Abstract: A coaxial drive employs a base member which is secured to a housing and is open to atmosphere and mounts rotatably an interior drive shaft about said base member so that rotation of the drive member in either direction in a full 360° circle. An electrical slip ring is provided between the base and the drive member with a ferrofluidic seal disposed proximate the lower end of the interior drive shaft such that atmospheric pressure passing through the base member and through the electrical slip ring is blocked by the ferrofluidic seal which has an opposite end disposed to the vacuum in the central processing apparatus.

Abstract: A substrate processing apparatus having a substrate transport with substrate holders. The holders are adapted to vacuum hold substrates and thereby allow for rapid movement of the substrates without risk that the substrates will move off of the holders. If vacuum holding of a substrate on a holder fails, the movement of the substrate holder is automatically changed to provide a less rapid gravity only holding of the substrate on the holder.

Abstract: A substrate transport having a housing, a drive assembly connected to the housing, and a moveable arm assembly operably connected to the drive assembly. The drive assembly has a frame stationarily connected to the housing forming a cage with an open side. The drive assembly has a rotational drive and a vertical drive. The rotational drive is movably mounted to the frame inside the cage by a carriage. The vertical drive is mounted to the bottom of the frame and is attached to the rotational drive to move the rotational drive up and down on the frame. The rotational drive has two mirror image drive units.

Abstract: Robotic apparatus may be provided for handling workpieces such as semiconductor wafers within an integrated vacuum processing system and may be mounted within a vacuum load lock chamber adjacent a plurality of vacuum processing chambers. The apparatus includes an upper arm, a forearm, an end effector for supporting a wafer to be transported, and a wrist connecting the forearm to the end effector. The upper arm is rotatable in a level plane about an upright shoulder axis adjacent its inner end. A first coupling mechanism interconnects the forearm to the upper arm for mutual rotation about an elbow axis in a level plane. An end effector serves to support a wafer to be transported and a wrist connects the forearm to the end effector distant from the elbow axis. A second coupling mechanism interconnects the forearm to the wrist for their mutual rotation in a level plane about a wrist axis.

Abstract: Apparatus for transferring an object between spaced locations comprises first and second articulated arms mounted on a support, each articulated arm having a drive member disposed for rotation about a drive axis and, pinned to it, a shorter driven member. A wrist plate with an integral holding platform is pivotally coupled to the driven members at spaced apart locations. The drive members are rotated from an initial position at which they subtend a first acute angle with the holding platform at an initial position through an intermediate position at which they subtend an angle of 180.degree. to a final position at which they subtend a second acute angle oppositely disposed from the first acute angle with the holding means at a final position overlying the drive axis. The wrist plate extends transverse of the extend-retract path for the holding platform.