Abstract: The invention provides calibrated spectrometers in a multi-spectrometer system, where chemical mechanical polishing endpoint detection is an issue. In one aspect of the invention, a spectrometer is calibrated by selecting a filter slide having a predetermined light transmittance or reflectance variation with location (e.g. angular or linear displacement) on the slide. Light is incident on locations on the filter slide, and this incidence light is either transmitted or reflected. Transmitted or reflected light is received by a spectrometer, and the wavelength measured is compared with the known wavelength that corresponds to its location on the slide. The spectrometer is calibrated by normalizing the wavelength readings obtained at various locations on the slide with the known readings dictated by the reference slide. The spectrometers are also calibrated to a standard light source for intensity of light.

Abstract: The invention provides calibrated spectrometers in a multi-spectrometer system, where chemical mechanical polishing endpoint detection is an issue. In one aspect of the invention, a spectrometer is calibrated by selecting a filter slide having a predetermined light transmittance or reflectance variation with location (e.g. angular or linear displacement) on the slide. Light is incident on locations on the filter slide, and this incident light is either transmitted or reflected. Transmitted or reflected light is received by a spectrometer, and the wavelength measured is compared with the known wavelength that corresponds to its location on the slide. The spectrometer is calibrated by normalizing the wavelength readings obtained at various locations on the slide with the known readings dictated by the reference slide. The spectrometers are also calibrated to a standard light source for intensity of light.

Abstract: A fluid delivery system is provided for delivering a fluid to a polishing surface of a chemical mechanical polishing tool. The system includes a platen, manifold and slurry delivery conduit. The platen has a plurality of conduits for allowing a fluid to pass to the polishing surface. The manifold, through the use of a plurality of channels, controls the fluid distribution to the conduits in the platen. The channel cross-sectional area at substantially every point is greater than, preferably 1.5 to 2 times, the combined cross-sectional area of all the conduits being serviced by the channel. This results in the conduits being the most restrictive feature and a uniform pressure within the manifold. However, the volume of the channels should also be reduced as this reduces the time necessary for a fluid change over. The slurry delivery conduit communicates fluid from a fluid source to the channels in the manifold.

Abstract: An apparatus and method for a spectrally stable light source is disclosed. An excitation source provides a spectrally stable light within a predetermined bandwidth. The spectrally stable light is directed at a reflective target. A light sensor receives reflected light from the surface of the target through the fiber optic cable and generates reflected spectral data. A computer receives the reflected spectral data and calculates a signal based on the reflected spectral data.

Abstract: A system and method for monitoring remote computer access and associated costs is provided. The system includes a remotely located communication server in communication with multiple host computer networks and in communication with a network access server. First and second memory devices contain a list of authorized users for the host computer networks and a user log for use by a billing computer to generate bills. The method includes the steps of creating starting and ending time stamps for each authorized user accessing a respective one of the multiple host computer networks and creating a user log to generate bills and monitor host computer network usage.

Abstract: An apparatus for optical endpoint detection of a chemical mechanical polishing process, that reduces or eliminates interference effects caused by air bubbles in chemical polishing slurries, and accumulation of polishing debris on components of the optical system. In particular, the invention provides hydrophobic light pipes and windows with polishing surfaces substantially coplanar with surrounding surfaces of polishing pads to thereby eliminate the effect of air bubbles trapped in recesses at the polishing pad surface. Moreover, hydrophobic surfaces have now been found to resist the accumulation of polished debris thereon, resulting in a reduction in loss of optical reflectance over polishing time. Accordingly, the invention provides an optical endpoint system that eliminates or reduces both the oversaturation and loss of reflectance problems of the prior art.

Abstract: A drilling rig 10 supports a drill string 11 within a borehole 12. An acoustic receiver 14 is associated with a drill bit 13 connected to the end of the drill string 11. An acoustic source 16, such as an airgun, is located at the earth's surface 17 some distance from the rig 10. In operation, the acoustic source 16 is controlled to transmit an acoustic pulse downwards into the rock formations surrounding the borehole 12. The acoustic energy travelling on a path 18 reaches the rock in contact with the drill bit 13 which is thereby detected by the acoustic receiver 14. Boundaries 20 and 23 in the rock formations are detected and their positions determined by receiving signals from the source 16 after reflection by the boundaries 20 and 23. Time-depth check-shots may be obtained by timing acoustic propagation along either path 18 or path 27. A Vertical Seismic Profile can be obtained by performing measurements with the drill bit 13 at different depths in the borehole.

