Patents by Inventor Robert E. Higashi
Robert E. Higashi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10867855Abstract: One or more embodiments are directed to establishing electrical connections through silicon wafers with low resistance and high density, while at the same time maintaining processability for further fabrication. Such connections through silicon wafers enable low resistance connections from the top side of a silicon wafer to the bottom side of the silicon wafer.Type: GrantFiled: May 13, 2019Date of Patent: December 15, 2020Assignee: Honeywell International Inc.Inventors: Robert E. Higashi, Son T. Lu, Elenita Chanhvongsak
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Publication number: 20200365459Abstract: One or more embodiments are directed to establishing electrical connections through silicon wafers with low resistance and high density, while at the same time maintaining processability for further fabrication. Such connections through silicon wafers enable low resistance connections from the top side of a silicon wafer to the bottom side of the silicon wafer.Type: ApplicationFiled: May 13, 2019Publication date: November 19, 2020Inventors: Robert E. Higashi, Son T. Lu, Elenita Chanhvongsak
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Patent number: 10497486Abstract: A gas sensor that includes a heat source and a gas sensing film. The gas sensing film includes a polycrystalline tungsten trioxide film thermally connected to the heat source and a plurality of islands of gold on a surface of the polycrystalline tungsten trioxide film. The surface of the polycrystalline tungsten trioxide film is exposed between the islands of gold to allow the polycrystalline tungsten trioxide film to sense gas. A first electrode that electrically connected to the polycrystalline tungsten trioxide film and a second electrode is electrically connected to the polycrystalline tungsten trioxide film. The resistance of the polycrystalline tungsten trioxide film between the first electrode and the second electrode changes when the polycrystalline tungsten trioxide film is exposed to a particular type of gas.Type: GrantFiled: December 13, 2016Date of Patent: December 3, 2019Assignee: HONEYWELL INTERNATIONAL INC.Inventors: Robert E. Higashi, Karen M. Newstrom-Peitso
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Publication number: 20180164239Abstract: A gas sensor that includes a heat source and a gas sensing film. The gas sensing film includes a polycrystalline tungsten trioxide film thermally connected to the heat source and a plurality of islands of gold on a surface of the polycrystalline tungsten trioxide film. The surface of the polycrystalline tungsten trioxide film is exposed between the islands of gold to allow the polycrystalline tungsten trioxide film to sense gas. A first electrode that electrically connected to the polycrystalline tungsten trioxide film and a second electrode is electrically connected to the polycrystalline tungsten trioxide film. The resistance of the polycrystalline tungsten trioxide film between the first electrode and the second electrode changes when the polycrystalline tungsten trioxide film is exposed to a particular type of gas.Type: ApplicationFiled: December 13, 2016Publication date: June 14, 2018Inventors: Robert E. Higashi, Karen M. Newstrom-Peitso
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Patent number: 9574947Abstract: The present disclosure includes sensing device embodiments. One sensing device includes a heater layer, a resistance detector layer, constructed and arranged to indicate a temperature value based upon a correlation to a detected resistance value, an electrode layer, and a sensing layer.Type: GrantFiled: February 18, 2014Date of Patent: February 21, 2017Assignee: Honeywell International Inc.Inventors: Barrett E. Cole, Robert E. Higashi, Peter Tobias
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Publication number: 20140161153Abstract: The present disclosure includes sensing device embodiments. One sensing device includes a heater layer, a resistance detector layer, constructed and arranged to indicate a temperature value based upon a correlation to a detected resistance value, an electrode layer, and a sensing layer.Type: ApplicationFiled: February 18, 2014Publication date: June 12, 2014Applicant: Honeywell International Inc.Inventors: Barrett E. Cole, Robert E. Higashi, Peter Tobias
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Patent number: 8299506Abstract: A method of forming CMOS circuitry integrated with MEMS devices includes bonding a wafer to a top surface layer having contacts formed to CMOS circuitry. A handle wafer is then removed from one of the top or bottom surfaces of the CMOS circuitry, and MEMS devices are formed in a remaining silicon layer.Type: GrantFiled: December 1, 2009Date of Patent: October 30, 2012Assignee: Honeywell International Inc.Inventors: Andy Peczalski, Robert E. Higashi, Gordon Alan Shaw, Thomas Keyser
