Abstract: A chemical impedance detector having several electrodes situated on or across a dielectric layer of a substrate. The electrodes may be across or covered with a thin film polymer. Each electrode may have a set of finger-like electrodes. Each set of finger-like electrodes may be intermeshed, but not in contact, with another set of finger-like electrodes. The thin-film polymer may have a low dielectric constant and a high porous surface area. The chemical impedance detector may be incorporated in a micro fluid analyzer system.

Abstract: A gas sensor is provided for detecting one or more gases in a gas sample. The gas sensor includes a substrate, a solid electrolyte layer including lanthanum oxide for sensing carbon dioxide, a heating element thermally coupled to the solid electrolyte layer, and a controller coupled to the heating element and the solid electrolyte layer. The controller heats the heating element so that the solid electrolyte layer reaches an operating. Methods of sensing carbon dioxide and humidity are also disclosed.

Abstract: A method of thermally coupling a flow tube or like component to a thermal sensor comprises bonding the component to the thermal sensor such that thermally conductive portions formed on the component are thermally coupled to corresponding sensing/heating elements disposed on the thermal sensor. The method can be employed to form a capillary mass flow sensor system. Thermally conductive portions, such as metal bands, can be formed on the outer surface of a capillary tube for bonding with corresponding resistive heat sensing and heating elements disposed on the substrate of a micro mass flow sensor. Bonding metal pads can be formed on the sensor surface preparatory to solder bonding the tube metal bands to the resistive sensing and heating elements.

Abstract: Substrates such as wafers often have surface or other imperfections that can create gaps when the wafers are solder bonded together. Such substrates can be more effectively bonded together by subjecting an intervening solder layer to an electrostatic force that causes the solder layer to be pulled to fill at least some of any gaps that may exist between the substrates. When the solder cools, an improved solder bond is formed.

Abstract: A three-wafer channel or column structure for a fluid analyzer. The structure may have a support member, membrane, or support wafer containing heaters and interactive elements. The membrane may have a channel of one wafer facing the interactive element side and a space of another wafer facing the other side. The membrane may have perforations to equalize the pressures on both sides of the membrane. A detector in the membrane may have exposure to both the channel and space for good sensitivity, as the sample may be on both sides of the membrane. The wafers may be bonded with a thin film of non-flowing viscous material. Capillaries may be attached to an inlet and outlet of the channel and be parallel to an elongated dimension of the channel.

Abstract: A multi-substrate package assembly having a first substrate, a second substrate and a package, each with a number of bond pads. The package includes a cavity for receiving either or both of the first and second substrates, with a number of bond pads positioned along at least part of the periphery of the cavity. The first substrate and the second substrate are preferably positioned in the cavity of the package, with selected bond pads of the first substrate and second substrate electrically connected to selected bond pads of the package. In some embodiments, the bond pads of the first substrate are only connected to bond pads on one or more sides of the cavity, and the bond pads of the second substrate are only connected to bond pads on one or more of the remaining sides of the cavity. The packaging assembly of the present invention can be used in many applications, including spectrally tunable optical detectors.

Abstract: A flow sensor is provided having a substrate with a sensing element and flow channel over the sensing element. The sensing element senses at least one property of a fluid. The flow channel is configured such that tilting the flow sensor does not have a significant effect on the measured signal. A device for measuring tilt in a system having a fluid flow path is also provided.

Abstract: A spectrally tunable optical detector and methods of manufacture therefore are provided. In one illustrative embodiment, the tunable optical detector includes a tunable bandpass filter, a detector and readout electronics, each supported by a different substrate. The substrates are secured relative to one another to form the spectrally tunable optical detector.

Abstract: A micro fluid analyzer having a concentrator and separator. A strip continuous through a channel in the concentrator may provide a hot zone that may move with the flow of fluid through the channel of the concentrator to provide a concentration of heat in the flow. A pump may provide a flow to the fluid through the analyzer. Detectors may be positioned at places where the fluid may flow. A processor or controller may be connected to the strip, separator, pump and detectors. The concentrator, separator, detectors and processor may be integrated on one chip.

