film filling between the structures. A second acid-labile film is deposited overtop the first acid-labile film. An acid source film is deposited overtop the second acid-labile film, the acid source film including an acid generator configured to generate an acid in response to receiving radiation having a predetermined wavelength of light. A pattern of radiation is projected over the acid source film, the pattern of radiation having a spatially variable intensity at predetermined areas of the pattern of radiation.

Abstract: An improved system and method for controlling access of components to industrial automation system resources by reference to the various operational states of the industrial automation system. A central access control system includes a processing circuitry, interface circuitry configured to receive information pertaining to the operational state of an automation system, memory circuitry, and a display and user interface. In operation, access to automation components are either allowed or denied based on the designation of an operational state of an automation system.

Abstract: A corrugated-typed fastener configured to couple a first substrate to a second substrate includes a bridge and a plurality of ribs, the ribs having a plurality of flutes. The flutes, and possibly the ribs, may be angled inwardly to form an apex disposed within the width of the fastener and pointing towards a center of the fastener. The ribs may extend outward from the bridge towards opposing ends of the fastener, and the ends may be at a different height than the bridge when viewing the fastener from the side. Alternatively, the ends may be at the same height as the bridge and also may be generally centered on the height of the fastener.

Abstract: An improved system and method for controlling access of components to industrial automation system resources by reference to the various operational states of the industrial automation system. A central access control system includes a processing circuitry, interface circuitry configured to receive information pertaining to the operational state of an automation system, memory circuitry, and a display and user interface. In operation, access to automation components are either allowed or denied based on the designation of an operational state of an automation system.

Abstract: An improved system and method for controlling access of components to industrial automation system resources by reference to the various operational states of the industrial automation system. A central access control system includes a processing circuitry, interface circuitry configured to receive information pertaining to the operational state of an automation system, memory circuitry, and a display and user interface. In operation, access to automation components are either allowed or denied based on the designation of an operational state of an automation system.

Abstract: An improved system and method for controlling access of components to industrial automation system resources by reference to the various operational states of the industrial automation system. A central access control system includes a processing circuitry, interface circuitry configured to receive information pertaining to the operational state of an automation system, memory circuitry, and a display and user interface. In operation, access to automation components are either allowed or denied based on the designation of an operational state of an automation system.

Abstract: Aspects of the present invention are directed to methods for manufacturing shaped, comestible articles. Multiple comestible articles are connected by flash, and stress lines in the flash surround the articles. The comestible articles are subsequently separated from the flash at the stress lines. Additional aspects of the present invention are directed to an intermediate comestible product. In certain embodiments, the intermediate comestible product comprises multiple articles, web-like flash connecting the articles, and stress lines formed in the flash and about each article.

Abstract: Systems, apparatuses, and methods are provided for protecting electronic devices from electromagnetic threats. Exemplary systems, apparatuses, and methods may include utilizing meta-material, wire grids including specially coated fibers, carrying cases including electromagnetic protective liners or inserts, enclosures for containing electronic devices and protecting such devices from electromagnetic threats, connection members for connecting panels of an enclosure, soft-sided enclosures such as tents or rooms for protecting electronic devices contained therein, low-profile meta-material gaskets for electromagnetically protection openings in an enclosure, among other things.

Abstract: A wheel suspension is described with a wheel-guiding McPherson strut unit which has a helical compression support spring, a shock absorber which is connected on one end to the body and on the other end to the wheel, and a suspension arm, the helical compression spring being made such that the helical compression spring at least partially compensates for transverse forces which occur on the shock absorber without the action of the helical compression spring. To enable the weight of the helical compression spring to be reduced, the helical compression spring is constructed and arranged so that the stress in the spring is at least approximately, preferably exactly, the same on the side of the spring center line or line of action of the spring force facing the wheel as on the side facing away from the wheel. This makes it possible to reduce the weight throughout by roughly 10%.

Abstract: A corrugated-typed fastener configured to couple a first substrate to a second substrate includes a bridge and a plurality of ribs, the ribs having a plurality of flutes. The flutes, and possibly the ribs, may be angled inwardly to form an apex disposed within the width of the fastener and pointing towards a center of the fastener. The ribs may extend outward from the bridge towards opposing ends of the fastener, and the ends may be at a different height than the bridge when viewing the fastener from the side. Alternatively, the ends may be at the same height as the bridge and also may be generally centered on the height of the fastener.

Abstract: Aspects of the present invention are directed to methods for manufacturing shaped, comestible articles. Multiple comestible articles are connected by flash, and stress lines in the flash surround the articles. The comestible articles are subsequently separated from the flash at the stress lines. Additional aspects of the present invention are directed to an intermediate comestible product. In certain embodiments, the intermediate comestible product comprises multiple articles, web-like flash connecting the articles, and stress lines formed in the flash and about each article.

Abstract: A novel apparatus and device is described for reconstituting a bone sample with a biological fluid, such as concentrated plasma or saline solutions, for example, prior to surgical implantation into a patient. In particular, the invention comprises, in certain aspects, a container in which a bone sample may be reconstituted with the desired fluid by applying a vacuum within the container, thereby driving the fluid into the bone for complete, or near complete, permeation of the fluid into the interstices of the bone sample prior to surgical implantation.