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Patent number: 8188561Abstract: An integrated vacuum package having an added volume on a perimeter within the perimeter of a bonding seal between two wafers. The added volume of space may be an etching of material from the inside surface of the top wafer. This wafer may have vent holes that may be sealed to maintain a vacuum within the volume between the two wafers after the pump out of gas and air. The inside surface of the top wafer may have an anti-reflective pattern. Also, an anti-reflective pattern may be on the outside surface of the top wafer. The seal between the two wafers may be ring-like and have a spacer material. Also, it may have a malleable material such as solder to compensate for any flatness variation between the two facing surfaces of the wafers.Type: GrantFiled: December 1, 2010Date of Patent: May 29, 2012Assignee: Honeywell International Inc.Inventors: Robert E. Higashi, Karen M. Newstrom-Peitso, Jeffrey A. Ridley
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Patent number: 8153285Abstract: A fuel cell, fuel cell array and methods of forming the same are disclosed. The fuel cell can be made by forming a first aperture defined by a first aperture surface through a first electrode layer and forming a second aperture defined by a second aperture surface through a second electrode layer. A proton exchange membrane is laminated between the first electrode layer and the second electrode layer. At least a portion of the first aperture is at least partially aligned with the second aperture.Type: GrantFiled: December 29, 2003Date of Patent: April 10, 2012Assignee: Honeywell International Inc.Inventors: Robert E. Higashi, Khanh Q. Nguyen, Karen M. Newstrom-Peitso, Tom M. Rezachek, Roland A. Wood
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Patent number: 8076245Abstract: A metal oxide semiconductor (MOS) device includes a substrate, a lower sacrificial membrane adjacent to the substrate, an upper thin film structure adjacent to the lower membrane, and a MOS material deposited on the upper thin film structure.Type: GrantFiled: May 13, 2008Date of Patent: December 13, 2011Assignee: Honeywell International Inc.Inventors: Barrett E. Cole, Robert E. Higashi
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Publication number: 20110279680Abstract: An infrared camera includes a lens to receive infrared radiation from an image to be viewed. A thermal detector is positioned to receive the infrared radiation from the lens and vary the amount of light transmitted through the thermal detector responsive to the infrared radiation.Type: ApplicationFiled: May 11, 2011Publication date: November 17, 2011Applicant: Honeywell International Inc.Inventors: Barrett E. Cole, Robert E. Higashi
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Publication number: 20110070401Abstract: An integrated vacuum package having an added volume on a perimeter within the perimeter of a bonding seal between two wafers. The added volume of space may be an etching of material from the inside surface of the top wafer. This wafer may have vent holes that may be sealed to maintain a vacuum within the volume between the two wafers after the pump out of gas and air. The inside surface of the top wafer may have an anti-reflective pattern. Also, an anti-reflective pattern may be on the outside surface of the top wafer. The seal between the two wafers may be ring-like and have a spacer material. Also, it may have a malleable material such as solder to compensate for any flatness variation between the two facing surfaces of the wafers.Type: ApplicationFiled: December 1, 2010Publication date: March 24, 2011Applicant: HONEYWELL INTERNATIONAL INC.Inventors: Robert E. Higashi, Karen M. Newstrom-Peitso, Jeffrey A. Ridley
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Patent number: 7875944Abstract: An integrated vacuum package having an added volume on a perimeter within the perimeter of a bonding seal between two wafers. The added volume of space may be an etching of material from the inside surface of the top wafer. This wafer may have vent holes that may be sealed to maintain a vacuum within the volume between the two wafers after the pump out of gas and air. The inside surface of the top wafer may have an anti-reflective pattern. Also, an anti-reflective pattern may be on the outside surface of the top wafer. The seal between the two wafers may be ring-like and have a spacer material. Also, it may have a malleable material such as solder to compensate for any flatness variation between the two facing surfaces of the wafers.Type: GrantFiled: August 1, 2007Date of Patent: January 25, 2011Assignee: Honeywell International Inc.Inventors: Robert E. Higashi, Karen M. Newstrom-Peitso, Jeffrey A. Ridley