Abstract: An apparatus to generate an endpoint signal to control the polishing of thin films on a semiconductor wafer surface includes a through-hole in a polish pad, a light source, a fiber optic cable, a light sensor, and a computer. A pad assembly includes the polish pad, a pad backer, and a pad backing plate. The pad backer includes a pinhole and a canal that holds the fiber optic cable. The pad backer holds the polish pad so that the through-hole is coincident with the pinhole opening. A wafer chuck holds a semiconductor wafer so that the surface to be polished is against the polish pad. The light source provides light within a predetermined bandwidth. The fiber optic cable propagates the light through the through-hole opening to illuminate the surface as the pad assembly orbits and the chuck rotates. The light sensor receives reflected light from the surface through the fiber optic cable and generates reflected spectral data. The computer receives the reflected spectral data and calculates an endpoint signal.

Abstract: An apparatus to generate an endpoint signal to control the polishing of thin films on a semiconductor wafer surface includes a through-hole in a polish pad, a light source, a fiber optic cable, a light sensor, and a computer. A pad assembly includes the polish pad, a pad backer, and a pad backing plate. The pad backer includes a pinhole and a canal that holds the fiber optic cable. The pad backer holds the polish pad so that the through-hole is coincident with the pinhole opening. A wafer chuck holds a semiconductor wafer so that the surface to be polished is against the polish pad. The light source provides light within a predetermined bandwidth. The fiber optic cable propagates the light through the through-hole opening to illuminate the surface as the pad assembly orbits and the chuck rotates. The light sensor receives reflected light from the surface through the fiber optic cable and generates reflected spectral data. The computer receives the reflected spectral data and calculates an endpoint signal.

Abstract: A multiple adhesive bead applicator has a handle member and a cross member. A network of adhesive distribution tubes is attached to the application and extends from the handle member to multiple distribution points in a preselected spacing on the cross member. Such an application is useful in a method for applying a cover member, such as an elastomeric membrane or insulation board, to a roofing substrate by first positioning the membrane adjacent a work area, then dispensing multiple beads of an adhesive onto the substrate in a preselected spacing and in a single pass and contacting the adhesive beads with the cover member.

Abstract: A multiple adhesive bead applicator has a handle member and a cross member. A network of adhesive distribution tubes is attached to the application and extends from the handle member to multiple distribution points in a preselected spacing on the cross member. Such an application is useful in a method for applying a cover member, such as an elastomeric membrane or insulation board, to a roofing substrate by first positioning the membrane adjacent a work area, then dispensing multiple beads of an adhesive onto the substrate in a preselected spacing and in a single pass and contacting the adhesive beads with the cover member.

Abstract: A speed bump for use in connection with roadways located in climates where snow plow is used to clear the roadways.

Abstract: A speed bump for use in connection with highways located in climates where snow plow is used to clear the highways includes a raised mass fabricated from highway construction material. The raised mass has a crown, a base where the raised mass meets a surface of the highway, and a slope of the raised mass between the crown and the base. The slope presents a profile in the area of the slope at which a snow plow is likely to encounter the speed bump such that the snow plow is lifted smoothly over the speed bump.

Abstract: An impeller for use in a centrifugal pump, the impeller including a plurality of vanes disposed intermediate a pair of spaced apart side walls, at least one of the side walls having a substantially smooth generally planar outer surface and a plurality of channels recessed into the surface, each of the channels spiralling progressively outwardly and rearwardly relative to an intended direction of rotation, and having a cross sectional flow area reducing substantially uniformly from a central region towards a respective rearwardly directed peripheral discharge port.

Abstract: A high pressure laminate comprising an overlay sheet impregnated with a melamine resin, and an unimpregnated decorative sheet of fibrous cellulosic material, a thin resin coating on preferably the backside of said decorative layer, and a core comprising a multiplicity of sheets of cellulosic material impregnated with a phenolic resin.