Abstract: A sensor having a nanotube grown on and supported by thermal bimorph structures. The nanotube rests on a heat sink during sensing gas or a liquid and is moved from the heat sink when the nanotube is heated to desorb gas or liquid from it. The heatsink may function as a gate along with the bimorph structures as the other terminals of a transistor. Current-voltage and current-gate voltage characteristics may be obtained of the nanotube as a device like a transistor. These characteristics may provide information on a gas or liquid absorbed by the nanotube.

Abstract: A structure having a substrate, patterned metal layer and a catalyst island formed on the metal layer. The surface of the substrate upon which the metal layer is formed may be oxidized. As an illustrative example, the metal may be HfN and the catalyst island may be iron, nickel, or the like. The resulting structure may be placed in an environment having a carbon-containing gas, a temperature between 500 and 1200 degrees C., and an electric field. A nanotube may grow from the catalyst island. A method including the combining of hafnium and nitrogen may be used to make the nanotube growing structure.

Abstract: A fuel cell, fuel cell array and methods of forming the same are disclosed. The fuel cell can be made by forming a first aperture defined by a first aperture surface through a first electrode layer and forming a second aperture defined by a second aperture surface through a second electrode layer. A proton exchange membrane is laminated between the first electrode layer and the second electrode layer. At least a portion of the first aperture is at least partially aligned with the second aperture.

Abstract: A light detector having a cathode wafer, a cavity wafer and an anode wafer. The cathode wafer may be bonded to one side of the cavity wafer and the anode wafer may be bonded to another side of the cavity wafer. The cathode wafer may have numerous cathodes, the anode wafer numerous anodes and the cavity wafer numerous cavities which may be aligned on a one-to-one basis to form a wafer structure of a plurality of detectors which may be diced into separable detector chips. When there is a voltage potential across a cathode and an anode, and a gas such as Ne or the like in the cavity, a reception of light such as ultra violet may result in an electronic discharge between the cathode and anode of the light detector.

Abstract: A thermal sensor structure having one level for an infrared detecting pixel including the sensor associated electronics. The electronics displace a small area thereby having little effect on the fill area of the pixel relative to a level having no pixel electronics. That level has thermally isolation for the substrate through the limited structural attachment to the substrate because of the access vias to the silicon. It has additional isolation because of a pit of removed silicon from the substrate below that one level. The thermal sensor may have an array with a large number of pixels having the one level for the pixels and electronics structure.

Abstract: A structure being a modular system generally having a concentrator, separator, various detectors and a pump. The concentrator may have an array of phased heaters that are turned on at different times relative to each other in a fluid stream channel. The structure may relate to such a phased heater array structure, and more particularly to application of it relative to a sensor, analyzer or chromatograph for the identification and quantification of fluid components. The structure may be a miniaturized fluid micro system. The changeability of the modules of the system may be a plus for development, manufacturing, usage, repair and modification. It may also be energy-efficient, be battery-powered, and usable as a portable instrument.

Abstract: A sensor incorporating a phased heater array structure with a concentrator, separator and detectors for sensing the presence, identity and concentration of a mixture of fluids in a sample or other place. It may utilize an array of gas discharge devices, of chemi-sensors and of photo ionization sensors. The sensors may have control logic for the selection of variable portions and types of the heater elements for the concentrator and the separator. Detectors, the concentrator and separator along with the phased heater array may be integrated on a chip. Registers and the control logic may be integrated in a chip connectable to the chip containing the phased heater array structure via wire-bonds or solder bumps or z-axis conductive elastomers.

Abstract: A micro fluid analyzer having a concentrator and separator. A strip continuous through a channel in the concentrator may provide a hot zone that may move with the flow of fluid through the channel of the concentrator to provide a concentration of heat in the flow. A pump may provide a flow to the fluid through the analyzer. Detectors may be positioned at places where the fluid may flow. A processor or controller may be connected to the strip, separator, pump and detectors. The concentrator, separator, detectors and processor may be integrated on one chip.