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Publication number: 20100140670Abstract: A method of forming CMOS circuitry integrated with MEMS devices includes bonding a wafer to a top surface layer having contacts formed to CMOS circuitry. A handle wafer is then removed from one of the top or bottom surfaces of the CMOS circuitry, and MEMS devices are formed in a remaining silicon layer.Type: ApplicationFiled: December 1, 2009Publication date: June 10, 2010Applicant: Honeywell International Inc.Inventors: Andy Peczalski, Robert E. Higashi, Gordon Alan Shaw, Thomas Keyser
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Patent number: 7703313Abstract: Embodiments of the invention relate to a fluid containment structure for a micro analyzer comprising one or more shelled thermal structures in contact with a thermally isolated component of the analyzer and wherein the shelled thermal structure comprises a conformal film and also comprises three walls of a channel and the thermally isolated component forms the fourth wall.Type: GrantFiled: February 14, 2007Date of Patent: April 27, 2010Assignee: Honeywell International Inc.Inventor: Robert E. Higashi
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Patent number: 7628907Abstract: A gas sensor is provided for detecting one or more gases in a gas sample. The gas sensor includes a substrate, a solid electrolyte layer including lanthanum oxide for sensing carbon dioxide, a heating element thermally coupled to the solid electrolyte layer, and a controller coupled to the heating element and the solid electrolyte layer. The controller heats the heating element so that the solid electrolyte layer reaches an operating. Methods of sensing carbon dioxide and humidity are also disclosed.Type: GrantFiled: August 26, 2005Date of Patent: December 8, 2009Assignee: Honeywell International Inc.Inventors: Yuandong Gu, Barrett E. Cole, Robert E. Higashi
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Publication number: 20090283759Abstract: A metal oxide semiconductor (MOS) device includes a substrate, a lower sacrificial membrane adjacent to the substrate, an upper thin film structure adjacent to the lower membrane, and a MOS material deposited on the upper thin film structure.Type: ApplicationFiled: May 13, 2008Publication date: November 19, 2009Applicant: Honeywell International Inc.Inventors: Barrett E. Cole, Robert E. Higashi
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Publication number: 20090279172Abstract: An optical instrument includes a grating. The grating includes a plurality of plates that form a single first plane. The instrument further includes a mirror surface positioned adjacent to the grating. The mirror surface is positioned in a second plane. In an embodiment, the mirror surface is made of a substrate, a silicon wafer positioned on the substrate, and a mirror etch pit surface on the silicon wafer.Type: ApplicationFiled: May 12, 2008Publication date: November 12, 2009Inventor: Robert E. Higashi
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Patent number: 7613586Abstract: A system for determining a gas pressure or gauging a vacuum in a hermetically sealed enclosure. One or more heater structures and one or more temperature sensor structures situated on a substrate may be used in conjunction for measuring a thermal conductivity of a gas in the enclosure. Each heater has significant thermal isolation from each sensor structure. Electronics connected to each heater and sensor of their respective structures may provide processing to calculate the pressure or vacuum in the enclosure. The enclosure may contain various electronic components such as bolometers.Type: GrantFiled: January 16, 2007Date of Patent: November 3, 2009Assignee: Honeywell International Inc.Inventor: Robert E. Higashi
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Patent number: 7549206Abstract: A flow sensor system and a method for fabricating the same. A substrate is provided, comprising a detector wafer upon which a flow sensor is formed. One or more shells can then be configured upon the substrate whose walls form a flow channel. The flow channel is fabricated directly upon the substrate in a manner that allows the flow channel to couple heat transfer directly to the flow sensor in order to eliminate the need for two or more different types of sacrificial layers during the fabrication of the flow sensor upon the substrate and in which the shell(s) is coupled with fluidic measurement to provide for the flow sensor.Type: GrantFiled: August 13, 2007Date of Patent: June 23, 2009Assignee: Honeywell International Inc.Inventors: Robert E. Higashi, Son T. Lu, Jeffrey A. Ridley